JP7353314B2 - 化学発光式NOx濃度測定装置 - Google Patents
化学発光式NOx濃度測定装置 Download PDFInfo
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- JP7353314B2 JP7353314B2 JP2021021658A JP2021021658A JP7353314B2 JP 7353314 B2 JP7353314 B2 JP 7353314B2 JP 2021021658 A JP2021021658 A JP 2021021658A JP 2021021658 A JP2021021658 A JP 2021021658A JP 7353314 B2 JP7353314 B2 JP 7353314B2
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- nox concentration
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Description
Claims (3)
- 金属製筐体からなる無声放電式オゾン発生器で生成したオゾンと試料ガス中の窒素酸化物が反応槽内で反応した際に生じる発光強度を検出して窒素酸化物の濃度を測定する化学発光式NOx濃度測定装置において、
前記無声放電式オゾン発生器と前記反応槽とを接続する配管の途中に、前記金属製筐体内で発生する金属粉及び金属錆を除去するための交換式フィルタを配置したことを特徴とする化学発光式NOx濃度測定装置。 - 前記交換式フィルタが、配管から取り外し可能で、かつオゾンが配管から漏れないよう封止できる構造である、請求項1に記載の化学発光式NOx濃度測定装置。
- 前記交換式フィルタが、カートリッジタイプ又はインライン型フィルタエレメントから構成されている、請求項1又は2に記載の化学発光式NOx濃度測定装置。
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JP2021021658A JP7353314B2 (ja) | 2021-02-15 | 2021-02-15 | 化学発光式NOx濃度測定装置 |
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JP2021021658A JP7353314B2 (ja) | 2021-02-15 | 2021-02-15 | 化学発光式NOx濃度測定装置 |
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JP2018000551U Continuation JP3216725U (ja) | 2018-02-16 | 2018-02-16 | 化学発光式NOx濃度測定装置 |
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JP2021073474A JP2021073474A (ja) | 2021-05-13 |
JP7353314B2 true JP7353314B2 (ja) | 2023-09-29 |
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KR20230030284A (ko) | 2021-08-25 | 2023-03-06 | (주)켄텍 | 반응부가 개선된 질소산화물측정기 |
Citations (1)
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WO2014092046A1 (ja) | 2012-12-14 | 2014-06-19 | インテグリス・インコーポレーテッド | 気体浄化フィルターユニット |
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JP2000028531A (ja) * | 1998-07-15 | 2000-01-28 | Shimadzu Corp | 化学発光式窒素酸化物計 |
JP2006004968A (ja) * | 2004-06-15 | 2006-01-05 | Renesas Technology Corp | 半導体製造装置、半導体装置の製造方法およびガス中金属の除去方法 |
JP2008232640A (ja) * | 2007-03-16 | 2008-10-02 | Dkk Toa Corp | 窒素酸化物測定方法 |
JP4962296B2 (ja) * | 2007-12-19 | 2012-06-27 | 東亜ディーケーケー株式会社 | 分析装置 |
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WO2014092046A1 (ja) | 2012-12-14 | 2014-06-19 | インテグリス・インコーポレーテッド | 気体浄化フィルターユニット |
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