JP6563303B2 - 光電変換素子及び撮像装置 - Google Patents
光電変換素子及び撮像装置 Download PDFInfo
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- JP6563303B2 JP6563303B2 JP2015204647A JP2015204647A JP6563303B2 JP 6563303 B2 JP6563303 B2 JP 6563303B2 JP 2015204647 A JP2015204647 A JP 2015204647A JP 2015204647 A JP2015204647 A JP 2015204647A JP 6563303 B2 JP6563303 B2 JP 6563303B2
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- photoelectric conversion
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- alloy
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- 238000003384 imaging method Methods 0.000 title claims description 40
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- 125000000217 alkyl group Chemical group 0.000 claims description 12
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 10
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
- H10K39/32—Organic image sensors
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D213/00—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members
- C07D213/02—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members
- C07D213/04—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D213/06—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom containing only hydrogen and carbon atoms in addition to the ring nitrogen atom
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
- H10K30/353—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains comprising blocking layers, e.g. exciton blocking layers
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
- H10K85/636—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising heteroaromatic hydrocarbons as substituents on the nitrogen atom
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/654—Aromatic compounds comprising a hetero atom comprising only nitrogen as heteroatom
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
- H10K2102/103—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising indium oxides, e.g. ITO
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
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- Y02E10/549—Organic PV cells
Description
図面は模式的または概念的なものであり、各部分の厚みと幅との関係、部分間の大きさの比率などは、必ずしも現実のものと同一とは限らない。同じ部分を表す場合であっても、図面により互いの寸法や比率が異なって表される場合もある。
本願明細書と各図において、既出の図に関して前述したものと同様の要素には同一の符号を付して詳細な説明は適宜省略する。
図1は、第1の実施形態に係る光電変換素子を例示する模式的断面図である。
図1に表したように、本実施形態に係る光電変換素子110は、第1電極11と、第2電極12と、光電変換層30と、第1層50と、を含む。
図2は、光電変換素子の特性を例示するグラフ図である。
図2は、光電変換素子110を種々の温度で熱処理した時の外部量子効率(External Quantum Efficiency;EQE)を示す。外部量子効率は、光電変換効率に対応する。横軸は、熱処理の温度T(℃)である。縦軸は、外部量子効率EQE(%)である。外部量子効率EQEは、分光感度測定装置(分光計器株式会社製、「CEP−V25ML」)により測定される。測定において、照射光の波長は530nmである。測定において、出力は、50μW/cm2である。
基体10sは、例えば、他の部材を支持する。基体10sには、例えば、光を透過する材料が用いられる。基体10sは、例えば、ガラス基板を含む。基体10sは、例えば、合成樹脂を含む。基体10sは、例えば、透明である。基体10sは、例えば、光透過性である。基体10sは、光電変換素子110に入射する光の少なくとも一部を透過する。
基体10sとなるガラス基板の上に、第1電極11としてITO等の透明導電膜を、スパッタリング法により形成する。第1電極11の形成には、例えば、真空蒸着法、スパッタリング法、イオンプレーティング法、メッキ法及び塗布法の少なくともいずれかが用いられる。
本実施形態は、撮像装置に係る。撮像装置は、例えば、固体撮像素子である。
図3は、第2の実施形態に係る撮像装置を例示する模式的断面図である。
図3に示すように、撮像装置210は、複数の画素領域80を含む。複数の画素領域80は、例えば、第1画素領域81及び第2画素領域82などを含む。第2画素領域82は、Z軸方向と交差する方向(この例ではX軸方向)において、第1画素領域81と並ぶ。
図6は、カメラ331cを搭載した移動体331の例を示す。カメラ331cは、例えば、移動体331の前方端部に搭載される。カメラ331cは、移動体331の前方を撮像する。
Claims (19)
- 前記R1〜R11は、互いに同じである、請求項1記載の光電変換素子。
- 前記R1〜R11の1つは、前記R1〜R11の別の1つと異なっている、請求項1記載の光電変換素子。
- 前記第2電極の電位は、前記第1電極の電位よりも高い、請求項1〜7のいずれか1つに記載の光電変換素子。
- 前記第1電極と前記光電変換層との間に設けられた第2層をさらに備えた請求項1〜8のいずれか1つに記載の光電変換素子。
- 前記第2層は、N,N′−ビス(3−メチルフェニル)−N,N′−ジフェニルベンジジン(TPD)、及び、トリス(4−カルバゾイル−9−イルフェニル)アミン(TCTA)の少なくともいずれかを含む、請求項9記載の光電変換素子。
- 前記第2電極の仕事関数は、前記第1電極の仕事関数よりも小さい、請求項1〜10のいずれか1つに記載の光電変換素子。
- 前記第1電極は、インジウム、亜鉛及び錫の少なくともいずれかの酸化物を含む、請求項1〜11のいずれか1つに記載の光電変換素子。
- 前記第2電極は、アルミニウム、銀、金、リチウム−アルミニウム合金、リチウム−マグネシウム合金、リチウム−インジウム合金、マグネシウム−銀合金、マグネシウム−インジウム合金、マグネシウム−アルミニウム合金、インジウム−銀合金、カルシウム−アルミニウム合金、及び、化合物の少なくともいずれかを含み、
前記化合物は、インジウム、亜鉛及び錫の少なくともいずれかの酸化物を含む、請求項1〜12のいずれか1つに記載の光電変換素子。 - 前記光電変換層は、クマリン、キナクリドン、サブフタロシアニン、フラーレン(C60)、ペリレン及びフタロシアニンの少なくともいずれかを含む、請求項1〜13のいずれか1つに記載の光電変換素子。
- 前記第1層の厚さは、3nm以上10nm以下である、請求項1〜14のいずれか1つに記載の光電変換素子。
- 前記第1電極及び前記第2電極と電気的に接続され、前記第2電極の電位を前記第1電極の電位よりも高くする制御部をさらに備えた、請求項1〜15のいずれか1つに記載の光電変換素子。
- 請求項1〜16のいずれか1つに記載された光電変換素子を備えた撮像装置。
- 前記光電変換素子は複数設けられ、
前記複数の光電変換素子の1つの前記第2電極は、前記複数の光電変換素子の前記1つの前記第1電極と、第1方向に沿って離間し、
前記複数の光電変換素子の少なくとも一部は、前記第1方向と交差する第2方向に沿って並ぶ、請求項17記載の撮像装置。 - フォトダイオードをさらに備え、
前記第2電極は、前記第1電極と第1方向に沿って離間し、
前記フォトダイオードは、前記第1方向において前記光電変換素子と重なる、請求項17記載の撮像装置。
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