JP6460689B2 - 積層体の作製装置 - Google Patents
積層体の作製装置 Download PDFInfo
- Publication number
- JP6460689B2 JP6460689B2 JP2014187212A JP2014187212A JP6460689B2 JP 6460689 B2 JP6460689 B2 JP 6460689B2 JP 2014187212 A JP2014187212 A JP 2014187212A JP 2014187212 A JP2014187212 A JP 2014187212A JP 6460689 B2 JP6460689 B2 JP 6460689B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light
- support
- adhesive layer
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B2038/0052—Other operations not otherwise provided for
- B32B2038/0076—Curing, vulcanising, cross-linking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/60—In a particular environment
- B32B2309/62—Inert
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
- B32B2309/60—In a particular environment
- B32B2309/68—Vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/14—Semiconductor wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
- B32B37/22—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of both discrete and continuous layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0004—Cutting, tearing or severing, e.g. bursting; Cutter details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1858—Handling of layers or the laminate using vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1875—Tensioning
Landscapes
- Electroluminescent Light Sources (AREA)
- Laminated Bodies (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014187212A JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013193314 | 2013-09-18 | ||
| JP2013193314 | 2013-09-18 | ||
| JP2014187212A JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018240869A Division JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015083373A JP2015083373A (ja) | 2015-04-30 |
| JP2015083373A5 JP2015083373A5 (https=) | 2017-10-26 |
| JP6460689B2 true JP6460689B2 (ja) | 2019-01-30 |
Family
ID=52666884
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014187212A Expired - Fee Related JP6460689B2 (ja) | 2013-09-18 | 2014-09-16 | 積層体の作製装置 |
| JP2018240869A Active JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
| JP2020117076A Withdrawn JP2020184090A (ja) | 2013-09-18 | 2020-07-07 | 表示装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018240869A Active JP6732002B2 (ja) | 2013-09-18 | 2018-12-25 | 積層体の作製装置 |
| JP2020117076A Withdrawn JP2020184090A (ja) | 2013-09-18 | 2020-07-07 | 表示装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9981457B2 (https=) |
| JP (3) | JP6460689B2 (https=) |
| KR (1) | KR102302067B1 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9229481B2 (en) | 2013-12-20 | 2016-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| KR102358935B1 (ko) * | 2014-02-12 | 2022-02-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 전자 기기 |
| JP6378530B2 (ja) | 2014-05-03 | 2018-08-22 | 株式会社半導体エネルギー研究所 | フィルム吸着機構 |
| WO2015170208A1 (en) | 2014-05-03 | 2015-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Film-like member support apparatus |
| JP6548871B2 (ja) | 2014-05-03 | 2019-07-24 | 株式会社半導体エネルギー研究所 | 積層体の基板剥離装置 |
| JP6603486B2 (ja) | 2014-06-27 | 2019-11-06 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| WO2017115484A1 (ja) * | 2015-12-28 | 2017-07-06 | 鴻海精密工業股▲ふん▼有限公司 | 有機el表示装置の製造方法 |
| US10259207B2 (en) | 2016-01-26 | 2019-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming separation starting point and separation method |
| US10279576B2 (en) | 2016-04-26 | 2019-05-07 | Semiconductor Energy Laboratory Co., Ltd. | Peeling method and manufacturing method of flexible device |
| US10804407B2 (en) * | 2016-05-12 | 2020-10-13 | Semiconductor Energy Laboratory Co., Ltd. | Laser processing apparatus and stack processing apparatus |
| IT201600087263A1 (it) * | 2016-08-25 | 2018-02-25 | Automatic Lamination Tech S R L | Apparecchiatura per la realizzazione di un pannello composito comprendente una pellicola biadesiva interposta tra due sottili lastre metalliche |
| CN107120875B (zh) * | 2017-05-09 | 2022-05-20 | 澳柯玛股份有限公司 | 一种使内冷凝器贴合箱壳的装置及方法 |
| CN110216975B (zh) * | 2019-07-09 | 2025-03-11 | 安吉八塔机器人有限公司 | 一种多功能复合机器人系统 |
| CN110881252B (zh) * | 2019-11-26 | 2021-02-19 | 南通深南电路有限公司 | 印制电路板生产设备的控制方法及印制电路板生产设备 |
| CN111683460A (zh) * | 2020-05-26 | 2020-09-18 | 江西源盛泰电子科技有限公司 | 一种fpc钢片生产设备 |
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| JPS6052822A (ja) * | 1983-09-02 | 1985-03-26 | Tokyo Erekutoron Kk | レーザcvd装置 |
| JPH0793485B2 (ja) * | 1988-05-16 | 1995-10-09 | カシオ計算機株式会社 | Icユニットの接続方法 |
| JPH02308126A (ja) * | 1989-05-23 | 1990-12-21 | Idemitsu Kosan Co Ltd | 液晶光学素子の製造方法及びその装置 |
| JP2810532B2 (ja) | 1990-11-29 | 1998-10-15 | キヤノン株式会社 | 堆積膜形成方法及び堆積膜形成装置 |
| JP2975151B2 (ja) | 1991-03-28 | 1999-11-10 | キヤノン株式会社 | 半導体素子の連続的製造装置 |
| JP3118037B2 (ja) | 1991-10-28 | 2000-12-18 | キヤノン株式会社 | 堆積膜形成方法および堆積膜形成装置 |
| US5932302A (en) | 1993-07-20 | 1999-08-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for fabricating with ultrasonic vibration a carbon coating |
| US5457299A (en) * | 1993-10-29 | 1995-10-10 | International Business Machines Corporation | Semiconductor chip packaging method which heat cures an encapsulant deposited on a chip using a laser beam to heat the back side of the chip |
| JP3175894B2 (ja) | 1994-03-25 | 2001-06-11 | 株式会社半導体エネルギー研究所 | プラズマ処理装置及びプラズマ処理方法 |
| JPH08153759A (ja) * | 1994-11-29 | 1996-06-11 | Nec Yamagata Ltd | シングルポイントボンダーおよび半導体装置の製造方法 |
| JP3698749B2 (ja) | 1995-01-11 | 2005-09-21 | 株式会社半導体エネルギー研究所 | 液晶セルの作製方法およびその作製装置、液晶セルの生産システム |
| US5736431A (en) | 1995-02-28 | 1998-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing thin film solar battery |
| US6273955B1 (en) | 1995-08-28 | 2001-08-14 | Canon Kabushiki Kaisha | Film forming apparatus |
| JPH10328612A (ja) * | 1997-05-29 | 1998-12-15 | Idemitsu Kosan Co Ltd | 液晶光学素子の製造方法 |
| JPH11204548A (ja) * | 1998-01-09 | 1999-07-30 | Hitachi Cable Ltd | 半導体チップの貼付方法および貼付装置 |
| JP4293385B2 (ja) | 1998-01-27 | 2009-07-08 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法 |
| US20030009876A1 (en) * | 2000-01-14 | 2003-01-16 | Akira Yamauchi | Method and device for chip mounting |
| JP2001316818A (ja) | 2000-02-29 | 2001-11-16 | Canon Inc | 膜形成方法及び形成装置、並びにシリコン系膜、起電力素子及びそれを用いた太陽電池、センサー及び撮像素子 |
| JP4316767B2 (ja) | 2000-03-22 | 2009-08-19 | 株式会社半導体エネルギー研究所 | 基板処理装置 |
| JP2001274179A (ja) * | 2000-03-28 | 2001-10-05 | Hitachi Ltd | チップマウンタおよび半導体装置の製造方法 |
| US6680724B2 (en) * | 2001-05-31 | 2004-01-20 | Hewlett-Packard Development Company, L.P. | Flexible electronic viewing device |
| JP4027740B2 (ja) | 2001-07-16 | 2007-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| TW564471B (en) | 2001-07-16 | 2003-12-01 | Semiconductor Energy Lab | Semiconductor device and peeling off method and method of manufacturing semiconductor device |
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| EP1376658B1 (en) * | 2002-06-25 | 2011-07-06 | Kabushiki Kaisha Toshiba | Method and apparatus for manufacturing semiconductor device |
| CN100459060C (zh) | 2003-02-05 | 2009-02-04 | 株式会社半导体能源研究所 | 显示装置的制造方法 |
| US7554121B2 (en) | 2003-12-26 | 2009-06-30 | Semiconductor Energy Laboratory Co., Ltd. | Organic semiconductor device |
| JP4505721B2 (ja) * | 2004-02-02 | 2010-07-21 | セイコーエプソン株式会社 | 電気光学装置およびこれを備えた電子機器 |
| KR101187403B1 (ko) | 2004-06-02 | 2012-10-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 제조방법 |
| US7591863B2 (en) | 2004-07-16 | 2009-09-22 | Semiconductor Energy Laboratory Co., Ltd. | Laminating system, IC sheet, roll of IC sheet, and method for manufacturing IC chip |
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| JP2006323032A (ja) * | 2005-05-17 | 2006-11-30 | Sony Corp | フラットパネルディスプレイディバイスの欠陥画素リペア装置及びその欠陥画素リペア方法 |
| JP4916680B2 (ja) * | 2005-06-30 | 2012-04-18 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法、剥離方法 |
| US7666766B2 (en) | 2005-09-27 | 2010-02-23 | Semiconductor Energy Laboratory Co., Ltd. | Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device |
| US20070183184A1 (en) | 2006-02-03 | 2007-08-09 | Semiconductor Energy Laboratory Ltd. | Apparatus and method for manufacturing semiconductor device |
| JP2008015041A (ja) * | 2006-07-03 | 2008-01-24 | Dainippon Printing Co Ltd | アライメント貼合装置及びアライメント貼合方法 |
| TWI433306B (zh) | 2006-09-29 | 2014-04-01 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
| US8137417B2 (en) | 2006-09-29 | 2012-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Peeling apparatus and manufacturing apparatus of semiconductor device |
| KR100781708B1 (ko) * | 2006-10-12 | 2007-12-03 | 삼성전자주식회사 | 플렉서블 표시부 및 그를 갖는 휴대 단말기 |
| JP5108293B2 (ja) * | 2006-12-20 | 2012-12-26 | 富士フイルム株式会社 | 携帯機器及び撮像装置 |
| US7897482B2 (en) * | 2007-05-31 | 2011-03-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US8387674B2 (en) * | 2007-11-30 | 2013-03-05 | Taiwan Semiconductor Manufacturing Comany, Ltd. | Chip on wafer bonder |
| JPWO2009128359A1 (ja) * | 2008-04-17 | 2011-08-04 | 旭硝子株式会社 | ガラス積層体、支持体付き表示装置用パネルおよびこれらの製造方法 |
| JP5151653B2 (ja) * | 2008-04-23 | 2013-02-27 | 大日本印刷株式会社 | 貼合装置及び貼合方法 |
| JP2010267420A (ja) * | 2009-05-13 | 2010-11-25 | Panasonic Corp | 有機el素子検査リペア方法および装置 |
| JPWO2011024690A1 (ja) * | 2009-08-27 | 2013-01-31 | 旭硝子株式会社 | フレキシブル基材−支持体の積層構造体、支持体付き電子デバイス用パネル、および電子デバイス用パネルの製造方法 |
| KR101176474B1 (ko) * | 2011-05-12 | 2012-08-24 | 주식회사 코윈디에스티 | 픽셀재생장치 및 이를 이용한 픽셀재생방법 |
| US9487880B2 (en) | 2011-11-25 | 2016-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Flexible substrate processing apparatus |
| DE102012101210A1 (de) * | 2012-02-15 | 2013-08-22 | Maxim Stührenberg | Anzeigevorrichtung mit einem Gehäuse und mit einer flexiblen elektronisch ansteuerbaren Anzeigeeinrichtung |
-
2014
- 2014-09-12 US US14/484,802 patent/US9981457B2/en active Active
- 2014-09-16 JP JP2014187212A patent/JP6460689B2/ja not_active Expired - Fee Related
- 2014-09-16 KR KR1020140123007A patent/KR102302067B1/ko not_active Expired - Fee Related
-
2018
- 2018-12-25 JP JP2018240869A patent/JP6732002B2/ja active Active
-
2020
- 2020-07-07 JP JP2020117076A patent/JP2020184090A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| KR20150032486A (ko) | 2015-03-26 |
| US20150075720A1 (en) | 2015-03-19 |
| KR102302067B1 (ko) | 2021-09-13 |
| JP2019091698A (ja) | 2019-06-13 |
| JP2015083373A (ja) | 2015-04-30 |
| JP2020184090A (ja) | 2020-11-12 |
| US9981457B2 (en) | 2018-05-29 |
| JP6732002B2 (ja) | 2020-07-29 |
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