JP6410004B1 - トンネル磁気抵抗効果素子、磁気メモリ、及び内蔵型メモリ - Google Patents
トンネル磁気抵抗効果素子、磁気メモリ、及び内蔵型メモリ Download PDFInfo
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- 239000011810 insulating material Substances 0.000 claims abstract description 8
- 230000002093 peripheral effect Effects 0.000 claims description 41
- 230000000694 effects Effects 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 13
- 229910004121 SrRuO Inorganic materials 0.000 claims description 6
- 229910011208 Ti—N Inorganic materials 0.000 claims description 6
- 229910007744 Zr—N Inorganic materials 0.000 claims description 6
- 230000001939 inductive effect Effects 0.000 description 18
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- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- 229910052721 tungsten Inorganic materials 0.000 description 1
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Abstract
Description
WU>16.4×TE …(1)
これにより、下地層は、当該下地層の面内方向において、ビア配線部の上面の周辺領域上における下地層の厚さTEの16.4倍より大きな幅WUを有することができる。この大きな幅WUを有するとき、周辺領域上の下地層内において亀裂といった応力緩和部が設けられて、下地層内に生じた応力が緩和される。
WU>16.4×TE …(1)
下地層21が、この大きな幅WUを有するとき、周辺領域26E上の下地層21内において、亀裂といった応力緩和部30がTEMによって観測される。TEMによる応力緩和部30の観測では、TEMの倍率は、例えば50万〜500万倍である。周辺領域26E上の下地層21内において応力緩和部30が設けられて、下地層21内に生じた応力が緩和される。
Claims (14)
- ビア配線部の上面上に設けられた下地層と、前記下地層の表面上に設けられた磁気トンネル接合部と、前記ビア配線部及び前記下地層の側面と覆う層間絶縁層と、
を備え、
前記下地層は、応力緩和部を有し、
前記磁気トンネル接合部は、磁化方向が固定された参照層と、磁化自由層と、前記参照層と前記磁化自由層との間に設けられたトンネルバリア層とを有し、
前記層間絶縁層は、絶縁材料を含み、
前記下地層は、前記ビア配線部の前記上面の周辺領域上において、前記ビア配線部の前記上面の中央領域上より大きな厚さを有し、
前記下地層は、前記ビア配線部の前記上面の前記周辺領域上において、前記応力緩和部を有する、トンネル磁気抵抗効果素子。 - 前記応力緩和部は、複数の亀裂を含む、請求項1に記載のトンネル磁気抵抗効果素子。
- 前記下地層の幅をWUとし、前記ビア配線部の前記上面の前記周辺領域上における前記下地層の厚さをTEとすると、前記下地層は、式(1)を満たす幅WUを有する、請求項1又は2に記載のトンネル磁気抵抗効果素子。
WU>16.4×TE …(1) - 前記下地層は、前記トンネルバリア層の幅より大きい幅を有する、請求項1〜3のいずれか一項に記載のトンネル磁気抵抗効果素子。
- トンネルバリア層の下面は、ビア配線部の上面の中央領域上と、ビア配線部の上面の周辺領域上とにおいて、2nm以下の当該下面の高さの差を有する、請求項1〜4のいずれか一項に記載のトンネル磁気抵抗効果素子。
- 前記応力緩和部は、前記下地層の裏面から前記下地層の前記表面に向かって延在する、請求項1〜5のいずれか一項に記載のトンネル磁気抵抗効果素子。
- 前記応力緩和部の上端は、前記下地層の前記裏面と前記下地層の前記表面との間に位置する、請求項6に記載のトンネル磁気抵抗効果素子。
- ビア配線部の上面上に設けられた下地層と、前記下地層の表面上に設けられた磁気トンネル接合部と、前記ビア配線部及び前記下地層の側面と覆う層間絶縁層と、
を備え、
前記下地層は、応力緩和部を有し、
前記磁気トンネル接合部は、磁化方向が固定された参照層と、磁化自由層と、前記参照層と前記磁化自由層との間に設けられたトンネルバリア層とを有し、
前記層間絶縁層は、絶縁材料を含み、
前記応力緩和部は、前記下地層の裏面から前記下地層の前記表面に向かって延在し、
前記応力緩和部の上端は、前記下地層の前記裏面と前記下地層の前記表面との間に位置する、トンネル磁気抵抗効果素子。 - 前記応力緩和部は、複数の亀裂を含む、請求項8に記載のトンネル磁気抵抗効果素子。
- 前記下地層は、Nb−N、Ta−N、Ti−N、V−N、及びZr−Nからなる群より選択される少なくとも一つの窒化物を含む、請求項1〜9のいずれか一項に記載のトンネル磁気抵抗効果素子。
- 前記下地層は、NaRh2O4、NaV2O4、RuO2、SrRuO2、ReO3、及びIrO2からなる群より選択される少なくとも一つの酸化物を含む、請求項1〜9のいずれか一項に記載のトンネル磁気抵抗効果素子。
- 前記下地層は、Nb−N、Ta−N、Ti−N、V−N、及びZr−Nからなる群より選択される少なくとも一つの窒化物と、NaRh2O4、NaV2O4、RuO2、SrRuO2、ReO3、及びIrO2からなる群より選択される少なくとも一つの酸化物とを含む酸窒化物を有する、請求項1〜9のいずれか一項に記載のトンネル磁気抵抗効果素子。
- 請求項1〜12のいずれか一項に記載のトンネル磁気抵抗効果素子を記憶素子として備える磁気メモリ。
- 請求項13に記載の磁気メモリを備える内蔵型メモリ。
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Citations (6)
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JP2010232499A (ja) * | 2009-03-27 | 2010-10-14 | Toshiba Corp | 磁気抵抗素子および磁気メモリ |
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US10522592B2 (en) | 2019-12-31 |
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