JP6871524B1 - 積層接合材料、半導体パッケージおよびパワーモジュール - Google Patents
積層接合材料、半導体パッケージおよびパワーモジュール Download PDFInfo
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- JP6871524B1 JP6871524B1 JP2020050674A JP2020050674A JP6871524B1 JP 6871524 B1 JP6871524 B1 JP 6871524B1 JP 2020050674 A JP2020050674 A JP 2020050674A JP 2020050674 A JP2020050674 A JP 2020050674A JP 6871524 B1 JP6871524 B1 JP 6871524B1
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- base material
- lead
- free solder
- laminated
- substrate
- Prior art date
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- 239000000463 material Substances 0.000 title claims abstract description 363
- 239000004065 semiconductor Substances 0.000 title claims abstract description 116
- 229910000679 solder Inorganic materials 0.000 claims abstract description 102
- 239000002648 laminated material Substances 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims description 79
- 238000002844 melting Methods 0.000 claims description 20
- 230000008018 melting Effects 0.000 claims description 20
- 229910052718 tin Inorganic materials 0.000 claims description 15
- 238000005304 joining Methods 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 12
- 239000002131 composite material Substances 0.000 abstract description 18
- 229910052721 tungsten Inorganic materials 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 abstract 1
- 239000010949 copper Substances 0.000 description 48
- 238000012360 testing method Methods 0.000 description 18
- 230000007547 defect Effects 0.000 description 15
- 239000010410 layer Substances 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 230000002950 deficient Effects 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910016525 CuMo Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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- C—CHEMISTRY; METALLURGY
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- C22C—ALLOYS
- C22C9/00—Alloys based on copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
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- B23K35/0238—Sheets, foils layered
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
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- B32B15/00—Layered products comprising a layer of metal
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- C22C27/04—Alloys based on tungsten or molybdenum
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/32227—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the layer connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
Abstract
Description
図1は、一実施の形態に係る積層接合材料10の概略構成を示す縦断面図である。
次に、図2を参照し、一実施の形態に係る半導体パッケージ20について説明する。なお、本明細書において、半導体パッケージ20に含まれる半導体素子22がパワー半導体素子である場合には、そのような半導体パッケージ20(すなわちパワー半導体パッケージ)をパワーモジュールということがある。
次に、本実施の形態に係る具体的な実施例について説明する。
欠陥部変化率(%)={(1000サイクル後の欠陥部面積率−冷熱サイクル試験前の欠陥部面積率)/1000サイクル後の欠陥部面積率}×100 式(1)
11 基材
12a 鉛フリーはんだ
12b 鉛フリーはんだ
13a 第1下地層
13b 第2下地層
20 半導体パッケージ(パワーモジュール)
21 基板
22 半導体(パワー半導体)
23 放熱部
23a 放熱板
23b 放熱フィン
Claims (29)
- 基材の線膨張係数が5.5〜15.5ppm/Kであり、第1面および第2面が鉛フリーはんだでコーティングされており、
前記基材は、Cu−W基材料、Cu−Mo基材料、Cu−W基材料とCu−Mo基材料との積層材料のいずれかからなり、
前記基材の第1面および第2面のうちの少なくとも一方と前記鉛フリーはんだとの界面が、前記基材側から順にNi、Snにより下地処理されている、積層接合材料。 - 前記基材の線膨張係数が5.9〜14.4ppm/Kである、請求項1に記載の積層接合材料。
- 前記基材の線膨張係数が7.0〜11.6ppm/Kである、請求項1または2に記載の積層接合材料。
- 前記基材のCu含有量が、60%以下である、請求項1〜3のいずれかに記載の積層接合材料。
- 前記基材のCu含有量が、15%以上である、請求項1〜4のいずれかに記載の積層接合材料。
- 前記第1面にコーティングされている鉛フリーはんだの厚さと、前記第2面にコーティングされている鉛フリーはんだの厚さのうちの少なくとも一方が、20〜100μmである、請求項1〜5のいずれかに記載の積層接合材料。
- 前記基材と前記第1面にコーティングされている鉛フリーはんだの厚さの比と、前記基材と前記第2面にコーティングされている鉛フリーはんだの厚さの比のうちの少なくとも一方が、2:1〜10:1である、請求項1〜6のいずれかに記載の積層接合材料。
- 前記鉛フリーはんだの融点が、210℃以上である、請求項1〜7のいずれかに記載の積層接合材料。
- 前記鉛フリーはんだの融点が、230℃以上である、請求項8に記載の積層接合材料。
- 基板と、前記基板上に配置された半導体素子と、前記基板と前記半導体素子との間に配置され、前記基板と前記半導体素子とを接合する積層接合材料と、を備え、
前記積層接合材料は、基材の線膨張係数が5.5〜15.5ppm/Kであり、第1面および第2面が鉛フリーはんだでコーティングされており、
前記基材は、Cu−W基材料、Cu−Mo基材料、Cu−W基材料とCu−Mo基材料との積層材料のいずれかからなり、
前記基材の第1面および第2面のうちの少なくとも一方と前記鉛フリーはんだとの界面が、前記基材側から順にNi、Snにより下地処理されている、半導体パッケージ。 - 基板と、前記基板上に配置された半導体素子と、前記基板と前記半導体素子との間に配置され、前記基板と前記半導体素子とを接合する第1積層接合材料と、前記基板の前記半導体素子とは逆側に配置された放熱部と、前記基板と前記放熱部との間に配置され、前記基板と前記放熱部とを接合する第2積層接合材料と、を備え、
前記第1積層接合材料と前記第2積層接合材料のうちの少なくとも一方は、基材の線膨張係数が5.5〜15.5ppm/Kであり、第1面および第2面が鉛フリーはんだでコーティングされており、
前記基材は、Cu−W基材料、Cu−Mo基材料、Cu−W基材料とCu−Mo基材料との積層材料のいずれかからなり、
前記基材の第1面および第2面のうちの少なくとも一方と前記鉛フリーはんだとの界面が、前記基材側から順にNi、Snにより下地処理されている、半導体パッケージ。 - 前記基材の線膨張係数が5.9〜14.4ppm/Kである、請求項10または11に記載の半導体パッケージ。
- 前記基材の線膨張係数が7.0〜11.6ppm/Kである、請求項10〜12のいずれかに記載の半導体パッケージ。
- 前記基材のCu含有量が、60%以下である、請求項10〜13のいずれかに記載の半導体パッケージ。
- 前記基材のCu含有量が、15%以上である、請求項10〜14のいずれかに記載の半導体パッケージ。
- 前記第1面にコーティングされている鉛フリーはんだの厚さと、前記第2面にコーティングされている鉛フリーはんだの厚さのうちの少なくとも一方が、20〜100μmである、請求項10〜15のいずれかに記載の半導体パッケージ。
- 前記基材と前記第1面にコーティングされている鉛フリーはんだの厚さの比と、前記基材と前記第2面にコーティングされている鉛フリーはんだの厚さの比のうちの少なくとも一方が、2:1〜10:1である、請求項10〜16のいずれかに記載の半導体パッケージ。
- 前記鉛フリーはんだの融点が、210℃以上である、請求項10〜17のいずれかに記載の半導体パッケージ。
- 前記鉛フリーはんだの融点が、230℃以上である、請求項18に記載の半導体パッケージ。
- 基板と、前記基板上に配置されたパワー半導体素子と、前記基板と前記パワー半導体素子との間に配置され、前記基板と前記パワー半導体素子とを接合する積層接合材料と、を備え、
前記積層接合材料は、基材の線膨張係数が5.5〜15.5ppm/Kであり、第1面および第2面が鉛フリーはんだでコーティングされており、
前記基材は、Cu−W基材料、Cu−Mo基材料、Cu−W基材料とCu−Mo基材料との積層材料のいずれかからなり、
前記基材の第1面および第2面のうちの少なくとも一方と前記鉛フリーはんだとの界面が、前記基材側から順にNi、Snにより下地処理されている、パワーモジュール。 - 基板と、前記基板上に配置されたパワー半導体素子と、前記基板と前記パワー半導体素子との間に配置され、前記基板と前記パワー半導体素子とを接合する第1積層接合材料と、前記基板の前記パワー半導体素子とは逆側に配置された放熱部と、前記基板と前記放熱部との間に配置され、前記基板と前記放熱部とを接合する第2積層接合材料と、を備え、
前記第1積層接合材料と前記第2積層接合材料のうちの少なくとも一方は、基材の線膨張係数が5.5〜15.5ppm/Kであり、第1面および第2面が鉛フリーはんだでコーティングされており、
前記基材は、Cu−W基材料、Cu−Mo基材料、Cu−W基材料とCu−Mo基材料との積層材料のいずれかからなり、
前記基材の第1面および第2面のうちの少なくとも一方と前記鉛フリーはんだとの界面が、前記基材側から順にNi、Snにより下地処理されている、パワーモジュール。 - 前記基材の線膨張係数が5.9〜14.4ppm/Kである、請求項20または21に記載のパワーモジュール。
- 前記基材の線膨張係数が7.0〜11.6ppm/Kである、請求項20〜22のいずれかに記載のパワーモジュール。
- 前記基材のCu含有量が、60%以下である、請求項20〜23のいずれかに記載のパワーモジュール。
- 前記基材のCu含有量が、15%以上である、請求項20〜24のいずれかに記載のパワーモジュール。
- 前記第1面にコーティングされている鉛フリーはんだの厚さと、前記第2面にコーティングされている鉛フリーはんだの厚さのうちの少なくとも一方が、20〜100μmである、請求項20〜25のいずれかに記載のパワーモジュール。
- 前記基材と前記第1面にコーティングされている鉛フリーはんだの厚さの比と、前記基材と前記第2面にコーティングされている鉛フリーはんだの厚さの比のうちの少なくとも一方が、2:1〜10:1である、請求項20〜26のいずれかに記載のパワーモジュール。
- 前記鉛フリーはんだの融点が、210℃以上である、請求項20〜27のいずれかに記載のパワーモジュール。
- 前記鉛フリーはんだの融点が、230℃以上である、請求項28に記載のパワーモジュール。
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US17/793,866 US11712760B2 (en) | 2020-03-23 | 2021-03-19 | Layered bonding material, semiconductor package, and power module |
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JP2019508250A (ja) * | 2016-02-19 | 2019-03-28 | ヘラエウス ドイチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディトゲゼルシャフト | 熱拡散板の製造方法、熱拡散板、半導体モジュールの製造方法及び半導体モジュール |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2023053901A1 (ja) | 2021-09-30 | 2023-04-06 | 株式会社タムラ製作所 | 接合材及び半導体パッケージ |
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US20230039027A1 (en) | 2023-02-09 |
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WO2021193420A1 (ja) | 2021-09-30 |
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