JP6620921B2 - 紫外線発光材料およびその製造方法 - Google Patents

紫外線発光材料およびその製造方法 Download PDF

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JP6620921B2
JP6620921B2 JP2015035941A JP2015035941A JP6620921B2 JP 6620921 B2 JP6620921 B2 JP 6620921B2 JP 2015035941 A JP2015035941 A JP 2015035941A JP 2015035941 A JP2015035941 A JP 2015035941A JP 6620921 B2 JP6620921 B2 JP 6620921B2
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substrate
ultraviolet light
mist
crystal substrate
crystal
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JP2016155963A (ja
JP2016155963A5 (https=
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章夫 高塚
章夫 高塚
真也 織田
真也 織田
俊実 人羅
俊実 人羅
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Flosfia Inc
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Flosfia Inc
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JP2015035941A 2015-02-25 2015-02-25 紫外線発光材料およびその製造方法 Active JP6620921B2 (ja)

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JP2015035941A JP6620921B2 (ja) 2015-02-25 2015-02-25 紫外線発光材料およびその製造方法
JP2019201137A JP6920630B2 (ja) 2015-02-25 2019-11-06 紫外線発光材料およびその製造方法

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JP2016155963A JP2016155963A (ja) 2016-09-01
JP2016155963A5 JP2016155963A5 (https=) 2018-04-19
JP6620921B2 true JP6620921B2 (ja) 2019-12-18

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020019969A (ja) * 2015-02-25 2020-02-06 株式会社Flosfia 紫外線発光材料およびその製造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6774592B2 (ja) * 2015-09-08 2020-10-28 株式会社Flosfia 深紫外発光素子
JP6620328B2 (ja) * 2015-09-08 2019-12-18 株式会社Flosfia 深紫外光発生用ターゲット、深紫外光源および深紫外発光素子
EP3816330A4 (en) * 2018-06-26 2022-10-05 Flosfia Inc. CRYSTALLINE OXIDE FILM
CN114423883B (zh) 2019-09-30 2024-03-12 日本碍子株式会社 α－Ga2O3系半导体膜

Family Cites Families (4)

* Cited by examiner, † Cited by third party
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JP3556916B2 (ja) * 2000-09-18 2004-08-25 三菱電線工業株式会社 半導体基材の製造方法
JP5222916B2 (ja) * 2010-09-17 2013-06-26 シャープ株式会社 半導体基材の製造方法、半導体装置、および電気機器
JP5569987B2 (ja) * 2012-05-25 2014-08-13 双葉電子工業株式会社 紫外線発光材料及び紫外線光源
JP5397794B1 (ja) * 2013-06-04 2014-01-22 Ｒｏｃａ株式会社 酸化物結晶薄膜の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020019969A (ja) * 2015-02-25 2020-02-06 株式会社Flosfia 紫外線発光材料およびその製造方法

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