JP6413694B2 - 脆性基板の分断方法 - Google Patents

脆性基板の分断方法 Download PDF

Info

Publication number
JP6413694B2
JP6413694B2 JP2014237467A JP2014237467A JP6413694B2 JP 6413694 B2 JP6413694 B2 JP 6413694B2 JP 2014237467 A JP2014237467 A JP 2014237467A JP 2014237467 A JP2014237467 A JP 2014237467A JP 6413694 B2 JP6413694 B2 JP 6413694B2
Authority
JP
Japan
Prior art keywords
trench line
line
substrate
glass substrate
trench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014237467A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016098153A (ja
Inventor
曽山　浩
浩 曽山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2014237467A priority Critical patent/JP6413694B2/ja
Priority to TW104136383A priority patent/TWI678343B/zh
Priority to KR1020150161659A priority patent/KR20160062695A/ko
Priority to CN201510801190.1A priority patent/CN105621876B/zh
Publication of JP2016098153A publication Critical patent/JP2016098153A/ja
Application granted granted Critical
Publication of JP6413694B2 publication Critical patent/JP6413694B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP2014237467A 2014-11-25 2014-11-25 脆性基板の分断方法 Expired - Fee Related JP6413694B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2014237467A JP6413694B2 (ja) 2014-11-25 2014-11-25 脆性基板の分断方法
TW104136383A TWI678343B (zh) 2014-11-25 2015-11-04 脆性基板之分斷方法
KR1020150161659A KR20160062695A (ko) 2014-11-25 2015-11-18 취성 기판의 분단 방법
CN201510801190.1A CN105621876B (zh) 2014-11-25 2015-11-19 脆性基板的切断方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014237467A JP6413694B2 (ja) 2014-11-25 2014-11-25 脆性基板の分断方法

Publications (2)

Publication Number Publication Date
JP2016098153A JP2016098153A (ja) 2016-05-30
JP6413694B2 true JP6413694B2 (ja) 2018-10-31

Family

ID=56037277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014237467A Expired - Fee Related JP6413694B2 (ja) 2014-11-25 2014-11-25 脆性基板の分断方法

Country Status (4)

Country Link
JP (1) JP6413694B2 (zh)
KR (1) KR20160062695A (zh)
CN (1) CN105621876B (zh)
TW (1) TWI678343B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI605024B (zh) * 2015-08-07 2017-11-11 Mitsuboshi Diamond Ind Co Ltd Breaking method of brittle substrate
JP6555002B2 (ja) * 2015-08-19 2019-08-07 三星ダイヤモンド工業株式会社 スクライブラインの検査方法
JP2018150191A (ja) * 2017-03-13 2018-09-27 日本電気硝子株式会社 ガラス板の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6402004B1 (en) * 1998-09-16 2002-06-11 Hoya Corporation Cutting method for plate glass mother material
JP3792508B2 (ja) * 2000-12-19 2006-07-05 三星ダイヤモンド工業株式会社 貼り合わせ脆性基板の分断方法
KR100549099B1 (ko) 2001-06-14 2006-02-02 미쓰보시 다이야몬도 고교 가부시키가이샤 유기이엘 디스플레이 제조장치 및 유기이엘 디스플레이의제조방법
TWI226877B (en) 2001-07-12 2005-01-21 Mitsuboshi Diamond Ind Co Ltd Method of manufacturing adhered brittle material substrates and method of separating adhered brittle material substrates
JP2007039302A (ja) * 2005-08-05 2007-02-15 Matsushita Electric Ind Co Ltd ガラス基板割断方法およびガラス基板割断装置
JP2008195571A (ja) * 2007-02-13 2008-08-28 Shiraitekku:Kk 基板の分断装置
JP5076662B2 (ja) * 2007-06-13 2012-11-21 澁谷工業株式会社 脆性材料の割断方法およびその装置
JP4730345B2 (ja) * 2007-06-18 2011-07-20 ソニー株式会社 ガラス基板対を有する表示装置及びその切断方法
JP5476063B2 (ja) * 2009-07-28 2014-04-23 浜松ホトニクス株式会社 加工対象物切断方法
JP5686291B2 (ja) * 2011-03-04 2015-03-18 旭硝子株式会社 矩形板状物の切断装置及び製造方法
JP2012193060A (ja) * 2011-03-15 2012-10-11 Asahi Glass Co Ltd 脆性板の切断装置および脆性板の切断方法
CN103359925B (zh) * 2012-03-27 2016-04-27 三星钻石工业股份有限公司 强化玻璃基板的刻划方法及刻划装置
JP2014051415A (ja) * 2012-09-07 2014-03-20 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板のスクライブ方法
US20150299021A1 (en) * 2012-11-09 2015-10-22 Nippon Electric Glass Co., Ltd. Initial crack formation device, and formation method
JP6311798B2 (ja) * 2014-11-25 2018-04-18 三星ダイヤモンド工業株式会社 脆性基板の分断方法

Also Published As

Publication number Publication date
JP2016098153A (ja) 2016-05-30
KR20160062695A (ko) 2016-06-02
CN105621876A (zh) 2016-06-01
TW201628983A (zh) 2016-08-16
TWI678343B (zh) 2019-12-01
CN105621876B (zh) 2020-03-10

Similar Documents

Publication Publication Date Title
JP6288258B2 (ja) 脆性基板の分断方法
JP6432245B2 (ja) 基板分断方法
JP6311798B2 (ja) 脆性基板の分断方法
JP6413694B2 (ja) 脆性基板の分断方法
JP6555354B2 (ja) 脆性基板の分断方法
JP6493537B2 (ja) 脆性基板の分断方法
JP6350669B2 (ja) 脆性基板の分断方法
CN106079116B (zh) 脆性材料基板的断开方法
JP6413693B2 (ja) 脆性基板の分断方法
JP6288293B2 (ja) 脆性基板の分断方法
JP2016098154A (ja) 脆性基板の分断方法
JP2016009773A (ja) 単結晶基板の分断方法
JP6648817B2 (ja) 脆性基板の分断方法
TWI610892B (zh) 脆性基板之分斷方法
JP2017065007A (ja) 脆性基板の分断方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20171030

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180719

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180904

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180917

R150 Certificate of patent or registration of utility model

Ref document number: 6413694

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees