JP6746230B2 - ウェーハの製造方法 - Google Patents
ウェーハの製造方法 Download PDFInfo
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- JP6746230B2 JP6746230B2 JP2016239245A JP2016239245A JP6746230B2 JP 6746230 B2 JP6746230 B2 JP 6746230B2 JP 2016239245 A JP2016239245 A JP 2016239245A JP 2016239245 A JP2016239245 A JP 2016239245A JP 6746230 B2 JP6746230 B2 JP 6746230B2
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- Prior art keywords
- wafer
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- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000227 grinding Methods 0.000 claims description 53
- 239000007789 gas Substances 0.000 claims description 46
- 238000005247 gettering Methods 0.000 claims description 40
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 28
- 229910052786 argon Inorganic materials 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 17
- -1 argon ions Chemical class 0.000 claims description 12
- 230000001681 protective effect Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 111
- 239000010410 layer Substances 0.000 description 29
- 150000002500 ions Chemical class 0.000 description 13
- 230000036961 partial effect Effects 0.000 description 8
- 239000011810 insulating material Substances 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 239000003507 refrigerant Substances 0.000 description 5
- 229910018503 SF6 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 3
- 229960000909 sulfur hexafluoride Drugs 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- High Energy & Nuclear Physics (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Drying Of Semiconductors (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第1のガス:六フッ化硫黄(SF6)
ウェーハの上面(裏面)とガス供給プレートの下面との距離:10mm
交流電力:100W〜5KW
交流電力の周波数:13.56MHz
チャンバ内の圧力:1Pa〜200Pa
処理の時間:10秒〜10分
第2のガス:アルゴン(Ar)
ウェーハの上面(裏面)とガス供給プレートの下面との距離:50mm〜100mm
第1の交流電力:100W〜5KW
第1の交流電力の周波数:13.56MHz
第2の交流電力:100W〜5KW
第2の交流電力の周波数:2MHz
チャンバ内の圧力:1Pa〜800Pa
処理の時間:10秒〜10分
11a 表面
11b 裏面
11c ゲッタリング層
13 分割予定ライン(ストリート)
15 デバイス
21 保護部材
21a 表面
21b 裏面
31 プラズマ(ラジカル、イオン等)
33 アルゴンイオン
2 研削装置
4 チャックテーブル
4a 保持面
6 研削ユニット
8 スピンドル
10 マウント
12 研削ホイール
14 ホイール基台
16 研削砥石
22 プラズマ処理装置
24 空間
26 チャンバ
26a 側壁
26b 底壁
26c 上壁
28 開口
30 シャッター
32 開閉機構
34 排気口
36 排気ユニット
38 下部電極ユニット
40 上部電極ユニット
42 保持テーブル
44 支柱
46 開口
48 絶縁材
50,52 交流電源
54 吸引路
56 吸引源
58 絶縁材
60 電極
62 冷却流路
64 冷媒導入路
66 循環ユニット
68 冷媒排出路
70 支柱
72 ガス供給プレート
74 開口
76 絶縁材
78 昇降機構
80 支持アーム
82 ガス供給口
84 ガス供給路
86,88 ガス供給源
Claims (2)
- 表面側にデバイスを有するウェーハを加工して裏面側にゲッタリング層を備えるウェーハを製造するウェーハの製造方法であって、
該表面に貼付された保護部材を介して、凸状に湾曲した保持面を有する保持テーブルの該保持面でウェーハを保持する保持ステップと、
該保持ステップの後、該保持面の形状に沿って凸状に湾曲したウェーハの該裏面側にアルゴンガスをプラズマ化させて得られるアルゴンイオンを衝突させることで、ウェーハの該裏面側にゲッタリング層を形成するゲッタリング層形成ステップと、を備えることを特徴とするウェーハの製造方法。 - 該ゲッタリング層形成ステップの前に、第1の周波数の交流電力を供給して第1のガスをプラズマ化させることで、ウェーハの該裏面をプラズマエッチングして該裏面の研削痕又は研削歪を除去するエッチングステップを更に備え、
該ゲッタリング層形成ステップでは、該第1の周波数の交流電力と、該第1の周波数より低い第2の周波数の交流電力とを重畳させるように供給し、該アルゴンガスをプラズマ化させて得られるアルゴンイオンをウェーハの該裏面に衝突させることで、ウェーハの該裏面側にゲッタリング層を形成することを特徴とする請求項1に記載のウェーハの製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016239245A JP6746230B2 (ja) | 2016-12-09 | 2016-12-09 | ウェーハの製造方法 |
TW106137926A TW201826369A (zh) | 2016-12-09 | 2017-11-02 | 晶圓的製造方法 |
KR1020170165054A KR20180066852A (ko) | 2016-12-09 | 2017-12-04 | 웨이퍼의 제조 방법 |
CN201711257763.4A CN108231577B (zh) | 2016-12-09 | 2017-12-04 | 晶片的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016239245A JP6746230B2 (ja) | 2016-12-09 | 2016-12-09 | ウェーハの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018098286A JP2018098286A (ja) | 2018-06-21 |
JP6746230B2 true JP6746230B2 (ja) | 2020-08-26 |
Family
ID=62633058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016239245A Active JP6746230B2 (ja) | 2016-12-09 | 2016-12-09 | ウェーハの製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6746230B2 (ja) |
KR (1) | KR20180066852A (ja) |
CN (1) | CN108231577B (ja) |
TW (1) | TW201826369A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7304708B2 (ja) * | 2019-02-15 | 2023-07-07 | 株式会社ディスコ | ウェーハの加工方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56120133A (en) * | 1980-02-26 | 1981-09-21 | Nippon Telegr & Teleph Corp <Ntt> | Gettering process method using the bending of substrate |
KR970003885B1 (ko) * | 1987-12-25 | 1997-03-22 | 도오교오 에레구토론 가부시끼 가이샤 | 에칭 방법 및 그 장치 |
JPH0461325A (ja) * | 1990-06-29 | 1992-02-27 | Tokyo Electron Ltd | 処理装置 |
JPH0824117B2 (ja) * | 1992-10-27 | 1996-03-06 | 東京エレクトロン株式会社 | プラズマ処理方法 |
JP3220619B2 (ja) * | 1995-05-24 | 2001-10-22 | 松下電器産業株式会社 | ガス伝熱プラズマ処理装置 |
JP4154067B2 (ja) * | 1999-04-06 | 2008-09-24 | 株式会社ディスコ | 研削装置 |
JP5226287B2 (ja) * | 2007-12-07 | 2013-07-03 | 株式会社ディスコ | ウェーハの研削方法 |
JP5331500B2 (ja) * | 2009-01-29 | 2013-10-30 | 株式会社ディスコ | ウエーハの処理方法 |
JP2012084780A (ja) * | 2010-10-14 | 2012-04-26 | Renesas Electronics Corp | 半導体装置の製造方法 |
JP6495086B2 (ja) * | 2015-04-24 | 2019-04-03 | 株式会社ディスコ | ウエーハの加工方法 |
-
2016
- 2016-12-09 JP JP2016239245A patent/JP6746230B2/ja active Active
-
2017
- 2017-11-02 TW TW106137926A patent/TW201826369A/zh unknown
- 2017-12-04 CN CN201711257763.4A patent/CN108231577B/zh active Active
- 2017-12-04 KR KR1020170165054A patent/KR20180066852A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN108231577A (zh) | 2018-06-29 |
KR20180066852A (ko) | 2018-06-19 |
CN108231577B (zh) | 2022-10-11 |
JP2018098286A (ja) | 2018-06-21 |
TW201826369A (zh) | 2018-07-16 |
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