JP6970075B2 - 再配線の形成方法及びこれを利用する半導体素子の製造方法 - Google Patents
再配線の形成方法及びこれを利用する半導体素子の製造方法 Download PDFInfo
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- JP6970075B2 JP6970075B2 JP2018213480A JP2018213480A JP6970075B2 JP 6970075 B2 JP6970075 B2 JP 6970075B2 JP 2018213480 A JP2018213480 A JP 2018213480A JP 2018213480 A JP2018213480 A JP 2018213480A JP 6970075 B2 JP6970075 B2 JP 6970075B2
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- rewiring
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Landscapes
- Engineering & Computer Science (AREA)
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- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Formation Of Insulating Films (AREA)
- Thin Film Transistor (AREA)
Description
図1を参照すれば、半導体素子10は対向する上面100aと下面100cを有する半導体基板100、半導体基板100内に提供され、素子分離膜710によって分離されたフォトダイオード720、半導体基板100の上面100a上に提供された金属配線構造740、金属配線構造740上に提供されたカラーフィルタ760、及びカラーフィルタ760に対応するマイクロレンズ770を含む。上面100aは半導体基板100の活性面であり、下面100cは半導体基板100の非活性面である。
なお、フォトダイオード720、カラーフィルタ760、マイクロレンズ770、及びストレージノード730は例示的であって、本発明は必ずしもこれらに限定されない。
図2を参照すれば、半導体素子10は電気的装置20に電気的に連結されて半導体パッケージ1を構成する。一例として、半導体素子10の外部端子630と電気的装置20の外部端子23との間にソルダボール30を形成し、エポキシモールディングコンパウンド(EMC)の提供と硬化によってモールド膜40を形成する。電気的装置20はメモリチップ、ロジックチップ、或いはその組合せを含む。他の例として、電気的装置20は印刷回路基板PCBを含む。ソルダボール30を形成するためのリフロー工程とモールド膜40を形成するための硬化工程は常温(例:約25℃)から250℃以下の温度で進行される。
図3を参照すれば、対向する第1面100aと第2面100bとを有する半導体基板100を提供する。半導体基板100はイメージセンサを構成する多様な構成要素を含む半導体ウエハ(例:シリコンウエハ)である。例えば、半導体基板100は、図1を参照して前述したように、フォトダイオード720、金属配線構造740、カラーフィルタ760、及びマイクロレンズ770を含む。カラーフィルタ760とマイクロレンズ770とはポリマーを含む。
図16を参照すれば、図3乃至図7を参照して前述した本発明の実施形態に係る半導体素子の製造方法と同一であるか、或いは類似の工程を進行して、半導体基板100の下面100c上にバリア膜410とシード膜420を形成する。図7の犠牲膜60の代わりに、グルーブ55を満たす金属膜430aを形成する。金属膜430aは銅のような金属を鍍金して形成する。
10 半導体素子
20 電気的装置
23 外部端子
30 ソルダボール
40 モールド膜
50 マスクパターン
55 グルーブ
60 犠牲膜
70 マスクパターン
90 キャリヤ
100 半導体基板
100a、100b (半導体基板の)上面、下面
200 貫通電極
210 バリア膜
220 ビア絶縁膜
310 第1下部絶縁膜
320 第2下部絶縁膜
410 バリア膜
420 シード膜
430、430a 再配線、金属膜
440 酸化膜
500 保護膜
550 開口部
610 バリア膜
620 シード膜
630 外部端子
640 キャッピング膜
710 素子分離膜
720 フォトダイオード
730 ストレージノード
740 金属配線構造
742 ビア
744 金属配線
746 絶縁膜
750 上部絶縁膜
760 カラーフィルタ
770 マイクロレンズ
Claims (22)
- 上面とその反対面である下面とを有する半導体基板、前記半導体基板の前記上面上のカラーフィルタ、及び前記半導体基板の前記上面上のマイクロレンズを含むベース構造体を提供する段階と、
前記半導体基板の前記下面上に再配線を形成する段階と、
前記半導体基板の前記下面上に前記再配線を覆う保護膜を形成する段階と、を含み、
前記再配線上に酸化膜を自発的に形成し、前記カラーフィルタと前記マイクロレンズとの何れにも熱的損傷が加わらない温度下で前記再配線と前記保護膜との間に酸化膜が成長し、
前記酸化膜の成長は、半導体素子の製造が終了する時に、前記酸化膜の厚さが50nm乃至200nmに、好ましくは100nmになるように、前記酸化膜が前記保護膜を形成した後に遂行される工程の中で自発的に成長する、ことを特徴とする半導体素子の製造方法。 - 前記保護膜は、酸素を含む物質で形成され、前記保護膜内の酸素と前記再配線の物質の構成成分が反応して自然に前記酸化膜が形成される、ことを特徴とする請求項1に記載の半導体素子の製造方法。
- 前記温度は、250℃以下である、ことを特徴とする請求項1に記載の半導体素子の製造方法。
- 前記再配線を形成する段階は、
前記半導体基板の前記下面上にマスクパターンを形成し、
前記半導体基板の前記下面に形成された前記マスクパターンによって露出された前記半導体基板の前記下面上にバリア膜とシード膜とを順に形成する段階と、
前記シード膜を利用して鍍金工程を通じて金属膜を鍍金する段階と、を含むことを特徴とする請求項1に記載の半導体素子の製造方法。 - 前記ベース構造体は、前記半導体基板を貫通し、前記半導体基板の前記下面を通じて露出された貫通電極を含み、
前記バリア膜は、前記貫通電極と接続するように形成される、ことを特徴とする請求項4に記載の半導体素子の製造方法。 - 前記再配線は、前記半導体基板の前記下面に対向する前記再配線の上面、前記半導体基板と対向する前記再配線の下面、及び前記再配線の側面を有し、
前記バリア膜は、前記再配線の前記上面を覆い、
前記酸化膜は、前記再配線の前記下面及び前記再配線の前記側面を覆う、ことを特徴とする請求項4に記載の半導体素子の製造方法。 - 前記保護膜を形成する段階は、
前記再配線によって覆われていない前記半導体基板の前記下面上にポリベンゾオキサゾール(PBO)を含む絶縁膜を形成する段階を含む、ことを特徴とする請求項1に記載の半導体素子の製造方法。 - 活性面とその反対面である非活性面とを有する半導体基板、前記活性面上のカラーフィルタ、及び前記活性面上のマイクロレンズを含むベース構造体を提供する段階と、
前記半導体基板の前記非活性面上に再配線金属膜を形成する段階と、
前記半導体基板の前記非活性面上に前記再配線金属膜を覆う有機絶縁膜を形成する段階と、
前記再配線金属膜と前記有機絶縁膜との間に金属酸化膜を成長させる段階と、を含み、
前記金属酸化膜は、前記カラーフィルタ及び前記マイクロレンズに対する熱的損傷を回避するように規定された温度範囲内で前記有機絶縁膜を形成した後に遂行される工程の中で50nm乃至200nm、好ましくは100nmの厚さに成長する、ことを特徴とする半導体素子の製造方法。 - 前記金属酸化膜は、前記再配線金属膜と前記有機絶縁膜との間で自発的反応によって形成する、ことを特徴とする請求項8に記載の半導体素子の製造方法。
- 前記温度は、250℃の最大温度範囲を有する、ことを特徴とする請求項8に記載の半導体素子の製造方法。
- 前記ベース構造体を提供することは、
前記半導体基板を貫通する貫通電極を形成し、
前記半導体基板を薄型化して前記非活性面を露出させることを含み、
前記貫通電極は、前記半導体基板の前記非活性面に露出される、ことを特徴とする請求項8に記載の半導体素子の製造方法。 - 前記再配線金属膜を形成することは、
前記半導体基板の前記非活性面上に前記貫通電極を露出させるグルーブを有するマスクパターンを形成し、
前記半導体基板の前記非活性面上に前記貫通電極と接続するバリア膜を形成し、
前記バリア膜上にシード膜を形成し、
前記シード膜を利用する鍍金で前記グルーブ内に銅(Cu)を含む金属膜を形成することを含む、ことを特徴とする請求項11に記載の半導体素子の製造方法。 - 前記有機絶縁膜を形成することは、
銅(Cu)上にポリベンゾオキサゾール(PBO)を提供し、
前記ポリベンゾオキサゾール(PBO)を硬化することを
含む、ことを特徴とする請求項12に記載の半導体素子の製造方法。 - 前記ベース構造体を提供することは、前記半導体基板の前記活性面上に金属配線構造を形成することを含み、前記カラーフィルタと前記マイクロレンズとは、前記金属配線構造上に積層され、
前記有機絶縁膜を通じて前記再配線金属膜で延長される外部端子を形成することをさらに含む、ことを特徴とする請求項8に記載の半導体素子の製造方法。 - 活性面と非活性面を有する半導体基板、及び前記非活性面に至らない貫通電極を含むベース構造体を提供する段階と、
前記半導体基板の前記非活性面をリセスして前記貫通電極を露出する段階と、
前記半導体基板の前記非活性面上に前記貫通電極と電気的に連結される再配線を形成する段階と、
前記再配線を覆う有機保護膜を形成する段階と、を含み、
250℃以下の温度で、前記再配線と前記有機保護膜との間に50nm乃至200nm厚さに自然金属酸化膜を成長させる、ことを特徴とする再配線の形成方法。 - 前記再配線は、銅(Cu)を含み、前記有機保護膜は、ポリベンゾオキサゾール(PBO)を含む、ことを特徴とする請求項15に記載の再配線の形成方法。
- 前記半導体基板の前記非活性面をリセスすることは、
前記半導体基板の前記活性面上にキャリヤを付着し、
前記キャリヤが付着された前記半導体基板をグラインディングすることを
含む、ことを特徴とする請求項15に記載の再配線の形成方法。 - 前記非活性面がリセスされた後に、前記半導体基板の前記非活性面上に前記貫通電極を覆う絶縁膜を形成する段階と、
前記貫通電極が前記絶縁膜の表面に露出されるように平坦化された構造を形成するために前記絶縁膜を平坦化する段階と、をさらに含み、
前記再配線は、前記平坦化された構造の前記貫通電極に電気的に連結される、ことを特徴とする請求項15に記載の再配線の形成方法。 - 前記再配線を形成する段階は、
前記平坦化された絶縁膜の表面に現れる前記貫通電極を露出させるグルーブを含むマスクパターンを前記絶縁膜の前記表面上に形成する段階と、
前記マスクパターンを含む結果構造物上にバリア膜とシード膜とを順に形成する段階と、
前記シード膜を利用して鍍金工程を遂行して前記グルーブ内に銅を含む金属膜を形成する段階と、を含むことを特徴とする請求項18に記載の再配線の形成方法。 - 前記有機保護膜が形成された後、前記自然金属酸化膜は10時間の間100nm厚さに形成される、ことを特徴とする請求項15に記載の再配線の形成方法。
- 相互に対向する上面と下面とを有する半導体基板、前記下面に露出されたビア、前記半導体基板の上面上のカラーフィルタ、及び前記半導体基板の上面上のマイクロレンズを含むベース構造体を提供する段階と、
前記半導体基板の下面に沿って延長され前記ビアに接続される金属再配線を形成する段階と、
前記金属再配線を覆う保護膜を形成する段階と、
前記カラーフィルタ及び前記マイクロレンズの各々の許容温度より低い温度範囲のプロセスを遂行して製造を完了する段階と、を含み、
前記温度範囲下で前記金属再配線と前記保護膜との間に、前記プロセスの終了時に酸化膜が50nm乃至200nm厚さに形成される、ことを特徴とする半導体素子の形成方法。 - 前記再配線を形成する段階は、
前記ビアを露出させるグルーブを含むマスクを前記ベース構造体の下面上に形成する段階と、
前記マスクを含む結果構造物上にバリア膜及びシード膜を順次的に形成する段階と、
前記シード膜を利用して鍍金工程を遂行して前記グルーブ内に金属膜を形成することを含む、ことを特徴とする請求項21に記載の半導体素子の形成方法。
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