JP6603831B1 - 有機el表示装置及び有機el表示装置の製造方法 - Google Patents
有機el表示装置及び有機el表示装置の製造方法 Download PDFInfo
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- JP6603831B1 JP6603831B1 JP2019542651A JP2019542651A JP6603831B1 JP 6603831 B1 JP6603831 B1 JP 6603831B1 JP 2019542651 A JP2019542651 A JP 2019542651A JP 2019542651 A JP2019542651 A JP 2019542651A JP 6603831 B1 JP6603831 B1 JP 6603831B1
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- organic
- film
- signal output
- insulating film
- output circuit
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- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
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Abstract
Description
図1には、第1実施形態の有機EL表示装置1の構成の一例が模式的に示されている。図2には、有機EL表示装置1に備えられる有機EL表示パネル3の部分的な断面の一例が示されている。図1及び図2に示されるように、有機EL表示装置1は、複数の画素3aそれぞれを駆動する複数の画素駆動回路2が表面に設けられた基板10、及び、複数の画素3aそれぞれに設けられると共に複数の画素駆動回路2のいずれかに接続されている有機発光素子40を含む有機EL表示パネル3を備えている。複数の画素3aは、略直交する第1方向(例えば図1におけるX方向、以下「第1方向X」と称される)及び第2方向(例えば図1におけるY方向、以下「第2方向Y」と称される)それぞれに沿ってマトリクス状に配列されている。有機EL表示パネル3は、さらに、第1方向X又は第2方向Yに沿って一列に並ぶ複数の画素駆動回路2それぞれに略同時に信号を供給する信号出力回路5を備えている。図1に示される例では、信号出力回路5は、第1方向Xに沿って一列に並ぶ複数の画素駆動回路2それぞれに接続されており、第1方向Xに沿って一列に並ぶ画素駆動回路2それぞれに略同時に信号を供給する。信号出力回路5は、画素駆動回路2が設けられた基板10の表面における表示領域3bの周囲に形成されている。図1の例では、有機EL表示パネル3の第1方向Xにおいて対向する二辺のうちの一辺(図1の例では左辺)に沿う縁部に複数の信号出力回路5が形成され、この一辺に沿って複数の信号出力回路5が並置されている。また、図1の例の有機EL表示装置1は、ソースドライバとも称されるエミッションドライバ1dを有機EL表示パネル3の外部に有している。
次に、図2に示される有機EL表示装置1を例に、一実施形態の有機EL表示装置の製造方法が、図8A及び図8Bのフローチャート並びに図9A〜図9Gに示される断面図を参照すると共に、図5Aも適宜参照しながら説明される。
(1)本発明の第1実施形態の有機EL表示装置は、略直交する第1方向及び第2方向それぞれに沿ってマトリクス状に配列された複数の画素それぞれを駆動する複数の画素駆動回路が表面に設けられた基板、及び、前記複数の画素それぞれに設けられると共に前記複数の画素駆動回路のいずれかに接続されている有機発光素子を含む有機EL表示パネルを備え、前記有機EL表示パネルは、前記第1方向又は前記第2方向に沿って一列に並ぶ複数の前記画素駆動回路それぞれに略同時に信号を供給する信号出力回路を備え、前記信号出力回路は、複数の薄膜トランジスタを含み、前記基板の前記表面における表示領域の周囲に形成されており、前記薄膜トランジスタは、ゲート電極、ソース電極、ドレイン電極、並びに前記ソース電極と前記ドレイン電極の間のチャネルとなる領域を含む半導体層を有し、前記半導体層がアモルファスシリコンで形成されている。
2 画素駆動回路
3 有機EL表示パネル
10 基板
20 電流制御トランジスタ(第1画素TFT)
21 半導体層
30 平坦化膜
31 第1無機絶縁膜
32 有機絶縁膜
33 第2無機絶縁膜
40 有機発光素子
5、5a、5b、5c 信号出力回路
50、50a〜50m 駆動TFT(TFT)
51 半導体層
52 ゲート絶縁膜
53 ゲート電極
55 ソース電極
55a 第2導体膜
56 ドレイン電極
56a 第1導体膜
57 シフトレジスタ
Claims (9)
- 略直交する第1方向及び第2方向それぞれに沿ってマトリクス状に配列された複数の画素それぞれを駆動する複数の画素駆動回路が表面に設けられた基板、及び、前記複数の画素それぞれに設けられると共に前記複数の画素駆動回路のいずれかに接続されている有機発光素子を含む有機EL表示パネルを備え、
前記有機EL表示パネルは、前記第1方向又は前記第2方向に沿って一列に並ぶ複数の前記画素駆動回路それぞれに略同時に信号を供給する信号出力回路を備え、
前記信号出力回路は、複数の薄膜トランジスタを含み、前記基板の前記表面における表示領域の周囲に形成されており、
前記薄膜トランジスタは、ゲート電極、ソース電極、ドレイン電極、並びに前記ソース電極と前記ドレイン電極の間のチャネルとなる領域を含む半導体層を有し、
前記半導体層がアモルファスシリコンで形成されており、
前記信号出力回路は前記基板の表面を平坦化する平坦化膜に覆われており、
前記平坦化膜は、前記信号出力回路上の第1無機絶縁膜、前記第1無機絶縁膜の上に積層された有機絶縁膜、及び、前記有機絶縁膜の上に積層された第2無機絶縁膜を含んでおり、
前記第2無機絶縁膜における前記有機絶縁膜と反対方向を向く表面が、20nm以上、50nm以下の算術平均粗さを有している、有機EL表示装置。 - 複数の前記薄膜トランジスタのうちの少なくとも一つにおいて、前記チャネルのチャネル幅(W)とチャネル長(L)との比(W/L)が、50以上、500以下である、請求項1に記載の有機EL表示装置。
- 複数の前記薄膜トランジスタのうちの少なくとも一つにおいて、前記ドレイン電極を構成する第1導体膜及び前記ソース電極を構成する第2導体膜それぞれの一部が所定の方向に沿って交互に並べられており、
前記チャネルとなる領域は、前記第1導体膜の前記一部と前記第2導体膜の前記一部との間に挟まれており、
前記第1導体膜及び前記第2導体膜の一方は、前記一方における複数の前記一部同士がそれぞれの端部において連結されることによってジグザグの平面形状を有しており、
前記第1導体膜及び前記第2導体膜の他方は前記一方の周囲に形成されており、
前記他方の前記一部が前記ジグザグの平面形状の凹部に挿入されている、請求項1又は2に記載の有機EL表示装置。 - 前記画素駆動回路は、薄膜トランジスタによって構成されていて前記有機発光素子に接続された電流制御トランジスタを含み、
前記電流制御トランジスタにおいてチャネルが形成される半導体層はアモルファスシリコンで形成されている、請求項1〜3のいずれか1項に記載の有機EL表示装置。 - 前記電流制御トランジスタにおける前記チャネルのチャネル幅(W1)とチャネル長(L1)との比(W1/L1)は、50以上、500以下である、請求項4に記載の有機EL表示装置。
- 略矩形の形状を有する前記基板の対向する第1辺及び第2辺の縁部それぞれに一つ又は複数の前記信号出力回路が形成されており、
前記基板の前記第1辺及び前記第2辺と略直交する方向に沿う一つの行又は列に並ぶ複数の前記画素駆動回路のうちの第1群が前記第1辺の縁部に形成された前記信号出力回路に接続されると共に、前記一つの行又は列に並ぶ複数の前記画素駆動回路のうちの前記第1群以外の第2群が前記第2辺の縁部に形成された前記信号出力回路に接続されている、請求項1〜5のいずれか1項に記載の有機EL表示装置。 - 前記平坦化膜は、前記画素駆動回路を覆っており、
前記有機発光素子は前記平坦化膜における前記画素駆動回路と反対方向を向く表面に形成されている、請求項1〜6のいずれか1項に記載の有機EL表示装置。 - 基板の上に複数の薄膜トランジスタ及び配線を形成することによって、有機EL表示パネルにおいてマトリクス状に配列される複数の画素それぞれを駆動する複数の画素駆動回路を形成する工程と、
前記画素駆動回路の表面を覆うように第1無機絶縁膜、有機絶縁膜及び第2無機絶縁膜を順に形成することによって平坦化膜を形成する工程と、
前記第2無機絶縁膜の表面を研磨する工程と、
前記画素駆動回路と接続されるように有機発光素子を前記平坦化膜の表面上に形成する工程と、
を含み、
前記画素駆動回路の形成と共に、前記基板の縁部に複数の薄膜トランジスタを形成することによって、一列に並ぶ複数の前記画素駆動回路それぞれに略同時に信号を供給する信号出力回路を形成し、
前記画素駆動回路を構成する薄膜トランジスタ及び前記信号出力回路を構成する薄膜トランジスタを、ゲート電極と、ゲート絶縁膜と、ドレイン電極及びソース電極と、前記ドレイン電極及び前記ソース電極の間のチャネルとなる領域を含む半導体層とを形成することによって形成し、
前記半導体層をアモルファスシリコンで形成し、
前記信号出力回路を覆うように前記平坦化膜を形成し、
前記第2無機絶縁膜の前記表面の研磨において、前記第2無機絶縁膜の前記表面を20nm以上、50nm以下の算術平均粗さに研磨する、有機EL表示装置の製造方法。 - 前記信号出力回路を構成する前記薄膜トランジスタの形成において、前記チャネルのチャネル幅(W)とチャネル長(L)との比(W/L)が、50以上、500以下となるように前記ゲート電極と前記ドレイン電極と前記ソース電極とを形成する、請求項8に記載の有機EL表示装置の製造方法。
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