JP6405346B2 - スイッチを用いて単一の信号チャネルと複数のパッドとの結合を切り替える試験回路 - Google Patents

スイッチを用いて単一の信号チャネルと複数のパッドとの結合を切り替える試験回路 Download PDF

Info

Publication number
JP6405346B2
JP6405346B2 JP2016161738A JP2016161738A JP6405346B2 JP 6405346 B2 JP6405346 B2 JP 6405346B2 JP 2016161738 A JP2016161738 A JP 2016161738A JP 2016161738 A JP2016161738 A JP 2016161738A JP 6405346 B2 JP6405346 B2 JP 6405346B2
Authority
JP
Japan
Prior art keywords
test
switch
test circuit
pads
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016161738A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017129559A (ja
Inventor
鴻尉 ▲頼▼
鴻尉 ▲頼▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SYNC−TECH SYSTEM CORPORATION
Original Assignee
SYNC−TECH SYSTEM CORPORATION
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SYNC−TECH SYSTEM CORPORATION filed Critical SYNC−TECH SYSTEM CORPORATION
Publication of JP2017129559A publication Critical patent/JP2017129559A/ja
Application granted granted Critical
Publication of JP6405346B2 publication Critical patent/JP6405346B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2853—Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07385—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using switching of signals between probe tips and test bed, i.e. the standard contact matrix which in its turn connects to the tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2016161738A 2016-01-20 2016-08-22 スイッチを用いて単一の信号チャネルと複数のパッドとの結合を切り替える試験回路 Active JP6405346B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662280712P 2016-01-20 2016-01-20
US62/280,712 2016-01-20

Publications (2)

Publication Number Publication Date
JP2017129559A JP2017129559A (ja) 2017-07-27
JP6405346B2 true JP6405346B2 (ja) 2018-10-17

Family

ID=59394691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016161738A Active JP6405346B2 (ja) 2016-01-20 2016-08-22 スイッチを用いて単一の信号チャネルと複数のパッドとの結合を切り替える試験回路

Country Status (4)

Country Link
JP (1) JP6405346B2 (zh)
KR (1) KR101912325B1 (zh)
CN (1) CN106990346A (zh)
TW (1) TWI595248B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12099085B2 (en) 2021-05-18 2024-09-24 Analog Devices International Unlimited Company Apparatuses and methods for testing semiconductor circuitry using microelectromechanical systems switches

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6912776B2 (ja) * 2017-11-08 2021-08-04 グローバルウェーハズ・ジャパン株式会社 誘電体膜の電気伝導率測定装置
CN108196179A (zh) * 2017-12-05 2018-06-22 广东欧珀移动通信有限公司 印制电路板、终端及基于共用测试点的电路测试方法
CN113933683B (zh) * 2021-09-23 2024-04-23 洛晶半导体(上海)有限公司 芯片测试系统及方法
CN115856588B (zh) * 2023-02-22 2023-08-04 长鑫存储技术有限公司 芯片测试板及测试方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
JP2004125707A (ja) * 2002-10-04 2004-04-22 Tokyo Cathode Laboratory Co Ltd 半導体検査装置、半導体検査装置用マザーボード及び半導体検査方法
US20040199786A1 (en) * 2002-12-02 2004-10-07 Walmsley Simon Robert Randomisation of the location of secret information on each of a series of integrated circuits
US7414418B2 (en) * 2005-01-07 2008-08-19 Formfactor, Inc. Method and apparatus for increasing operating frequency of a system for testing electronic devices
US7245134B2 (en) * 2005-01-31 2007-07-17 Formfactor, Inc. Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes
JP2007305879A (ja) * 2006-05-12 2007-11-22 Mt Picture Display Co Ltd 半導体装置の検査方法及び検査装置
US7852094B2 (en) * 2006-12-06 2010-12-14 Formfactor, Inc. Sharing resources in a system for testing semiconductor devices
CN101545942B (zh) * 2008-03-27 2013-05-08 矽创电子股份有限公司 用于测试连接垫的电路
JP2009287943A (ja) * 2008-05-27 2009-12-10 Mitsubishi Electric Corp 基板検査方法
TWI560456B (en) * 2009-03-20 2016-12-01 Bravechips Microelectronics Method of parallel ic test and wafer containing same function dies under test and ic chips containing same function blocks under test
JP5691193B2 (ja) * 2010-02-26 2015-04-01 富士通セミコンダクター株式会社 コンタクタ、半導体装置の試験装置、及び半導体装置の製造方法
US8694845B2 (en) * 2010-04-25 2014-04-08 Ssu-Pin Ma Methods and systems for testing electronic circuits
CN102466739B (zh) * 2010-11-02 2014-04-09 旺矽科技股份有限公司 探针卡
JP2013088288A (ja) * 2011-10-18 2013-05-13 Fujitsu Semiconductor Ltd 検査装置及び検査システム
US9110134B2 (en) * 2012-12-27 2015-08-18 Intel Corporation Input/output delay testing for devices utilizing on-chip delay generation
JP2014202728A (ja) * 2013-04-10 2014-10-27 独立行政法人国立高等専門学校機構 電子的に組み替え可能な半導体特性測定装置
CN105575303A (zh) * 2015-12-24 2016-05-11 中颖电子股份有限公司 液晶驱动芯片测试方法及使用这种测试方法的液晶驱动芯片

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12099085B2 (en) 2021-05-18 2024-09-24 Analog Devices International Unlimited Company Apparatuses and methods for testing semiconductor circuitry using microelectromechanical systems switches

Also Published As

Publication number Publication date
JP2017129559A (ja) 2017-07-27
KR101912325B1 (ko) 2018-12-28
TWI595248B (zh) 2017-08-11
KR20170087383A (ko) 2017-07-28
CN106990346A (zh) 2017-07-28
TW201727249A (zh) 2017-08-01

Similar Documents

Publication Publication Date Title
JP6405346B2 (ja) スイッチを用いて単一の信号チャネルと複数のパッドとの結合を切り替える試験回路
TWI407120B (zh) 路由探針卡上信號的可程式裝置
US9885746B2 (en) Switching matrix and testing system for semiconductor characteristic measurement using the same
KR20080018133A (ko) 반도체 장치, 반도체 집적 회로 및 범프 저항 측정 방법
JP2014062925A (ja) 信号測定装置
KR20100105499A (ko) 집적 회로 병렬 테스트 방법, 장치 및 시스템
JP2010523945A (ja) アクティブプローブ集積回路を用いた電子回路試験
JP2014526141A (ja) 電気的に結合された複数の半導体ダイをウェハのスクライブライン内に位置する検査アクセスインタフェースと接触させる方法、装置、及びシステム
KR20140112135A (ko) 디바이스 인터페이스 보드의 반도체 소자 및 이를 이용한 테스트 시스템
TWI463155B (zh) 具有薄膜覆晶封裝的電子裝置
US7818640B1 (en) Test system having a master/slave JTAG controller
US10677845B2 (en) Converged test platforms and processes for class and system testing of integrated circuits
CN103185819B (zh) 探针卡及其制作方法
JP2010537187A (ja) マルチサイトプローブ
KR20140078170A (ko) 제이택 인터페이스 보드
US11069586B2 (en) Chip-on-film package
KR100882425B1 (ko) 멀티 사이트 테스트용 프로브카드
JPS63178538A (ja) 半導体集積回路装置
US7644329B2 (en) Integrated circuit testing method and related circuit thereof
TWI464410B (zh) 探針卡及其製作方法
JP2001345364A (ja) モニター用抵抗素子及び抵抗素子相対精度測定方法
KR100689218B1 (ko) 볼 그리드 어레이형 디바이스 및 이의 패키징 방법
JP2002357641A (ja) 半導体装置
KR20020045641A (ko) 반도체 디바이스
JP7037398B2 (ja) テスタ校正装置およびテスタ校正方法

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170822

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171122

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180306

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180704

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20180717

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180904

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180914

R150 Certificate of patent or registration of utility model

Ref document number: 6405346

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250