JP6826910B2 - 多孔質体合成用多重管バーナー及び多孔質体合成装置 - Google Patents
多孔質体合成用多重管バーナー及び多孔質体合成装置 Download PDFInfo
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- JP6826910B2 JP6826910B2 JP2017030632A JP2017030632A JP6826910B2 JP 6826910 B2 JP6826910 B2 JP 6826910B2 JP 2017030632 A JP2017030632 A JP 2017030632A JP 2017030632 A JP2017030632 A JP 2017030632A JP 6826910 B2 JP6826910 B2 JP 6826910B2
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- glass tube
- tube
- gas
- glass
- porous body
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- 230000015572 biosynthetic process Effects 0.000 title claims description 8
- 238000003786 synthesis reaction Methods 0.000 title claims description 8
- 239000011521 glass Substances 0.000 claims description 175
- 230000002194 synthesizing effect Effects 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 239000007789 gas Substances 0.000 description 108
- 239000000463 material Substances 0.000 description 19
- 239000002994 raw material Substances 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 7
- 229910003902 SiCl 4 Inorganic materials 0.000 description 5
- 230000002411 adverse Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- -1 CH 4 Chemical class 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/08—Recessed or protruding ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/66—Relative motion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
2 ターゲットロッド
3 多孔質母材(多孔質体)
10 多重管バーナー
11 第1ガラスチューブ
12 第2ガラスチューブ
13 第3ガラスチューブ
14 第4ガラスチューブ
15 第5ガラスチューブ
16 第6ガラスチューブ
17 第7ガラスチューブ
18 第8ガラスチューブ
21 ガス導入管
22,23,24,25,26,27,28 ガス導入枝管
22a,22b 接続部
Claims (5)
- 長手方向に対して垂直な断面が略円形状のガラス管が3本以上、互いに同心円状に配置された多孔質体合成用多重管バーナーであって、
前記3本以上のガラス管のうち、第1ガラス管と、前記第1ガラス管の外周側に設けられる第2ガラス管とが、ガス導入側において互いに接続され、
前記第2ガラス管における前記第1ガラス管との接続部の近傍の肉厚が、前記第2ガラス管におけるガス噴出側を含む前記第1ガラス管との接続部の近傍以外の肉厚よりも大きく、
前記第2ガラス管の外周側に前記第2ガラス管と同心円状に第3ガラス管が設けられ、前記第2ガラス管と前記第3ガラス管とが、ガス導入側において互いに接続され、前記第2ガラス管における、前記第1ガラス管との接続部から前記第3ガラス管との接続部までの肉厚が、前記ガス噴出側の肉厚よりも大きい
ことを特徴とする多孔質体合成用多重管バーナー。 - 前記第2ガラス管における前記第1ガラス管との接続部の近傍の肉厚が、前記ガス噴出側における前記第2ガラス管の肉厚の2倍以上6倍以下である
ことを特徴とする請求項1に記載の多孔質体合成用多重管バーナー。 - 前記第1ガラス管が中心に配置されている
ことを特徴とする請求項1または2に記載の多孔質体合成用多重管バーナー。 - 前記第2ガラス管としての第nガラスチューブ(nは、3以上の整数)における前記第1ガラス管としての第(n−1)ガラスチューブ(nは、3以上の整数)との接続部の肉厚が、前記第nガラスチューブのガス噴出側の肉厚より大きい
ことを特徴とする請求項1〜3のいずれか1項に記載の多孔質体合成用多重管バーナー。 - 請求項1〜4のいずれか1項に記載の多孔質体合成用多重管バーナーを有する
ことを特徴とする多孔質体合成装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017030632A JP6826910B2 (ja) | 2017-02-22 | 2017-02-22 | 多孔質体合成用多重管バーナー及び多孔質体合成装置 |
PCT/JP2018/001747 WO2018155036A1 (ja) | 2017-02-22 | 2018-01-22 | 多孔質体合成用多重管バーナー及び多孔質体合成装置 |
EP18757148.4A EP3587362B1 (en) | 2017-02-22 | 2018-01-22 | Multi-pipe burner for synthesizing porous materials, and porous material synthesis device |
CN201880010249.7A CN110248900A (zh) | 2017-02-22 | 2018-01-22 | 多孔体合成用多重管燃烧器及多孔体合成装置 |
US16/540,174 US11524917B2 (en) | 2017-02-22 | 2019-08-14 | Multiple tube burner for synthesizing porous material and apparatus for synthesizing porous material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017030632A JP6826910B2 (ja) | 2017-02-22 | 2017-02-22 | 多孔質体合成用多重管バーナー及び多孔質体合成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018135238A JP2018135238A (ja) | 2018-08-30 |
JP6826910B2 true JP6826910B2 (ja) | 2021-02-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017030632A Active JP6826910B2 (ja) | 2017-02-22 | 2017-02-22 | 多孔質体合成用多重管バーナー及び多孔質体合成装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11524917B2 (ja) |
EP (1) | EP3587362B1 (ja) |
JP (1) | JP6826910B2 (ja) |
CN (1) | CN110248900A (ja) |
WO (1) | WO2018155036A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109206006B (zh) * | 2017-06-29 | 2021-08-03 | 中天科技精密材料有限公司 | 喷灯及芯棒的制造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5743859Y2 (ja) * | 1978-07-08 | 1982-09-28 | ||
JPS5513949A (en) | 1978-07-18 | 1980-01-31 | Toshiba Corp | Coil in transformer |
US4199337A (en) * | 1978-10-06 | 1980-04-22 | International Telephone And Telegraph Corporation | Method of fabricating high strength optical preforms |
JPS61236625A (ja) * | 1985-04-10 | 1986-10-21 | Furukawa Electric Co Ltd:The | 光学ガラス製造用バ−ナのパイプ材 |
DE19527451C2 (de) | 1995-07-27 | 1998-06-04 | Heraeus Quarzglas | Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeigneter Brenner |
JPH09100133A (ja) * | 1995-10-04 | 1997-04-15 | Furukawa Electric Co Ltd:The | 光ファイバ用多孔質ガラス母材の製造方法 |
JPH1095623A (ja) * | 1996-09-19 | 1998-04-14 | Sumitomo Electric Ind Ltd | 多孔質ガラス母材の製造方法及びその製造用バーナ |
DE19725955C1 (de) | 1997-06-19 | 1999-01-21 | Heraeus Quarzglas | Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeignete Vorrichtung |
JP2000327341A (ja) * | 1999-05-11 | 2000-11-28 | Shin Etsu Chem Co Ltd | 多孔質ガラス母材製造用多重管バーナおよびこれを用いた多孔質ガラス母材の製造方法並びに製造装置 |
DE10018857C1 (de) * | 2000-04-14 | 2001-11-29 | Heraeus Quarzglas | Vorrichtung zur Herstellung eines Quarzglaskörpers |
JP2003212560A (ja) | 2002-01-18 | 2003-07-30 | Sumitomo Electric Ind Ltd | ガラス微粒子堆積体製造方法 |
JP2003246627A (ja) * | 2002-02-26 | 2003-09-02 | Sumitomo Electric Ind Ltd | 石英バーナー |
EP1496024A1 (en) * | 2003-07-07 | 2005-01-12 | Sumitomo Electric Industries, Ltd. | Method of producing glass-particle-deposited body and glass-particle-synthesizing burner |
US8789393B2 (en) * | 2004-11-29 | 2014-07-29 | The Furukawa Electric Co., Ltd. | Optical fiber preform, method of manufacturing optical fiber preform, and method of manufacturing optical fiber |
JP4498917B2 (ja) * | 2004-12-28 | 2010-07-07 | 株式会社フジクラ | ガラス棒状体の製造方法 |
JP5236526B2 (ja) * | 2008-02-27 | 2013-07-17 | 信越化学工業株式会社 | 多孔質ガラス母材製造用バーナー |
JP5359573B2 (ja) * | 2009-06-05 | 2013-12-04 | 住友電気工業株式会社 | 多重管バーナの製造方法及び多重管バーナ |
JP5414611B2 (ja) * | 2010-04-23 | 2014-02-12 | 信越化学工業株式会社 | 多孔質ガラス母材製造用バーナ |
-
2017
- 2017-02-22 JP JP2017030632A patent/JP6826910B2/ja active Active
-
2018
- 2018-01-22 EP EP18757148.4A patent/EP3587362B1/en active Active
- 2018-01-22 CN CN201880010249.7A patent/CN110248900A/zh active Pending
- 2018-01-22 WO PCT/JP2018/001747 patent/WO2018155036A1/ja unknown
-
2019
- 2019-08-14 US US16/540,174 patent/US11524917B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3587362A4 (en) | 2020-12-09 |
CN110248900A (zh) | 2019-09-17 |
US20190375671A1 (en) | 2019-12-12 |
JP2018135238A (ja) | 2018-08-30 |
EP3587362B1 (en) | 2023-09-13 |
EP3587362A1 (en) | 2020-01-01 |
US11524917B2 (en) | 2022-12-13 |
WO2018155036A1 (ja) | 2018-08-30 |
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