JP6857488B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP6857488B2 JP6857488B2 JP2016231602A JP2016231602A JP6857488B2 JP 6857488 B2 JP6857488 B2 JP 6857488B2 JP 2016231602 A JP2016231602 A JP 2016231602A JP 2016231602 A JP2016231602 A JP 2016231602A JP 6857488 B2 JP6857488 B2 JP 6857488B2
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Description
<3相モータシステムの構成例>
図1は、例えば、鉄道車両に適用される3相モータシステム(電力変換装置)の一例を示すブロック図である。図1に示すように、鉄道車両には、架線RTからパンタグラフPGを介して電力が供給される。このとき、架線RTから供給される高圧交流電圧は、例えば、25kVまたは15kVである。架線RTからパンタグラフPGを介して鉄道車両に供給される高圧交流電圧は、絶縁型の主変圧器MTRによって、例えば、3.3kVの交流電圧に降圧される。この降圧された交流電圧は、コンバータCONによって直流電圧(3.3kV)に順変換される。その後、コンバータCONによって変換された直流電圧は、キャパシタCLを介してインバータINVによって、それぞれ位相が120度ずれた3相交流電圧に変換される。そして、インバータINVで変換された3相交流電圧は、3相モータMTに供給される。この結果、3相モータMTが駆動することにより、車輪WHLを回転させることができ、これによって、鉄道車両を走行させることができる。
まず、SiC−pn接合ダイオードでは、メサ構造が採用されているが、この理由について説明する。SiC−pn接合ダイオードでは、整流特性を実現するために、pn接合を形成する必要がある。このとき、例えば、図3に示すように、n型半導体層であるドリフト層(エピタキシャル層)EPIの表面領域の一部に、イオン注入法を使用して、p型不純物を導入することにより、p型半導体領域である電荷注入領域EIRを形成する技術が考えられる。この技術の場合、ドリフト層EPIと電荷注入領域EIRとの境界領域にpn接合が形成されることになる。ところが、イオン注入法を使用すると、注入エネルギーによって、ドリフト層EPIの結晶構造が破壊されてしまう。そして、通常、イオン注入法を実施した後には、結晶構造の回復を図るため、活性化アニールが実施されるが、SiCでは、この活性化アニールを実施しても、SiCの結晶構造を回復するのは困難である実情が存在する。特に、電荷注入領域EIRは、正孔をドリフト層EPI内に注入するための領域であるが、電荷注入領域EIRの結晶構造が破壊されていると、正孔のライフタイムが短くなる。したがって、電荷注入領域EIRからドリフト層EPIに正孔が注入される前に正孔の一部が消滅してしまうおそれがある。このことは、ドリフト層EPIに注入される正孔の量が少なくなることを意味し、これによって、ドリフト層EPI内における正孔と電子との対消滅が少なくなることを意味する。これは、SiC−pn接合ダイオードの順方向電流が少なくなることを意味し、言い換えれば、SiC−pn接合ダイオードのオン抵抗が大きくなってしまうことを意味する。このことから、特に、電荷注入領域EIRをイオン注入法で形成する技術では、SiC−pn接合ダイオードの性能向上を図ることが困難になるのである。
次に、上述したメサ構造MSを前提とした本実施の形態1におけるSiC−pn接合ダイオードのデバイス構造について、図面を参照しながら説明することにする。
続いて、本実施の形態1における特徴点について説明する。本実施の形態1における特徴点は、例えば、図7において、リーク低減領域LRに導入されている導電型不純物(p型不純物)の不純物濃度が、電界緩和領域ERRに導入されている導電型不純物(p型不純物)の不純物濃度よりも大きく、かつ、抵抗低減領域RRに導入されている導電型不純物(p型不純物)の不純物濃度よりも小さくなっている点にある。
次に、本実施の形態1における特徴点によれば、順方向電流を通電し続けても、順方向電圧の増加(オン抵抗の増加に相当)を抑制することができることの検証結果について説明する。図12は、SiC−pn接合ダイオードに順方向電流を流し続けた場合における順方向電圧の挙動を示すグラフである。図12において、横軸は、順方向電流の通電時間を示しており、縦軸は、順方向電圧の値を示している。
本実施の形態1におけるSiC−pn接合ダイオードは、上記のように構成されており、以下に、その製造方法について、図面を参照しながら説明する。
次に、実施の形態1における変形例1について説明する。図16は、本変形例1におけるSiC−pn接合ダイオードのデバイス構造を示す断面図である。図16において、本変形例1におけるSiC−pn接合ダイオードでは、炭化珪素基板1Sとドリフト層EPIとの間にBPD低減層BRLが形成されている点が、例えば、図7に示す実施の形態1におけるSiC−pn接合ダイオードと相違する点である。
続いて、本実施の形態1における変形例2について説明する。図17は、本変形例2におけるSiC−pn接合ダイオードのデバイス構造を示す平面図であり、図18は、本変形例2におけるSiC−pn接合ダイオードのデバイス構造の一部を示す断面図である。
次に、本実施の形態1における変形例3について説明する。図19は、本変形例3におけるSiC−pn接合ダイオードのデバイス構造を示す平面図であり、図20は、本変形例3におけるSiC−pn接合ダイオードのデバイス構造の一部を示す断面図である。
<ゲートターンオフサイリスタのデバイス構造>
前記実施の形態1では、SiC−pn接合ダイオードに技術的思想を適用する例について説明したが、本実施の形態2では、ゲートターンオフサイリスタ(以下、SiC−GTOという)に技術的思想を適用する例について説明する。
炭化珪素基板と、
前記炭化珪素基板上に形成され、かつ、第2導電型のフィールドストップ層と、
前記フィールドストップ層上に形成され、かつ、前記第2導電型のドリフト層と、
前記ドリフト層上に形成され、かつ、前記第2導電型とは反対の導電型である第1導電型のベース層と、
前記ベース層の表面に形成されたメサ構造と、
前記メサ構造の外側に形成されたゲート領域と、
を備え、
前記メサ構造には、
前記ベース層上に形成され、かつ、前記第2導電型の電荷注入領域と、
前記電荷注入領域上に形成され、かつ、前記第2導電型の抵抗低減領域と、
前記メサ構造の側壁部に形成され、かつ、前記抵抗低減領域と前記電荷注入領域と前記ベース層とに接し、かつ、前記第2導電型のリーク低減領域と、
が形成されている、半導体装置であって、
前記リーク低減領域の不純物濃度は、前記抵抗低減領域の不純物濃度よりも小さい、半導体装置。
BRL BPD低減層
EIR 電荷注入領域
EPI ドリフト層
ERR 電界緩和領域
IF 絶縁膜
LR リーク低減領域
MS メサ構造
RR 抵抗低減領域
Claims (2)
- (a)第1導電型のドリフト層と、前記ドリフト層上に形成され、かつ、前記第1導電型とは反対の導電型である第2導電型の半導体層とが形成された炭化珪素基板を用意する工程、
(b)前記半導体層と前記ドリフト層の一部とをエッチングすることにより、前記炭化珪素基板に、前記半導体層を加工して形成された電荷注入領域と、前記電荷注入領域と接する前記ドリフト層の一部とを含むメサ構造を形成する工程、
(c)前記(b)工程の後、前記メサ構造内の上部に前記電荷注入領域と接する前記第2導電型の抵抗低減領域を形成する工程、
(d)前記(b)工程の後、前記メサ構造内の側壁部に前記電荷注入領域と接する前記第2導電型のリーク低減領域を形成する工程、
(e)前記(b)工程の後、前記ドリフト層の表面領域のうち、前記メサ構造の外側の外縁領域に前記第2導電型の電界緩和領域を形成する工程、
を備える、半導体装置の製造方法であって、
前記リーク低減領域の不純物濃度は、前記電界緩和領域の不純物濃度よりも大きく、かつ、前記抵抗低減領域の不純物濃度よりも小さい、半導体装置の製造方法。 - 請求項1に記載の半導体装置の製造方法において、
前記(c)工程と前記(d)工程と前記(e)工程のそれぞれは、イオン注入法を使用する、半導体装置の製造方法。
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