JP6333732B2 - 気体浄化フィルターユニット - Google Patents
気体浄化フィルターユニット Download PDFInfo
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- JP6333732B2 JP6333732B2 JP2014552031A JP2014552031A JP6333732B2 JP 6333732 B2 JP6333732 B2 JP 6333732B2 JP 2014552031 A JP2014552031 A JP 2014552031A JP 2014552031 A JP2014552031 A JP 2014552031A JP 6333732 B2 JP6333732 B2 JP 6333732B2
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- 238000000746 purification Methods 0.000 title claims description 50
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 97
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 40
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- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
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- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
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- 241001391944 Commicarpus scandens Species 0.000 description 1
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- 239000005977 Ethylene Substances 0.000 description 1
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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- 239000007864 aqueous solution Substances 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
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- 238000009940 knitting Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005949 ozonolysis reaction Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- 229910052723 transition metal Inorganic materials 0.000 description 1
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- B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
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- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
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- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- Separation Of Gases By Adsorption (AREA)
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Description
すなわち、本発明の気体浄化フィルターユニットは、オゾンガスに含まれる不純物を除去する気体浄化フィルターユニットであって、
前記不純物から、気体成分を除去する第一除去部と、該第一除去部の後段に配置され、前記気体成分が除去された不純物から、固体微粒子を除去する第二除去部とを備えたことを特徴とする。
また、前記第一除去部と前記第二除去部とは、互いに隣接状態に連続配置された一体構造を成すことを特徴とする。
気体浄化フィルターユニット10は、例えば、半導体装置の製造工程に用いるオゾン(オゾンガス)を浄化するものであり、オゾンの発生装置と、半導体装置の製造工程との間でオゾンを供給する配管の途上に挿入されるインラインフィルターとして用いることができる。
シリカゲル(silica gel)は、メタケイ酸ナトリウム(Na2SiO3)の水溶液から得られる酸成分を加水分解し、これによって得られるケイ酸ゲルを脱水、乾燥したものである。
第一除去部11の後段側、即ち第一除去部11の収容部23に対して着脱自在に収容される第二除去部12は、オゾン耐蝕性を有する略円筒形の樹脂ケース31と、この樹脂ケース31内に収容され、オゾンに含まれる不純物のうち、固体微粒子を漉し取る濾材(部位)32とから構成されている。
不織布フィルターとしては、例えば数mmから数cmの長さに切断された繊維体を、公知の方法によって絡み合わせることにより形成できる。複数種類の繊維体を絡み合わせて形成してもよい。成形体フィルターとしては、例えば数mmから数cmの長さに切断された繊維体を、公知の成形方法によって任意の形態に成形することにより得られる。網状フィルターとしては、繊維体を網状に編むことにより形成できる。なお、これら繊維体に半導体装置の製造工程に影響を与える重金属を吸着する粒子を付着させることも好ましい。
検証にあたっては、高レベルオゾン発生装置に、ステンレス鋼の配管を介してフィルターユニットを接続し、該フィルターユニットからの流出ガス中に含まれる金属成分を測定する装置構成とした。
本発明例として、図1に示す第一除去部11および第二除去部12を備えた気体浄化フィルターユニット10を用い、第一除去部11には、吸着材25としてシリカゲルを充填した。シリカゲルは、直径が1〜3mmの球形であり、細孔径が1〜10nmのものを用い、予め加熱乾燥させた。
一方、比較例としては、こうした気体浄化フィルターユニット10のうち、第一除去部11を取り除いた第二除去部12だけの構成とした。
導入したガスは、数10g/m3以上の高レベルオゾンガスであり、配管としてステンレス鋼を用いた。こうしたステンレス鋼の配管には、汚染源となる金属成分として、Fe、Cr,Mnが含まれている。
こうした検証結果を表1に示す。なお、表中のガス供給側の濃度は、オゾン発生装置によって生成されたオゾンガスの供給側における金属濃度、すなわちステンレス鋼の配管を通過する前のオゾンガス中の金属濃度を示す。
Claims (16)
- オゾンガスに含まれる不純物を除去する気体浄化フィルターユニットであって、
前記不純物から、気体成分を除去する第一除去部と、該第一除去部の後段に配置され、前記気体成分が除去された不純物から、固体微粒子を除去する第二除去部とを備えたことを特徴とする気体浄化フィルターユニット。 - 前記第一除去部は、前記気体成分を吸着する吸着材を備えることを特徴とする請求項1に記載の気体浄化フィルターユニット。
- 前記吸着材は、シリカゲルであることを特徴とする請求項2に記載の気体浄化フィルターユニット。
- 前記シリカゲルは多数の細孔を有し、それぞれの細孔の口径は10nm以下であることを特徴とする請求項3に記載の気体浄化フィルターユニット。
- 前記シリカゲルは、直径が0.5mm以上、3mm以下の球状を成すことを特徴とする請求項3または4に記載の気体浄化フィルターユニット。
- 前記吸着材は、シリカ、およびアルミナを含むことを特徴とする請求項2に記載の気体浄化フィルターユニット。
- 前記吸着材は、アルミナに対するシリカの比率が10以上の高シリカゼオライトからなることを特徴とする請求項6に記載の気体浄化フィルターユニット。
- 前記第二除去部は、前記固体微粒子を漉し取る部位を備えることを特徴とする請求項1に記載の気体浄化フィルターユニット。
- 前記第二除去部は、オゾン耐蝕性の樹脂ケースと、該樹脂ケース内に収容された前記部位とから構成されてなることを特徴とする請求項8に記載の気体浄化フィルターユニット。
- 前記部位はシート状を成す濾材であり、前記樹脂ケース内において折り畳まれて収容されていることを特徴とする請求項9に記載の気体浄化フィルターユニット。
- 前記濾材は、公称孔径が0.2μm以上、0.5μm以下の範囲であることを特徴とする請求項10に記載の気体浄化フィルターユニット。
- 前記樹脂ケース、および前記濾材は、フッ素系樹脂からなることを特徴とする請求項10に記載の気体浄化フィルターユニット。
- 前記フッ素系樹脂は、四フッ化エチレン・六フッ化プロピレン共重合体、ポリテトラフルオロエチレン、ペルフルオロアルコキシフッ素樹脂のうち、少なくとも1種以上を含むことを特徴とする請求項12に記載の気体浄化フィルターユニット。
- 前記第一除去部は、吸着材を収容する外装体と、該外装体の一部に形成され、前記第二除去部を構成する樹脂ケースを着脱可能に収容する収容部とを備えていることを特徴とする請求項10に記載の気体浄化フィルターユニット。
- 前記収容部は、ステンレスからなる網部材を備えていることを特徴とする請求項14に記載の気体浄化フィルターユニット。
- 前記第一除去部と前記第二除去部とは、互いに隣接状態に連続配置された一体構造を成すことを特徴とする請求項1から15のいずれか1項に記載の気体浄化フィルターユニット。
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