JP6102598B2 - パワーモジュール - Google Patents
パワーモジュール Download PDFInfo
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- JP6102598B2 JP6102598B2 JP2013150794A JP2013150794A JP6102598B2 JP 6102598 B2 JP6102598 B2 JP 6102598B2 JP 2013150794 A JP2013150794 A JP 2013150794A JP 2013150794 A JP2013150794 A JP 2013150794A JP 6102598 B2 JP6102598 B2 JP 6102598B2
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- semiconductor element
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- power module
- power semiconductor
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- 239000004065 semiconductor Substances 0.000 claims description 75
- 239000000463 material Substances 0.000 claims description 40
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 239000004020 conductor Substances 0.000 claims description 16
- 239000003963 antioxidant agent Substances 0.000 claims description 11
- 230000003078 antioxidant effect Effects 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 7
- 238000007772 electroless plating Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910000679 solder Inorganic materials 0.000 description 16
- 230000006866 deterioration Effects 0.000 description 11
- 230000020169 heat generation Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910016525 CuMo Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0618—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/06181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29299—Base material
- H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29338—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/29339—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29299—Base material
- H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29338—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/29347—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
- H01L2224/331—Disposition
- H01L2224/3318—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/33181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Description
図1は、この発明の実施の形態1のパワーモジュールを示す断面模式図である。図1に示すように、パワーモジュール100は、パワー半導体素子1、接合材2,4,5、ヒートスプレッダ3、外部端子6、封止樹脂7、第一の金属層であるエミッタ電極12、有機絶縁膜13、第二の金属層である付加電極15を備える。
本実施の形態2においては、実施の形態1における導電体層152を無電解めっきで有機絶縁膜13の膜厚よりも厚く形成した点が異なる。このように、導電体層152を無電解めっきで有機絶縁膜13の膜厚よりも厚く形成することで、付加電極とはんだとの接合界面が有機絶縁膜上となり、半導体素子の発熱により発生する付加電極とはんだとの接合端部における応力緩和が可能となり、エミッタ電極へのクラックの発生が低減でき、エミッタ電極の劣化が抑制できる。
本実施の形態3においては、実施の形態2における付加電極と外部端子との間である付加電極上に、応力緩和層8を形成した点が異なる。このように、付加電極上部に応力緩和層8を形成することで、接合材4であるはんだの実効的な熱膨張係数を低減したので、半導体素子の発熱により発生する付加電極とはんだとの接合端部における応力緩和が可能となり、エミッタ電極へのクラック発生による電極の劣化が抑制できる。
Claims (7)
- 半導体素子と、
一方の面が前記半導体素子に接合して形成された第一の金属層と、
前記半導体素子に接し、前記第一の金属層の他方の面の外周周辺部に形成された有機絶縁膜と、
前記有機絶縁膜に接し、前記第一の金属層の他方の面の中央部に接合して形成され、前記有機絶縁膜の膜厚よりも厚く凸状の第二の金属層と、
前記第二の金属層を介して前記第一の金属層の他方の面に接合して形成された接合材と、
を備えたことを特徴とするパワーモジュール。 - 前記第二の金属層は、前記有機絶縁膜を介して前記第一の金属層の他方の面の外周周辺部側に形成された領域を備えることを特徴とする請求項1に記載のパワーモジュール。
- 前記第二の金属層は、前記第一の金属層側から導電体層と酸化防止層とを順次備えたことを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記導電体層は、無電解めっきを用いて形成されたことを特徴とする請求項3に記載のパワーモジュール。
- 前記第二の金属層は、バリア層と導電体層と酸化防止層とを順次備えたことを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記第二の金属層の前記第一の金属層の他方の面に接する面の反対側の面に応力緩和層が形成されたことを特徴とする請求項1から請求項5のいずれか1項に記載のパワーモジュール。
- 前記半導体素子は、シリコンよりバンドギャップが広いワイドバンドギャップ半導体材料で形成されたことを特徴とする請求項1から請求項6のいずれか1項に記載のパワーモジュール。
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JP2013150794A JP6102598B2 (ja) | 2013-07-19 | 2013-07-19 | パワーモジュール |
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JP2013150794A JP6102598B2 (ja) | 2013-07-19 | 2013-07-19 | パワーモジュール |
Publications (2)
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JP2015023183A JP2015023183A (ja) | 2015-02-02 |
JP6102598B2 true JP6102598B2 (ja) | 2017-03-29 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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EP4071257A4 (en) * | 2020-03-23 | 2023-11-29 | Senju Metal Industry Co., Ltd. | LAYERED BONDING MATERIAL, SEMICONDUCTOR PACKAGE AND POWER MODULE |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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DE112017003925B4 (de) * | 2016-08-05 | 2022-12-22 | Mitsubishi Electric Corporation | Leistungs-Halbleiterelement |
JP6822056B2 (ja) * | 2016-10-18 | 2021-01-27 | 富士電機株式会社 | 半導体装置およびモジュール型半導体装置 |
JPWO2018207856A1 (ja) | 2017-05-10 | 2020-05-14 | ローム株式会社 | パワー半導体装置 |
JP2019145545A (ja) * | 2018-02-16 | 2019-08-29 | シャープ株式会社 | パワーモジュール |
JP7452040B2 (ja) | 2020-01-30 | 2024-03-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP7443926B2 (ja) | 2020-05-15 | 2024-03-06 | 株式会社デンソー | 半導体装置およびその製造方法 |
WO2022230697A1 (ja) | 2021-04-28 | 2022-11-03 | 千住金属工業株式会社 | 積層接合材料、半導体パッケージおよびパワーモジュール |
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JP3614386B2 (ja) * | 2001-08-23 | 2005-01-26 | 株式会社ルネサステクノロジ | パワーmosfet |
JP4093765B2 (ja) * | 2002-02-08 | 2008-06-04 | 株式会社豊田中央研究所 | 半導体素子実装回路 |
JP4453919B2 (ja) * | 2005-11-02 | 2010-04-21 | 富士通株式会社 | バンプ電極付き電子部品の製造方法 |
JP2009269075A (ja) * | 2008-05-09 | 2009-11-19 | Sumitomo Metal Mining Co Ltd | 応力緩和層を有する積層はんだ材の製造方法および製造装置 |
JP2010272711A (ja) * | 2009-05-22 | 2010-12-02 | Mitsubishi Electric Corp | 半導体デバイスとその製造方法 |
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EP4071257A4 (en) * | 2020-03-23 | 2023-11-29 | Senju Metal Industry Co., Ltd. | LAYERED BONDING MATERIAL, SEMICONDUCTOR PACKAGE AND POWER MODULE |
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