JP6627988B2 - 半導体パッケージ - Google Patents
半導体パッケージ Download PDFInfo
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- JP6627988B2 JP6627988B2 JP2018550948A JP2018550948A JP6627988B2 JP 6627988 B2 JP6627988 B2 JP 6627988B2 JP 2018550948 A JP2018550948 A JP 2018550948A JP 2018550948 A JP2018550948 A JP 2018550948A JP 6627988 B2 JP6627988 B2 JP 6627988B2
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- 239000004065 semiconductor Substances 0.000 title claims description 158
- 229910052751 metal Inorganic materials 0.000 claims description 297
- 239000002184 metal Substances 0.000 claims description 297
- 239000000919 ceramic Substances 0.000 claims description 82
- 239000000463 material Substances 0.000 claims description 52
- 238000005219 brazing Methods 0.000 claims description 47
- 229910000679 solder Inorganic materials 0.000 claims description 29
- 229910003460 diamond Inorganic materials 0.000 claims description 6
- 239000010432 diamond Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- 229910052802 copper Inorganic materials 0.000 description 17
- 239000010949 copper Substances 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 11
- 238000005336 cracking Methods 0.000 description 9
- 229910000531 Co alloy Inorganic materials 0.000 description 8
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 8
- 229910000881 Cu alloy Inorganic materials 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 5
- 238000005304 joining Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910001182 Mo alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
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Description
図1は、実施の形態1に係る半導体パッケージの断面図である。本実施の形態に係る半導体パッケージ100は、金属板21を備える。金属板21は銅から形成される。銅の熱伝導率は394W/m・Kであり、放熱性が高い。また、銅の熱膨張係数は19×10−6/Kである。金属板21の上には、金属ベース10が設けられる。金属ベース10は、鉄−ニッケル−コバルト合金から形成される。鉄−ニッケル−コバルト合金の熱伝導率は17W/m・Kである。また、鉄−ニッケル−コバルト合金の熱膨張係数は4.9×10−6/Kである。金属ベース10には上面から裏面に貫通した貫通孔11が形成されている。貫通孔11は、半導体素子50の直下に形成される。
図6は、実施の形態2に係る半導体パッケージの断面図である。本実施の形態に係る半導体パッケージ500は、金属ベース510および金属ブロック520の形状が実施の形態1と異なる。図7は、実施の形態2に係る金属ベースと金属ブロックの断面図である。金属ブロック520の幅は、上面よりも裏面の方が大きい。金属ブロック520の断面形状は台形である。金属ブロック520は、金属ベース510の上面と平行な断面における断面積が上面から裏面に向かって連続して大きくなる。
図8は、実施の形態3に係る半導体パッケージの断面図である。本実施の形態に係る半導体パッケージ600は、金属ベース610および金属ブロック620の形状が実施の形態1と異なる。図9は、実施の形態3に係る金属ベースと金属ブロックの断面図である。金属ベース610には貫通孔611が形成されている。貫通孔611は、金属ベース610の上面に形成された第1開口611bと、第1開口611bに連なる第2開口611cから構成される。第2開口611cは、第1開口611bよりも幅が大きく、金属ベース610の裏面に至る。
図10は、実施の形態4に係る半導体パッケージの断面図である。本実施の形態に係る半導体パッケージ700は、金属ブロック720を備える。金属ブロック720は、ダイヤモンド723を備える。金属ブロック720は、粉末のダイヤモンド723を銅に混ぜた複合体から形成される。ダイヤモンド723は、銅よりも熱伝導率が高い。このため、半導体素子50から発生する熱を、銅のみから形成される金属ブロックよりも効率よく伝達し、放熱できる。このため、高出力の半導体素子50を搭載した半導体パッケージ700を提供できる。
図12は、実施の形態5に係る半導体パッケージの断面図である。実施の形態1では、フレーム31は、金属フレーム30およびセラミック部40を備えた。本実施の形態に係る半導体パッケージ800はフレーム831を備える。フレーム831は、セラミック部840のみを備える。フレーム831はセラミックフレームである。セラミック部840は、第1セラミック部40a、第2セラミック部40bおよび第3セラミック部840cを備える。
図13は、実施の形態6に係る半導体パッケージの断面図である。本実施の形態に係る半導体パッケージ900は、金属リング932を備える。金属リング932は、フレーム831と金属ベース10との間に設けられる。金属リング932は、半導体素子50を囲む。フレーム831は環状の金属リング932を介して、金属ベース10に接合される。
Claims (10)
- 金属板と、
前記金属板の上に設けられ、上面から裏面に貫通した貫通孔が形成された金属ベースと、
前記貫通孔に設けられ、上面が前記金属ベースの上面よりも低い位置に設けられた金属ブロックと、
前記金属ブロックの上面を覆うロウ材と、
前記ロウ材の上に設けられたはんだと、
前記はんだの上に設けられた半導体素子と、
前記金属ベースの上に設けられ、前記半導体素子を囲むフレームと、
前記フレームの上に設けられ、前記フレームで囲まれた領域を覆う蓋と、
前記半導体素子と電気的に接続され、前記フレームに対して前記半導体素子と反対側に伸びるリードと、
を備え、
前記フレームは、前記リードが取り付けられたセラミック部を備え、
前記金属ベースと前記セラミック部との熱膨張率の差分は、前記金属ブロックと前記セラミック部との熱膨張率の差分よりも小さく、
前記金属ブロックは、前記金属ベースよりも熱伝導率が大きく、
前記ロウ材の上面の算術平均粗さは、前記はんだの厚さ以下であることを特徴とする半導体パッケージ。 - 前記ロウ材の上面の算術平均粗さは0.02mm以下であることを特徴とする請求項1に記載の半導体パッケージ。
- 前記金属ブロックの幅は、上面よりも裏面の方が大きいことを特徴とする請求項1または2に記載の半導体パッケージ。
- 前記金属ベースの上面における前記貫通孔の幅は、前記金属ブロックの上面の幅よりも小さいことを特徴とする請求項3に記載の半導体パッケージ。
- 前記貫通孔は、前記金属ベースの上面に形成された第1開口と、前記第1開口に連なり、前記第1開口よりも幅が大きく、前記金属ベースの裏面に至る第2開口から構成され、
前記金属ブロックは、第2ブロックと、前記第2ブロックの上に設けられ、前記第2ブロックよりも幅が小さい第1ブロックと、を備え、
前記第1ブロックは、前記第1開口に配置され、
前記第1開口の幅は、前記第2ブロックの幅よりも小さく、
前記第1ブロックの高さは、前記第1開口の高さ以下であることを特徴とする請求項3に記載の半導体パッケージ。 - 前記金属ブロックは、ダイヤモンドを備えることを特徴とする請求項1〜5の何れか1項に記載の半導体パッケージ。
- 前記金属ブロックは、グラファイトを備えることを特徴とする請求項1〜5の何れか1項に記載の半導体パッケージ。
- 前記フレームは、前記セラミック部のみからなることを特徴とする請求項1〜7の何れか1項に記載の半導体パッケージ。
- 前記フレームと前記金属ベースとの間に設けられ、前記半導体素子を囲む金属リングを備えることを特徴とする請求項8に記載の半導体パッケージ。
- 前記セラミック部は、前記金属ベースに接合されていることを特徴とする請求項1〜8の何れか1項に記載の半導体パッケージ。
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