JP6316889B2 - 傾けられた格子 - Google Patents
傾けられた格子 Download PDFInfo
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- JP6316889B2 JP6316889B2 JP2016181934A JP2016181934A JP6316889B2 JP 6316889 B2 JP6316889 B2 JP 6316889B2 JP 2016181934 A JP2016181934 A JP 2016181934A JP 2016181934 A JP2016181934 A JP 2016181934A JP 6316889 B2 JP6316889 B2 JP 6316889B2
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- 238000003384 imaging method Methods 0.000 claims description 60
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 19
- 230000005855 radiation Effects 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 13
- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 27
- 238000005530 etching Methods 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 11
- 230000010363 phase shift Effects 0.000 description 10
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- 238000004519 manufacturing process Methods 0.000 description 7
- 230000005670 electromagnetic radiation Effects 0.000 description 6
- LFEUVBZXUFMACD-UHFFFAOYSA-H lead(2+);trioxido(oxo)-$l^{5}-arsane Chemical class [Pb+2].[Pb+2].[Pb+2].[O-][As]([O-])([O-])=O.[O-][As]([O-])([O-])=O LFEUVBZXUFMACD-UHFFFAOYSA-H 0.000 description 6
- 238000000708 deep reactive-ion etching Methods 0.000 description 5
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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- 229910052737 gold Inorganic materials 0.000 description 2
- 238000009607 mammography Methods 0.000 description 2
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- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 238000009623 Bosch process Methods 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 238000002083 X-ray spectrum Methods 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/48—Diagnostic techniques
- A61B6/484—Diagnostic techniques involving phase contrast X-ray imaging
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
- G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
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- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Optics & Photonics (AREA)
- Radiology & Medical Imaging (AREA)
- Molecular Biology (AREA)
- High Energy & Nuclear Physics (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Manufacturing & Machinery (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Measurement Of Radiation (AREA)
Description
Claims (6)
- 関心対象物を検査する位相コントラスト撮像装置であって、
放射線を放出する源と、
検出器と、
前記源及び前記検出器の間に配置される格子と
を有し、
前記検出器が、前記関心対象物及び前記格子を通過した後の前記放射線を検出するように構成され、
前記格子は、集束ジオメトリを持ち、
前記格子が前記撮像装置に設置されるとき、前記格子が、放射線源に向かう方向に構成される第1の軸を持ち、
前記格子は、
ウェーハ物質と、
前記ウェーハ物質内部にあり、第1の方向に深さを持つ第1の溝と
を有し、
前記第1の溝が前記第1の軸に対して傾斜するよう、前記第1の方向が、前記第1の軸と異なり、
前記位相コントラスト撮像装置は、少なくとも1つのアクチュエータ又はステッパーモータを更に有し、前記アクチュエータ又はステッパーモータは、特定の角度に前記格子を傾けることにより、入射する放射線に関する有効な溝深さを変化させるように構成される、
位相コントラスト撮像装置。 - 溝のシーケンスを更に有し、
前記溝のシークエンスにおける各溝が、前記第1の軸に対して個別の角度で傾斜し、
前記個別の角度が、溝から溝へと増加する、請求項1に記載の撮像装置。 - 前記検出器の前に配置される吸収格子である第2の格子を更に有し、
前記第2の格子が、前記格子位置に適合される集束ジオメトリを持つ、請求項1又は2に記載の撮像装置。 - 台形ジオメトリを持つ吸収格子であり、前記源及び前記格子の間に配置される第3の格子であって、前記格子の少なくとも部分的にコヒーレントな照射を可能にする、第3の格子を更に有する、請求項1乃至3の何れか一項に記載の撮像装置。
- 前記源により放出される前記放射線が、光軸を持ち、前記アクチュエータ又はステッパーモータは、前記格子と前記源により放出される放射線の光学軸に垂直な前記第2の格子との少なくとも1つを動かすように構成される、請求項3に記載の撮像装置。
- 前記源が、X線源であり、
前記装置は、X線ベースの差分位相コントラスト撮像装置として構成される、請求項1乃至4の何れか一項に記載の撮像装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09162787 | 2009-06-16 | ||
EP09162787.7 | 2009-06-16 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012515588A Division JP6281969B2 (ja) | 2009-06-16 | 2010-06-09 | 傾けられた格子及び傾けられた格子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017012814A JP2017012814A (ja) | 2017-01-19 |
JP6316889B2 true JP6316889B2 (ja) | 2018-04-25 |
Family
ID=42697268
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012515588A Expired - Fee Related JP6281969B2 (ja) | 2009-06-16 | 2010-06-09 | 傾けられた格子及び傾けられた格子の製造方法 |
JP2016181934A Expired - Fee Related JP6316889B2 (ja) | 2009-06-16 | 2016-09-16 | 傾けられた格子 |
JP2017207981A Pending JP2018033988A (ja) | 2009-06-16 | 2017-10-27 | 傾けられた格子及び傾けられた格子の製造方法 |
Family Applications Before (1)
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JP2012515588A Expired - Fee Related JP6281969B2 (ja) | 2009-06-16 | 2010-06-09 | 傾けられた格子及び傾けられた格子の製造方法 |
Family Applications After (1)
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---|---|---|---|
JP2017207981A Pending JP2018033988A (ja) | 2009-06-16 | 2017-10-27 | 傾けられた格子及び傾けられた格子の製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9348067B2 (ja) |
EP (1) | EP2443491B1 (ja) |
JP (3) | JP6281969B2 (ja) |
CN (1) | CN102460237B (ja) |
RU (1) | RU2544390C2 (ja) |
WO (1) | WO2010146498A1 (ja) |
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JP5697430B2 (ja) | 2010-12-17 | 2015-04-08 | キヤノン株式会社 | X線撮像装置 |
JP2013063099A (ja) * | 2011-09-15 | 2013-04-11 | Canon Inc | X線撮像装置 |
US20130164457A1 (en) * | 2011-12-27 | 2013-06-27 | Rigaku Innovative Technologies, Inc. | Method of manufacturing patterned x-ray optical elements |
WO2014137318A1 (en) * | 2012-03-05 | 2014-09-12 | University Of Rochester | Methods and apparatus for differential phase-contrast cone-beam ct and hybrid cone-beam ct |
US9903827B2 (en) * | 2012-08-17 | 2018-02-27 | Koninklijke Philips N.V. | Handling misalignment in differential phase contrast imaging |
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2010
- 2010-06-09 JP JP2012515588A patent/JP6281969B2/ja not_active Expired - Fee Related
- 2010-06-09 RU RU2012101313/28A patent/RU2544390C2/ru active
- 2010-06-09 CN CN201080026946.5A patent/CN102460237B/zh active Active
- 2010-06-09 EP EP10727950.7A patent/EP2443491B1/en active Active
- 2010-06-09 WO PCT/IB2010/052555 patent/WO2010146498A1/en active Application Filing
- 2010-06-09 US US13/319,196 patent/US9348067B2/en active Active
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2016
- 2016-09-16 JP JP2016181934A patent/JP6316889B2/ja not_active Expired - Fee Related
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CN102460237B (zh) | 2015-04-15 |
JP6281969B2 (ja) | 2018-02-21 |
EP2443491A1 (en) | 2012-04-25 |
JP2018033988A (ja) | 2018-03-08 |
CN102460237A (zh) | 2012-05-16 |
WO2010146498A1 (en) | 2010-12-23 |
RU2012101313A (ru) | 2013-07-27 |
JP2012530270A (ja) | 2012-11-29 |
US20120057677A1 (en) | 2012-03-08 |
RU2544390C2 (ru) | 2015-03-20 |
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JP2017012814A (ja) | 2017-01-19 |
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