JP6751775B2 - 基板処理装置、基板処理方法および記憶媒体 - Google Patents
基板処理装置、基板処理方法および記憶媒体 Download PDFInfo
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Description
続いて、基板処理システム1が含む基板処理装置10の構成を例示する。基板処理装置10は、表面に膜Fが形成されたウェハWを処理対象とし、膜FのうちウェハWの周縁部We(周縁の近傍部分)に位置する部分を除去する処理を行う。膜Fの具体例としては、たとえばSiNを含有する保護膜などが挙げられる。
以下、基板処理方法の一例として、処理ユニット16により実行される基板処理手順を例示する。上記基板処理手順は、制御装置4が実行する制御手順に従って自動的に実行される。
以上に説明したように、基板処理装置10は、ウェハWを保持して回転させる回転保持部21と、回転保持部21により保持されたウェハWの周縁部Weに処理液を供給する液供給部22と、周縁部Weにおける温度分布を検出するセンサ23と、温度分布に基づいて、周縁部Weのうち処理液が付着している領域と付着していない領域との境界部B1,B2を検出することを実行するように構成された制御装置4と、を備える。
(付記1)
基板を保持して回転させる回転保持部と、
前記回転保持部により保持された前記基板の周縁部に処理液を供給する液供給部と、
前記周縁部における温度分布を検出するセンサと、
前記温度分布に基づいて、前記周縁部のうち前記処理液が付着している領域と付着していない領域との境界部を検出することを実行するように構成された制御装置と、を備える基板処理装置。
(付記2)
前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大する温調部をさらに備える、付記1記載の基板処理装置。
(付記3)
前記温調部は、前記基板を加熱する加熱部を含む、付記2記載の基板処理装置。
(付記4)
前記センサは、前記処理液が前記基板に到達する位置の近傍において、前記基板が回転する方向に位置する領域の温度分布を検出するように設けられている、付記1〜3のいずれか一項記載の基板処理装置。
(付記5)
前記処理液が前記基板に到達する位置を調節する位置調節部をさらに備え、
前記制御装置は、
前記境界部を検出した後、前記基板に処理液を供給している間に、前記処理液が前記基板に到達する位置を前記境界部の位置に基づいて調節するように前記位置調節部を制御することをさらに実行するように構成されている、付記1〜4のいずれか一項記載の基板処理装置。
(付記6)
基板を保持して回転させることと、
回転中の前記基板の周縁部に処理液を供給することと、
前記周縁部における温度分布を検出することと、
前記温度分布に基づいて、前記周縁部のうち前記処理液が付着している領域と付着していない領域との境界部を検出することと、を含む基板処理方法。
(付記7)
前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大することをさらに含む、付記6記載の基板処理方法。
(付記8)
前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大することは、前記基板を加熱することを含む、付記7記載の基板処理方法。
(付記9)
前記周縁部における温度分布を検出することは、前記処理液が前記基板に到達する位置の近傍において、前記基板が回転する方向に位置する領域の温度分布を検出することを含む、付記6〜8のいずれか一項記載の基板処理方法。
(付記10)
前記境界部を検出した後、前記基板に処理液を供給している間に、前記処理液が前記基板に到達する位置を前記境界部の位置に基づいて調節することをさらに含む、付記6〜9のいずれか一項記載の基板処理方法。
(付記11)
付記6〜10のいずれか一項記載の基板処理方法を装置に実行させるためのプログラムを記録した、コンピュータ読み取り可能な記憶媒体。
Claims (11)
- 基板を保持して回転させる回転保持部と、
前記回転保持部により保持された前記基板の周縁部に処理液を供給する液供給部と、
前記周縁部における温度分布を検出するセンサと、
前記温度分布に基づいて、前記周縁部のうち前記処理液が付着している領域と付着していない領域との境界部を検出することを実行するように構成された制御装置と、を備える基板処理装置。 - 前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大する温調部をさらに備える、請求項1記載の基板処理装置。
- 前記温調部は、前記基板を加熱する加熱部を含む、請求項2記載の基板処理装置。
- 前記センサは、前記処理液が前記基板に到達する位置の近傍において、前記基板が回転する方向に位置する領域の温度分布を検出するように設けられている、請求項1記載の基板処理装置。
- 前記処理液が前記基板に到達する位置を調節する位置調節部をさらに備え、
前記制御装置は、
前記境界部を検出した後、前記基板に処理液を供給している間に、前記処理液が前記基板に到達する位置を前記境界部の位置に基づいて調節するように前記位置調節部を制御することをさらに実行するように構成されている、請求項1記載の基板処理装置。 - 基板を保持して回転させることと、
回転中の前記基板の周縁部に処理液を供給することと、
前記周縁部における温度分布を検出することと、
前記温度分布に基づいて、前記周縁部のうち前記処理液が付着している領域と付着していない領域との境界部を検出することと、を含む基板処理方法。 - 前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大することをさらに含む、請求項6記載の基板処理方法。
- 前記基板に付着する前の前記処理液と、前記基板との間の温度差を拡大することは、前記基板を加熱することを含む、請求項7記載の基板処理方法。
- 前記周縁部における温度分布を検出することは、前記処理液が前記基板に到達する位置の近傍において、前記基板が回転する方向に位置する領域の温度分布を検出することを含む、請求項6記載の基板処理方法。
- 前記境界部を検出した後、前記基板に処理液を供給している間に、前記処理液が前記基板に到達する位置を前記境界部の位置に基づいて調節することをさらに含む、請求項6記載の基板処理方法。
- 請求項6記載の基板処理方法を装置に実行させるためのプログラムを記録した、コンピュータ読み取り可能な記憶媒体。
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US9460944B2 (en) * | 2014-07-02 | 2016-10-04 | SCREEN Holdings Co., Ltd. | Substrate treating apparatus and method of treating substrate |
JP6254929B2 (ja) * | 2014-11-26 | 2017-12-27 | 東京エレクトロン株式会社 | 測定処理装置、基板処理システム、測定用治具、測定処理方法、及びその記憶媒体 |
US10508953B2 (en) * | 2016-12-09 | 2019-12-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication |
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KR102381239B1 (ko) | 2022-04-01 |
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