JP6333734B2 - レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル - Google Patents

レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル Download PDF

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Publication number
JP6333734B2
JP6333734B2 JP2014553398A JP2014553398A JP6333734B2 JP 6333734 B2 JP6333734 B2 JP 6333734B2 JP 2014553398 A JP2014553398 A JP 2014553398A JP 2014553398 A JP2014553398 A JP 2014553398A JP 6333734 B2 JP6333734 B2 JP 6333734B2
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JP
Japan
Prior art keywords
plasma
filter assembly
bulb
plasma cell
gas
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Active
Application number
JP2014553398A
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English (en)
Japanese (ja)
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JP2015505419A (ja
JP2015505419A5 (enExample
Inventor
イリヤ ベゼル
イリヤ ベゼル
アナトリー シュエメリニン
アナトリー シュエメリニン
ユージーン シフリン
ユージーン シフリン
マシュー パンザー
マシュー パンザー
マシュー ダースティン
マシュー ダースティン
ジンチェン ワン
ジンチェン ワン
アナント チンマルジー
アナント チンマルジー
ラジーブ パティル
ラジーブ パティル
ルドルフ ブランナー
ルドルフ ブランナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
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KLA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JP2015505419A5 publication Critical patent/JP2015505419A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/06—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for filtering out ultraviolet radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/14—Selection of substances for gas fillings; Specified operating pressure or temperature having one or more carbon compounds as the principal constituents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamp (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Lasers (AREA)
JP2014553398A 2012-01-17 2013-01-17 レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル Active JP6333734B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261587380P 2012-01-17 2012-01-17
US61/587,380 2012-01-17
US13/741,566 US9927094B2 (en) 2012-01-17 2013-01-15 Plasma cell for providing VUV filtering in a laser-sustained plasma light source
US13/741,566 2013-01-15
PCT/US2013/021857 WO2013109701A1 (en) 2012-01-17 2013-01-17 Plasma cell for providing vuv filtering in a laser-sustained plasma light source

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018084339A Division JP6509404B2 (ja) 2012-01-17 2018-04-25 レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル

Publications (3)

Publication Number Publication Date
JP2015505419A JP2015505419A (ja) 2015-02-19
JP2015505419A5 JP2015505419A5 (enExample) 2016-03-03
JP6333734B2 true JP6333734B2 (ja) 2018-05-30

Family

ID=48779500

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014553398A Active JP6333734B2 (ja) 2012-01-17 2013-01-17 レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル
JP2018084339A Active JP6509404B2 (ja) 2012-01-17 2018-04-25 レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018084339A Active JP6509404B2 (ja) 2012-01-17 2018-04-25 レーザ維持プラズマ光源におけるｖｕｖフィルタリングを提供するためのプラズマセル

Country Status (5)

Country Link
US (3) US9927094B2 (enExample)
JP (2) JP6333734B2 (enExample)
KR (2) KR102134110B1 (enExample)
DE (2) DE112013000595T5 (enExample)
WO (1) WO2013109701A1 (enExample)

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US8853655B2 (en) * 2013-02-22 2014-10-07 Kla-Tencor Corporation Gas refraction compensation for laser-sustained plasma bulbs
US9709811B2 (en) 2013-08-14 2017-07-18 Kla-Tencor Corporation System and method for separation of pump light and collected light in a laser pumped light source
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US9924585B2 (en) 2013-12-13 2018-03-20 Asml Netherlands B.V. Radiation source, metrology apparatus, lithographic system and device manufacturing method
US9433070B2 (en) 2013-12-13 2016-08-30 Kla-Tencor Corporation Plasma cell with floating flange
CN105830198B (zh) * 2013-12-13 2017-10-27 Asml荷兰有限公司 辐射源、量测设备、光刻系统和器件制造方法
US9530636B2 (en) 2014-03-20 2016-12-27 Kla-Tencor Corporation Light source with nanostructured antireflection layer
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US12452987B2 (en) * 2023-02-14 2025-10-21 Kla Corporation High-power compact VUV laser-sustained plasma light source

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Also Published As

Publication number Publication date
KR102134110B1 (ko) 2020-07-14
JP2015505419A (ja) 2015-02-19
KR20190090058A (ko) 2019-07-31
KR20140123072A (ko) 2014-10-21
US9927094B2 (en) 2018-03-27
KR102004520B1 (ko) 2019-07-26
DE112013000595T5 (de) 2014-10-16
US20180172240A1 (en) 2018-06-21
JP6509404B2 (ja) 2019-05-08
US10976025B2 (en) 2021-04-13
US20210231292A1 (en) 2021-07-29
US20130181595A1 (en) 2013-07-18
DE112013007825B4 (de) 2023-11-02
WO2013109701A1 (en) 2013-07-25
JP2018113272A (ja) 2018-07-19

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