JP6916886B2 - 分光組成分析のためのウェハ粒子欠陥の活性化 - Google Patents

分光組成分析のためのウェハ粒子欠陥の活性化 Download PDF

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Publication number
JP6916886B2
JP6916886B2 JP2019541117A JP2019541117A JP6916886B2 JP 6916886 B2 JP6916886 B2 JP 6916886B2 JP 2019541117 A JP2019541117 A JP 2019541117A JP 2019541117 A JP2019541117 A JP 2019541117A JP 6916886 B2 JP6916886 B2 JP 6916886B2
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particles
inspection system
illumination
surface inspection
defective
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JP2020505607A5 (enExample
JP2020505607A (ja
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クルト ハーラー
クルト ハーラー
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KLA Corp
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • H10P74/27—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H10P74/203—
    • H10P74/235—

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  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2019541117A 2017-01-30 2018-01-26 分光組成分析のためのウェハ粒子欠陥の活性化 Active JP6916886B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/419,355 2017-01-30
US15/419,355 US10551320B2 (en) 2017-01-30 2017-01-30 Activation of wafer particle defects for spectroscopic composition analysis
PCT/US2018/015570 WO2018140805A1 (en) 2017-01-30 2018-01-26 Activation of wafer particle defects for spectroscopic composition analysis

Publications (3)

Publication Number Publication Date
JP2020505607A JP2020505607A (ja) 2020-02-20
JP2020505607A5 JP2020505607A5 (enExample) 2021-03-04
JP6916886B2 true JP6916886B2 (ja) 2021-08-11

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JP2019541117A Active JP6916886B2 (ja) 2017-01-30 2018-01-26 分光組成分析のためのウェハ粒子欠陥の活性化

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US (1) US10551320B2 (enExample)
EP (1) EP3549160B1 (enExample)
JP (1) JP6916886B2 (enExample)
KR (1) KR102353259B1 (enExample)
CN (1) CN110313058B (enExample)
SG (1) SG11201906281RA (enExample)
TW (1) TWI764979B (enExample)
WO (1) WO2018140805A1 (enExample)

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Also Published As

Publication number Publication date
KR102353259B1 (ko) 2022-01-18
EP3549160A4 (en) 2020-07-08
CN110313058B (zh) 2022-06-28
WO2018140805A1 (en) 2018-08-02
KR20190104628A (ko) 2019-09-10
SG11201906281RA (en) 2019-08-27
JP2020505607A (ja) 2020-02-20
EP3549160A1 (en) 2019-10-09
CN110313058A (zh) 2019-10-08
EP3549160B1 (en) 2022-01-05
TW201832304A (zh) 2018-09-01
TWI764979B (zh) 2022-05-21
US20180217065A1 (en) 2018-08-02
US10551320B2 (en) 2020-02-04

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