JP6689981B2 - ボンディング装置 - Google Patents
ボンディング装置 Download PDFInfo
- Publication number
- JP6689981B2 JP6689981B2 JP2018532187A JP2018532187A JP6689981B2 JP 6689981 B2 JP6689981 B2 JP 6689981B2 JP 2018532187 A JP2018532187 A JP 2018532187A JP 2018532187 A JP2018532187 A JP 2018532187A JP 6689981 B2 JP6689981 B2 JP 6689981B2
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- substrate
- section
- carry
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims description 152
- 230000007246 mechanism Effects 0.000 claims description 42
- 230000007723 transport mechanism Effects 0.000 claims description 29
- 230000032258 transport Effects 0.000 description 25
- 238000000034 method Methods 0.000 description 20
- 239000004065 semiconductor Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 6
- 238000010276 construction Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7565—Means for transporting the components to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75703—Mechanical holding means
- H01L2224/75704—Mechanical holding means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75744—Suction holding means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/758—Means for moving parts
- H01L2224/75801—Lower part of the bonding apparatus, e.g. XY table
- H01L2224/75802—Rotational mechanism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15158—Shape the die mounting substrate being other than a cuboid
- H01L2924/15162—Top view
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Wire Bonding (AREA)
Description
Claims (9)
- 矩形基板、および、円形基板のいずれであっても設置可能なボンディングステージと、
前記矩形基板を、第一搬入部から前記ボンディングステージに、また、前記ボンディングステージから第一搬出部に、搬送する第一搬送機構と、
前記円形基板を、第二搬入部から前記ボンディングステージに、また、前記ボンディングステージから第二搬出部に、搬送する第二搬送機構と、
を備え、
前記第一搬送機構による第一搬送経路と、前記第二搬送機構による第二搬送経路は、一部が重複している、
ことを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置であって、
前記第一搬送機構が有効かつ前記第二搬送機構が無効の第一状態と、前記第一搬送機構が無効かつ前記第二搬送機構が有効の第二状態と、に切り替え可能である、
ことを特徴とするボンディング装置。 - 請求項2に記載のボンディング装置であって、
前記第一搬送機構は、前記矩形基板が搬送される平面経路を規定する平面搬送部を有し、
前記第二搬送機構は、前記円形基板を搬送するアーム搬送部を有し、
前記平面搬送部が移動することで、前記第一状態と前記第二状態とが切り替えられる、
ことを特徴とするボンディング装置。 - 請求項3に記載のボンディング装置であって、
前記平面搬送部は、その長手方向に延びる軸を中心として揺動して移動可能であり、
前記アーム搬送部は、昇降可能であり、
前記第一状態において、前記アーム搬送部は、降下するとともに、前記平面搬送部は、前記アーム搬送部の上方に位置し、
前記第二状態において、前記アーム搬送部は、上昇するとともに、前記平面搬送部は、前記アーム搬送部の側方に位置する、
ことを特徴とするボンディング装置。 - 請求項4に記載のボンディング装置であって、
前記平面搬送部は、前記矩形基板を前記ボンディングステージから第一搬出部に搬送する搬出平面搬送部であり、
前記アーム搬送部は、前記ボンディングステージから第一搬出部までの途中に配されている、
ことを特徴とするボンディング装置。 - 請求項5に記載のボンディング装置であって、
前記第一搬入部および第一搬出部は、前記ボンディング装置の正面向かって左右両側に設けられており、前記第一搬送経路は、左右方向に延びており、
前記第二搬入部および第二搬出部は、前記ボンディング装置の正面向かって手前側に設けられており、前記第二搬送経路は、1回以上屈曲している、
ことを特徴とするボンディング装置。 - 請求項1から5のいずれか1項に記載のボンディング装置であって、
前記円形基板は、ウエハであることを特徴とするボンディング装置。 - 請求項1から6のいずれか1項に記載のボンディング装置であって、
前記ボンディングステージは、
ベース部と、
前記ベース部に対して着脱自在であり、取り扱う基板種類に応じて択一的に選択されて前記ベース部に装着されるアダプタと、
を備えることを特徴とするボンディング装置。 - 請求項2から6のいずれか1項に記載のボンディング装置であって、
前記第二状態において前記円形基板を前記ボンディングステージに搬送する際に、前記円形基板の下面を保持する基板保持部を更に備え、
前記基板保持部は、第一状態において、前記第一搬送機構と干渉しない位置に退避することを特徴とするボンディング装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017018863 | 2017-02-03 | ||
JP2017018863 | 2017-02-03 | ||
PCT/JP2018/003386 WO2018143330A1 (ja) | 2017-02-03 | 2018-02-01 | ボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018143330A1 JPWO2018143330A1 (ja) | 2019-06-27 |
JP6689981B2 true JP6689981B2 (ja) | 2020-04-28 |
Family
ID=63040795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018532187A Active JP6689981B2 (ja) | 2017-02-03 | 2018-02-01 | ボンディング装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11410960B2 (ja) |
JP (1) | JP6689981B2 (ja) |
TW (1) | TWI668789B (ja) |
WO (1) | WO2018143330A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI797461B (zh) * | 2019-07-26 | 2023-04-01 | 日商新川股份有限公司 | 封裝裝置 |
CN112447555B (zh) * | 2019-08-29 | 2024-05-14 | 芝浦机械电子装置株式会社 | 电子零件的安装装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3552574B2 (ja) | 1999-03-09 | 2004-08-11 | 松下電器産業株式会社 | 導電性ボールの搭載装置および搭載方法 |
JP3731513B2 (ja) * | 2001-09-06 | 2006-01-05 | 松下電器産業株式会社 | 表示パネルの組立装置 |
JP4361572B2 (ja) * | 2007-02-28 | 2009-11-11 | 株式会社新川 | ボンディング装置及び方法 |
CA2681367C (en) * | 2007-03-19 | 2016-08-16 | Boston Scientific Neuromodulation Corporation | Mri and rf compatible leads and related methods of operating and fabricating leads |
US8387674B2 (en) * | 2007-11-30 | 2013-03-05 | Taiwan Semiconductor Manufacturing Comany, Ltd. | Chip on wafer bonder |
JP2009170587A (ja) | 2008-01-15 | 2009-07-30 | Seiko Instruments Inc | 電子デバイスの製造方法及びその製造装置 |
JP5608829B1 (ja) | 2014-03-31 | 2014-10-15 | アルファーデザイン株式会社 | 部品実装装置 |
KR102295986B1 (ko) * | 2014-12-01 | 2021-08-31 | 삼성디스플레이 주식회사 | 칩 본딩 장치 및 칩 본딩 방법 |
-
2018
- 2018-01-31 TW TW107103363A patent/TWI668789B/zh active
- 2018-02-01 JP JP2018532187A patent/JP6689981B2/ja active Active
- 2018-02-01 WO PCT/JP2018/003386 patent/WO2018143330A1/ja active Application Filing
- 2018-02-01 US US16/622,296 patent/US11410960B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW201836043A (zh) | 2018-10-01 |
JPWO2018143330A1 (ja) | 2019-06-27 |
US11410960B2 (en) | 2022-08-09 |
US20200286850A1 (en) | 2020-09-10 |
TWI668789B (zh) | 2019-08-11 |
WO2018143330A1 (ja) | 2018-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9302395B2 (en) | Conveying robot | |
JP5027210B2 (ja) | 電子構成要素、詳細には半導体チップを基板に配置するための方法および装置 | |
JP6689981B2 (ja) | ボンディング装置 | |
JP5189370B2 (ja) | 基板交換装置及び基板処理装置並びに基板検査装置 | |
WO2007097147A1 (ja) | 搬送装置及び搬送方法 | |
TW201350411A (zh) | 基板之垂直搬送裝置 | |
KR20190052126A (ko) | 배치 본딩 장치 및 본딩 방법 | |
JPH09289241A (ja) | ウェーハ搬送装置 | |
KR20170006343A (ko) | 플립칩 본딩 장치 및 방법 | |
WO2019103051A1 (ja) | 電子部品取付装置及び電子装置の製造方法 | |
US20050217217A1 (en) | Turn-over mechanism for packaging asymmetrically shaped articles | |
JP5026235B2 (ja) | 基板切断装置 | |
JP2012248778A (ja) | ダイボンダ及びボンディング方法 | |
WO2020235535A1 (ja) | 電子部品取付装置、電子装置の製造方法及びストラップの製造方法 | |
JP5930519B2 (ja) | 加工装置 | |
JP5091031B2 (ja) | 自動装着機および構成素子をハンドリングするための方法 | |
JP2006024643A (ja) | 基板処理装置 | |
KR101180736B1 (ko) | 스크린 프린팅 시스템 및 이를 이용한 스크린 프린팅 방법 | |
JP2003077982A (ja) | 搬送装置 | |
JP5064181B2 (ja) | 基板切断装置 | |
JP2022103995A (ja) | テープマウンタ | |
JP5909105B2 (ja) | 板状部材を搬送するエンドエフェクタ及び該エンドエフェクタを備える基板搬送用ロボット | |
KR102528839B1 (ko) | 트랜스퍼 및 이송 시스템 | |
KR102528838B1 (ko) | 트랜스퍼 및 이송 시스템 | |
JP3900269B2 (ja) | 部品実装方法及び部品実装装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190201 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20191114 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200331 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200408 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6689981 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |