JP6404296B2 - 静電チャックの窒化アルミ誘電体の修復方法 - Google Patents
静電チャックの窒化アルミ誘電体の修復方法 Download PDFInfo
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- JP6404296B2 JP6404296B2 JP2016206156A JP2016206156A JP6404296B2 JP 6404296 B2 JP6404296 B2 JP 6404296B2 JP 2016206156 A JP2016206156 A JP 2016206156A JP 2016206156 A JP2016206156 A JP 2016206156A JP 6404296 B2 JP6404296 B2 JP 6404296B2
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- Prior art keywords
- electrostatic chuck
- dielectric layer
- base surface
- sprayed material
- chuck body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49718—Repairing
- Y10T29/49746—Repairing by applying fluent material, e.g., coating, casting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Jigs For Machine Tools (AREA)
Description
108 チャック本体
110 心棒
302 粗面
402 新しい誘電材料
700 修復された静電チャック
702 ガス保持リング
704 メサ
Claims (14)
- 静電チャックを修復する方法であって、
静電チャック本体の上面から下方の電極の深さを測定する段階と、
測定された深さに応じて、前記静電チャック本体の除去すべき一部分の厚さを決定する段階と、
前記静電チャック本体の一部分を除去してベース表面を露出させる段階であって、前記ベース表面と前記電極との間に約20μm〜約25μmの静電チャック本体を残す段階を含む、前記段階と、
前記ベース表面を粗面化する段階と、
前記粗面化されたベース表面に誘電材料をプラズマ溶射して、前記ベース表面上に溶射された材料の誘電体層を形成する段階と、
前記溶射された材料の誘電体層を高圧の、不活性ガス環境において圧縮する段階と、
前記溶射された材料の圧縮された誘電体層から材料を選択的に除去して、新しい上側表面を形成する段階と、
を含む方法。 - 前記静電チャック本体の一部分を除去して前記ベース表面を露出させる段階が、前記上面にラッピング処理を実施する段階を含む、請求項1に記載の方法。
- 前記ラッピング処理は、毎分1マイクロメートル〜毎分120マイクロメートルの範囲の速度で材料を除去する、請求項2に記載の方法。
- 前記ベース表面を粗面化する段階が、前記ベース表面をビードブラスト処理する段階を含む、請求項2に記載の方法。
- 前記粗面化されたベース表面が、約50マイクロインチ〜約300マイクロインチの範囲の表面粗さを有する、請求項3に記載の方法。
- 前記溶射された材料の誘電体層を圧縮する段階が、前記溶射された材料の誘電体層を約1Torrよりも高い圧力に曝す段階を含む、請求項1に記載の方法。
- 前記溶射された材料の圧縮された誘電体層から材料を選択的に除去して前記新しい上側表面を形成する段階が、
前記溶射された材料の圧縮された誘電体層を覆ってマスクを形成する段階と、
マスクを通って曝される前記溶射された材料の圧縮された誘電体層をビードブラスト処理してメサを形成する段階と、
を含む、請求項6に記載の方法。 - 前記新しい上側表面をポリッシングする段階を更に含み、前記新しい上側表面をポリッシングする段階が前記メサからバリを除去する段階を含む、請求項7に記載の方法。
- 前記新しい上側表面をポリッシングする段階は、最小の力で柔らかいポリッシングパッドを用いる、請求項8に記載の方法。
- ベース層が第1の材料を含み、前記溶射された材料の誘電体層が前記第1の材料とは異なる第2の材料を含む、請求項1に記載の方法。
- 前記溶射された材料の誘電体層が、更に、酸化イットリウム、酸化アルミニウム、酸化チタン、酸化サマリウム、又はこれらの組合せを含む、請求項10に記載の方法。
- 前記静電チャックの上側表面から下方の前記電極の深さを測定する段階が、前記電極と前記上面との間の前記静電チャック本体の静電容量を測定する段階を含む、請求項1に記載の方法。
- 前記溶射された材料の誘電体層が、酸化イットリウム、酸化アルミニウム、酸化チタン、酸化サマリウム、又はこれらの組合せを含む、請求項1に記載の方法。
- 前記溶射された材料の誘電体層が、前記ベース表面と非共形的である、請求項1に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161492692P | 2011-06-02 | 2011-06-02 | |
US61/492,692 | 2011-06-02 |
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JP2014513509A Division JP2014522572A (ja) | 2011-06-02 | 2012-04-16 | 静電チャックの窒化アルミ誘電体の修復方法 |
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JP2017055126A JP2017055126A (ja) | 2017-03-16 |
JP6404296B2 true JP6404296B2 (ja) | 2018-10-10 |
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JP2014513509A Pending JP2014522572A (ja) | 2011-06-02 | 2012-04-16 | 静電チャックの窒化アルミ誘電体の修復方法 |
JP2016206156A Active JP6404296B2 (ja) | 2011-06-02 | 2016-10-20 | 静電チャックの窒化アルミ誘電体の修復方法 |
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Country Status (6)
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US (1) | US9001489B2 (ja) |
JP (2) | JP2014522572A (ja) |
KR (1) | KR101981766B1 (ja) |
CN (1) | CN103493194B (ja) |
TW (1) | TWI550762B (ja) |
WO (1) | WO2012166256A1 (ja) |
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2012
- 2012-04-16 CN CN201280020074.0A patent/CN103493194B/zh active Active
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220017961A (ko) * | 2019-10-14 | 2022-02-14 | 세메스 주식회사 | 정전 척을 구비하는 기판 처리 시스템 |
KR20230015490A (ko) * | 2019-10-14 | 2023-01-31 | 세메스 주식회사 | 정전 척을 구비하는 기판 처리 시스템 |
US11705357B2 (en) | 2019-10-14 | 2023-07-18 | Semes Co., Ltd. | Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck |
KR102381402B1 (ko) * | 2020-10-12 | 2022-03-31 | 주식회사 제스코 | 웨이퍼 정전척 재생 방법 |
Also Published As
Publication number | Publication date |
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WO2012166256A1 (en) | 2012-12-06 |
KR20140033436A (ko) | 2014-03-18 |
CN103493194A (zh) | 2014-01-01 |
TWI550762B (zh) | 2016-09-21 |
JP2017055126A (ja) | 2017-03-16 |
US9001489B2 (en) | 2015-04-07 |
US20120307412A1 (en) | 2012-12-06 |
JP2014522572A (ja) | 2014-09-04 |
CN103493194B (zh) | 2016-05-18 |
TW201308510A (zh) | 2013-02-16 |
KR101981766B1 (ko) | 2019-05-23 |
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