JP6933475B2 - メンテナンス機構 - Google Patents
メンテナンス機構 Download PDFInfo
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- JP6933475B2 JP6933475B2 JP2017048588A JP2017048588A JP6933475B2 JP 6933475 B2 JP6933475 B2 JP 6933475B2 JP 2017048588 A JP2017048588 A JP 2017048588A JP 2017048588 A JP2017048588 A JP 2017048588A JP 6933475 B2 JP6933475 B2 JP 6933475B2
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- 230000008531 maintenance mechanism Effects 0.000 title claims description 169
- 238000000034 method Methods 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 9
- 238000011161 development Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010438 granite Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/025—Arms extensible telescopic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C23/00—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes
- B66C23/18—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes specially adapted for use in particular purposes
- B66C23/20—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes specially adapted for use in particular purposes with supporting couples provided by walls of buildings or like structures
- B66C23/208—Cranes comprising essentially a beam, boom, or triangular structure acting as a cantilever and mounted for translatory of swinging movements in vertical or horizontal planes or a combination of such movements, e.g. jib-cranes, derricks, tower cranes specially adapted for use in particular purposes with supporting couples provided by walls of buildings or like structures with supporting couples provided from the side, e.g. by walls of buildings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/075—Constructional features or details
- B66F9/08—Masts; Guides; Chains
- B66F9/10—Masts; Guides; Chains movable in a horizontal direction relative to truck
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F9/00—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes
- B66F9/06—Devices for lifting or lowering bulky or heavy goods for loading or unloading purposes movable, with their loads, on wheels or the like, e.g. fork-lift trucks
- B66F9/075—Constructional features or details
- B66F9/12—Platforms; Forks; Other load supporting or gripping members
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Robotics (AREA)
- Transportation (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Civil Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
2 ビーム
3 アーム
3a、3b セグメント
4 軸
5 接続ユニット
6 ビーム受座
7 アーム受座
8 フォーク
8b 上側部分
8a 下側部分
9 回転軸
10 凹部
11 収容手段
12〜14 矢印
15 回転軸
16 半導体素子を処理するシステム
17 台
18 防振装置
19 ステージ
20 フレーム
21 メトロロジー装置
22 センサー
23 フィルターモジュール
24 トロリーケース
25 アダプター
26 レバー
27 カム
28 凹部
29 矢印
30 補償ジョイント
31 センサー
32 接続ユニット
33 リーダー
34 教示データを含むメモリ
35 初期位置
36 最終位置
37 障害物
38 障害物
39 アクチュエーター
Claims (17)
- 半導体素子を処理するシステム(16)のコンポーネントを持ち上げて移動させるメンテナンス機構(1)であって、該メンテナンス機構は、ビーム(2)と、コンポーネントを持ち上げる手段を伴うアーム(3)とを備え、該アームは、水平面において枢動可能であるように、接続ユニット(5)を介して前記ビームに接続され、前記接続ユニット(5)は、前記ビームに沿って変位可能であり、前記アーム(3)は、前記ビームに対して直角に変位可能であり、枢動可能な前記アーム(3)には、コンポーネント用の荷重収容手段が設けられる、メンテナンス機構。
- 請求項1に記載のメンテナンス機構(1)であって、前記接続ユニット(5)は、アーム受座(7)及びビーム受座(6)を備え、前記アーム受座(7)は、前記ビーム受座(6)に対して直線的に変位可能である、メンテナンス機構。
- 請求項1又は2に記載のメンテナンス機構(1)であって、前記アーム(3)及び/又は前記荷重収容手段及び/又はフォークは、取外し可能に構成されている、メンテナンス機構。
- 請求項1〜3のいずれか1項に記載のメンテナンス機構(1)であって、前記アーム(3)は、前記接続ユニット(5)を介して回動可能に設計されている、メンテナンス機構。
- 請求項1〜4のいずれか1項に記載のメンテナンス機構(1)であって、前記荷重収容手段は、前記コンポーネントを支持する折畳み式フォーク(8)又は、回動可能及び/又は水平方向に変位可能であるように前記アームに取り付けられる折畳み式フォークを備える、メンテナンス機構。
- 請求項5に記載のメンテナンス機構(1)であって、前記アーム(3)は、コンポーネント用の更なる収容手段(11)を備える、メンテナンス機構。
- 請求項6に記載のメンテナンス機構(1)であって、前記更なる収容手段(11)は、前記アーム(3)の前記折畳み式フォーク(8)に面しない側に配置される、メンテナンス機構。
- 請求項1〜7のいずれか1項に記載のメンテナンス機構(1)であって、折り畳んで可搬ユニットにすることができ、及び/又は移動用途にすることもできる、メンテナンス機構。
- 請求項1〜7のいずれか1項に記載のメンテナンス機構(1)であって、無潤滑ジョイント、無潤滑レール及び/又は無潤滑軸受、又は、空気軸受若しくは磁気軸受を備え、及び/又は、粒子吸引ユニットが備え付けられている、メンテナンス機構。
- 半導体素子を処理するシステム(16)であって、該システムに取り付けることができる、又は、該システムのフレームに取り付けることができる、コンポーネントを持ち上げる手段を備える請求項1〜9のいずれか1項に記載のメンテナンス機構(1)を備える、システム。
- 請求項10に記載のシステム(16)であって、前記メンテナンス機構(1)のビーム(2)用の受座を備える、システム。
- 請求項10又は11に記載のシステム(16)であって、前記メンテナンス機構(1)は、クイックリリースクランプ機構によって該システムに取り付けることができる、システム。
- 請求項12に記載のシステム(16)であって、前記クイックリリースクランプ機構は、該システム(16)のフレーム(20)に取り付けられるアダプター(25)を備える、システム。
- 請求項10〜13のいずれか1項に記載のシステム(16)であって、互いに正対して配置される2つのメンテナンス機構(1)を備える、システム。
- 請求項1〜9のいずれか1項に記載のメンテナンス機構及び/又は請求項10〜14のいずれか1項に記載のシステムを用いることを含む、コンポーネントを持ち上げて移動させる方法。
- 前記移動は、コントローラーを用いて、少なくとも2つの異なる移動方向を含む軌道に沿って移動させることを含む、請求項15に記載の方法。
- 前記メンテナンス機構を用いて、少なくとも2つの異なるコンポーネント又はシステムコンポーネントを持ち上げて移動させることを含む、請求項15又は16に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16160367.5 | 2016-03-15 | ||
EP16160367.5A EP3220413B1 (de) | 2016-03-15 | 2016-03-15 | Serviceeinrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017168841A JP2017168841A (ja) | 2017-09-21 |
JP6933475B2 true JP6933475B2 (ja) | 2021-09-08 |
Family
ID=55628741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017048588A Active JP6933475B2 (ja) | 2016-03-15 | 2017-03-14 | メンテナンス機構 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10322919B2 (ja) |
EP (1) | EP3220413B1 (ja) |
JP (1) | JP6933475B2 (ja) |
KR (1) | KR102388699B1 (ja) |
Families Citing this family (8)
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US20170040205A1 (en) * | 2015-08-05 | 2017-02-09 | Lam Research Corporation | High-hardness-material-powder infused elastomer for high friction and compliance for silicon wafer transfer |
DE102016120820A1 (de) * | 2016-11-02 | 2018-05-03 | Integrated Dynamics Engineering Gmbh | Anlage zur Prozessierung von Halbleiterbauelementen sowie Hebeeinrichtung |
CN209160601U (zh) * | 2018-09-07 | 2019-07-26 | 深圳市海柔创新科技有限公司 | 一种搬运机器人 |
CN109231082A (zh) * | 2018-11-15 | 2019-01-18 | 北京特种机械研究所 | 一种全向堆垛拣选车 |
KR102196755B1 (ko) * | 2019-03-12 | 2020-12-30 | 현대중공업지주 주식회사 | 기판 이송장치의 정비장치 |
CN111244002B (zh) * | 2020-03-25 | 2022-07-29 | 铜陵富仕三佳机器有限公司 | 一种用于ic芯片封装的抓取机械手 |
CN112573424B (zh) * | 2020-12-31 | 2022-07-22 | 中山市德友鑫智能装备有限公司 | 一种可根据货物量自动调节提升高度的提升机装置 |
WO2023149958A1 (en) * | 2022-02-04 | 2023-08-10 | Lam Research Corporation | Portable robot for semiconductor equipment maintenance tasks |
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JP5474522B2 (ja) * | 2009-01-14 | 2014-04-16 | ギガフォトン株式会社 | 極端紫外光源システム |
KR101543681B1 (ko) * | 2009-01-15 | 2015-08-11 | 주성엔지니어링(주) | 기판 처리 시스템 |
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US9908212B2 (en) * | 2014-05-14 | 2018-03-06 | Ebara Corporation | Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine |
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-
2016
- 2016-03-15 EP EP16160367.5A patent/EP3220413B1/de active Active
-
2017
- 2017-03-03 US US15/449,415 patent/US10322919B2/en active Active
- 2017-03-14 JP JP2017048588A patent/JP6933475B2/ja active Active
- 2017-03-15 KR KR1020170032533A patent/KR102388699B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP3220413A1 (de) | 2017-09-20 |
JP2017168841A (ja) | 2017-09-21 |
EP3220413B1 (de) | 2022-01-26 |
US10322919B2 (en) | 2019-06-18 |
KR102388699B1 (ko) | 2022-04-20 |
US20170267504A1 (en) | 2017-09-21 |
KR20170107406A (ko) | 2017-09-25 |
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