JP6446881B2 - ガス供給装置及びバルブ装置 - Google Patents
ガス供給装置及びバルブ装置 Download PDFInfo
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- JP6446881B2 JP6446881B2 JP2014147035A JP2014147035A JP6446881B2 JP 6446881 B2 JP6446881 B2 JP 6446881B2 JP 2014147035 A JP2014147035 A JP 2014147035A JP 2014147035 A JP2014147035 A JP 2014147035A JP 6446881 B2 JP6446881 B2 JP 6446881B2
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- 238000000034 method Methods 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 16
- 239000012495 reaction gas Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 8
- 238000011144 upstream manufacturing Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000007795 chemical reaction product Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 17
- 238000000231 atomic layer deposition Methods 0.000 description 13
- 239000011261 inert gas Substances 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 6
- 230000002265 prevention Effects 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000002052 molecular layer Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
- F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- Y10T137/87652—With means to promote mixing or combining of plural fluids
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Description
また他の発明の目的は、前記技術の実施に適したバルブ装置を提供することにある。
前記処理ガスを前記処理容器内に供給するための処理ガス流路と、
前記置換ガスを前記処理容器に供給するための置換ガス流路と、
前記置換ガス流路が前記処理ガス流路と合流する部位を含むバルブ装置と、
前記置換ガスを加熱する目的で前記置換ガス流路における前記バルブ装置よりも上流側に設けられた置換ガス加熱部と、を備えたことを特徴とする。
第1のガス導入ポート、第2のガス導入ポート、及びガス吐出ポートと、
前記第1のガス導入ポートから前記第1の弁室に接続され、前記第1の弁体部により開閉される第1のガス流路と、
前記第1の弁室から前記ガス吐出ポートに至るガス吐出流路と、
前記第2のガス導入ポートからオリフィスを介して、前記第1の弁体部及び第2の弁体部の各々により開閉されないように前記ガス吐出流路に連通する第2のガス流路と、
前記第2のガス導入ポートから前記第2の弁室を介して、前記第2のガス流路における前記オリフィスの下流側に合流するように形成されると共に前記第2の弁体部により開閉されるバイパス流路と、を備えたことを特徴とする。
また処理容器10の側壁内や天井部3の内部には、図示しないヒータなどの昇温機構が設けられており、天井部3及び処理容器10の内面の温度が例えば150℃に設定されている。これにより例えば処理容器10の内部において処理ガスの吸着を抑制している。
なお後述の作用の説明において、バルブV1(V2)を開くとは、第1の弁体部59a(第2の弁体部59b)が第1の弁座57a(第2の弁座57b)から離れた状態であり、バルブV1(V2)を閉じるとは、第1の弁体部59a(第2の弁体部59bが下降して、第1の弁座57a(第2の弁座57b)に着座した状態のことを言う。
供給サイクルが設定回数だけ繰り返された後は、N2ガスをしばらく処理容器10内に供給し、その後載置台2を搬入出位置に下降させ、ゲートバルブ12を開いてウエハWを処理容器10から搬出する。
バルブ装置1において、図12に示すように逆流防止用のN2ガスのガス流路50をV字流路56にオリフィス92を介して接続してもよいし、図12に示す構造に代えて、N2ガス導入路50をV字流路56に接続せずに直接ガス吐出流路55にオリフィスを介して接続してもよい。また図2に示すV字流路56に相当する流路、即ち逆流防止用のN2ガス及び置換ガスであるN2ガスが合流した後の流路の出口が第1の弁室58aを介さずにガス吐出流路55に開口されていてもよい。
ガスの置換ガス加熱部54、64は、バルブ装置1の上流側に設けることに限らず、バルブ装置1の下流側に設けてもよい。
成膜処理の種別としては、TiCl4ガス、NH3ガスに限らず、原料ガスとして有機系のシリコンソースを用い、反応ガスとしてオゾンガスを用いてシリコン酸化膜を成膜する場合、あるいは原料ガスとしてジクロロシランガスなどのシラン系のガスを用い、反応ガスとしてNH3ガスを用いていわゆるSiN膜を成膜する場合などであってもよい。
置換ガスであるN2ガスの流路は、逆流防止用のN2ガス及び処理ガスが流れる流路とは別個の専用の流路を設けて処理容器10内に供給するようにしてもよい。
5 処理ガス流路
8、81 N2ガス流路
10 処理容器
50 N2ガス導入路
51、61 バイパス流路
52 オリフィス
52a オリフィス形成部材
53 オリフィス
53a オリフィス形成部材
54、64 置換ガス加熱部
55 ガス吐出流路
57a,57b 第1、第2の弁座
58a,58b 第1、第2の弁室
59a,59b 第1、第2の弁体部
74 TiCl4ガス導入口
75 N2ガス導入口
76 ガス吐出口
80 TiCl4ガス流路
82 NH3ガス流路
100 ガス供給装置
Claims (12)
- 基板が置かれている真空雰囲気とされた処理容器内に、処理ガスである原料ガス、雰囲気を置換するための置換ガス、及び原料ガスと反応して基板上に反応生成物を生成するための処理ガスである反応ガスを順番に複数サイクル供給するためのガス供給装置において、
前記処理ガスを前記処理容器内に供給するための処理ガス流路と、
前記置換ガスを前記処理容器に供給するための置換ガス流路と、
前記置換ガス流路が前記処理ガス流路と合流する部位を含むバルブ装置と、
前記置換ガスを加熱する目的で前記置換ガス流路における前記バルブ装置よりも上流側に設けられた置換ガス加熱部と、を備えたことを特徴とするガス供給装置。 - 前記処理ガスの供給時に前記処理ガス流路に前記置換ガスの一部を供給するためのガス流路を備えることを特徴とする請求項2記載のガス供給装置。
- 前記バルブ装置は、
第1の弁室にて流路を開閉する第1の弁体部と、第2の弁室にて流路を開閉する第2の弁体部とが連設されて構成され、
処理ガスを導入する第1のガス導入ポート、置換ガスを導入する第2のガス導入ポート、及びガス吐出ポートと、
前記第1のガス導入ポートから前記第1の弁室に開口し、前記第1の弁体部により開閉される処理ガス流路である第1のガス流路と、
前記第1の弁室から前記ガス吐出ポートに至るガス吐出流路と、
前記第2のガス導入ポートからオリフィスを介して、前記第1の弁体部及び第2の弁体部の各々により開閉されないように前記ガス吐出流路に連通する第2のガス流路と、
前記第2のガス流路における前記オリフィスの上流側にて当該第2のガス流路から分岐され、前記第2の弁室を介して、前記第2のガス流路における前記オリフィスの下流側に合流するように形成されると共に前記第2の弁体部により開閉されるバイパス流路と、
前記第1の弁室、第2の弁室、第1のガス流路、ガス吐出流路、第2のガス流路及びバイパス流路を加熱するための加熱機構と、
前記処理容器内に、処理ガスを供給するときには、前記第2の弁体部を閉じて前記第2のガス流路を介して置換ガスの一部を供給し、前記処理容器内の雰囲気を置換するときには、前記第2の弁体部を開いて前記第2のガス流路及び前記バイパス流路を介して置換ガスを供給するように制御信号を出力する制御部と、を備えたことを特徴とする請求項2記載のガス供給装置。 - 前記バイパス流路にはオリフィスが設けられていることを特徴とする請求項3記載のガス供給装置。
- 前記弁室の壁部に設けられた開口部にオリフィス形成部材を被せ、前記オリフィスは、このオリフィス形成部材に形成された孔部により構成されることを特徴とする請求項3または4に記載のガス供給装置。
- 前記第2のガス流路と前記バイパス流路とは合流して第1の弁体部により開閉されないように第1の弁室に接続されていることを特徴とする請求項3ないし5のいずれか一項に記載のガス供給装置。
- 請求項2に記載されたバルブ装置は、処理ガスとして原料ガスを用いた請求項3ないし6のいずれか一項に記載されたバルブ装置と、処理ガスとして反応ガスを用いた請求項3ないし6のいずれか一項に記載されたバルブ装置とを一体化したものであることを特徴とするガス供給装置。
- 請求項1ないし7のいずれか一項に記載のガス供給装置において、
前記原料ガスに代えてCVDにより成膜するための第1の反応ガスを用い、
前記反応ガスに代えてCVDにより成膜するための第2の反応ガスを用いることを特徴とするガス供給装置。 - 第1の弁室にて流路を開閉する第1の弁体部と、第2の弁室にて流路を開閉する第2の弁体部とが連設されたバルブ装置において、
第1のガス導入ポート、第2のガス導入ポート、及びガス吐出ポートと、
前記第1のガス導入ポートから前記第1の弁室に接続され、前記第1の弁体部により開閉される第1のガス流路と、
前記第1の弁室から前記ガス吐出ポートに至るガス吐出流路と、
前記第2のガス導入ポートからオリフィスを介して、前記第1の弁体部及び第2の弁体部の各々により開閉されないように前記ガス吐出流路に連通する第2のガス流路と、
前記第2のガス導入ポートから前記第2の弁室を介して、前記第2のガス流路における前記オリフィスの下流側に合流するように形成されると共に前記第2の弁体部により開閉されるバイパス流路と、を備えたことを特徴とするバルブ装置。 - 前記バイパス流路にはオリフィスが設けられていることを特徴とする請求項9に記載のバルブ装置。
- 前記弁室の壁部に設けられた開口部にオリフィス形成部材を被せ、前記オリフィスは、このオリフィス形成部材に形成された孔部により構成されることを特徴とする請求項9または10に記載のバルブ装置。
- 前記第2のガス流路と前記バイパス流路とは合流して第1の弁体部により開閉されないように第1の弁室に接続されていることを特徴とする請求項9ないし11のいずれか一項に記載のバルブ装置。
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