JP2016527518A5 - - Google Patents
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- JP2016527518A5 JP2016527518A5 JP2016532170A JP2016532170A JP2016527518A5 JP 2016527518 A5 JP2016527518 A5 JP 2016527518A5 JP 2016532170 A JP2016532170 A JP 2016532170A JP 2016532170 A JP2016532170 A JP 2016532170A JP 2016527518 A5 JP2016527518 A5 JP 2016527518A5
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- Prior art keywords
- stator
- synchronous
- sum
- sensor
- synchronization
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- 230000001360 synchronised effect Effects 0.000 claims 29
- 230000005415 magnetization Effects 0.000 claims 15
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361862520P | 2013-08-06 | 2013-08-06 | |
| US61/862,520 | 2013-08-06 | ||
| US201462008519P | 2014-06-06 | 2014-06-06 | |
| US62/008,519 | 2014-06-06 | ||
| PCT/CA2014/050739 WO2015017933A1 (en) | 2013-08-06 | 2014-08-06 | Displacement devices and methods and apparatus for detecting and estimating motion associated with same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016527518A JP2016527518A (ja) | 2016-09-08 |
| JP2016527518A5 true JP2016527518A5 (enExample) | 2017-09-14 |
| JP6373992B2 JP6373992B2 (ja) | 2018-08-15 |
Family
ID=52460453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016532170A Active JP6373992B2 (ja) | 2013-08-06 | 2014-08-06 | 変位デバイスおよび方法とそれに関連付けられた運動を検出し推定するための装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US10222237B2 (enExample) |
| EP (1) | EP3014219B1 (enExample) |
| JP (1) | JP6373992B2 (enExample) |
| CN (1) | CN105452812B (enExample) |
| WO (1) | WO2015017933A1 (enExample) |
Families Citing this family (76)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4033645A1 (en) | 2011-10-27 | 2022-07-27 | The University of British Columbia | Displacement devices and methods for fabrication, use and control of same |
| CN105452812B (zh) | 2013-08-06 | 2019-04-30 | 不列颠哥伦比亚大学 | 移位装置以及用于检测和估计与其相关联的运动的方法和设备 |
| WO2015179962A1 (en) | 2014-05-30 | 2015-12-03 | The University Of British Columbia | Displacement devices and methods for fabrication, use and control of same |
| EP3584913B1 (en) | 2014-06-07 | 2023-08-02 | The University of British Columbia | Systems for controllably moving multiple moveable stages in a displacement device |
| WO2015188281A1 (en) | 2014-06-14 | 2015-12-17 | The University Of British Columbia | Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same |
| US10091594B2 (en) | 2014-07-29 | 2018-10-02 | Cochlear Limited | Bone conduction magnetic retention system |
| US10130807B2 (en) | 2015-06-12 | 2018-11-20 | Cochlear Limited | Magnet management MRI compatibility |
| US20160381473A1 (en) | 2015-06-26 | 2016-12-29 | Johan Gustafsson | Magnetic retention device |
| EP3320606B1 (en) | 2015-07-06 | 2023-06-07 | The University Of British Columbia | Method and system for controllably moving one or more moveable stages in a displacement device |
| US10917730B2 (en) | 2015-09-14 | 2021-02-09 | Cochlear Limited | Retention magnet system for medical device |
| US9872115B2 (en) * | 2015-09-14 | 2018-01-16 | Cochlear Limited | Retention magnet system for medical device |
| DE102016002420B4 (de) * | 2016-03-02 | 2017-11-30 | TE Connectivity Sensors Germany GmbH | Verfahren zur Bestimmung der Position eines Magneten relativ zu einer Sensorzelle |
| DE102016206905B4 (de) * | 2016-04-22 | 2025-01-30 | Festo Se & Co. Kg | Linearantriebssystem und Verfahren zur Ermittlung von zwei Positionen zweier Messelemente, die längs eines Bewegungswegs eines Linearantriebssystems bewegt werden |
| DE102016215212A1 (de) | 2016-08-16 | 2018-02-22 | Robert Bosch Gmbh | Bewegungsvorrichtung mit magnetischer Positionsbestimmung und Datenübertragungsvorrichtung |
| US11647678B2 (en) | 2016-08-23 | 2023-05-09 | Analog Devices International Unlimited Company | Compact integrated device packages |
| DE102016220573A1 (de) | 2016-10-20 | 2018-04-26 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Bestimmen einer Position und/oder Orientierung eines frei schwebenden Elements |
| US10697800B2 (en) * | 2016-11-04 | 2020-06-30 | Analog Devices Global | Multi-dimensional measurement using magnetic sensors and related systems, methods, and integrated circuits |
| US11595768B2 (en) | 2016-12-02 | 2023-02-28 | Cochlear Limited | Retention force increasing components |
| DE102016224951A1 (de) | 2016-12-14 | 2018-06-14 | Robert Bosch Gmbh | Beförderungsvorrichtung mit einem Stator zur kontrollierten Beförderung eines Transportkörpers relativ zum Stator |
| CN106706222A (zh) * | 2017-01-09 | 2017-05-24 | 北京中昌天盛科技有限公司 | 检测系统及方法 |
| CN111279595B (zh) | 2017-03-27 | 2022-08-05 | 平面电机公司 | 机器人装置和用于制造、使用和控制其的方法 |
| US11223303B2 (en) * | 2017-06-19 | 2022-01-11 | Nikon Research Corporation Of America | Motor with force constant modeling and identification for flexible mode control |
| WO2019082750A1 (ja) * | 2017-10-24 | 2019-05-02 | パナソニックIpマネジメント株式会社 | 平面モータシステム、制御装置、及び、移動方法 |
| DE102017131324A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul und Planarantriebssystem |
| DE102017131320A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Planarantriebssystem, Statormodul und Sensormodul |
| DE102017131314A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131326A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131304A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131321B4 (de) | 2017-12-27 | 2020-03-12 | Beckhoff Automation Gmbh | Statoreinheit und Statormodul |
| US11628275B2 (en) | 2018-01-31 | 2023-04-18 | Analog Devices, Inc. | Electronic devices |
| CN108490390B (zh) * | 2018-02-28 | 2022-05-17 | 北京理工大学 | 一种移动磁源定位装置 |
| DE102018209403A1 (de) | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung |
| DE102018209402A1 (de) * | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Bewegungsvorrichtung mit entkoppelten Positionsreglern |
| DE102018209401A1 (de) * | 2018-06-13 | 2019-12-19 | Robert Bosch Gmbh | Beförderungsvorrichtung mit Sicherheitsfunktion |
| DE102018117953B3 (de) * | 2018-07-25 | 2019-11-07 | Beckhoff Automation Gmbh | Statoreinheit |
| DE102018117981A1 (de) * | 2018-07-25 | 2020-01-30 | Beckhoff Automation Gmbh | Statoreinheit und Statormodul |
| DE102018118004B3 (de) | 2018-07-25 | 2019-11-07 | Beckhoff Automation Gmbh | Statoreinheit |
| CN110829781B (zh) * | 2018-08-08 | 2022-07-26 | 佳能株式会社 | 运输系统、动子、控制设备及控制方法 |
| JP6938457B2 (ja) | 2018-08-08 | 2021-09-22 | キヤノン株式会社 | 搬送システム、可動子、制御装置及び制御方法 |
| CN119853368A (zh) | 2018-10-13 | 2025-04-18 | 普拉那汽车公司 | 用于识别磁性动子的系统和方法 |
| DE102018218666A1 (de) * | 2018-10-31 | 2020-04-30 | Robert Bosch Gmbh | Bewegungsvorrichtung mit Positionsbestimmungssystem |
| DE102018129739A1 (de) | 2018-11-26 | 2020-05-28 | Beckhoff Automation Gmbh | Vorrichtung zum Antreiben von wenigstens einem Mover auf einer Antriebsfläche |
| DE102018129727A1 (de) | 2018-11-26 | 2020-05-28 | Beckhoff Automation Gmbh | Vorrichtung und Verfahren zum Vermeiden einer Kollision beim Antreiben von wenigstens zwei Movern auf einer Antriebsfläche |
| DE102018129732A1 (de) | 2018-11-26 | 2020-05-28 | Beckhoff Automation Gmbh | Vorrichtung und Verfahren zum Vermeiden einer Kollision beim Antreiben von wenigstens zwei Movern auf einer Antriebsfläche |
| DE102018129738A1 (de) | 2018-11-26 | 2020-05-28 | Beckhoff Automation Gmbh | Vorrichtung und Verfahren für eine Pfadplanung für einen Mover einer Antriebsvorrichtung |
| DE102018129731A1 (de) | 2018-11-26 | 2020-05-28 | Beckhoff Automation Gmbh | Verfahren zum Antreiben eines Läufers eines Planarantriebssystems |
| WO2020111035A1 (ja) * | 2018-11-28 | 2020-06-04 | 日本精機株式会社 | 位置検出装置用磁石ユニット及び位置検出装置 |
| US10838023B2 (en) * | 2019-01-25 | 2020-11-17 | Aktiebolaget Skf | High performance magnetic ring and sensor arrangement |
| CN109660064B (zh) * | 2019-01-29 | 2024-05-17 | 苏州隐冠半导体技术有限公司 | 一种基于混合位移传感器和平面电机的位移装置 |
| CN111490642B (zh) | 2019-01-29 | 2022-05-20 | 苏州隐冠半导体技术有限公司 | 一种基于霍尔效应传感器和平面电机的位移装置 |
| WO2020243814A1 (en) | 2019-03-29 | 2020-12-10 | Planar Motors Inc | Robotic device and methods for fabrication, use and control of same |
| US11152823B2 (en) * | 2019-04-01 | 2021-10-19 | Spark Connected LLC | Translation unit for wireless power transfer |
| CN115944849A (zh) | 2019-09-27 | 2023-04-11 | 科利耳有限公司 | 用于医用植入物系统的多极磁体 |
| AT523217A1 (de) * | 2019-11-27 | 2021-06-15 | B & R Ind Automation Gmbh | Transporteinrichtung |
| US12068656B2 (en) | 2019-12-16 | 2024-08-20 | Planar Motor Incorporated | Stator modules and robotic systems |
| TW202516998A (zh) | 2020-02-20 | 2025-04-16 | 美商布魯克斯自動機械美國公司 | 線性電機、電磁輸送帶基板輸送裝置、及用於電磁輸送帶基板輸送裝置的方法 |
| EP3883124A1 (de) | 2020-03-19 | 2021-09-22 | Beckhoff Automation GmbH | Verfahren zum steuern eines planarantriebssystems und planarantriebssystem |
| EP3890171A1 (de) | 2020-04-02 | 2021-10-06 | Beckhoff Automation GmbH | Verfahren zum steuern eines planarantriebssystems und planarantriebssystem |
| DE102020204749A1 (de) | 2020-04-15 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Beförderungsvorrichtung |
| CN111564953A (zh) * | 2020-05-28 | 2020-08-21 | 复旦大学 | 平面电机位移装置 |
| DE102020115449A1 (de) * | 2020-06-10 | 2021-12-16 | Beckhoff Automation Gmbh | Verfahren zum Steuern eines Planarantriebssystems und Planarantriebssystem |
| CN112054649A (zh) * | 2020-09-18 | 2020-12-08 | 复旦大学 | 一种磁悬浮运动台 |
| CN112234800B (zh) * | 2020-12-14 | 2021-03-09 | 上海隐冠半导体技术有限公司 | 一种位移装置及磁浮平面电机 |
| DE102020135153A1 (de) | 2020-12-30 | 2022-06-30 | Fl Technology Gmbh | Logistikfläche und Verfahren zum Betreiben einer solchen |
| CN113091729B (zh) * | 2021-03-19 | 2023-07-14 | 北京控制工程研究所 | 一种磁悬浮旋转扫描载荷舱的径向位姿估计方法和系统 |
| CN113137908A (zh) * | 2021-04-02 | 2021-07-20 | 深圳市汇顶科技股份有限公司 | 感应装置、定位模组和定位方法 |
| US12206342B2 (en) | 2021-10-29 | 2025-01-21 | Brooks Automation Us, Llc | Substrate processing apparatus |
| DE102021130313A1 (de) * | 2021-11-19 | 2023-05-25 | Beckhoff Automation Gmbh | Verfahren zum Betreiben eines linearen Antriebssystems und lineares Antriebssystem |
| JP2023086105A (ja) | 2021-12-09 | 2023-06-21 | ベーウントエル・インダストリアル・オートメイション・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | 平面モータを稼働させるための方法 |
| DE102022105622B4 (de) | 2022-03-10 | 2024-06-13 | Baumann Maschinenbau Solms Gmbh & Co.Kg | Verfahren zum Sortieren von Nutzen und Anordnung zum Bearbeiten von bedruckten Bogen |
| DE102022105619A1 (de) | 2022-03-10 | 2023-09-14 | Baumann Maschinenbau Solms Gmbh & Co.Kg | Anordnung sowie Verfahren zum Bearbeiten blattförmigen Guts |
| DE102022105597B3 (de) | 2022-03-10 | 2023-03-30 | Baumann Maschinenbau Solms Gmbh & Co.Kg | Verfahren und Anordnung zum Anordnen von Nutzen |
| WO2024124358A1 (en) * | 2022-12-15 | 2024-06-20 | Planar Motor Incorporated | Displacement system, device, and method |
| CN119738885A (zh) * | 2023-09-22 | 2025-04-01 | Abb瑞士股份有限公司 | 用于探测动子的方法和电磁运输装置 |
| DE102024201808A1 (de) * | 2024-02-27 | 2025-08-28 | Infineon Technologies Ag | Zweidimensionales Magnetbasiertes Positionierungssystem und Verfahren zum Durchführen einer Magnetbasierten Positionsbestimmung |
| CN118589799A (zh) * | 2024-08-05 | 2024-09-03 | 佛山市增广智能科技有限公司 | 动磁式平面电机定子、动圈式平面电机动子及平面电机 |
Family Cites Families (116)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3376578A (en) | 1966-05-31 | 1968-04-02 | Bruce A. Sawyer | Magnetic positioning device |
| NL7302941A (enExample) | 1973-03-02 | 1974-09-04 | ||
| JPS58175020A (ja) | 1982-04-05 | 1983-10-14 | Telmec Co Ltd | 二次元精密位置決め装置 |
| US4654571A (en) | 1985-09-16 | 1987-03-31 | Hinds Walter E | Single plane orthogonally movable drive system |
| US4835424A (en) | 1987-03-23 | 1989-05-30 | Megamation Incorporated | Platen laminated in mutually perpendicular direction for use with linear motors and the like |
| US5125347A (en) | 1989-10-30 | 1992-06-30 | Hitachi, Ltd. | Power supply system for a linear motor type transportation system |
| US5196745A (en) | 1991-08-16 | 1993-03-23 | Massachusetts Institute Of Technology | Magnetic positioning device |
| JP2714502B2 (ja) | 1991-09-18 | 1998-02-16 | キヤノン株式会社 | 移動ステージ装置 |
| US5334892A (en) | 1992-12-22 | 1994-08-02 | Anorad Corporation | Positioning device for planar positioning |
| JPH086642A (ja) | 1994-06-20 | 1996-01-12 | Brother Ind Ltd | 平面モータの位置決め装置 |
| US5925956A (en) | 1995-06-30 | 1999-07-20 | Nikon Corporation | Stage construction incorporating magnetically levitated movable stage |
| AUPN422295A0 (en) | 1995-07-18 | 1995-08-10 | Bytecraft Research Pty. Ltd. | Control system |
| US5777402A (en) | 1996-06-24 | 1998-07-07 | Anorad Corporation | Two-axis motor with high density magnetic platen |
| US5886432A (en) | 1997-04-28 | 1999-03-23 | Ultratech Stepper, Inc. | Magnetically-positioned X-Y stage having six-degrees of freedom |
| US6441514B1 (en) | 1997-04-28 | 2002-08-27 | Ultratech Stepper, Inc. | Magnetically positioned X-Y stage having six degrees of freedom |
| JP4164905B2 (ja) | 1997-09-25 | 2008-10-15 | 株式会社ニコン | 電磁力モータ、ステージ装置および露光装置 |
| US6003230A (en) | 1997-10-03 | 1999-12-21 | Massachusetts Institute Of Technology | Magnetic positioner having a single moving part |
| US6876105B1 (en) | 1998-02-26 | 2005-04-05 | Anorad Corporation | Wireless encoder |
| US7170241B1 (en) | 1998-02-26 | 2007-01-30 | Anorad Corporation | Path module for a linear motor, modular linear motor system and method to control same |
| EP1063756A4 (en) | 1998-03-13 | 2001-06-13 | Nikon Corp | METHOD FOR PRODUCING A LINEAR MOTOR, LINEAR MOTOR, CARRIER SYSTEM WITH SUCH A LINEAR MOTOR, AND EXPOSURE SYSTEM |
| JP4352445B2 (ja) | 1998-03-19 | 2009-10-28 | 株式会社ニコン | 平面モータ装置、ステージ装置、露光装置及びその製造方法、並びにデバイス及びその製造方法 |
| US6252234B1 (en) | 1998-08-14 | 2001-06-26 | Nikon Corporation | Reaction force isolation system for a planar motor |
| US6097114A (en) | 1998-08-17 | 2000-08-01 | Nikon Corporation | Compact planar motor having multiple degrees of freedom |
| US6144118A (en) | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
| US6208045B1 (en) | 1998-11-16 | 2001-03-27 | Nikon Corporation | Electric motors and positioning devices having moving magnet arrays and six degrees of freedom |
| US6835941B1 (en) | 1998-11-30 | 2004-12-28 | Nikon Corporation | Stage unit and its making method, and exposure apparatus and its making method |
| KR100855921B1 (ko) | 1999-02-04 | 2008-09-02 | 가부시키가이샤 니콘 | 평면모터장치 및 그 구동방법, 스테이지장치 및 그구동방법, 노광장치 및 노광방법, 그리고 디바이스 및 그제조방법 |
| TW466542B (en) | 1999-02-26 | 2001-12-01 | Nippon Kogaku Kk | A stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same |
| US6590355B1 (en) * | 1999-06-07 | 2003-07-08 | Nikon Corporation | Linear motor device, stage device, and exposure apparatus |
| US6144119A (en) | 1999-06-18 | 2000-11-07 | Nikon Corporation | Planar electric motor with dual coil and magnet arrays |
| TWI248718B (en) | 1999-09-02 | 2006-02-01 | Koninkl Philips Electronics Nv | Displacement device |
| US6398812B1 (en) | 2000-02-10 | 2002-06-04 | Medidea, Llc | Shoulder prosthesis with anatomic reattachment features |
| US6437463B1 (en) | 2000-04-24 | 2002-08-20 | Nikon Corporation | Wafer positioner with planar motor and mag-lev fine stage |
| US6445093B1 (en) * | 2000-06-26 | 2002-09-03 | Nikon Corporation | Planar motor with linear coil arrays |
| US6452292B1 (en) * | 2000-06-26 | 2002-09-17 | Nikon Corporation | Planar motor with linear coil arrays |
| JP2002112526A (ja) * | 2000-06-26 | 2002-04-12 | Nikon Corp | 平面モータ、ステージ位置決めシステム、露光装置 |
| US6885430B2 (en) | 2000-11-16 | 2005-04-26 | Nikon Corporation | System and method for resetting a reaction mass assembly of a stage assembly |
| TWI258914B (en) | 2000-12-27 | 2006-07-21 | Koninkl Philips Electronics Nv | Displacement device |
| US20020149270A1 (en) | 2001-04-12 | 2002-10-17 | Hazelton Andrew J. | Planar electric motor with two sided magnet array |
| US6670730B2 (en) | 2001-04-12 | 2003-12-30 | Ballado Investments Inc. | Multi-phase linear motor with induction coils arranged on an axis perpendicular to the direction of motion |
| US6650079B2 (en) * | 2001-06-01 | 2003-11-18 | Nikon Corporation | System and method to control planar motors |
| US7271879B2 (en) | 2001-09-24 | 2007-09-18 | Agency For Science, Technology And Research | Decoupled planar positioning system |
| US6710495B2 (en) | 2001-10-01 | 2004-03-23 | Wisconsin Alumni Research Foundation | Multi-phase electric motor with third harmonic current injection |
| JP3916048B2 (ja) | 2002-01-10 | 2007-05-16 | 株式会社安川電機 | リニアモータ |
| DE60332681D1 (de) * | 2002-01-22 | 2010-07-08 | Ebara Corp | Trägerplattevorrichtung |
| EP1357434A1 (en) * | 2002-04-23 | 2003-10-29 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| EP1357429A1 (en) * | 2002-04-23 | 2003-10-29 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US6777896B2 (en) * | 2002-07-09 | 2004-08-17 | Nikon Corporation | Methods and apparatus for initializing a planar motor |
| CN100565234C (zh) * | 2002-10-23 | 2009-12-02 | 雅马哈株式会社 | 磁传感器制造方法 |
| JP4227452B2 (ja) | 2002-12-27 | 2009-02-18 | キヤノン株式会社 | 位置決め装置、及びその位置決め装置を利用した露光装置 |
| US7224252B2 (en) | 2003-06-06 | 2007-05-29 | Magno Corporation | Adaptive magnetic levitation apparatus and method |
| US7057370B2 (en) | 2003-06-21 | 2006-06-06 | Igor Victorovich Touzov | Ultra-fast precision motor with X, Y and Theta motion and ultra-fast optical decoding and absolute position detector |
| JP4478470B2 (ja) | 2004-01-26 | 2010-06-09 | キヤノン株式会社 | 位置決めステージ装置 |
| JP3981669B2 (ja) * | 2004-03-02 | 2007-09-26 | セイコーエプソン株式会社 | モータ及びモータの駆動システム |
| JP2005253179A (ja) | 2004-03-03 | 2005-09-15 | Canon Inc | 位置決め装置、露光装置およびデバイス製造方法 |
| JP2005261135A (ja) * | 2004-03-12 | 2005-09-22 | Seiko Epson Corp | モータ及びその駆動制御システム |
| JP2005268608A (ja) | 2004-03-19 | 2005-09-29 | Sumitomo Heavy Ind Ltd | ステージ装置 |
| US7536161B2 (en) | 2004-03-31 | 2009-05-19 | Silicon Laboratories Inc. | Magnetically differential input |
| EP1842101B1 (en) * | 2005-01-17 | 2014-09-17 | Koninklijke Philips N.V. | Displacement device |
| US7882701B2 (en) | 2005-01-18 | 2011-02-08 | Massachusetts Institute Of Technology | Microfabricated mechanical frequency multiplier |
| JP2006211812A (ja) | 2005-01-27 | 2006-08-10 | Canon Inc | 位置決め装置、露光装置、並びにデバイス製造方法 |
| JP4738829B2 (ja) | 2005-02-09 | 2011-08-03 | キヤノン株式会社 | 位置決め装置 |
| US7550890B2 (en) | 2005-08-23 | 2009-06-23 | Seagate Technology Llc | Motor assembly with an integrated flexible printed circuit |
| JP2007068256A (ja) | 2005-08-29 | 2007-03-15 | Canon Inc | ステージ装置の制御方法 |
| US7459808B2 (en) | 2005-11-15 | 2008-12-02 | Asml Netherlands B.V. | Lithographic apparatus and motor |
| US7541699B2 (en) | 2005-12-27 | 2009-06-02 | Asml Netherlands B.V. | Magnet assembly, linear actuator, planar motor and lithographic apparatus |
| TWI454859B (zh) | 2006-03-30 | 2014-10-01 | 尼康股份有限公司 | 移動體裝置、曝光裝置與曝光方法以及元件製造方法 |
| KR101626245B1 (ko) * | 2006-09-01 | 2016-05-31 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법 |
| US7504794B2 (en) | 2006-11-29 | 2009-03-17 | Chiba Precision Co., Ltd. | Planar motor |
| US7633070B2 (en) | 2006-12-18 | 2009-12-15 | Kla-Tencor Technologies Corporation | Substrate processing apparatus and method |
| KR20100016658A (ko) | 2007-04-19 | 2010-02-12 | 가부시키가이샤 니콘 | 3 운동도 이동기 및 그 제어 방법 |
| US20080285005A1 (en) * | 2007-05-15 | 2008-11-20 | Jean-Marc Gery | System and method for measuring and mapping a sideforce for a mover |
| DE102007024602A1 (de) | 2007-05-25 | 2008-11-27 | Etel S.A. | Planarmotor |
| WO2009003186A1 (en) * | 2007-06-27 | 2008-12-31 | Brooks Automation, Inc. | Multiple dimension position sensor |
| DE102007038845A1 (de) | 2007-08-16 | 2009-03-19 | Dorma Gmbh + Co. Kg | Anordnung von Statormodulen in einem Linearmotor |
| JP2009060773A (ja) | 2007-09-04 | 2009-03-19 | Canon Inc | 駆動装置およびそれを用いた平面モータおよびそれを用いた露光装置 |
| US20090195195A1 (en) | 2008-02-03 | 2009-08-06 | Lieh-Feng Huang | Position Feedback Device for a Linear Motor |
| JP2009253090A (ja) | 2008-04-08 | 2009-10-29 | Canon Inc | 位置決めステージ装置、露光装置およびデバイス製造方法 |
| JP2010004684A (ja) | 2008-06-20 | 2010-01-07 | Canon Inc | モータ装置、製造方法、露光装置及びデバイスの製造方法 |
| JP4811798B2 (ja) * | 2008-08-19 | 2011-11-09 | 株式会社安川電機 | リニアモータ装置 |
| US7965010B2 (en) | 2008-09-03 | 2011-06-21 | Bose Corporation | Linear motor with patterned magnet arrays |
| US20100090545A1 (en) * | 2008-10-09 | 2010-04-15 | Binnard Michael B | Planar motor with wedge shaped magnets and diagonal magnetization directions |
| US8492934B2 (en) | 2009-03-23 | 2013-07-23 | Nikon Corporation | Coil variations for an oval coil planar motor |
| JP5430204B2 (ja) | 2009-04-01 | 2014-02-26 | キヤノン株式会社 | リニアモータおよびそれを用いたステージ装置、露光装置およびデバイス製造方法 |
| US7808133B1 (en) | 2009-04-21 | 2010-10-05 | Asm Assembly Automation Ltd. | Dual-axis planar motor providing force constant and thermal stability |
| JP4941790B2 (ja) * | 2009-08-28 | 2012-05-30 | 村田機械株式会社 | 移動体システム |
| JP5486874B2 (ja) * | 2009-08-28 | 2014-05-07 | Thk株式会社 | 分散配置リニアモータおよび分散配置リニアモータの制御方法 |
| AU2010295220B2 (en) | 2009-09-21 | 2012-07-19 | Soderberg, Rod F. Mr | A matrix material comprising magnetic particles for use in hybrid and electric vehicles |
| CN101750187B (zh) * | 2010-01-19 | 2011-04-06 | 清华大学 | 一种基于磁钢阵列的运动平台二维定位方法 |
| US9465305B2 (en) | 2010-05-18 | 2016-10-11 | Nikon Corporation | Method for determining a commutation offset and for determining a compensation map for a stage |
| KR101211222B1 (ko) * | 2010-07-23 | 2012-12-11 | 한양대학교 산학협력단 | 이동체 움직임 감지 장치 및 방법 |
| US8593016B2 (en) | 2010-12-03 | 2013-11-26 | Sri International | Levitated micro-manipulator system |
| CN201956875U (zh) | 2011-01-27 | 2011-08-31 | 东南大学 | 梯形线圈型永磁无铁直线电机 |
| JP5649058B2 (ja) | 2011-02-02 | 2015-01-07 | 独立行政法人理化学研究所 | アンジュレータ磁石列およびアンジュレータ |
| NL2008696A (en) | 2011-05-25 | 2012-11-27 | Asml Netherlands Bv | A multi-stage system, a control method therefor, and a lithographic apparatus. |
| US9030057B2 (en) | 2011-06-24 | 2015-05-12 | Nikon Corporation | Method and apparatus to allow a plurality of stages to operate in close proximity |
| US20130140372A1 (en) | 2011-06-30 | 2013-06-06 | Nikon Corporation | Temperature control of a mover with active bypass, predictive feedforward control, and phase change housing |
| US20130164687A1 (en) | 2011-06-30 | 2013-06-27 | Michael B. Binnard | Hybrid cooling and thermal shield for electromagnetic actuators |
| EP2568582B1 (de) | 2011-09-12 | 2014-06-04 | Siemens Aktiengesellschaft | Elektrische Maschine |
| CN102501224B (zh) * | 2011-09-30 | 2016-01-27 | 中南大学 | 一种平面型磁浮直线运动平台 |
| CN103033786B (zh) * | 2011-10-08 | 2015-07-08 | 中国科学院空间科学与应用研究中心 | 一种三轴矢量磁强计正交校准方法及装置 |
| EP4033645A1 (en) | 2011-10-27 | 2022-07-27 | The University of British Columbia | Displacement devices and methods for fabrication, use and control of same |
| US9755493B2 (en) | 2012-07-31 | 2017-09-05 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Linear motor and stage apparatus |
| US8736133B1 (en) | 2013-03-14 | 2014-05-27 | Boulder Wind Power, Inc. | Methods and apparatus for overlapping windings |
| CN105452812B (zh) | 2013-08-06 | 2019-04-30 | 不列颠哥伦比亚大学 | 移位装置以及用于检测和估计与其相关联的运动的方法和设备 |
| US10084364B2 (en) | 2013-10-05 | 2018-09-25 | Nikon Research Corporation Of America | Power minimizing controller for a stage assembly |
| US10261419B2 (en) | 2014-05-22 | 2019-04-16 | Nikon Corporation | Magnet array for moving magnet planar motor |
| WO2015179962A1 (en) | 2014-05-30 | 2015-12-03 | The University Of British Columbia | Displacement devices and methods for fabrication, use and control of same |
| EP3584913B1 (en) | 2014-06-07 | 2023-08-02 | The University of British Columbia | Systems for controllably moving multiple moveable stages in a displacement device |
| WO2015188281A1 (en) | 2014-06-14 | 2015-12-17 | The University Of British Columbia | Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same |
| DE102014214693A1 (de) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Wiegen eines Behältnisses |
| DE102014214696A1 (de) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Transport eines Behältnisses relativ zu einer Füllstation |
| DE102014214697A1 (de) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Befüllen eines Behältnisses |
| DE102014214694A1 (de) | 2014-07-25 | 2016-01-28 | Robert Bosch Gmbh | Vorrichtung zum Verschließen eines Behältnisses |
| US9828192B2 (en) | 2014-07-25 | 2017-11-28 | Robert Bosch Gmbh | Conveying arrangement |
| DE102014225171A1 (de) | 2014-12-08 | 2016-06-09 | Robert Bosch Gmbh | Sicherungssystem für eine Anordnung zum Bewegen von Transportkörpern |
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2014
- 2014-08-06 CN CN201480045532.5A patent/CN105452812B/zh active Active
- 2014-08-06 EP EP14833852.8A patent/EP3014219B1/en active Active
- 2014-08-06 WO PCT/CA2014/050739 patent/WO2015017933A1/en not_active Ceased
- 2014-08-06 JP JP2016532170A patent/JP6373992B2/ja active Active
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2016
- 2016-02-04 US US15/016,027 patent/US10222237B2/en active Active
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2017
- 2017-10-23 US US15/791,345 patent/US10704927B2/en active Active
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2020
- 2020-05-29 US US16/888,599 patent/US11397097B2/en active Active
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