DE112013000595T5 - Plasmazelle zur Filterung von VUV-Strahlung in einer mittels eines Lasers aufrechterhaltenen Plasmalichtquelle - Google Patents

Plasmazelle zur Filterung von VUV-Strahlung in einer mittels eines Lasers aufrechterhaltenen Plasmalichtquelle Download PDF

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Publication number
DE112013000595T5
DE112013000595T5 DE112013000595.6T DE112013000595T DE112013000595T5 DE 112013000595 T5 DE112013000595 T5 DE 112013000595T5 DE 112013000595 T DE112013000595 T DE 112013000595T DE 112013000595 T5 DE112013000595 T5 DE 112013000595T5
Authority
DE
Germany
Prior art keywords
plasma
bulb
cell
plasma cell
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112013000595.6T
Other languages
German (de)
English (en)
Inventor
Ilya V. Bezel
Matthew Panzer
Matthew W. Derstine
Rajeev Patil
Anatoly Shchemelinin
Eugene Shifrin
Jincheng Wang
Anant Chimmalgi
Rudolf Brunner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of DE112013000595T5 publication Critical patent/DE112013000595T5/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/06—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for filtering out ultraviolet radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/14—Selection of substances for gas fillings; Specified operating pressure or temperature having one or more carbon compounds as the principal constituents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamp (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Lasers (AREA)
DE112013000595.6T 2012-01-17 2013-01-17 Plasmazelle zur Filterung von VUV-Strahlung in einer mittels eines Lasers aufrechterhaltenen Plasmalichtquelle Withdrawn DE112013000595T5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261587380P 2012-01-17 2012-01-17
USUS-61/587,380 2012-01-17
US13/741,566 US9927094B2 (en) 2012-01-17 2013-01-15 Plasma cell for providing VUV filtering in a laser-sustained plasma light source
USUS-13/741,566 2013-01-15
PCT/US2013/021857 WO2013109701A1 (en) 2012-01-17 2013-01-17 Plasma cell for providing vuv filtering in a laser-sustained plasma light source

Publications (1)

Publication Number Publication Date
DE112013000595T5 true DE112013000595T5 (de) 2014-10-16

Family

ID=48779500

Family Applications (2)

Application Number Title Priority Date Filing Date
DE112013000595.6T Withdrawn DE112013000595T5 (de) 2012-01-17 2013-01-17 Plasmazelle zur Filterung von VUV-Strahlung in einer mittels eines Lasers aufrechterhaltenen Plasmalichtquelle
DE112013007825.2T Active DE112013007825B4 (de) 2012-01-17 2013-01-17 Plasmazelle einer mittels eines lasers aufrecht erhaltenen plasmalichtquelle mit einer anordnung zur rotation des plasmakolbens und einer flüssigkeit zur filterung von vuv-strahlung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE112013007825.2T Active DE112013007825B4 (de) 2012-01-17 2013-01-17 Plasmazelle einer mittels eines lasers aufrecht erhaltenen plasmalichtquelle mit einer anordnung zur rotation des plasmakolbens und einer flüssigkeit zur filterung von vuv-strahlung

Country Status (5)

Country Link
US (3) US9927094B2 (enExample)
JP (2) JP6333734B2 (enExample)
KR (2) KR102134110B1 (enExample)
DE (2) DE112013000595T5 (enExample)
WO (1) WO2013109701A1 (enExample)

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Also Published As

Publication number Publication date
KR102134110B1 (ko) 2020-07-14
JP2015505419A (ja) 2015-02-19
KR20190090058A (ko) 2019-07-31
KR20140123072A (ko) 2014-10-21
US9927094B2 (en) 2018-03-27
KR102004520B1 (ko) 2019-07-26
US20180172240A1 (en) 2018-06-21
JP6509404B2 (ja) 2019-05-08
US10976025B2 (en) 2021-04-13
US20210231292A1 (en) 2021-07-29
US20130181595A1 (en) 2013-07-18
JP6333734B2 (ja) 2018-05-30
DE112013007825B4 (de) 2023-11-02
WO2013109701A1 (en) 2013-07-25
JP2018113272A (ja) 2018-07-19

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