JP6711509B2 - プリント回路基板、半導体パッケージ及びその製造方法 - Google Patents
プリント回路基板、半導体パッケージ及びその製造方法 Download PDFInfo
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01L21/486—Via connections through the substrate with or without pins
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
- H05K1/113—Via provided in pad; Pad over filled via
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68345—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during the manufacture of self supporting substrates
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/04—Assemblies of printed circuits
- H05K2201/049—PCB for one component, e.g. for mounting onto mother PCB
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09472—Recessed pad for surface mounting; Recessed electrode of component
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10242—Metallic cylinders
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10378—Interposers
Description
先ず、本発明の第1実施例に係るプリント回路基板について、図面を参照して具体的に説明する。ここで、参照図面に記載されなかった図面符号は、同じ構成を示す他の図面での図面符号であり得る。
以下に、製造方法の順に詳細に説明する。ここでは、上述したプリント回路基板及び図1を参照し、重複する説明を省略する。
120、220、320 絶縁層
130 第2金属層
131、231、331 回路層
150、270 ソルダレジスト層
160 ディンプル形状
170、280、390 金属ポスト
Claims (17)
- 絶縁層と、
前記絶縁層の下面に形成された回路層と、
前記回路層に接続され、前記絶縁層の下面から上面に延長して形成された金属ポストと、を含み、
前記金属ポストは、第1金属層と、前記第1金属層の一面に形成された第2金属層とを含み、
前記第1金属層は、上面から下面に行くほど直径が減少するテーパ形状を有し、前記第2金属層は、上面から下面に行くほど直径が広くなるテーパ形状を有する、
プリント回路基板。 - 前記絶縁層の上面は、前記金属ポストの側面の一部及び上面が露出するようにディンプル形状に形成された請求項1に記載のプリント回路基板。
- 前記第1金属層の下面の直径は、前記第2金属層の上面の直径よりも大きい請求項1に記載のプリント回路基板。
- 前記金属ポストは、銅または銅を含む合金で形成された請求項1に記載のプリント回路基板。
- 前記絶縁層上に、前記第1金属層が形成された領域と前記回路層とを露出させる開口部を有するソルダレジスト層をさらに形成する請求項1に記載のプリント回路基板。
- 前記回路層上に、ビルドアップ絶縁層及びビルドアップ回路層を含むビルドアップ層をさらに形成する請求項1から5のいずれか一項に記載のプリント回路基板。
- 絶縁層、前記絶縁層の下面に形成された回路層、及び前記回路層に接続され、前記絶縁層の下面から上面に延長して形成された金属ポストを含み、
前記金属ポストは、第1金属層と、前記第1金属層の一面に形成された第2金属層とを含み、
前記第1金属層は、上面から下面に行くほど直径が減少するテーパ形状を有し、前記第2金属層は、上面から下面に行くほど直径が広くなるテーパ形状を有する、プリント回路基板と、
前記プリント回路基板の上部に実装された素子と、
を含む半導体パッケージ。 - 前記素子は、外部接続端子を媒介にして前記金属ポストと接続する請求項7に記載の半導体パッケージ。
- キャリア部材の両面に金属物質層を形成するステップと、
前記金属物質層をエッチングして第1金属層を形成するステップと、
前記第1金属層が埋め込まれるように絶縁層を形成するステップと、
前記キャリア部材を分離するステップと、
前記キャリア部材から分離された絶縁層の一面に、前記第1金属層と電気的に接続するように第2金属層を形成するステップと、
前記第1金属層の側面の一部が露出するように、前記絶縁層をディンプル形状に加工するステップと、
を含むプリント回路基板の製造方法。 - 前記キャリア部材から分離された絶縁層の一面に、前記第1金属層と電気的に接続するように第2金属層を形成するステップは、
前記第2金属層が形成された前記絶縁層の一面に回路パターンを形成するステップと、
前記回路パターンが形成された絶縁層上に化学銅メッキを施すステップと、
前記化学銅メッキ上にドライフィルムを形成してエッチングするステップと、を含む請求項9に記載のプリント回路基板の製造方法。 - 前記回路パターンを形成するステップは、前記絶縁層を貫通するビアを含んで形成する請求項10に記載のプリント回路基板の製造方法。
- 前記第2金属層を形成するステップの後に、
前記絶縁層に、前記第1金属層が形成された領域と前記第2金属層とを露出させる開口部を有するソルダレジスト層を形成するステップをさらに含む請求項9から11のいずれか一項に記載のプリント回路基板の製造方法。 - 前記第2金属層を形成するステップの後に、
前記第2金属層上に、ビルドアップ回路層及びビルドアップ絶縁層を含むビルドアップ層を形成するステップをさらに含む請求項9から12のいずれか一項に記載のプリント回路基板の製造方法。 - 前記第1金属層は、上面から下面に行くほど直径が減少するテーパ形状を有し、前記第2金属層は、上面から下面に行くほど直径が広くなるテーパ形状を有する請求項9から13のいずれか一項に記載のプリント回路基板の製造方法。
- 前記第1金属層の下面の直径は、前記第2金属層の上面の直径よりも大きい請求項14に記載のプリント回路基板の製造方法。
- 前記第1金属層及び前記第2金属層は、銅または銅を含む合金で形成された請求項9から15のいずれか一項に記載のプリント回路基板の製造方法。
- 前記絶縁層をディンプル形状に加工するステップの後に、
前記露出された金属層上に表面処理工程を行うステップをさらに含む請求項9から16のいずれか一項に記載のプリント回路基板の製造方法。
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KR1020150057191A KR102472945B1 (ko) | 2015-04-23 | 2015-04-23 | 인쇄회로기판, 반도체 패키지 및 그 제조방법 |
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JP7386595B2 (ja) * | 2018-04-05 | 2023-11-27 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
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JP2012099860A (ja) * | 2012-02-06 | 2012-05-24 | Nec Corp | 金属ポストを有する配線基板、半導体装置及び半導体装置モジュール |
KR20140021910A (ko) * | 2012-08-13 | 2014-02-21 | 삼성전기주식회사 | 코어기판 및 이를 이용한 인쇄회로기판 |
TWI528517B (zh) * | 2013-03-26 | 2016-04-01 | 威盛電子股份有限公司 | 線路基板、半導體封裝結構及線路基板製程 |
KR102107033B1 (ko) * | 2013-04-30 | 2020-05-07 | 삼성전기주식회사 | 방열기판 |
JP6131135B2 (ja) * | 2013-07-11 | 2017-05-17 | 新光電気工業株式会社 | 配線基板及びその製造方法 |
JP6316609B2 (ja) * | 2014-02-05 | 2018-04-25 | 新光電気工業株式会社 | 配線基板及び半導体装置と配線基板の製造方法及び半導体装置の製造方法 |
JP6434328B2 (ja) * | 2015-02-04 | 2018-12-05 | 新光電気工業株式会社 | 配線基板及び電子部品装置とそれらの製造方法 |
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US10249503B2 (en) | 2019-04-02 |
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