JP6688732B2 - 多入射角半導体計測システム及び方法 - Google Patents

多入射角半導体計測システム及び方法 Download PDF

Info

Publication number
JP6688732B2
JP6688732B2 JP2016542854A JP2016542854A JP6688732B2 JP 6688732 B2 JP6688732 B2 JP 6688732B2 JP 2016542854 A JP2016542854 A JP 2016542854A JP 2016542854 A JP2016542854 A JP 2016542854A JP 6688732 B2 JP6688732 B2 JP 6688732B2
Authority
JP
Japan
Prior art keywords
irradiation
azimuth
illumination
collection
incidence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016542854A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016536609A (ja
JP2016536609A5 (enExample
Inventor
デイヴィッド ワイ ワン
デイヴィッド ワイ ワン
クラウス フロック
クラウス フロック
ローレンス ディー ロッター
ローレンス ディー ロッター
シャンカー クリシュナン
シャンカー クリシュナン
ヨハネス ディー デフェール
ヨハネス ディー デフェール
キャタリン フィリップ
キャタリン フィリップ
グレゴリー ブラディ
グレゴリー ブラディ
ムザミル アライン
ムザミル アライン
アンドレイ シェグロフ
アンドレイ シェグロフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/043,783 external-priority patent/US9116103B2/en
Application filed by KLA Corp filed Critical KLA Corp
Publication of JP2016536609A publication Critical patent/JP2016536609A/ja
Publication of JP2016536609A5 publication Critical patent/JP2016536609A5/ja
Application granted granted Critical
Publication of JP6688732B2 publication Critical patent/JP6688732B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • H10P14/6538—
    • H10P34/42—
    • H10P74/203—
    • H10P74/27—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Toxicology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2016542854A 2013-09-16 2014-09-15 多入射角半導体計測システム及び方法 Active JP6688732B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361878561P 2013-09-16 2013-09-16
US61/878,561 2013-09-16
US14/043,783 2013-10-01
US14/043,783 US9116103B2 (en) 2013-01-14 2013-10-01 Multiple angles of incidence semiconductor metrology systems and methods
PCT/US2014/055666 WO2015039031A1 (en) 2013-09-16 2014-09-15 Multiple angles of incidence semiconductor metrology systems and methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020068405A Division JP2020128986A (ja) 2013-09-16 2020-04-06 多入射角半導体計測システム及び方法

Publications (3)

Publication Number Publication Date
JP2016536609A JP2016536609A (ja) 2016-11-24
JP2016536609A5 JP2016536609A5 (enExample) 2017-10-26
JP6688732B2 true JP6688732B2 (ja) 2020-04-28

Family

ID=52666379

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2016542854A Active JP6688732B2 (ja) 2013-09-16 2014-09-15 多入射角半導体計測システム及び方法
JP2020068405A Pending JP2020128986A (ja) 2013-09-16 2020-04-06 多入射角半導体計測システム及び方法
JP2022043887A Pending JP2022079538A (ja) 2013-09-16 2022-03-18 多入射角半導体計測システム及び方法
JP2022183419A Pending JP2023014136A (ja) 2013-09-16 2022-11-16 多入射角半導体計測システム及び方法
JP2024212169A Pending JP2025026544A (ja) 2013-09-16 2024-12-05 多入射角半導体計測システム及び方法
JP2025027104A Pending JP2025081595A (ja) 2013-09-16 2025-02-21 多入射角半導体計測システム及び方法

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2020068405A Pending JP2020128986A (ja) 2013-09-16 2020-04-06 多入射角半導体計測システム及び方法
JP2022043887A Pending JP2022079538A (ja) 2013-09-16 2022-03-18 多入射角半導体計測システム及び方法
JP2022183419A Pending JP2023014136A (ja) 2013-09-16 2022-11-16 多入射角半導体計測システム及び方法
JP2024212169A Pending JP2025026544A (ja) 2013-09-16 2024-12-05 多入射角半導体計測システム及び方法
JP2025027104A Pending JP2025081595A (ja) 2013-09-16 2025-02-21 多入射角半導体計測システム及び方法

Country Status (6)

Country Link
EP (3) EP3624174B1 (enExample)
JP (6) JP6688732B2 (enExample)
KR (2) KR102216201B1 (enExample)
CN (1) CN105051877B (enExample)
IL (2) IL239666B (enExample)
WO (1) WO2015039031A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10309907B2 (en) * 2015-03-04 2019-06-04 Kla-Tencor Corporation All reflective wafer defect inspection and review systems and methods
JP6448528B2 (ja) * 2015-12-24 2019-01-09 株式会社目白６７ エリプソメータ
US10215693B2 (en) * 2016-09-29 2019-02-26 Kla-Tencor Corporation Infrared spectroscopic reflectometer for measurement of high aspect ratio structures
EP3333632A1 (en) * 2016-12-08 2018-06-13 ASML Netherlands B.V. Metrology apparatus
US10444161B2 (en) * 2017-04-05 2019-10-15 Kla-Tencor Corporation Systems and methods for metrology with layer-specific illumination spectra
CN109425619B (zh) * 2017-08-31 2021-12-28 深圳中科飞测科技股份有限公司 光学测量系统及方法
US10551166B2 (en) * 2017-10-11 2020-02-04 Kla-Tencor Corporation Optical measurement of a highly absorbing film layer over highly reflective film stacks
KR102248379B1 (ko) * 2019-06-20 2021-05-06 주식회사 이솔 반도체 소자의 결함 검사장치.
CN112213272B (zh) * 2019-07-10 2024-01-12 中微半导体设备(上海)股份有限公司 一种光谱检测设备、终点检测系统和方法
WO2021068232A1 (en) * 2019-10-12 2021-04-15 Yangtze Memory Technologies Co., Ltd. Method for detecting defects in deep features
US11226234B2 (en) * 2020-01-22 2022-01-18 Applied Materials, Inc. Spectrum shaping devices and techniques for optical characterization applications
CN113048895B (zh) * 2021-03-04 2022-08-16 上海精测半导体技术有限公司 探测反射光变化的装置、方法及膜厚测量装置
CN113048894B (zh) * 2021-03-04 2022-10-18 上海精测半导体技术有限公司 一种探测反射光变化的装置、方法及膜厚测量装置
CN114428081A (zh) * 2021-12-15 2022-05-03 赣州市同兴达电子科技有限公司 复测aoi抛料可视化复判方法
KR102521324B1 (ko) * 2022-03-03 2023-04-20 (주)오로스 테크놀로지 입사각을 갖는 오프-액시스 광학계의 정렬 방법
KR102492803B1 (ko) 2022-04-19 2023-01-31 (주)오로스테크놀로지 조리개를 이용하여 입사 각도 또는 개구수를 조절하는 편광 분석 장치 및 방법
JP7396548B1 (ja) 2022-05-13 2023-12-12 日本精工株式会社 逆入力遮断クラッチ
CN115290571A (zh) * 2022-08-16 2022-11-04 深圳市埃芯半导体科技有限公司 测量设备和测量方法
CN115389022B (zh) * 2022-08-19 2024-01-26 深圳市埃芯半导体科技有限公司 椭偏仪
KR102621281B1 (ko) * 2022-11-22 2024-01-05 (주)오로스테크놀로지 광 계측기
CN116518851A (zh) * 2023-03-31 2023-08-01 江苏匠岭半导体有限公司 光学测量组件、半导体光学膜厚和线宽测量装置与方法
US20250076185A1 (en) * 2023-08-31 2025-03-06 Kla Corporation Angle Of Incidence And Azimuth Angle Resolved Spectroscopic Ellipsometry For Semiconductor Metrology

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6012763A (ja) * 1983-07-02 1985-01-23 Tadahiro Omi 光電変換装置
JPH0643372A (ja) * 1992-06-19 1994-02-18 Canon Inc 光走査装置
US5872630A (en) * 1995-09-20 1999-02-16 Johs; Blaine D. Regression calibrated spectroscopic rotating compensator ellipsometer system with photo array detector
JP3330403B2 (ja) * 1992-11-18 2002-09-30 浜松ホトニクス株式会社 固体撮像装置
US5412473A (en) * 1993-07-16 1995-05-02 Therma-Wave, Inc. Multiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devices
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
JP3712481B2 (ja) * 1995-12-28 2005-11-02 富士通株式会社 半導体装置の製造方法
US5877859A (en) * 1996-07-24 1999-03-02 Therma-Wave, Inc. Broadband spectroscopic rotating compensator ellipsometer
US5859424A (en) * 1997-04-08 1999-01-12 Kla-Tencor Corporation Apodizing filter system useful for reducing spot size in optical measurements and other applications
US5979244A (en) * 1998-03-04 1999-11-09 Siemens Aktiengesellschaft Method and apparatus for evaluating internal film stress at high lateral resolution
US6184984B1 (en) * 1999-02-09 2001-02-06 Kla-Tencor Corporation System for measuring polarimetric spectrum and other properties of a sample
JP2001165850A (ja) * 1999-12-14 2001-06-22 Fuji Electric Co Ltd 油膜検知装置
US7345762B1 (en) * 2000-05-30 2008-03-18 J.A. Woollam Co., Inc. Control of beam spot size in ellipsometer and the like systems
US20030030817A1 (en) * 2001-08-10 2003-02-13 Chih-Kung Lee Multifunctional opto-electronic biochip detection system
WO2004023071A1 (en) * 2002-09-09 2004-03-18 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US7369233B2 (en) * 2002-11-26 2008-05-06 Kla-Tencor Technologies Corporation Optical system for measuring samples using short wavelength radiation
JP2006153770A (ja) * 2004-11-30 2006-06-15 Omron Corp 分光計測装置
US7483133B2 (en) * 2004-12-09 2009-01-27 Kla-Tencor Technologies Corporation. Multiple angle of incidence spectroscopic scatterometer system
US7463369B2 (en) * 2006-03-29 2008-12-09 Kla-Tencor Technologies Corp. Systems and methods for measuring one or more characteristics of patterned features on a specimen
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US7705331B1 (en) * 2006-06-29 2010-04-27 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for a process performed on the specimen
TWI429896B (zh) * 2006-07-27 2014-03-11 Rudolph Technologies Inc 橢圓偏光測定儀器及監控製程之方法
US7755764B2 (en) 2007-01-26 2010-07-13 Kla-Tencor Corporation Purge gas flow control for high-precision film measurements using ellipsometry and reflectometry
JP4950813B2 (ja) * 2007-08-30 2012-06-13 大日本スクリーン製造株式会社 分光エリプソメータ、膜厚測定装置および分光エリプソメータのフォーカス調整方法
JP5175605B2 (ja) * 2008-04-18 2013-04-03 株式会社日立ハイテクノロジーズ パターン形状検査方法
EP2364436A4 (en) * 2008-11-04 2016-01-27 Univ Rice William M PICTURE PICTURE SPECTROMETER
JP5366536B2 (ja) * 2008-12-26 2013-12-11 株式会社堀場製作所 ラマン散乱光測定装置
US8441639B2 (en) 2009-09-03 2013-05-14 Kla-Tencor Corp. Metrology systems and methods
US8446584B2 (en) 2011-05-13 2013-05-21 Kla-Tencor Corporation Reconfigurable spectroscopic ellipsometer
US8456639B2 (en) * 2011-07-01 2013-06-04 Kla-Tencor Corporation Measurement of critical dimension
US9228943B2 (en) * 2011-10-27 2016-01-05 Kla-Tencor Corporation Dynamically adjustable semiconductor metrology system
US9176069B2 (en) 2012-02-10 2015-11-03 Kla-Tencor Corporation System and method for apodization in a semiconductor device inspection system
US8879073B2 (en) * 2012-02-24 2014-11-04 Kla-Tencor Corporation Optical metrology using targets with field enhancement elements
JP6345125B2 (ja) 2012-03-07 2018-06-20 ケーエルエー−テンカー コーポレイション ウェハおよびレチクル検査システムならびに照明瞳配置を選択するための方法

Also Published As

Publication number Publication date
JP2016536609A (ja) 2016-11-24
JP2025026544A (ja) 2025-02-21
EP3971950B1 (en) 2024-11-06
EP3047520A4 (en) 2017-07-12
EP3624174A3 (en) 2020-06-03
KR20200085938A (ko) 2020-07-15
CN105051877B (zh) 2019-02-22
IL239666B (en) 2021-02-28
CN105051877A (zh) 2015-11-11
EP3971950A1 (en) 2022-03-23
KR102134943B1 (ko) 2020-08-26
WO2015039031A1 (en) 2015-03-19
IL280388B (en) 2022-02-01
EP3047520A1 (en) 2016-07-27
KR20160055908A (ko) 2016-05-18
JP2023014136A (ja) 2023-01-26
JP2020128986A (ja) 2020-08-27
JP2025081595A (ja) 2025-05-27
IL280388A (en) 2021-03-01
EP3624174B1 (en) 2024-08-21
EP3047520B1 (en) 2019-11-06
EP3624174A2 (en) 2020-03-18
JP2022079538A (ja) 2022-05-26
KR102216201B1 (ko) 2021-02-15
IL239666A0 (en) 2015-08-31

Similar Documents

Publication Publication Date Title
JP6688732B2 (ja) 多入射角半導体計測システム及び方法
TWI631312B (zh) 用於執行半導體樣品之度量衡之橢圓偏光計設備
CN111095509B (zh) 使用多重参数配置的叠加计量
JP6830492B2 (ja) 分光ビームプロファイルオーバーレイ計測
US9170156B2 (en) Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system
US7924422B2 (en) Calibration method for optical metrology
TW201629469A (zh) 光譜光束分佈度量
JP2016536609A5 (enExample)
CN114450575A (zh) 在扫描及静态模式中的敏感光学计量
TWI601937B (zh) 用於執行半導體樣品之度量衡之橢圓偏光計設備

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170913

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170913

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180530

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180605

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180904

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181204

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20190227

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190417

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190806

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191105

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200310

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200406

R150 Certificate of patent or registration of utility model

Ref document number: 6688732

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250