JP6330402B2 - インバータ装置及びプラズマ発生装置 - Google Patents

インバータ装置及びプラズマ発生装置 Download PDF

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Publication number
JP6330402B2
JP6330402B2 JP2014055657A JP2014055657A JP6330402B2 JP 6330402 B2 JP6330402 B2 JP 6330402B2 JP 2014055657 A JP2014055657 A JP 2014055657A JP 2014055657 A JP2014055657 A JP 2014055657A JP 6330402 B2 JP6330402 B2 JP 6330402B2
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Japan
Prior art keywords
output
period
output voltage
inverter device
voltage
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Expired - Fee Related
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JP2014055657A
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English (en)
Japanese (ja)
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JP2015180127A (ja
JP2015180127A5 (enExample
Inventor
鎌田　久浩
久浩 鎌田
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Ricoh Co Ltd
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Ricoh Co Ltd
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Priority to JP2014055657A priority Critical patent/JP6330402B2/ja
Priority to US14/657,961 priority patent/US9232625B2/en
Publication of JP2015180127A publication Critical patent/JP2015180127A/ja
Publication of JP2015180127A5 publication Critical patent/JP2015180127A5/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/539—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
    • H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
    • H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
    • H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
    • H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2439—Surface discharges, e.g. air flow control
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0006—Arrangements for supplying an adequate voltage to the control circuit of converters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0016—Control circuits providing compensation of output voltage deviations using feedforward of disturbance parameters
    • H02M1/0022—Control circuits providing compensation of output voltage deviations using feedforward of disturbance parameters the disturbance parameters being input voltage fluctuations
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0064—Magnetic structures combining different functions, e.g. storage, filtering or transformation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/32—Means for protecting converters other than automatic disconnection
    • H02M1/34—Snubber circuits
    • H02M1/346—Passive non-dissipative snubbers
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/4815—Resonant converters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
JP2014055657A 2014-03-18 2014-03-18 インバータ装置及びプラズマ発生装置 Expired - Fee Related JP6330402B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014055657A JP6330402B2 (ja) 2014-03-18 2014-03-18 インバータ装置及びプラズマ発生装置
US14/657,961 US9232625B2 (en) 2014-03-18 2015-03-13 Inverter device, plasma generator apparatus and control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014055657A JP6330402B2 (ja) 2014-03-18 2014-03-18 インバータ装置及びプラズマ発生装置

Publications (3)

Publication Number Publication Date
JP2015180127A JP2015180127A (ja) 2015-10-08
JP2015180127A5 JP2015180127A5 (enExample) 2017-06-01
JP6330402B2 true JP6330402B2 (ja) 2018-05-30

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JP2014055657A Expired - Fee Related JP6330402B2 (ja) 2014-03-18 2014-03-18 インバータ装置及びプラズマ発生装置

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US (1) US9232625B2 (enExample)
JP (1) JP6330402B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6481814B2 (ja) 2015-02-19 2019-03-13 株式会社リコー インバータ装置
US9799441B2 (en) 2015-03-19 2017-10-24 Ricoh Company, Ltd. Transformer and plasma generator
KR102194247B1 (ko) 2015-06-29 2020-12-22 온세미컨덕터코리아 주식회사 영전압 스위칭을 위한 제어 회로 및 이를 포함하는 벅 컨버터
JP6675786B2 (ja) * 2016-07-29 2020-04-01 ダイハツ工業株式会社 プラズマリアクタの電源装置
JP6462637B2 (ja) * 2016-08-10 2019-01-30 株式会社東芝 沿面放電素子駆動装置および沿面放電素子駆動方法
FR3055494B1 (fr) * 2016-08-25 2018-09-21 Clarteis Generateur d'impulsions electriques
US11470711B2 (en) * 2017-05-16 2022-10-11 Fuji Corporation Plasma generator with connector-cable detector
PL233868B1 (pl) * 2017-12-29 2019-12-31 Politechnika Lubelska Układ i sposób zasilania reaktora plazmowego ze ślizgającym się wyładowaniem
CN108408826A (zh) * 2018-04-29 2018-08-17 航天慧能（江苏）环境工程有限公司 基于物联网的等离子废水处理系统的交流电源
CN108569742A (zh) * 2018-04-29 2018-09-25 航天慧能（江苏）环境工程有限公司 基于物联网的等离子废水处理系统
CN108400647A (zh) * 2018-05-14 2018-08-14 北方工业大学 基于互联网光触媒新风系统的太阳能电源
CN111983524B (zh) * 2020-08-26 2021-06-08 西南交通大学 一种基于振荡波时频变换的变压器绕组故障评估方法
US11368095B1 (en) * 2021-01-29 2022-06-21 Abl Ip Holding Llc Continuous load high power flyback converter
US11881383B2 (en) * 2021-08-16 2024-01-23 Essentium Ipco, Llc Control circuit for a dielectric barrier discharge (DBD) disk in a three-dimensional printer
EP4529013A1 (en) * 2023-09-19 2025-03-26 Abb Schweiz Ag Medium-frequency transformer-based double-isolated auxiliary supply for medium-voltage dc/dc converters
CN118646280B (zh) * 2024-08-13 2024-12-06 深圳迈微医疗科技有限公司 方波发生电路及电子设备

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JP2524942B2 (ja) 1992-07-27 1996-08-14 新日本製鐵株式会社 プラズマ表面処理装置
JPH0715950A (ja) * 1993-06-25 1995-01-17 Matsushita Electric Works Ltd 電力制御回路
JPH07227087A (ja) * 1994-02-08 1995-08-22 Ricoh Co Ltd 高圧電源
JP3353684B2 (ja) 1998-01-09 2002-12-03 ウシオ電機株式会社 誘電体バリア放電ランプ光源装置
JP4454444B2 (ja) 2004-09-08 2010-04-21 本田技研工業株式会社 双方向ｄｃ−ｄｃコンバータ
JP4627320B2 (ja) 2005-11-22 2011-02-09 ローム株式会社 インバータおよびその制御回路、ならびにそれらを用いた発光装置および液晶テレビ
KR100889528B1 (ko) 2007-06-27 2009-03-19 삼성에스디아이 주식회사 소프트 스타트 회로와 이를 포함하는 전원공급장치
JP5298050B2 (ja) * 2010-03-11 2013-09-25 トヨタ自動車株式会社 スイッチング電源回路
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JP2012135112A (ja) 2010-12-21 2012-07-12 Tohoku Ricoh Co Ltd 高電圧インバータ装置及びその出力電圧調整方法
JP5716394B2 (ja) 2010-12-28 2015-05-13 株式会社リコー 高電圧インバータ装置及びその漏電検出装置
JP5712704B2 (ja) 2011-03-14 2015-05-07 株式会社リコー 高電圧インバータ装置
JP5834596B2 (ja) * 2011-07-29 2015-12-24 株式会社リコー 高電圧インバータ装置
JP5842465B2 (ja) * 2011-08-29 2016-01-13 株式会社リコー 電源装置
JP2013219982A (ja) * 2012-04-11 2013-10-24 Toyota Industries Corp Ｄｃ−ａｃインバータ
JP6160142B2 (ja) 2013-03-14 2017-07-12 株式会社リコー 高電圧インバータ

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US9232625B2 (en) 2016-01-05
JP2015180127A (ja) 2015-10-08
US20150271906A1 (en) 2015-09-24

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