JP6445893B2 - 脱気装置、塗布装置、および脱気方法 - Google Patents
脱気装置、塗布装置、および脱気方法 Download PDFInfo
- Publication number
- JP6445893B2 JP6445893B2 JP2015029149A JP2015029149A JP6445893B2 JP 6445893 B2 JP6445893 B2 JP 6445893B2 JP 2015029149 A JP2015029149 A JP 2015029149A JP 2015029149 A JP2015029149 A JP 2015029149A JP 6445893 B2 JP6445893 B2 JP 6445893B2
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- Prior art keywords
- pipe
- deaeration
- tank
- horizontal
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000576 coating method Methods 0.000 title claims description 50
- 239000011248 coating agent Substances 0.000 title claims description 49
- 238000007872 degassing Methods 0.000 title claims description 32
- 239000007788 liquid Substances 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 13
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 230000006837 decompression Effects 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000013019 agitation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 75
- 239000000758 substrate Substances 0.000 description 35
- 238000012986 modification Methods 0.000 description 8
- 230000004048 modification Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
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- 238000004519 manufacturing process Methods 0.000 description 5
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- 238000004590 computer program Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Landscapes
- Coating Apparatus (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015029149A JP6445893B2 (ja) | 2015-02-18 | 2015-02-18 | 脱気装置、塗布装置、および脱気方法 |
| CN201521126941.6U CN205308730U (zh) | 2015-02-18 | 2015-12-29 | 脱气装置以及涂布装置 |
| TW105100210A TWI592201B (zh) | 2015-02-18 | 2016-01-06 | Degassing device, coating device and degassing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015029149A JP6445893B2 (ja) | 2015-02-18 | 2015-02-18 | 脱気装置、塗布装置、および脱気方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016150310A JP2016150310A (ja) | 2016-08-22 |
| JP6445893B2 true JP6445893B2 (ja) | 2018-12-26 |
Family
ID=56199946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015029149A Active JP6445893B2 (ja) | 2015-02-18 | 2015-02-18 | 脱気装置、塗布装置、および脱気方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6445893B2 (zh) |
| CN (1) | CN205308730U (zh) |
| TW (1) | TWI592201B (zh) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6783105B2 (ja) * | 2016-09-16 | 2020-11-11 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄方法、塗布装置 |
| TWI644023B (zh) * | 2017-09-05 | 2018-12-11 | Scientech Corporation | 流體輸送裝置 |
| JP6808696B2 (ja) * | 2018-09-14 | 2021-01-06 | 株式会社Ｓｃｒｅｅｎホールディングス | 供給装置、塗布装置、および供給方法 |
| JP7202132B2 (ja) * | 2018-10-12 | 2023-01-11 | 東レエンジニアリング株式会社 | 脱泡装置及び塗布装置 |
| JP7245795B2 (ja) * | 2020-01-23 | 2023-03-24 | 株式会社Ｓｃｒｅｅｎホールディングス | エージング装置、処理システム、およびエージング方法 |
| CN112337672A (zh) * | 2020-11-17 | 2021-02-09 | 周绿梅 | 一种喷洒面积广的家具喷涂设备 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004313891A (ja) * | 2003-04-15 | 2004-11-11 | Seiko Epson Corp | 液滴吐出方法、及び液滴吐出装置 |
-
2015
- 2015-02-18 JP JP2015029149A patent/JP6445893B2/ja active Active
- 2015-12-29 CN CN201521126941.6U patent/CN205308730U/zh active Active
-
2016
- 2016-01-06 TW TW105100210A patent/TWI592201B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016150310A (ja) | 2016-08-22 |
| CN205308730U (zh) | 2016-06-15 |
| TW201630647A (zh) | 2016-09-01 |
| TWI592201B (zh) | 2017-07-21 |
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