JP6340160B2 - 送り駆動系の設計方法 - Google Patents

送り駆動系の設計方法 Download PDF

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Publication number
JP6340160B2
JP6340160B2 JP2012123580A JP2012123580A JP6340160B2 JP 6340160 B2 JP6340160 B2 JP 6340160B2 JP 2012123580 A JP2012123580 A JP 2012123580A JP 2012123580 A JP2012123580 A JP 2012123580A JP 6340160 B2 JP6340160 B2 JP 6340160B2
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feed drive
compensator
displacement
drive mechanism
friction
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JP2012123580A
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Japanese (ja)
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JP2013254231A5 (enExample
JP2013254231A (ja
Inventor
堤　正臣
正臣 堤
浩文 板垣
浩文 板垣
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Makino Milling Machine Co Ltd
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Makino Milling Machine Co Ltd
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  • Control Of Position Or Direction (AREA)
  • Numerical Control (AREA)
  • Feedback Control In General (AREA)
JP2012123580A 2011-05-31 2012-05-30 送り駆動系の設計方法 Active JP6340160B2 (ja)

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JP2012123580A JP6340160B2 (ja) 2011-05-31 2012-05-30 送り駆動系の設計方法

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JP2011121449 2011-05-31
JP2011121449 2011-05-31
JP2012123580A JP6340160B2 (ja) 2011-05-31 2012-05-30 送り駆動系の設計方法

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JP2016190065A Division JP2017033587A (ja) 2011-05-31 2016-09-28 送り駆動系及び送り駆動系の設計方法

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JP2013254231A JP2013254231A (ja) 2013-12-19
JP2013254231A5 JP2013254231A5 (enExample) 2015-07-23
JP6340160B2 true JP6340160B2 (ja) 2018-06-06

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JP2012123580A Active JP6340160B2 (ja) 2011-05-31 2012-05-30 送り駆動系の設計方法
JP2016190065A Pending JP2017033587A (ja) 2011-05-31 2016-09-28 送り駆動系及び送り駆動系の設計方法

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6760975B2 (ja) * 2015-06-19 2020-09-23 エーエスエムエル ネザーランズ ビー．ブイ． 制御システム、位置決めシステム、リソグラフィ装置及びデバイス製造方法
CN108021039B (zh) * 2017-12-23 2020-03-17 西安交通大学 一种直线电机进给系统机电集成建模方法
JP7019857B1 (ja) 2021-07-20 2022-02-15 Dmg森精機株式会社 情報処理装置、情報処理方法および情報処理プログラム
KR102750080B1 (ko) * 2021-12-10 2025-01-07 한국철도기술연구원 대차 진동 시뮬레이터를 구현하는 방법 및 장치
CN115951575B (zh) * 2022-12-19 2025-07-29 西安精擘华科技有限公司 基于复位积分控制的进给系统摩擦力补偿方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05285786A (ja) * 1992-04-06 1993-11-02 Mitsubishi Electric Corp 位置決め制御装置
JPH0764644A (ja) * 1993-08-31 1995-03-10 Matsushita Electric Ind Co Ltd 位置決めサーボ機構のゲイン切換装置
JP3446595B2 (ja) * 1998-03-30 2003-09-16 三菱電機株式会社 サーボ装置
JP2000267712A (ja) * 1999-03-15 2000-09-29 Toyoda Mach Works Ltd 移動体の移動方向反転検出方法および該方法を用いたサーボ制御方法ならびにサーボ制御装置
JP2006079526A (ja) * 2004-09-13 2006-03-23 Mitsubishi Electric Corp 位置決め制御装置

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JP2017033587A (ja) 2017-02-09
JP2013254231A (ja) 2013-12-19

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