JP6327357B2 - 磁気記録媒体 - Google Patents
磁気記録媒体 Download PDFInfo
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- JP6327357B2 JP6327357B2 JP2016556219A JP2016556219A JP6327357B2 JP 6327357 B2 JP6327357 B2 JP 6327357B2 JP 2016556219 A JP2016556219 A JP 2016556219A JP 2016556219 A JP2016556219 A JP 2016556219A JP 6327357 B2 JP6327357 B2 JP 6327357B2
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- JP
- Japan
- Prior art keywords
- magnetic recording
- layer
- magnetic
- recording medium
- seed layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005291 magnetic effect Effects 0.000 title claims description 200
- 239000000758 substrate Substances 0.000 claims description 53
- 239000013078 crystal Substances 0.000 claims description 49
- 239000000956 alloy Substances 0.000 claims description 37
- 229910045601 alloy Inorganic materials 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 25
- 229910052596 spinel Inorganic materials 0.000 claims description 10
- 239000011029 spinel Substances 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 177
- 238000000034 method Methods 0.000 description 23
- 238000004544 sputter deposition Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 230000005415 magnetization Effects 0.000 description 11
- 230000003746 surface roughness Effects 0.000 description 11
- 239000011241 protective layer Substances 0.000 description 10
- 238000001755 magnetron sputter deposition Methods 0.000 description 9
- 239000000696 magnetic material Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 229910005335 FePt Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 239000003575 carbonaceous material Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910003321 CoFe Inorganic materials 0.000 description 2
- -1 CoNiP Inorganic materials 0.000 description 2
- 229910018936 CoPd Inorganic materials 0.000 description 2
- 229910018979 CoPt Inorganic materials 0.000 description 2
- 229910015187 FePd Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000314 poly p-methyl styrene Polymers 0.000 description 2
- 206010063401 primary progressive multiple sclerosis Diseases 0.000 description 2
- 238000012552 review Methods 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910019233 CoFeNi Inorganic materials 0.000 description 1
- 241000511976 Hoya Species 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- 229910016583 MnAl Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005345 chemically strengthened glass Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 208000035475 disorder Diseases 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000013080 microcrystalline material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000034655 secondary growth Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
Description
(実施例1)
平滑な表面を有する化学強化ガラス基板(HOYA社製N−10ガラス基板)を洗浄し、非磁性基体12を準備した。洗浄後の非磁性基体12を、スパッタ装置内に導入した。圧力0.20PaのArガス中で、基板から180mmの位置に配置したTaターゲットを用いるRFマグネトロンスパッタ法により、膜厚5nmのTa密着層14を形成した。ターゲットに印加した電力は200Wであった。
シード層20の形成において、MnCr2O4ターゲットをMgOターゲットに変更し、印加する電力を500Wに変更したことを除いて、実施例1の手順を繰り返して磁気記録媒体を得た。シード層および磁気記録層の表面粗さ、ならびに、得られた磁気記録媒体の磁気異方性定数Ku、飽和磁化Msおよび角形比Mr/Msの測定結果を第1表に示す。
実施例1および比較例1で得られた磁気記録媒体のシード層20および磁気記録層30の算術平均粗さRaと、シード層形成時の基板温度との関係を図3に示した。
実施例1と同様の手順を用いて、非磁性基体12の上に、膜厚5nmのTa密着層14および膜厚20nmのCr下地層16を形成して、基板10を得た。
MgOからなるシード層を形成したことを除いて、実施例2の手順を繰り返して磁気記録媒体を得た。シード層の形成条件は、MnCr2O4ターゲットに代えてMnCr2O4ターゲットを用いたことを除いて、実施例2と同様であった。実施例2と同様にして、磁気記録層の算術平均粗さRa、ならびに、磁気記録媒体の飽和磁化Ms、磁気異方性定数Ku、保磁力Hcおよびヒステリシスループのαを求めた。測定結果を第2表に示す。
シード層20の形成において、基板温度を350℃に固定し、シード層20の膜厚を変化させたことを除いて、実施例1の手順を繰り返して磁気記録媒体を得た。シード層20の膜厚、および得られた磁気記録媒体の磁気異方性定数Kuの測定結果を第3表に示す。
12 非磁性基体
14 密着層
16 下地層
20 シード層
30 磁気記録層
Claims (3)
- 基板と、前記基板上のシード層と、前記シード層の上の磁気記録層とを含み、前記磁気記録層が規則合金を含み、前記シード層がMn、CrおよびOを含み、スピネル構造を有することを特徴とする磁気記録媒体。
- 基板と、前記基板上のシード層と、前記シード層の上の磁気記録層とを含み、前記磁気記録層が規則合金を含み、前記シード層がMn(MnxCr1-x)2O4(式中、0≦x≦0.25である)からなることを特徴とする磁気記録媒体。
- 前記磁気記録層が、磁性結晶粒と、前記磁性結晶粒を包囲する非磁性結晶粒界とを含むグラニュラー構造を有し、前記磁性結晶粒は規則合金を含み、前記非磁性結晶粒界は、炭素、酸化物、および窒化物からなる群から選択される非磁性材料を含むことを特徴とする請求項1または2に記載の磁気記録媒体。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014219203 | 2014-10-28 | ||
JP2014219203 | 2014-10-28 | ||
PCT/JP2015/005340 WO2016067579A1 (ja) | 2014-10-28 | 2015-10-23 | 磁気記録媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016067579A1 JPWO2016067579A1 (ja) | 2017-04-27 |
JP6327357B2 true JP6327357B2 (ja) | 2018-05-23 |
Family
ID=55856945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016556219A Active JP6327357B2 (ja) | 2014-10-28 | 2015-10-23 | 磁気記録媒体 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10276200B2 (ja) |
JP (1) | JP6327357B2 (ja) |
MY (1) | MY181762A (ja) |
WO (1) | WO2016067579A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016203693A1 (ja) * | 2015-06-18 | 2016-12-22 | 富士電機株式会社 | 磁気記録媒体 |
WO2017221573A1 (ja) * | 2016-06-23 | 2017-12-28 | 富士電機株式会社 | 磁気記録媒体 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0271424A (ja) * | 1988-09-07 | 1990-03-12 | Ricoh Co Ltd | 磁気記録媒体 |
JP2001148114A (ja) * | 1999-11-19 | 2001-05-29 | Ohara Inc | 情報磁気記憶媒体用ガラスセラミックス基板。 |
JP2002025030A (ja) * | 2000-07-06 | 2002-01-25 | Hitachi Ltd | 垂直磁気記録媒体とその製法および磁気記録装置 |
JP2003036514A (ja) | 2001-07-19 | 2003-02-07 | Toyota Gakuen | 垂直磁化膜の作成及び垂直磁化膜、磁気記録媒体並びに磁気デイスク |
JP2009252308A (ja) * | 2008-04-08 | 2009-10-29 | Hoya Corp | 垂直磁気記録媒体 |
CN102473420B (zh) | 2009-08-20 | 2015-01-07 | 昭和电工株式会社 | 热辅助磁记录介质和磁存储装置 |
JP5617112B2 (ja) | 2010-01-14 | 2014-11-05 | 独立行政法人物質・材料研究機構 | 垂直磁気記録媒体及びその製造方法 |
JP5561766B2 (ja) | 2010-02-04 | 2014-07-30 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
JP4951075B2 (ja) * | 2010-03-02 | 2012-06-13 | 株式会社東芝 | 磁気記録媒体及びその製造法、並びにそれを用いた磁気記録再生装置 |
JP2014056622A (ja) * | 2012-09-11 | 2014-03-27 | Fuji Electric Co Ltd | 垂直磁気記録媒体 |
-
2015
- 2015-10-23 JP JP2016556219A patent/JP6327357B2/ja active Active
- 2015-10-23 MY MYPI2016703906A patent/MY181762A/en unknown
- 2015-10-23 WO PCT/JP2015/005340 patent/WO2016067579A1/ja active Application Filing
-
2016
- 2016-10-28 US US15/336,965 patent/US10276200B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20170047090A1 (en) | 2017-02-16 |
MY181762A (en) | 2021-01-06 |
JPWO2016067579A1 (ja) | 2017-04-27 |
WO2016067579A1 (ja) | 2016-05-06 |
US10276200B2 (en) | 2019-04-30 |
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