JP6595432B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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Description
図1は、第1実施形態の半導体装置の構造を示す断面図である。
なお、図2(b)の工程では、第1および第3導電層5a、5cを、TiCl4ガスと窒素を含むガスとを用いてプラズマCVDにより形成し、第2導電層5bを、TiCl4ガスを用いてプラズマCVDにより形成してもよい。この場合、第1および第3導電層5a、5cはTiN層となり、第2導電層5bはTi層となるため、図3(b)の熱工程後に、第1から第3導電層5a〜5cはいずれもTiN層となる。すなわち、第2バリアメタル層5は、TiN層のみを含む層となる。この場合、チタンは第1金属元素の例であり、TiCl4ガスは第1ガスの例であり、窒素を含むガスは第2ガスの例である。これにより、第2金属元素を使用せずに図2(a)〜図3(b)の工程を実行することが可能となる。
図9は、第2実施形態の半導体装置の構造を示す断面図である。
図10は、第3実施形態の半導体装置の構造を示す断面図である。
図11は、第4実施形態の半導体装置の構造を示す断面図である。
本実施形態の第2バリアメタル層5は、第1バリアメタル層4の表面に順々に形成された第1導電層5a、第2導電層5b、追加導電層5b’、および第3導電層5cを有している。第2導電層5bは、第2層内の下部層の例であり、追加導電層5b’、第2層内の上部層の例である。
4:第1バリアメタル層、5:第2バリアメタル層、
5a:第1導電層、5b:第2導電層、5c:第3導電層、
5d:第4導電層、5e:第5導電層、6:プラグ材層、
7:配線層、8:第2層間絶縁膜、9:SiN層、10:TiN層、
11:結晶粒、12:粒界、21:ゲート絶縁膜、22:ゲート電極、
23:側壁絶縁膜、24:ソース領域、25:ドレイン領域、
31:配線層、32:層間絶縁膜、33:プラグ層、
34:配線層、35:層間絶縁膜、36:プラグ層、
37:配線層、38:層間絶縁膜、39:ソース側導電層、
41a、41b、41c、41d、41e、41f、41g:絶縁層、
42a、42b、42c、42d、42e、42f:電極層、
43:絶縁膜、44:ドレイン側導電層、45:層間絶縁膜、46:層間絶縁膜、
47a、47b、47c、47d、47e:コンタクトプラグ、
51:第1メモリ絶縁膜、52:電荷蓄積層、
53:第2メモリ絶縁膜、54:チャネル半導体層
Claims (10)
- 基板と、
前記基板上に設けられた絶縁膜と、
前記絶縁膜内に設けられた第1バリアメタル層と、前記絶縁膜内に前記第1バリアメタル層を介して設けられた第2バリアメタル層と、前記絶縁膜内に前記第1バリアメタル層と前記第2バリアメタル層とを介して設けられたプラグ材層とを有し、前記第2バリアメタル層は少なくとも、第1金属元素と窒素とを含む第1層と、前記第1金属元素と異なる第2金属元素と窒素とを含む第2層とを有する、コンタクトプラグと、
を備える半導体装置。 - 前記第1金属元素は、チタンであり、前記第2金属元素は、チタンよりも小さい窒化物生成自由エネルギーを有する金属元素である、請求項1に記載の半導体装置。
- 前記第1層はさらに、チタンよりも小さい窒化物生成自由エネルギーを有する第3元素を含む、請求項2に記載の半導体装置。
- 前記第1層はさらに、前記第1層内の結晶粒の粒界に偏析した第4元素を含む、請求項1〜3のいずれか1項に記載の半導体装置。
- 前記第2バリアメタル層は、複数の前記第1層と複数の前記第2層とを交互に有する、請求項1〜4のいずれか1項に記載の半導体装置。
- 前記第2層は、前記第2金属元素と窒素とを含む下部層と、前記第2金属元素、窒素、および酸素を含む上部層とを有する、請求項1〜5のいずれか1項に記載の半導体装置。
- 基板と、
前記基板上に設けられた絶縁膜と、
前記絶縁膜内に設けられた第1バリアメタル層と、前記絶縁膜内に前記第1バリアメタル層を介して設けられた第2バリアメタル層と、前記絶縁膜内に前記第1バリアメタル層と前記第2バリアメタル層とを介して設けられたプラグ材層とを有し、前記第2バリアメタル層は少なくとも、第1金属元素と窒素とを含む複数の第1層と、前記第1金属元素、窒素、および酸素を含み、前記複数の第1層の間に設けられた第2層とを有する、コンタクトプラグと、
を備える半導体装置。 - 基板上に絶縁膜を形成し、
前記絶縁膜にコンタクトホールを形成し、
前記コンタクトホール内に、第1バリアメタル層と、第1金属元素と窒素とを含む第1層と、前記第1金属元素または前記第1金属元素と異なる第2金属元素を含む第2層とを有する第2バリアメタル層とを形成し、
前記コンタクトホール内に前記第1バリアメタル層と前記第2バリアメタル層とを介してプラグ材層を形成し、
前記第1層内の窒素原子が前記第2層に拡散するように熱処理を行う、
ことを含む半導体装置の製造方法。 - 前記第1層は、前記第1金属元素を含む第1ガスと、窒素を含む第2ガスとを用いて形成され、
前記第2層は、前記第1金属元素を含む前記第1ガスを用いて形成される、
請求項8に記載の半導体装置の製造方法。 - 前記第2層は、前記第1層の表面を酸化することで形成される、請求項8に記載の半導体装置の製造方法。
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JP2016186045A JP6595432B2 (ja) | 2016-09-23 | 2016-09-23 | 半導体装置およびその製造方法 |
US15/449,654 US10134673B2 (en) | 2016-09-23 | 2017-03-03 | Semiconductor device and manufacturing method thereof |
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JP2016186045A JP6595432B2 (ja) | 2016-09-23 | 2016-09-23 | 半導体装置およびその製造方法 |
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JP2018050009A JP2018050009A (ja) | 2018-03-29 |
JP6595432B2 true JP6595432B2 (ja) | 2019-10-23 |
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