JP2021073474A - 化学発光式NOx濃度測定装置 - Google Patents
化学発光式NOx濃度測定装置 Download PDFInfo
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- JP2021073474A JP2021073474A JP2021021658A JP2021021658A JP2021073474A JP 2021073474 A JP2021073474 A JP 2021073474A JP 2021021658 A JP2021021658 A JP 2021021658A JP 2021021658 A JP2021021658 A JP 2021021658A JP 2021073474 A JP2021073474 A JP 2021073474A
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- nox concentration
- ozone generator
- silent discharge
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Claims (1)
- 無声放電式オゾン発生器で生成したオゾンと試料ガス中の窒素酸化物が反応槽内で反応した際に生じる発光強度を検出して窒素酸化物の濃度を測定する化学発光式NOx濃度測定装置において、前記無声放電式オゾン発生器と前記反応槽とを接続する配管の途中に交換式フィルタを配置したことを特徴とする化学発光式NOx濃度測定装置。
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JP2021021658A JP7353314B2 (ja) | 2021-02-15 | 2021-02-15 | 化学発光式NOx濃度測定装置 |
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JP2021021658A JP7353314B2 (ja) | 2021-02-15 | 2021-02-15 | 化学発光式NOx濃度測定装置 |
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JP2018000551U Continuation JP3216725U (ja) | 2018-02-16 | 2018-02-16 | 化学発光式NOx濃度測定装置 |
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JP2021073474A true JP2021073474A (ja) | 2021-05-13 |
JP7353314B2 JP7353314B2 (ja) | 2023-09-29 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230030284A (ko) | 2021-08-25 | 2023-03-06 | (주)켄텍 | 반응부가 개선된 질소산화물측정기 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000028531A (ja) * | 1998-07-15 | 2000-01-28 | Shimadzu Corp | 化学発光式窒素酸化物計 |
JP2006004968A (ja) * | 2004-06-15 | 2006-01-05 | Renesas Technology Corp | 半導体製造装置、半導体装置の製造方法およびガス中金属の除去方法 |
JP2008232640A (ja) * | 2007-03-16 | 2008-10-02 | Dkk Toa Corp | 窒素酸化物測定方法 |
JP2009150688A (ja) * | 2007-12-19 | 2009-07-09 | Dkk Toa Corp | 分析装置 |
WO2014092046A1 (ja) * | 2012-12-14 | 2014-06-19 | インテグリス・インコーポレーテッド | 気体浄化フィルターユニット |
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2021
- 2021-02-15 JP JP2021021658A patent/JP7353314B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000028531A (ja) * | 1998-07-15 | 2000-01-28 | Shimadzu Corp | 化学発光式窒素酸化物計 |
JP2006004968A (ja) * | 2004-06-15 | 2006-01-05 | Renesas Technology Corp | 半導体製造装置、半導体装置の製造方法およびガス中金属の除去方法 |
JP2008232640A (ja) * | 2007-03-16 | 2008-10-02 | Dkk Toa Corp | 窒素酸化物測定方法 |
JP2009150688A (ja) * | 2007-12-19 | 2009-07-09 | Dkk Toa Corp | 分析装置 |
WO2014092046A1 (ja) * | 2012-12-14 | 2014-06-19 | インテグリス・インコーポレーテッド | 気体浄化フィルターユニット |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230030284A (ko) | 2021-08-25 | 2023-03-06 | (주)켄텍 | 반응부가 개선된 질소산화물측정기 |
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