JP6822767B2 - 半導体製造チャンバ内の消耗部品の余寿命の推定 - Google Patents

半導体製造チャンバ内の消耗部品の余寿命の推定 Download PDF

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Publication number
JP6822767B2
JP6822767B2 JP2016013176A JP2016013176A JP6822767B2 JP 6822767 B2 JP6822767 B2 JP 6822767B2 JP 2016013176 A JP2016013176 A JP 2016013176A JP 2016013176 A JP2016013176 A JP 2016013176A JP 6822767 B2 JP6822767 B2 JP 6822767B2
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trigger
consumable
edge ring
chamber
consumable part
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JP2016154224A5 (https=
JP2016154224A (ja
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リチャード・アラン・ゴットショ
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Lam Research Corp
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Lam Research Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/56—Investigating resistance to wear or abrasion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
JP2016013176A 2015-01-28 2016-01-27 半導体製造チャンバ内の消耗部品の余寿命の推定 Active JP6822767B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021001266A JP7326359B2 (ja) 2015-01-28 2021-01-07 半導体製造チャンバ内の消耗部品の余寿命の推定

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201562109016P 2015-01-28 2015-01-28
US62/109,016 2015-01-28
US14/961,756 US10041868B2 (en) 2015-01-28 2015-12-07 Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber
US14/961,756 2015-12-07

Related Child Applications (1)

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JP2021001266A Division JP7326359B2 (ja) 2015-01-28 2021-01-07 半導体製造チャンバ内の消耗部品の余寿命の推定

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JP2016154224A JP2016154224A (ja) 2016-08-25
JP2016154224A5 JP2016154224A5 (https=) 2019-03-07
JP6822767B2 true JP6822767B2 (ja) 2021-01-27

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JP2016013176A Active JP6822767B2 (ja) 2015-01-28 2016-01-27 半導体製造チャンバ内の消耗部品の余寿命の推定
JP2021001266A Active JP7326359B2 (ja) 2015-01-28 2021-01-07 半導体製造チャンバ内の消耗部品の余寿命の推定

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Country Link
US (2) US10041868B2 (https=)
EP (1) EP3051572A1 (https=)
JP (2) JP6822767B2 (https=)
KR (1) KR102619257B1 (https=)
CN (2) CN105823781B (https=)
SG (1) SG10201600630PA (https=)
TW (1) TWI723004B (https=)

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Also Published As

Publication number Publication date
US20180372605A1 (en) 2018-12-27
TW201640556A (zh) 2016-11-16
TWI723004B (zh) 2021-04-01
US10041868B2 (en) 2018-08-07
KR20160092940A (ko) 2016-08-05
CN110349827A (zh) 2019-10-18
KR102619257B1 (ko) 2023-12-28
CN105823781A (zh) 2016-08-03
JP7326359B2 (ja) 2023-08-15
JP2021061442A (ja) 2021-04-15
JP2016154224A (ja) 2016-08-25
SG10201600630PA (en) 2016-08-30
US20160216185A1 (en) 2016-07-28
EP3051572A1 (en) 2016-08-03
CN110349827B (zh) 2023-08-15
US10697874B2 (en) 2020-06-30
CN105823781B (zh) 2019-06-21

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