JP6500987B2 - 積層配線基板およびこれを備えるプローブカード - Google Patents
積層配線基板およびこれを備えるプローブカード Download PDFInfo
- Publication number
- JP6500987B2 JP6500987B2 JP2017525284A JP2017525284A JP6500987B2 JP 6500987 B2 JP6500987 B2 JP 6500987B2 JP 2017525284 A JP2017525284 A JP 2017525284A JP 2017525284 A JP2017525284 A JP 2017525284A JP 6500987 B2 JP6500987 B2 JP 6500987B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode
- resin
- core substrate
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000523 sample Substances 0.000 title claims description 29
- 229920005989 resin Polymers 0.000 claims description 131
- 239000011347 resin Substances 0.000 claims description 131
- 239000000758 substrate Substances 0.000 claims description 94
- 239000000919 ceramic Substances 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 claims description 22
- 238000007689 inspection Methods 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 118
- 206010040844 Skin exfoliation Diseases 0.000 description 19
- 239000004020 conductor Substances 0.000 description 15
- 239000003990 capacitor Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000004299 exfoliation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000007596 consolidation process Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015124027 | 2015-06-19 | ||
JP2015124027 | 2015-06-19 | ||
PCT/JP2016/067878 WO2016204209A1 (ja) | 2015-06-19 | 2016-06-16 | 積層配線基板およびこれを備えるプローブカード |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016204209A1 JPWO2016204209A1 (ja) | 2018-04-05 |
JP6500987B2 true JP6500987B2 (ja) | 2019-04-17 |
Family
ID=57545710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017525284A Active JP6500987B2 (ja) | 2015-06-19 | 2016-06-16 | 積層配線基板およびこれを備えるプローブカード |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6500987B2 (ko) |
KR (1) | KR102014111B1 (ko) |
WO (1) | WO2016204209A1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI663407B (zh) * | 2018-06-06 | 2019-06-21 | 中華精測科技股份有限公司 | 探針卡裝置及其立體式信號轉接結構 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007234659A (ja) * | 2006-02-27 | 2007-09-13 | Kyocera Corp | 基板およびそれを用いた電子装置 |
JP2009081334A (ja) * | 2007-09-27 | 2009-04-16 | Aisin Aw Co Ltd | 多層プリント配線基板及びその製造方法。 |
JP5574917B2 (ja) | 2010-03-25 | 2014-08-20 | 京セラ株式会社 | 多層配線基板 |
JP5764897B2 (ja) * | 2010-09-29 | 2015-08-19 | 凸版印刷株式会社 | 半導体パッケージ基板の検査方法 |
US20140158414A1 (en) * | 2012-12-11 | 2014-06-12 | Chris Baldwin | Recessed discrete component mounting on organic substrate |
JP5958454B2 (ja) * | 2013-12-05 | 2016-08-02 | 株式会社村田製作所 | 部品内蔵モジュール |
-
2016
- 2016-06-16 JP JP2017525284A patent/JP6500987B2/ja active Active
- 2016-06-16 WO PCT/JP2016/067878 patent/WO2016204209A1/ja active Application Filing
- 2016-06-16 KR KR1020177031146A patent/KR102014111B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20170132267A (ko) | 2017-12-01 |
JPWO2016204209A1 (ja) | 2018-04-05 |
WO2016204209A1 (ja) | 2016-12-22 |
KR102014111B1 (ko) | 2019-08-26 |
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