JP6858576B2 - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法 Download PDF

Info

Publication number
JP6858576B2
JP6858576B2 JP2017014613A JP2017014613A JP6858576B2 JP 6858576 B2 JP6858576 B2 JP 6858576B2 JP 2017014613 A JP2017014613 A JP 2017014613A JP 2017014613 A JP2017014613 A JP 2017014613A JP 6858576 B2 JP6858576 B2 JP 6858576B2
Authority
JP
Japan
Prior art keywords
adhesive layer
layer
conductive paste
semiconductor chip
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017014613A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018125349A5 (enExample
JP2018125349A (ja
Inventor
直 荒井
直 荒井
良和 平林
良和 平林
秀敏 荒井
秀敏 荒井
小平 正司
正司 小平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2017014613A priority Critical patent/JP6858576B2/ja
Priority to US15/852,479 priority patent/US10121695B2/en
Publication of JP2018125349A publication Critical patent/JP2018125349A/ja
Publication of JP2018125349A5 publication Critical patent/JP2018125349A5/ja
Application granted granted Critical
Publication of JP6858576B2 publication Critical patent/JP6858576B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H10W20/075
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H10W20/063
    • H10W20/42
    • H10W20/47
    • H10W70/60
    • H10W70/685
    • H10W72/012
    • H10W74/012
    • H10W74/15
    • H10W72/072
    • H10W72/073
    • H10W72/07338
    • H10W72/222
    • H10W72/225
    • H10W72/241
    • H10W72/252
    • H10W72/253
    • H10W90/724
    • H10W90/734

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP2017014613A 2017-01-30 2017-01-30 半導体装置の製造方法 Active JP6858576B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2017014613A JP6858576B2 (ja) 2017-01-30 2017-01-30 半導体装置の製造方法
US15/852,479 US10121695B2 (en) 2017-01-30 2017-12-22 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017014613A JP6858576B2 (ja) 2017-01-30 2017-01-30 半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2018125349A JP2018125349A (ja) 2018-08-09
JP2018125349A5 JP2018125349A5 (enExample) 2019-12-12
JP6858576B2 true JP6858576B2 (ja) 2021-04-14

Family

ID=62980766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017014613A Active JP6858576B2 (ja) 2017-01-30 2017-01-30 半導体装置の製造方法

Country Status (2)

Country Link
US (1) US10121695B2 (enExample)
JP (1) JP6858576B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109729639B (zh) * 2018-12-24 2020-11-20 奥特斯科技(重庆)有限公司 在无芯基板上包括柱体的部件承载件
CN113711347A (zh) 2019-04-15 2021-11-26 大日本印刷株式会社 贯通电极基板、电子单元、贯通电极基板的制造方法以及电子单元的制造方法
CN111554639A (zh) * 2020-04-02 2020-08-18 珠海越亚半导体股份有限公司 嵌入式芯片封装及其制造方法
CN111668170B (zh) * 2020-06-05 2025-07-08 矽力杰半导体技术(杭州)有限公司 固晶结构及其制造方法
JP7449816B2 (ja) * 2020-08-21 2024-03-14 CIG Photonics Japan株式会社 光モジュール
CN114975610B (zh) * 2021-02-25 2026-01-16 广东美的白色家电技术创新中心有限公司 半导体器件组件及集成电路、电器设备
EP4099807A1 (en) * 2021-06-01 2022-12-07 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Component carrier interconnection and manufacturing method
CN114220785A (zh) * 2021-12-16 2022-03-22 华天科技(南京)有限公司 一种具有高可靠度焊点结构的散热倒装封装结构及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0623352B2 (ja) * 1986-02-21 1994-03-30 東芝ケミカル株式会社 半導体素子接着用ペ−スト
JP2002076055A (ja) * 2000-08-22 2002-03-15 Hitachi Ltd 半導体装置の実装方法および実装構造
JP2005039240A (ja) * 2003-06-24 2005-02-10 Ngk Spark Plug Co Ltd 中継基板、半導体素子付き中継基板、中継基板付き基板、半導体素子と中継基板と基板とからなる構造体
JP4492233B2 (ja) * 2003-11-27 2010-06-30 株式会社デンソー 半導体チップの実装構造および半導体チップの実装方法
US8963340B2 (en) * 2011-09-13 2015-02-24 International Business Machines Corporation No flow underfill or wafer level underfill and solder columns
CN106233462B (zh) * 2014-04-14 2019-07-19 瑞萨电子株式会社 半导体器件以及半导体器件的制造方法
JP6467797B2 (ja) 2014-07-14 2019-02-13 凸版印刷株式会社 配線基板、配線基板を用いた半導体装置およびこれらの製造方法
JP6510897B2 (ja) * 2015-06-09 2019-05-08 新光電気工業株式会社 配線基板及びその製造方法と電子部品装置

Also Published As

Publication number Publication date
US20180218941A1 (en) 2018-08-02
US10121695B2 (en) 2018-11-06
JP2018125349A (ja) 2018-08-09

Similar Documents

Publication Publication Date Title
JP6858576B2 (ja) 半導体装置の製造方法
JP6803249B2 (ja) 配線基板及びその製造方法
JP4182140B2 (ja) チップ内蔵基板
JP6566879B2 (ja) 電子部品内蔵基板
JP6161437B2 (ja) 配線基板及びその製造方法、半導体パッケージ
JPWO2007069606A1 (ja) チップ内蔵基板の製造方法
US10720392B2 (en) Wiring substrate
JP6705718B2 (ja) 配線基板及びその製造方法
JP2010245280A (ja) 配線基板の製造方法及び配線基板
JP6761064B2 (ja) 配線基板及びその製造方法
JP4182144B2 (ja) チップ内蔵基板の製造方法
JP2017034059A (ja) プリント配線板、半導体パッケージおよびプリント配線板の製造方法
US20190261513A1 (en) Wiring substrate
JP5007164B2 (ja) 多層配線板及び多層配線板製造方法
US20120218721A1 (en) Method of manufacturing component built-in module and component built-in module
JP5436837B2 (ja) 半導体装置内蔵基板の製造方法
JP2007227586A (ja) 半導体素子内蔵基板及びその製造方法
JP4994099B2 (ja) 実装構造体の製造方法
JP2008181920A (ja) 電子部品内蔵基板とこれを用いた電子機器、およびその製造方法
US12482734B2 (en) Laminated wiring board
US20230413452A1 (en) Laminated wiring board
JP2004221525A (ja) Icパッケージ及びその製造方法
JP2018037633A (ja) プリント配線板およびプリント配線板の製造方法
JP2023142048A (ja) 配線基板の製造方法
JP2004327742A (ja) 半田バンプ付き配線基板の製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191028

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191028

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200819

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200825

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201012

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20201117

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210114

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20210114

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20210127

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20210202

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210309

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210324

R150 Certificate of patent or registration of utility model

Ref document number: 6858576

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150