JP6501403B2 - イメージセンサ - Google Patents
イメージセンサ Download PDFInfo
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- JP6501403B2 JP6501403B2 JP2015561054A JP2015561054A JP6501403B2 JP 6501403 B2 JP6501403 B2 JP 6501403B2 JP 2015561054 A JP2015561054 A JP 2015561054A JP 2015561054 A JP2015561054 A JP 2015561054A JP 6501403 B2 JP6501403 B2 JP 6501403B2
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- photoelectric conversion
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- 238000006243 chemical reaction Methods 0.000 claims description 48
- 238000003860 storage Methods 0.000 claims description 41
- 238000012546 transfer Methods 0.000 claims description 11
- 230000003111 delayed effect Effects 0.000 claims description 3
- 238000012937 correction Methods 0.000 description 42
- 239000004065 semiconductor Substances 0.000 description 25
- 239000000872 buffer Substances 0.000 description 20
- 230000004044 response Effects 0.000 description 15
- 238000005259 measurement Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000009825 accumulation Methods 0.000 description 8
- 238000004364 calculation method Methods 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 230000002123 temporal effect Effects 0.000 description 4
- 238000000701 chemical imaging Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004497 NIR spectroscopy Methods 0.000 description 1
- 238000001530 Raman microscopy Methods 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
- H04N25/745—Circuitry for generating timing or clock signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
- G01S7/4861—Circuits for detection, sampling, integration or read-out
- G01S7/4863—Detector arrays, e.g. charge-transfer gates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14806—Structural or functional details thereof
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/7795—Circuitry for generating timing or clock signals
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
Claims (6)
- 入射光を電荷に変換する受光部と、電荷を蓄積する電荷蓄積部と、前記受光部から前記電荷蓄積部への電荷の転送を制御するゲート電極とを有し、複数の列毎に一次元的に複数配列された光電変換素子と、
前記ゲート電極に印加する制御クロックを入力するクロック入力部と、
前記光電変換素子或いは前記光電変換素子の群の複数の列毎に対応して設けられ、前記クロック入力部の入力した前記制御クロックを可変の時間で遅延させ、該制御クロックを対応する列に属する複数の前記光電変換素子の前記ゲート電極に印加する第1の遅延調整部と、
を備えることを特徴とするイメージセンサ。 - 前記第1の遅延調整部は、遅延時間を決定する値を保持する記憶部と、
前記記憶部に保持された前記値に応じて信号遅延特性を変化させる遅延調整回路と、
を有することを特徴とする請求項1記載のイメージセンサ。 - 複数の前記光電変換素子或いは複数の前記光電変換素子の群は、複数の行毎に一次元的にさらに配列されており、
前記クロック入力部の入力した前記制御クロックを前記複数の行毎に可変の時間で遅延させ、該制御クロックを対応する行に属する複数の前記光電変換素子の前記ゲート電極に印加する第2の遅延調整部をさらに備える、
ことを特徴とする請求項1又は2記載のイメージセンサ。 - 前記第2の遅延調整回路は、
前記光電変換素子の複数の行毎に対応して設けられ、遅延時間を決定する値を保持する記憶部と、
前記複数の光電変換素子毎に設けられ、前記記憶部に保持された前記値に応じて信号遅延特性を前記光電変換素子の行毎に変化させる遅延調整回路とを有する、
ことを特徴とする請求項3に記載のイメージセンサ。 - 前記第2の遅延調整回路は、
前記複数の光電変換素子毎に設けられ、遅延時間を決定する値を保持する記憶部と、
前記複数の光電変換素子毎に設けられ、前記記憶部に保持された前記値に応じて信号遅延特性を前記光電変換素子の属する画素毎に変化させる遅延調整回路とを有する、
ことを特徴とする請求項3に記載のイメージセンサ。 - 前記第2の遅延調整回路は、
前記複数の光電変換素子の群毎に設けられ、遅延時間を決定する値を保持する記憶部と、
前記複数の光電変換素子の群毎に設けられ、前記記憶部に保持された前記値に応じて信号遅延特性を前記光電変換素子の群毎に変化させる遅延調整回路とを有する、
ことを特徴とする請求項3に記載のイメージセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014022344 | 2014-02-07 | ||
JP2014022344 | 2014-02-07 | ||
PCT/JP2015/053370 WO2015119243A1 (ja) | 2014-02-07 | 2015-02-06 | イメージセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2015119243A1 JPWO2015119243A1 (ja) | 2017-03-30 |
JP6501403B2 true JP6501403B2 (ja) | 2019-04-17 |
Family
ID=53778040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015561054A Active JP6501403B2 (ja) | 2014-02-07 | 2015-02-06 | イメージセンサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9832409B2 (ja) |
JP (1) | JP6501403B2 (ja) |
WO (1) | WO2015119243A1 (ja) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014181619A1 (ja) * | 2013-05-10 | 2014-11-13 | 国立大学法人静岡大学 | 距離計測装置 |
WO2017170568A1 (ja) * | 2016-03-30 | 2017-10-05 | 国立大学法人静岡大学 | 画素回路及び撮像素子 |
JP2018004486A (ja) * | 2016-07-04 | 2018-01-11 | パイオニア株式会社 | レーザ射出装置、レーザ射出方法及びプログラム |
JP6750680B2 (ja) * | 2016-08-23 | 2020-09-02 | 株式会社ニコン | 撮像素子および撮像システム |
US10419701B2 (en) | 2017-06-26 | 2019-09-17 | Facebook Technologies, Llc | Digital pixel image sensor |
US10686996B2 (en) | 2017-06-26 | 2020-06-16 | Facebook Technologies, Llc | Digital pixel with extended dynamic range |
US10598546B2 (en) | 2017-08-17 | 2020-03-24 | Facebook Technologies, Llc | Detecting high intensity light in photo sensor |
WO2019033382A1 (zh) | 2017-08-18 | 2019-02-21 | 深圳市汇顶科技股份有限公司 | 图像传感电路以及图像深度传感系统 |
US10418405B2 (en) | 2017-09-05 | 2019-09-17 | Sony Semiconductor Solutions Corporation | Sensor chip and electronic apparatus |
US11393867B2 (en) | 2017-12-06 | 2022-07-19 | Facebook Technologies, Llc | Multi-photodiode pixel cell |
JP7102159B2 (ja) | 2018-02-09 | 2022-07-19 | キヤノン株式会社 | 光電変換装置、撮像システム、および、移動体 |
US10969273B2 (en) | 2018-03-19 | 2021-04-06 | Facebook Technologies, Llc | Analog-to-digital converter having programmable quantization resolution |
US11004881B2 (en) | 2018-04-03 | 2021-05-11 | Facebook Technologies, Llc | Global shutter image sensor |
US11233085B2 (en) | 2018-05-09 | 2022-01-25 | Facebook Technologies, Llc | Multi-photo pixel cell having vertical gate structure |
US10903260B2 (en) | 2018-06-11 | 2021-01-26 | Facebook Technologies, Llc | Multi-photodiode pixel cell |
US11089210B2 (en) | 2018-06-11 | 2021-08-10 | Facebook Technologies, Llc | Configurable image sensor |
US11906353B2 (en) | 2018-06-11 | 2024-02-20 | Meta Platforms Technologies, Llc | Digital pixel with extended dynamic range |
US11089241B2 (en) | 2018-06-11 | 2021-08-10 | Facebook Technologies, Llc | Pixel cell with multiple photodiodes |
US11463636B2 (en) | 2018-06-27 | 2022-10-04 | Facebook Technologies, Llc | Pixel sensor having multiple photodiodes |
US10897586B2 (en) | 2018-06-28 | 2021-01-19 | Facebook Technologies, Llc | Global shutter image sensor |
JP2020020675A (ja) * | 2018-08-01 | 2020-02-06 | ソニーセミコンダクタソリューションズ株式会社 | 計測装置 |
JP7048448B2 (ja) | 2018-08-14 | 2022-04-05 | 株式会社東芝 | 固体撮像装置 |
US10931884B2 (en) | 2018-08-20 | 2021-02-23 | Facebook Technologies, Llc | Pixel sensor having adaptive exposure time |
US11956413B2 (en) | 2018-08-27 | 2024-04-09 | Meta Platforms Technologies, Llc | Pixel sensor having multiple photodiodes and shared comparator |
US11595602B2 (en) | 2018-11-05 | 2023-02-28 | Meta Platforms Technologies, Llc | Image sensor post processing |
US11102430B2 (en) | 2018-12-10 | 2021-08-24 | Facebook Technologies, Llc | Pixel sensor having multiple photodiodes |
KR102646902B1 (ko) | 2019-02-12 | 2024-03-12 | 삼성전자주식회사 | 거리 측정을 위한 이미지 센서 |
CN113518930B (zh) * | 2019-03-08 | 2024-05-03 | 布鲁克曼科技株式会社 | 距离图像传感器以及距离图像拍摄装置 |
JP2020148682A (ja) * | 2019-03-14 | 2020-09-17 | ソニーセミコンダクタソリューションズ株式会社 | 距離測定装置及びスキュー補正方法 |
US11218660B1 (en) | 2019-03-26 | 2022-01-04 | Facebook Technologies, Llc | Pixel sensor having shared readout structure |
US11070757B2 (en) * | 2019-05-02 | 2021-07-20 | Guangzhou Tyrafos Semiconductor Technologies Co., Ltd | Image sensor with distance sensing function and operating method thereof |
US11943561B2 (en) | 2019-06-13 | 2024-03-26 | Meta Platforms Technologies, Llc | Non-linear quantization at pixel sensor |
US11936998B1 (en) | 2019-10-17 | 2024-03-19 | Meta Platforms Technologies, Llc | Digital pixel sensor having extended dynamic range |
CN115152202A (zh) | 2020-02-25 | 2022-10-04 | 新唐科技日本株式会社 | 固体摄像装置及摄像装置 |
US11902685B1 (en) | 2020-04-28 | 2024-02-13 | Meta Platforms Technologies, Llc | Pixel sensor having hierarchical memory |
US11910114B2 (en) | 2020-07-17 | 2024-02-20 | Meta Platforms Technologies, Llc | Multi-mode image sensor |
US11956560B2 (en) | 2020-10-09 | 2024-04-09 | Meta Platforms Technologies, Llc | Digital pixel sensor having reduced quantization operation |
JP2022138434A (ja) | 2021-03-10 | 2022-09-26 | 株式会社東芝 | 固体撮像装置、固体撮像装置の駆動方法 |
JP2023003094A (ja) * | 2021-06-23 | 2023-01-11 | ソニーセミコンダクタソリューションズ株式会社 | 測距装置および方法、並びにプログラム |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3786540B2 (ja) | 1999-04-15 | 2006-06-14 | 株式会社ルネサステクノロジ | タイミング制御回路装置 |
US6300807B1 (en) * | 1998-09-04 | 2001-10-09 | Hitachi, Ltd. | Timing-control circuit device and clock distribution system |
JP4337779B2 (ja) * | 2004-07-01 | 2009-09-30 | ソニー株式会社 | 物理情報取得方法および物理情報取得装置並びに物理量分布検知の半導体装置 |
US7903160B2 (en) * | 2007-05-10 | 2011-03-08 | Sony Corporation | Data transfer circuit, solid-state imaging device and camera |
JP5115335B2 (ja) * | 2008-05-27 | 2013-01-09 | ソニー株式会社 | 固体撮像素子及びカメラシステム |
JP5533069B2 (ja) * | 2009-03-18 | 2014-06-25 | 株式会社リコー | 画像形成装置、画像形成方法およびプログラム |
TW201423965A (zh) * | 2012-08-03 | 2014-06-16 | Univ Shizuoka Nat Univ Corp | 半導體元件及固體攝像裝置 |
-
2015
- 2015-02-06 WO PCT/JP2015/053370 patent/WO2015119243A1/ja active Application Filing
- 2015-02-06 JP JP2015561054A patent/JP6501403B2/ja active Active
- 2015-02-06 US US15/116,732 patent/US9832409B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20160353045A1 (en) | 2016-12-01 |
JPWO2015119243A1 (ja) | 2017-03-30 |
WO2015119243A1 (ja) | 2015-08-13 |
US9832409B2 (en) | 2017-11-28 |
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