JP6543406B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
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- JP6543406B2 JP6543406B2 JP2018502464A JP2018502464A JP6543406B2 JP 6543406 B2 JP6543406 B2 JP 6543406B2 JP 2018502464 A JP2018502464 A JP 2018502464A JP 2018502464 A JP2018502464 A JP 2018502464A JP 6543406 B2 JP6543406 B2 JP 6543406B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32467—Material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32651—Shields, e.g. dark space shields, Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
Description
さらに、金属管には第1拡散板の下方に第2拡散板及びシャワー板を配設して第2空間及び第3空間を設け、各板には、後述する複数の小孔をいずれも板全体に万遍なく重複しないように分布形成している。
このような吊下げ状の構成にすることより、第1空間から複数の小孔を通って第2空間へ流入するプロセスガスは第2拡散板に沿って面方向に拡散され、第2空間から複数の小孔を通って第3空間へ流入するプロセスガスはシャワー板に沿って面方向に拡散される。
このため、ガス噴出口から電極板の面方向に沿って略全方位に噴出されたプロセスガスは、第1空間から第2空間、第3空間そしてプラズマ処理空間に到るまでに、各板の小孔を通過する度に面方向の分散性が向上してガス分布の一様性を徐々に向上させることができるため、プラズマ処理による膜形成の面内均一性を向上させることができる。
これにより、電極板11を構成する複数個所の各板12〜15へ入力する周波電力の周波数は一定になり、しかも電極板11の連結部11a〜11dへ入力する周波電力の位相も一致し、プラズマ処理空間PSに発生する定在波の抑制が可能であり、グロー放電の一様性を容易に向上することができる。
図1は、プラズマ処理装置の全体的な構成を示す斜視図、図2は、プラズマ処理装置の断面構成を説明する図、図3は、図2の要部を拡大して示した図、図4は、図3の要部を更に拡大して示した図、図5は、電極板を構成する各板の複数の小孔のサイズ及び位置関係を説明する図である。
Claims (8)
- 反応容器内に配設した主電極板と1以上の拡散板から構成された電極板と、
前記反応容器内に前記電極板に対向させて平行に配設した対向電極と、
前記電極板の前記対向電極に対向しない非対向側から接続され、前記反応容器外から前記電極板に周波電力を供給する伝送路と、
前記反応容器内に配設されて前記電極板を内部に密着して収容する蓋状絶縁体と、
前記伝送路に設けてガス供給機能を果たすと共に、吊下げ状で前記電極板に貫通接続して当該貫通部分において前記電極板に通電接続した金属管と、
よりなるプラズマ処理装置。 - 前記蓋状絶縁体の内底面には前記電極板の前記非対向側が密着し、
前記蓋状絶縁体の内側面には前記電極板の側面が密着し、
下方開口の前記蓋状絶縁体の周側壁を下方に伸延し、
伸延した周側壁の開口縁部の突出長d1よりも突出長d1の突出端面と対向電極との隙間d2が狭くなるように電極板と対向電極の間隔を調整した状態でプラズマ処理を行うように構成したことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記主電極板の周縁部は前記対向電極に向けて階段状の主電極板周壁部で構成し、
前記主電極板周壁部の階段状の内壁に前記拡散板を電気的に連結し、
前記電極板と主電極板周壁部とにより閉塞された密閉空間を構成したことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記金属管の下方先端部を階段状に加工し、この階段状加工寸法と前記主電極板周壁部内壁の階段状加工寸法とを一致したことを特徴とする請求項1に記載のプラズマ処理装置。
- 前記蓋状絶縁体は、下方に伸延した周側壁の下端内側角部をテーパー状に切削形成し、前記蓋状絶縁体の下方開口縁部の開口径を開口に近づくに連れて徐々に拡幅したことを特徴とする請求項1に記載のプラズマ処理装置。
- 前記蓋状絶縁体の上面及び側面の一部が金属製シールドプレートで覆われており、
前記金属製シールドプレートは前記蓋状絶縁体に連結した絶縁性連通路の側面を覆うシールドパイプを介してグランドに接続したことを特徴とする請求項1に記載のプラズマ処理装置。 - 前記吊下げ状で前記電極板に貫通接続した金属管は、前記主電極板と1以上の拡散板及びシャワー板の全てを貫通して当該貫通部分において通電接続したことを特徴とする請求項1に記載のプラズマ処理装置。
- 前記吊下げ状で前記電極板に貫通接続した金属管を、複数配設したことを特徴とする請求項1又は請求項7に記載のプラズマ処理装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2016/056683 WO2017149738A1 (ja) | 2016-03-03 | 2016-03-03 | プラズマ処理装置及びプラズマ処理用反応容器の構造 |
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JPWO2017149738A1 JPWO2017149738A1 (ja) | 2018-12-06 |
JP6543406B2 true JP6543406B2 (ja) | 2019-07-10 |
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US (1) | US11227748B2 (ja) |
JP (1) | JP6543406B2 (ja) |
CN (1) | CN109156074B (ja) |
SA (1) | SA518392339B1 (ja) |
WO (1) | WO2017149738A1 (ja) |
Families Citing this family (1)
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WO2020250787A1 (ja) * | 2019-06-13 | 2020-12-17 | 株式会社クメタ製作所 | プラズマ生成装置 |
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JP2006128485A (ja) * | 2004-10-29 | 2006-05-18 | Asm Japan Kk | 半導体処理装置 |
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JP2008091805A (ja) | 2006-10-05 | 2008-04-17 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法、及び基板処理装置 |
WO2009099661A2 (en) * | 2008-02-08 | 2009-08-13 | Lam Research Corporation | A protective coating for a plasma processing chamber part and a method of use |
JP5030850B2 (ja) * | 2008-04-23 | 2012-09-19 | 株式会社日立国際電気 | プラズマ処理装置 |
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-
2016
- 2016-03-03 JP JP2018502464A patent/JP6543406B2/ja active Active
- 2016-03-03 WO PCT/JP2016/056683 patent/WO2017149738A1/ja active Application Filing
- 2016-03-03 US US16/080,232 patent/US11227748B2/en active Active
- 2016-03-03 CN CN201680083051.2A patent/CN109156074B/zh active Active
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2018
- 2018-09-03 SA SA518392339A patent/SA518392339B1/ar unknown
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Publication number | Publication date |
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CN109156074B (zh) | 2021-12-28 |
WO2017149738A1 (ja) | 2017-09-08 |
SA518392339B1 (ar) | 2022-04-19 |
JPWO2017149738A1 (ja) | 2018-12-06 |
US20190019656A1 (en) | 2019-01-17 |
CN109156074A (zh) | 2019-01-04 |
US11227748B2 (en) | 2022-01-18 |
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