JP6468159B2 - 搬送システムおよび搬送方法 - Google Patents
搬送システムおよび搬送方法 Download PDFInfo
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- JP6468159B2 JP6468159B2 JP2015203700A JP2015203700A JP6468159B2 JP 6468159 B2 JP6468159 B2 JP 6468159B2 JP 2015203700 A JP2015203700 A JP 2015203700A JP 2015203700 A JP2015203700 A JP 2015203700A JP 6468159 B2 JP6468159 B2 JP 6468159B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1628—Programme controls characterised by the control loop
- B25J9/163—Programme controls characterised by the control loop learning, adaptive, model based, rule based expert control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/021—Optical sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S901/00—Robots
- Y10S901/02—Arm motion controller
- Y10S901/03—Teaching system
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
10 ロボット
10a 本体部
10b 昇降軸
11 第1アーム
12 第2アーム
13 ハンド
13a 基部
13b フォーク部
13c センサ
13C 基準位置
13CL ハンド中心線
20 ロボットコントローラ
21 制御部
21a 生成部
21b 切替部
21c 動作制御部
22 記憶部
22a 教示情報
30 入力装置
31 入力部
32 受付部
50 搬送室
51 正面側壁
52 背面側壁
100 基板
110 第1治具
110A ノッチ
110C 中心
110CL 中心線
111 第1目印
200 カセット
200C 収納位置
200CL 収納中心線
200F 前面
201 排除領域
210 第2治具
211 側壁
212 底壁
213 領域
214 第2目印
215 第3目印
216 目盛り
A1 第1軸
A2 第2軸
A3 第3軸
α 傾斜角
β 余裕角
Claims (11)
- 基板を搬送するハンドを有するロボットと、
前記ロボットが内部に配置される搬送室と、
平面視において、前記搬送室の側壁に並べて配置される基板収納用のカセットと、
教示情報に基づいて前記ロボットの動作を制御するロボットコントローラと
を備え、
平面視において、前記ハンドの回転軸と前記ハンドで搬送される前記基板の中心である基準位置とを結んだ線をハンド中心線とし、前記カセットにおける前記搬送室側の面である前面に垂直な線のうち当該カセットに収納された前記基板の中心を示す収納位置を通る線を収納中心線とした場合に、
前記ロボットコントローラは、
両端の前記カセットのうち少なくとも一方に対しては前記ハンド中心線を前記収納中心線よりも前記ロボット側に傾けた状態で、残りの前記カセットに対しては前記ハンド中心線を前記収納中心線に重ねた状態で、それぞれ、前記収納位置まで前記ロボットに前記基板を搬送させる動作制御部と、
前記ハンド中心線を前記傾けた状態で前記基板が搬送される前記カセットについて、前記基準位置を前記収納位置へ移動させた状態における前記ハンド中心線と前記収納中心線とがなす角である傾斜角に基づき、前記ハンドが前記基板を搬送する際に通過する位置および当該位置における姿勢を含んだ前記教示情報を生成する生成部と
を備えることを特徴とする搬送システム。 - 前記生成部は、
前記収納位置を前記収納中心線に沿って前記搬送室側へ予め定められたシフト量だけシフトすることによって生成した中間位置を含むとともに、前記傾斜角に予め定められた余裕角を加えることで生成した前記中間位置における前記ハンドの姿勢を含んだ前記教示情報を生成すること
を特徴とする請求項1に記載の搬送システム。 - 前記生成部は、
前記収納位置と前記中間位置との間において前記ハンドを前記基準位置まわりに回転させながら前記基準位置の軌跡が前記収納中心線に重なるように前記ハンドを移動させる前記教示情報を生成すること
を特徴とする請求項2に記載の搬送システム。 - 前記生成部は、
搬送中の前記基板を前記搬送室に接触させることなく前記ハンドを前記回転軸まわりに回転可能な待機位置を、予め定められた前記収納位置からのシフト量に基づいて生成するとともに、生成した前記待機位置を含んだ前記教示情報を生成すること
を特徴とする請求項2または3に記載の搬送システム。 - 前記生成部は、
前記中間位置と前記待機位置との間において前記搬送室に対する前記ハンド中心線の向きを保ったまま前記ハンドを移動させる前記教示情報を生成すること
を特徴とする請求項4に記載の搬送システム。 - 前記カセットは、
前記ハンドの侵入が禁止される排除領域を内部に有しており、
前記ハンドは、
前記カセットに収納された前記基板の収納状態を検査するセンサを先端側に有しており、
前記生成部は、
前記センサによって前記基板の収納状態を検査する位置である検査位置および該検査位置における前記ハンドの姿勢を含んだ前記教示情報を、前記排除領域および前記収納位置に基づいて生成すること
を特徴とする請求項1〜5のいずれか一つに記載の搬送システム。 - 前記ロボットコントローラは、
前記ロボットの教示を行う際に、前記基準位置から前記ハンド中心線に沿って前記ハンドの先端側へ向かう座標軸および当該座標軸と水平面内で直交する座標軸を含んだ第1直交座標系と、該第1直交座標系を前記基準位置まわりに前記傾斜角が0になるまで回転させた第2直交座標系とを切り替える切替部
を備えることを特徴とする請求項1〜5のいずれか一つに記載の搬送システム。 - 前記ロボットコントローラは、
前記第1直交座標系と前記第2直交座標系との切り替えを受け付ける受付部
を備えることを特徴とする請求項7に記載の搬送システム。 - 前記ロボットコントローラは、
前記傾斜角を入力する入力部
を備えることを特徴とする請求項1〜8のいずれか一つに記載の搬送システム。 - 前記動作制御部は、
前記収納位置を前記ロボットに教示する際には、前記基準位置まわりに前記ハンドを回転させる動作を前記ロボットに行わせること
を特徴とする請求項1〜9のいずれか一つに記載の搬送システム。 - 基板を搬送するハンドを有するロボットと、
前記ロボットが内部に配置される搬送室と、
平面視において、前記搬送室の側壁に並べて配置される基板収納用のカセットと、
教示情報に基づいて前記ロボットの動作を制御するロボットコントローラと
を用い、
平面視において、前記ハンドの回転軸と前記ハンドで搬送される前記基板の中心である基準位置とを結んだ線をハンド中心線とし、前記カセットにおける前記搬送室側の面である前面に垂直な線のうち当該カセットに収納された前記基板の中心を示す収納位置を通る線を収納中心線とした場合に、
両端の前記カセットのうち少なくとも一方に対しては前記ハンド中心線を前記収納中心線よりも前記ロボット側に傾けた状態で前記ロボットに前記基板を搬送させる工程と、
残りの前記カセットに対しては前記ハンド中心線を前記収納中心線に重ねた状態で、それぞれ、前記収納位置まで前記ロボットに前記基板を搬送させる工程と、
前記ハンド中心線を前記傾けた状態で前記基板が搬送される前記カセットについて、前記基準位置を前記収納位置へ移動させた状態における前記ハンド中心線と前記収納中心線とがなす角である傾斜角に基づき、前記ハンドが前記基板を搬送する際に通過する位置および当該位置における姿勢を含んだ前記教示情報を生成する工程と
を含むことを特徴とする搬送方法。
Priority Applications (3)
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JP2015203700A JP6468159B2 (ja) | 2015-10-15 | 2015-10-15 | 搬送システムおよび搬送方法 |
US15/291,069 US9908236B2 (en) | 2015-10-15 | 2016-10-12 | Transfer system and transfer method |
KR1020160132714A KR101850214B1 (ko) | 2015-10-15 | 2016-10-13 | 반송 시스템 및 반송 방법 |
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US10691110B2 (en) * | 2014-08-08 | 2020-06-23 | Sony Corporation | Transfer apparatus |
US9987747B2 (en) * | 2016-05-24 | 2018-06-05 | Semes Co., Ltd. | Stocker for receiving cassettes and method of teaching a stocker robot disposed therein |
JP6924112B2 (ja) * | 2017-09-29 | 2021-08-25 | 川崎重工業株式会社 | 基板搬送装置及び基板搬送ロボットと基板載置部との位置関係を求める方法 |
JP6626065B2 (ja) * | 2017-10-31 | 2019-12-25 | ファナック株式会社 | 教示点又は教示線の位置ずれを警告又は修正するロボット教示装置 |
CN113226662B (zh) * | 2018-12-28 | 2024-07-09 | 川崎重工业株式会社 | 机器人控制装置、机器人系统以及机器人控制方法 |
US11279032B2 (en) * | 2019-04-11 | 2022-03-22 | Applied Materials, Inc. | Apparatus, systems, and methods for improved joint coordinate teaching accuracy of robots |
CN114025925A (zh) * | 2019-06-27 | 2022-02-08 | 川崎重工业株式会社 | 基板扫描映射装置、其扫描映射方法及扫描映射示教方法 |
JP7356269B2 (ja) * | 2019-07-01 | 2023-10-04 | 川崎重工業株式会社 | ロボット制御装置、並びにそれを備えるロボット及びロボットシステム |
US11370114B2 (en) * | 2019-12-09 | 2022-06-28 | Applied Materials, Inc. | Autoteach enclosure system |
WO2023140259A1 (ja) * | 2022-01-21 | 2023-07-27 | 東京エレクトロン株式会社 | 搬送装置および搬送方法 |
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JP3539537B2 (ja) * | 1997-11-06 | 2004-07-07 | 株式会社三協精機製作所 | 多関節ロボット |
JP2002166376A (ja) * | 2000-11-30 | 2002-06-11 | Hirata Corp | 基板搬送用ロボット |
JP4999414B2 (ja) | 2006-09-27 | 2012-08-15 | 信越ポリマー株式会社 | 基板の取り扱い装置及び基板の取り扱い方法 |
JP5055101B2 (ja) * | 2007-12-07 | 2012-10-24 | 株式会社ダイヘン | ロボット制御装置 |
JP4746027B2 (ja) * | 2007-12-10 | 2011-08-10 | 川崎重工業株式会社 | 基板搬送方法 |
US9293355B2 (en) * | 2012-11-09 | 2016-03-22 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer system and substrate processing system |
JP5853991B2 (ja) | 2013-05-22 | 2016-02-09 | 株式会社安川電機 | 基板搬送ロボット、基板搬送システムおよび基板搬送方法 |
JP5750472B2 (ja) | 2013-05-22 | 2015-07-22 | 株式会社安川電機 | 基板搬送ロボット、基板搬送システムおよび基板の配置状態の検出方法 |
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