JP6876892B2 - 酸化イットリウム膜 - Google Patents
酸化イットリウム膜 Download PDFInfo
- Publication number
- JP6876892B2 JP6876892B2 JP2015106564A JP2015106564A JP6876892B2 JP 6876892 B2 JP6876892 B2 JP 6876892B2 JP 2015106564 A JP2015106564 A JP 2015106564A JP 2015106564 A JP2015106564 A JP 2015106564A JP 6876892 B2 JP6876892 B2 JP 6876892B2
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- Prior art keywords
- yttrium oxide
- oxide film
- film
- substrate
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Chemical Vapour Deposition (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015106564A JP6876892B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015106564A JP6876892B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016216331A JP2016216331A (ja) | 2016-12-22 |
| JP2016216331A5 JP2016216331A5 (enExample) | 2018-07-12 |
| JP6876892B2 true JP6876892B2 (ja) | 2021-05-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015106564A Active JP6876892B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6876892B2 (enExample) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4895574B2 (ja) * | 2005-11-02 | 2012-03-14 | シャープ株式会社 | 波長変換部材及び発光装置 |
| JP2008274374A (ja) * | 2007-05-02 | 2008-11-13 | Seiko Epson Corp | 成膜装置および成膜方法 |
| JP2009287058A (ja) * | 2008-05-27 | 2009-12-10 | Hakumaku Process:Kk | 直流反応性対向ターゲット方式スパッタリング成膜方法、その成膜方法によって形成される純イットリア耐食膜、及び耐食性石英構成体 |
| JP2010070854A (ja) * | 2008-08-20 | 2010-04-02 | Kyocera Corp | 耐食性部材およびこれを用いた半導体製造装置 |
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2015
- 2015-05-26 JP JP2015106564A patent/JP6876892B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016216331A (ja) | 2016-12-22 |
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