JP6651937B2 - 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ - Google Patents

圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ Download PDF

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Publication number
JP6651937B2
JP6651937B2 JP2016063903A JP2016063903A JP6651937B2 JP 6651937 B2 JP6651937 B2 JP 6651937B2 JP 2016063903 A JP2016063903 A JP 2016063903A JP 2016063903 A JP2016063903 A JP 2016063903A JP 6651937 B2 JP6651937 B2 JP 6651937B2
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Japan
Prior art keywords
piezoelectric
signal
piezoelectric actuator
drive
actuator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2016063903A
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English (en)
Japanese (ja)
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JP2017184316A (ja
JP2017184316A5 (enExample
Inventor
喜一 梶野
喜一 梶野
豊 荒川
豊 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2016063903A priority Critical patent/JP6651937B2/ja
Priority to CN201710178656.6A priority patent/CN107453646A/zh
Priority to EP17162764.9A priority patent/EP3226400B1/en
Priority to US15/469,969 priority patent/US10615328B2/en
Publication of JP2017184316A publication Critical patent/JP2017184316A/ja
Publication of JP2017184316A5 publication Critical patent/JP2017184316A5/ja
Application granted granted Critical
Publication of JP6651937B2 publication Critical patent/JP6651937B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B34/00—Computer-aided surgery; Manipulators or robots specially adapted for use in surgery
    • A61B34/30—Surgical robots
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B34/00—Computer-aided surgery; Manipulators or robots specially adapted for use in surgery
    • A61B34/70—Manipulators specially adapted for use in surgery
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/082—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular flexible member being pressed against a wall by a number of elements, each having an alternating movement in a direction perpendicular to the axes of the tubular member and each having its own driving mechanism
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/1223—Machines, pumps, or pumping installations having flexible working members having peristaltic action the actuating elements, e.g. rollers, moving in a straight line during squeezing
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Robotics (AREA)
  • Molecular Biology (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Vascular Medicine (AREA)
  • Anesthesiology (AREA)
  • Hematology (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2016063903A 2016-03-28 2016-03-28 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ Expired - Fee Related JP6651937B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016063903A JP6651937B2 (ja) 2016-03-28 2016-03-28 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ
CN201710178656.6A CN107453646A (zh) 2016-03-28 2017-03-23 压电致动器、压电电机、机器人、机械手以及泵
EP17162764.9A EP3226400B1 (en) 2016-03-28 2017-03-24 Piezoelectric actuator and piezoelectric motor, robot hand, and pump including such actuator
US15/469,969 US10615328B2 (en) 2016-03-28 2017-03-27 Piezoelectric actuator, piezoelectric motor, robot, hand, and pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016063903A JP6651937B2 (ja) 2016-03-28 2016-03-28 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ

Publications (3)

Publication Number Publication Date
JP2017184316A JP2017184316A (ja) 2017-10-05
JP2017184316A5 JP2017184316A5 (enExample) 2019-05-09
JP6651937B2 true JP6651937B2 (ja) 2020-02-19

Family

ID=58412985

Family Applications (1)

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JP2016063903A Expired - Fee Related JP6651937B2 (ja) 2016-03-28 2016-03-28 圧電アクチュエーター、圧電モーター、ロボット、ハンドおよびポンプ

Country Status (4)

Country Link
US (1) US10615328B2 (enExample)
EP (1) EP3226400B1 (enExample)
JP (1) JP6651937B2 (enExample)
CN (1) CN107453646A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6439466B2 (ja) * 2015-01-30 2018-12-19 セイコーエプソン株式会社 圧電駆動装置、ロボット及びロボットの駆動方法
JP6836129B2 (ja) * 2016-09-26 2021-02-24 セイコーエプソン株式会社 駆動装置、圧電モーター、電子部品搬送装置およびロボット
JP7077682B2 (ja) * 2018-03-12 2022-05-31 セイコーエプソン株式会社 圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP7200550B2 (ja) * 2018-08-31 2023-01-10 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JP7297489B2 (ja) * 2019-03-26 2023-06-26 キヤノン株式会社 振動型アクチュエータおよび振動型アクチュエータの駆動装置
WO2022085678A1 (ja) * 2020-10-22 2022-04-28 キヤノン株式会社 振動型駆動装置及び振動型駆動装置の駆動方法
JP2022069736A (ja) * 2020-10-26 2022-05-12 キヤノン株式会社 振動型駆動装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171174A (ja) 1987-01-07 1988-07-14 Olympus Optical Co Ltd 超音波モ−タ
JPH06253585A (ja) * 1993-02-25 1994-09-09 Nippondenso Co Ltd ブラシレスモータの異常検出装置
JPH1118456A (ja) * 1997-06-26 1999-01-22 Nikon Corp 振動アクチュエータの駆動装置
JP4651179B2 (ja) * 2000-10-26 2011-03-16 株式会社日本自動車部品総合研究所 ピエゾアクチュエータの異常検出装置
JP2004260990A (ja) * 2003-02-06 2004-09-16 Seiko Epson Corp 駆動装置および稼動装置
JP2006340528A (ja) 2005-06-03 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
JP4251206B2 (ja) 2006-09-20 2009-04-08 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
JP4891053B2 (ja) * 2006-12-21 2012-03-07 オリンパス株式会社 超音波モータ
JP4992037B2 (ja) 2007-02-13 2012-08-08 コニカミノルタアドバンストレイヤー株式会社 駆動装置、駆動装置の状態検出方法および駆動装置の制御方法
JP2015103619A (ja) 2013-11-22 2015-06-04 京セラ株式会社 素子収納用パッケージおよび実装構造体
JP6284120B2 (ja) 2013-12-13 2018-02-28 日本特殊陶業株式会社 圧電アクチュエータ
JP6442913B2 (ja) * 2014-08-13 2018-12-26 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法

Also Published As

Publication number Publication date
JP2017184316A (ja) 2017-10-05
CN107453646A (zh) 2017-12-08
US20170279033A1 (en) 2017-09-28
EP3226400A1 (en) 2017-10-04
EP3226400B1 (en) 2019-09-11
US10615328B2 (en) 2020-04-07

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