JP6373992B2 - 変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置 - Google Patents

変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置 Download PDF

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JP6373992B2
JP6373992B2 JP2016532170A JP2016532170A JP6373992B2 JP 6373992 B2 JP6373992 B2 JP 6373992B2 JP 2016532170 A JP2016532170 A JP 2016532170A JP 2016532170 A JP2016532170 A JP 2016532170A JP 6373992 B2 JP6373992 B2 JP 6373992B2
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stator
stage
sensor
magnet array
array
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JP2016527518A5 (enExample
JP2016527518A (ja
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シャオドン ル、
シャオドン ル、
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ザ・ユニバーシティ・オブ・ブリティッシュ・コロンビア
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Control Of Linear Motors (AREA)
JP2016532170A 2013-08-06 2014-08-06 変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置 Active JP6373992B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361862520P 2013-08-06 2013-08-06
US61/862,520 2013-08-06
US201462008519P 2014-06-06 2014-06-06
US62/008,519 2014-06-06
PCT/CA2014/050739 WO2015017933A1 (en) 2013-08-06 2014-08-06 Displacement devices and methods and apparatus for detecting and estimating motion associated with same

Publications (3)

Publication Number Publication Date
JP2016527518A JP2016527518A (ja) 2016-09-08
JP2016527518A5 JP2016527518A5 (enExample) 2017-09-14
JP6373992B2 true JP6373992B2 (ja) 2018-08-15

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JP2016532170A Active JP6373992B2 (ja) 2013-08-06 2014-08-06 変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置

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US (3) US10222237B2 (enExample)
EP (1) EP3014219B1 (enExample)
JP (1) JP6373992B2 (enExample)
CN (1) CN105452812B (enExample)
WO (1) WO2015017933A1 (enExample)

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