JP7036346B2 - 高分子樹脂化合物およびこれを含むブラックバンク用感光性樹脂組成物 - Google Patents
高分子樹脂化合物およびこれを含むブラックバンク用感光性樹脂組成物 Download PDFInfo
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- JP7036346B2 JP7036346B2 JP2018567189A JP2018567189A JP7036346B2 JP 7036346 B2 JP7036346 B2 JP 7036346B2 JP 2018567189 A JP2018567189 A JP 2018567189A JP 2018567189 A JP2018567189 A JP 2018567189A JP 7036346 B2 JP7036346 B2 JP 7036346B2
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- photosensitive resin
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- 239000011342 resin composition Substances 0.000 title claims description 63
- 150000001875 compounds Chemical class 0.000 title claims description 34
- 239000002952 polymeric resin Substances 0.000 title claims description 20
- 229920003002 synthetic resin Polymers 0.000 title claims description 20
- -1 phenoxyethyl Chemical group 0.000 claims description 48
- 239000000126 substance Substances 0.000 claims description 45
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 38
- 239000000178 monomer Substances 0.000 claims description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims description 23
- 239000002904 solvent Substances 0.000 claims description 20
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- 239000001257 hydrogen Substances 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- 125000003118 aryl group Chemical group 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 claims description 14
- 239000003795 chemical substances by application Substances 0.000 claims description 14
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical group NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 13
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 12
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 claims description 11
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 9
- 125000002947 alkylene group Chemical group 0.000 claims description 9
- 125000000623 heterocyclic group Chemical group 0.000 claims description 9
- 125000005843 halogen group Chemical group 0.000 claims description 8
- MPQXHAGKBWFSNV-UHFFFAOYSA-N oxidophosphanium Chemical group [PH3]=O MPQXHAGKBWFSNV-UHFFFAOYSA-N 0.000 claims description 8
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 8
- 239000007864 aqueous solution Substances 0.000 claims description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- 239000003086 colorant Substances 0.000 claims description 6
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000243 solution Substances 0.000 claims description 5
- 239000002202 Polyethylene glycol Substances 0.000 claims description 4
- 229910052805 deuterium Inorganic materials 0.000 claims description 4
- 239000003623 enhancer Substances 0.000 claims description 4
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 229920001223 polyethylene glycol Polymers 0.000 claims description 4
- 229920001451 polypropylene glycol Polymers 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 3
- HYLLZXPMJRMUHH-UHFFFAOYSA-N 1-[2-(2-methoxyethoxy)ethoxy]butane Chemical compound CCCCOCCOCCOC HYLLZXPMJRMUHH-UHFFFAOYSA-N 0.000 claims description 3
- SNAQINZKMQFYFV-UHFFFAOYSA-N 1-[2-[2-(2-methoxyethoxy)ethoxy]ethoxy]butane Chemical compound CCCCOCCOCCOCCOC SNAQINZKMQFYFV-UHFFFAOYSA-N 0.000 claims description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 claims description 3
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000000654 additive Substances 0.000 claims description 3
- 239000003963 antioxidant agent Substances 0.000 claims description 3
- 230000003078 antioxidant effect Effects 0.000 claims description 3
- 239000002270 dispersing agent Substances 0.000 claims description 3
- 239000003112 inhibitor Substances 0.000 claims description 3
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 claims description 3
- 238000012719 thermal polymerization Methods 0.000 claims description 3
- 239000006097 ultraviolet radiation absorber Substances 0.000 claims description 3
- HSZUHSXXAOWGQY-UHFFFAOYSA-N [2-methyl-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(C)(COC(=O)C=C)COC(=O)C=C HSZUHSXXAOWGQY-UHFFFAOYSA-N 0.000 claims description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 claims description 2
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 claims description 2
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 claims description 2
- 150000002923 oximes Chemical class 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- HGCIXCUEYOPUTN-UHFFFAOYSA-N cyclohexene Chemical compound C1CCC=CC1 HGCIXCUEYOPUTN-UHFFFAOYSA-N 0.000 claims 2
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 claims 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 claims 1
- 150000002431 hydrogen Chemical group 0.000 claims 1
- 229920000642 polymer Polymers 0.000 description 58
- 238000011161 development Methods 0.000 description 40
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 24
- 238000011156 evaluation Methods 0.000 description 21
- 239000010408 film Substances 0.000 description 16
- 125000001424 substituent group Chemical group 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 10
- SEEVRZDUPHZSOX-WPWMEQJKSA-N [(e)-1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethylideneamino] acetate Chemical compound C=1C=C2N(CC)C3=CC=C(C(\C)=N\OC(C)=O)C=C3C2=CC=1C(=O)C1=CC=CC=C1C SEEVRZDUPHZSOX-WPWMEQJKSA-N 0.000 description 8
- 229920005822 acrylic binder Polymers 0.000 description 8
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 239000003999 initiator Substances 0.000 description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000000049 pigment Substances 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 5
- UFHFLCQGNIYNRP-VVKOMZTBSA-N Dideuterium Chemical compound [2H][2H] UFHFLCQGNIYNRP-VVKOMZTBSA-N 0.000 description 5
- 239000002318 adhesion promoter Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 5
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- OMSUIQOIVADKIM-UHFFFAOYSA-N ethyl 3-hydroxybutyrate Chemical compound CCOC(=O)CC(C)O OMSUIQOIVADKIM-UHFFFAOYSA-N 0.000 description 4
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 4
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- JNELGWHKGNBSMD-UHFFFAOYSA-N xanthone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3OC2=C1 JNELGWHKGNBSMD-UHFFFAOYSA-N 0.000 description 4
- DPNXHTDWGGVXID-UHFFFAOYSA-N 2-isocyanatoethyl prop-2-enoate Chemical compound C=CC(=O)OCCN=C=O DPNXHTDWGGVXID-UHFFFAOYSA-N 0.000 description 3
- 0 CCC(C)(CC)C(*)(*)C(*Oc1ccc(C2(c3ccccc3-c3c2cccc3)c(cc2)ccc2O*)cc1)[Al] Chemical compound CCC(C)(CC)C(*)(*)C(*Oc1ccc(C2(c3ccccc3-c3c2cccc3)c(cc2)ccc2O*)cc1)[Al] 0.000 description 3
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical group C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 3
- 150000004056 anthraquinones Chemical class 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 3
- 125000001072 heteroaryl group Chemical group 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- VHRYZQNGTZXDNX-UHFFFAOYSA-N methacryloyl chloride Chemical compound CC(=C)C(Cl)=O VHRYZQNGTZXDNX-UHFFFAOYSA-N 0.000 description 3
- 239000012860 organic pigment Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- ZPVOLGVTNLDBFI-UHFFFAOYSA-N (±)-2,2,6-trimethylcyclohexanone Chemical compound CC1CCCC(C)(C)C1=O ZPVOLGVTNLDBFI-UHFFFAOYSA-N 0.000 description 2
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- FJPGAMCQJNLTJC-UHFFFAOYSA-N 2,3-Heptanedione Chemical compound CCCCC(=O)C(C)=O FJPGAMCQJNLTJC-UHFFFAOYSA-N 0.000 description 2
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- CUDYYMUUJHLCGZ-UHFFFAOYSA-N 2-(2-methoxypropoxy)propan-1-ol Chemical compound COC(C)COC(C)CO CUDYYMUUJHLCGZ-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 2-octanone Chemical compound CCCCCCC(C)=O ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 0.000 description 2
- OXYZDRAJMHGSMW-UHFFFAOYSA-N 3-chloropropyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)CCCCl OXYZDRAJMHGSMW-UHFFFAOYSA-N 0.000 description 2
- KNTKCYKJRSMRMZ-UHFFFAOYSA-N 3-chloropropyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(OC)CCCCl KNTKCYKJRSMRMZ-UHFFFAOYSA-N 0.000 description 2
- UJBOOUHRTQVGRU-UHFFFAOYSA-N 3-methylcyclohexan-1-one Chemical compound CC1CCCC(=O)C1 UJBOOUHRTQVGRU-UHFFFAOYSA-N 0.000 description 2
- RHLVCLIPMVJYKS-UHFFFAOYSA-N 3-octanone Chemical compound CCCCCC(=O)CC RHLVCLIPMVJYKS-UHFFFAOYSA-N 0.000 description 2
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 2
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 2
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 2
- VGVHNLRUAMRIEW-UHFFFAOYSA-N 4-methylcyclohexan-1-one Chemical compound CC1CCC(=O)CC1 VGVHNLRUAMRIEW-UHFFFAOYSA-N 0.000 description 2
- FFWSICBKRCICMR-UHFFFAOYSA-N 5-methyl-2-hexanone Chemical compound CC(C)CCC(C)=O FFWSICBKRCICMR-UHFFFAOYSA-N 0.000 description 2
- IYTXKIXETAELAV-UHFFFAOYSA-N Aethyl-n-hexyl-keton Natural products CCCCCCC(=O)CC IYTXKIXETAELAV-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 235000006708 antioxidants Nutrition 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- DZBUGLKDJFMEHC-UHFFFAOYSA-N benzoquinolinylidene Natural products C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- XUPYJHCZDLZNFP-UHFFFAOYSA-N butyl butanoate Chemical compound CCCCOC(=O)CCC XUPYJHCZDLZNFP-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001788 chalcone derivatives Chemical class 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 2
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 2
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical group CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 2
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- YLQWCDOCJODRMT-UHFFFAOYSA-N fluoren-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C2=C1 YLQWCDOCJODRMT-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
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- 230000035945 sensitivity Effects 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- KPNZYDNOFDZXNR-UHFFFAOYSA-N tetratert-butyl 4-benzoylcyclohexa-3,5-diene-1,1,2,2-tetracarboperoxoate Chemical compound CC(C)(C)OOC(=O)C1(C(=O)OOC(C)(C)C)C(C(=O)OOC(C)(C)C)(C(=O)OOC(C)(C)C)C=CC(C(=O)C=2C=CC=CC=2)=C1 KPNZYDNOFDZXNR-UHFFFAOYSA-N 0.000 description 1
- 125000001113 thiadiazolyl group Chemical group 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- HTSABYAWKQAHBT-UHFFFAOYSA-N trans 3-methylcyclohexanol Natural products CC1CCCC(O)C1 HTSABYAWKQAHBT-UHFFFAOYSA-N 0.000 description 1
- 125000001425 triazolyl group Chemical group 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Description
[化学式1]
A1およびA2は、互いに同一または異なり、それぞれ独立に、置換もしくは非置換のカルバメート基;またはヒドロキシ基であり、
前記A1およびA2のいずれか1つがヒドロキシ基の場合、残りは、置換もしくは非置換のカルバメート基であり、
Y1およびY2は、互いに同一または異なり、それぞれ独立に、置換もしくは非置換の炭素数1~3のアルキレン基;置換もしくは非置換のエチレンオキシド基;または置換もしくは非置換のプロピレンオキシド基であり、
Zは、置換もしくは非置換の2価のアルキル基;置換もしくは非置換の2価のシクロヘキサン;置換もしくは非置換の2価のシクロヘキシン;または置換もしくは非置換の2価のベンゼンであり、
R1~R8は、互いに同一または異なり、それぞれ独立に、水素;重水素;ハロゲン基;置換もしくは非置換の炭素数1~10のアルキル基;置換もしくは非置換の炭素数3~10のシクロアルキル基;置換もしくは非置換のシリル基;置換もしくは非置換のホスフィンオキシド基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基であり、
r1~r4は、それぞれ独立に、1~4の整数であり、
r1~r4がそれぞれ2以上の場合、括弧内の構造は、それぞれ互いに同一または異なり、
nは、2~5,000であり、
nが2以上の場合、括弧内の構造は、互いに同一または異なる。
Y3は、置換もしくは非置換の炭素数1~3のアルキレン基;置換もしくは非置換のエチレンオキシド基;または置換もしくは非置換のプロピレンオキシド基であり、
R11およびR14は、互いに同一または異なり、それぞれ独立に、水素;重水素;ハロゲン基;置換もしくは非置換のアルキル基;置換もしくは非置換のシクロアルキル基;置換もしくは非置換のシリル基;置換もしくは非置換のホスフィンオキシド基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基であり、
R12およびR13は、互いに同一または異なり、それぞれ独立に、O;S;NR101;またはCR102R103であり、
前記R101~R103は、互いに同一または異なり、それぞれ独立に、水素;重水素;置換もしくは非置換のアルキル基;置換もしくは非置換のシクロアルキル基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基である。
[化学式3]
A1、A2、Y1、Y2、R1~R8、r1~r4およびnに関する定義は、前記化
学式1で定義したものと同じである。
[化学式4]
Y1、Y2、R1~R8およびr1~r4およびnに関する定義は、前記化学式1で定義したものと同じであり、
Y3は、置換もしくは非置換の炭素数1~3のアルキレン基;置換もしくは非置換のエチレンオキシド基;または置換もしくは非置換のプロピレンオキシド基であり、
R11、R14、R21およびR24は、互いに同一または異なり、それぞれ独立に、水素;重水素;ハロゲン基;置換もしくは非置換のアルキル基;置換もしくは非置換のシクロアルキル基;置換もしくは非置換のシリル基;置換もしくは非置換のホスフィンオキシド基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基であり、
R12、R13、R22およびR23は、互いに同一または異なり、それぞれ独立に、O;S;NR101;またはCR102R103であり、
前記R101~R103は、互いに同一または異なり、それぞれ独立に、水素;重水素;置換もしくは非置換のアルキル基;置換もしくは非置換のシクロアルキル基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基である。
9,9-ビスフェノールフルオレンジグリシジルエーテル112gと4-シクロヘキセン-1,2-ジカルボン酸63gを、325gのプロピレングリコールメチルエーテルアセテートと共に撹拌した。反応器の内部に窒素を流し、反応器を120℃に加熱した。24時間後に反応を終了し、重合体Aを得た。(Mw=2,710g/mol、86KOHmg/g)
前記重合体A 150gに、2-アクリロイルオキシエチルイソシアネート4gとプロピレングリコールメチルエーテルアセテート9gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体B1を得た。(B1:Mw=2,840g/mol、81KOHmg/g)
前記重合体A 150gに、2-アクリロイルオキシエチルイソシアネート8gとプロピレングリコールメチルエーテルアセテート9gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体B2を得た。(B2:Mw=3,100、75KOHmg/g)
前記重合体A 150gに、4-メタクリロキシエチルトリメリティックアンハイドライド(4-META)9gとプロピレングリコールメチルエーテルアセテート17gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体Cを得た。(Mw=3,150g/mol、93KOHmg/g)
前記重合体A 150gに、塩化メタクリロイル8gとプロピレングリコールメチルエーテルアセテート17gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体D1を得た。(D1:Mw=2,760g/mol)
前記重合体A 150gに、塩化メタクリロイル16gとプロピレングリコールメチルエーテルアセテート17gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体D2を得た。(D2:Mw=2,840g/mol、67KOHmg/g)
前記重合体A 150gに、塩化メタクリロイル40gとプロピレングリコールメチルエーテルアセテート17gを入れて、80℃に加熱した。19時間後に反応を終了し、二重結合のある重合体D3を得た。(D3:Mw=2,890g/mol、44KOHmg/g)
(9H-フルオレン-9,9-ジイル)ビス(4,1-フェニレンビス(オキシ)ビス(2-ヒドロキシプロパン-3,1-diyl))ジアクリレート202g、イソホロンジイソシアネート3-イソシアナトメチル-3,5,5-トリメチルシクロヘキシルイソシアネート(エボニック社)19gをPGMEA180gに入れて80℃で12時間撹拌後、テトラヒドロフタリック無水酸22.5gを入れて追加的に12時間撹拌して、重合体Eを合成した(Mw=3,500g/mol、30KOHmg/g)
(9H-フルオレン-9,9-ジイル)ビス(4,1-フェニレンビス(オキシ)ビス(2-ヒドロキシプロパン-3,1-diyl))ジアクリレート200gと3,3,4,4-ビフェニルテトラカルボキシル無水酸16gをPGMEA180gに入れて80℃で15時間撹拌後、テトラヒドロフタリック無水酸30gを追加的に12時間撹拌して、重合体Fを合成した。(Mw=3,700g/mol、100KOHmg/g>
アルドリッチ社(Cat No.474576、モノマー比率(mol%)4-ビニルフェノール:メチルメタクリレート=75:25)ポリ(4-ビニルフェノール-co-メチルメタクリレート)100gをPGMEA900gに溶かして、固形分10%の重合体Gを合成した。(Mw=11,000g/mol)
2,2'-ビス-3-アミノ-4-ヒドロキシフェニル-ヘキサフルオロプロパン(320g)と3,3',4,4'-オキシジフタル無水酸(212g)をPGMEA(1180g)に入れて80℃で撹拌した後、ガンマ-バレロラクタム(16g)、トリメリック無水酸(74g)、トリエチルアミン(58g)を入れて175℃で12時間撹拌させた。この前駆体に2-アクリロイルオキシエチルイソシアネート(19g)を入れて80℃で19時間撹拌させて、重合体Hを得た。(Mw=5,200g/mol、イミド化度=92%)
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体E 60g、重合体F 10g、重合体B1 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート36g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート43g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体B1 60g、重合体H 88g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート38g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート43g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体E 60g、重合体F 10g、重合体A 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート36g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート43g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体E 60g、重合体F 10g、重合体B2 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート36g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート43g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体E 60g、重合体F 10g、重合体C 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート36g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート43g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体D1 78g、重合体H 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート38g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート33g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体D2 78g、重合体H 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート38g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート33g、および3-メトキシブチルアセテート240gを混合した。
ラクタムブラック(BK-5108、Tokushiki社、含有量16%)400g、アルカリ可溶性アクリルバインダーとして、重合体G(アルドリッチ社)120g、重合体D3 78g、重合体H 80g、多官能性モノマーとしてジペンタエリスリトールヘキサアクリレート38g、光重合開始剤としてOXE-02(バスフ社)4g、密着促進剤として3-メタアクリルオキシプロピルトリメトキシシラン5g、レベリング剤としてBYK-307(アルタナ社)2g、溶媒としてプロピレングリコールモノメチルエーテルアセテート33g、および3-メトキシブチルアセテート240gを混合した。
-Hole:非露光部位で現像液によって洗い流された部分陽極(anode)
-直進性:ホールが生成された両側面部の真っ直ぐな程度
-Taper:hole形成後にコーティングされた面とホールをなす断面の角度
-10μm:10μmサイズのmask非露光部で現像後に得られるホールパターンの大きさ
-15μm:15μmサイズのmask非露光部で現像後に得られるホールパターンの大きさ
ポストベーク後に得たフィルムは、膜厚さが約2.5μmで非露光部位に活性領域(active area=anode)のホールパターンが形成されている。ホールパターンの形成においてホール末端がマスク状に形成されたか、ホールをなしている断面の直進性を走査電子顕微鏡(SEM)により評価した。
現像を10秒間隔にしてホールパターンのCD変化率を評価した。
ポストベーク後に得たフィルムは、膜厚さが約2.5μmと非露光部位にアクティブエリアのホールパターンが形成されている。前記ホールパターンに感光性樹脂組成物が残っているか否かを光学顕微鏡により評価した。
現像直後に肉眼で全体ガラスのむしれの有無を確認した。
Claims (15)
- 重量平均分子量が2,840(g/mol)であって、下記化学式1の繰り返し単位を含む高分子樹脂化合物:
[化学式1]
A1およびA2は、互いに同一または異なり、それぞれ独立に、置換もしくは非置換のカルバメート基;またはヒドロキシ基であり、
前記A1およびA2のいずれか1つ、または、前記A1およびA2の両方が、置換もしくは非置換のカルバメート基であり、
Y1およびY2は、互いに同一または異なり、それぞれ独立に、置換もしくは非置換の炭素数1~3のアルキレン基であり、
Zは、置換もしくは非置換の2価のアルキレン基;置換もしくは非置換の2価のシクロヘキサン;置換もしくは非置換の2価のシクロヘキセン;または置換もしくは非置換の2価のベンゼンであり、
R1~R8は、互いに同一または異なり、それぞれ独立に、水素;重水素;ハロゲン基;置換もしくは非置換の炭素数1~10のアルキル基;置換もしくは非置換の炭素数3~10のシクロアルキル基;置換もしくは非置換のシリル基;置換もしくは非置換のホスフィンオキシド基;置換もしくは非置換のアリール基;または置換もしくは非置換のヘテロ環基であり、
r1~r4は、それぞれ独立に、1~4の整数であり、
r1~r4がそれぞれ2以上の場合、括弧内の構造は、それぞれ互いに同一または異なり、
nは、2以上であって、前記高分子樹脂化合物の重量平均分子量が2,840(g/mol)となる数であり
nが2以上の場合、括弧内の構造は、互いに同一または異なり、
前記カルバメート基は、下記化学式2で表されるものであり、
[化学式2]
Y3は、置換もしくは非置換の炭素数1~3のアルキレン基であり、
R11は、水素;重水素;または置換もしくは非置換の炭素数1~4のアルキル基であり、
R12は、CR102R103であり、
R13は、Oであり、
R14は、水素であり、
R102およびR103は、水素である。 - 前記化学式1は、下記化学式4~6のいずれか1つで表されるものである、請求項1に記載の高分子樹脂化合物:
[化学式4]
Y1、Y2、R1~R8、r1~r4およびnに関する定義は、前記化学式1で定義したものと同じであり、
Y3は、置換もしくは非置換の炭素数1~3のアルキレン基であり、
R11およびR21は、互いに同一または異なり、それぞれ独立に、水素;重水素;または置換もしくは非置換の炭素数1~4のアルキル基であり、
R12およびR22は、CR102R103であり、
R13およびR23は、Oであり、
R14およびR24は、水素であり、
前記R102およびR103は、水素である。 - 請求項1~3のいずれか1項に記載の高分子樹脂化合物、モノマー、光開始剤、着色剤、および溶媒を含むブラックバンク用感光性樹脂組成物。
- 前記高分子樹脂化合物の含有量は、前記ブラックバンク用感光性樹脂組成物の総重量を基準として、1~20重量%である、請求項4に記載のブラックバンク用感光性樹脂組成物。
- 前記モノマーは、ポリエチレングリコールモノ(メタ)アクリレート、ポリプロピレングリコールモノ(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、ポリエチレングリコール(メタ)アクリレート、ポリプロピレングリコール(メタ)アクリレート、トリメチロールエタントリアクリレート、トリメチロールプロパントリアクリレート、ネオペンチルグリコール(メタ)アクリレート、ジペンタエリスリトールヘキサアクリレート(DPHA)からなる群より選択される1種以上を含む、請求項4または5に記載のブラックバンク用感光性樹脂組成物。
- 前記モノマーの含有量は、前記ブラックバンク用感光性樹脂組成物の総重量を基準として、1~10重量%である、請求項4~6のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 前記光開始剤は、アセトフェノン系化合物、ビイミダゾール系化合物、トリアジン系化合物、およびオキシム系化合物からなる群より選択される1種以上を含む、請求項4~7のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 前記光開始剤の含有量は、前記ブラックバンク用感光性樹脂組成物の総重量を基準として、0.1~5重量%である、請求項4~8のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 前記溶媒は、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテル、ジエチレングリコールエチルメチルエーテル、ジエチレングリコールメチルブチルエーテル、トリエチレングリコールメチルブチルエーテル、メチル3-メトキシプロピオネート、エチル3-エトキシプロピオネート、ジエチレングリコールモノエチルエーテルアセテート、3-メトキシブチルアセテート、および2-プロパノールからなる群より選択される1種以上を含む、請求項4~9のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 前記溶媒の含有量は、前記ブラックバンク用感光性樹脂組成物の総重量を基準として、60~90重量%である、請求項4~10のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 前記ブラックバンク用感光性樹脂組成物は、光架橋増感剤、硬化促進剤、密着促進剤、接着力増強剤、界面活性剤、酸化防止剤、熱重合防止剤、紫外線吸収剤、分散剤、およびレベリング剤からなる群より選択された1種以上の添加剤を追加的に含む、請求項4~11のいずれか1項に記載のブラックバンク用感光性樹脂組成物。
- 請求項4~12のいずれか1項に記載のブラックバンク用感光性樹脂組成物を含むブラックバンク。
- 1)請求項4に記載のブラックバンク用感光性樹脂組成物を基板上に塗布するステップと、
2)前記塗布されたブラックバンク用感光性樹脂組成物を露光および現像してパターニングするステップと、
3)パターニングされたブラックバンク用感光性樹脂組成物を硬化させるステップとを含むブラックバンクの製造方法。 - 前記2)の前記塗布されたブラックバンク用感光性樹脂組成物の現像時に使用する現像液は、テトラメチルアンモニウムヒドロキシド(TMAH)水溶液である、請求項14に記載のブラックバンクの製造方法。
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KR20210081032A (ko) * | 2019-12-23 | 2021-07-01 | 주식회사 엘지화학 | 고분자 수지 화합물, 이의 제조 방법 및 이를 포함하는 감광성 수지 조성물 |
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TWI651339B (zh) | 2019-02-21 |
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