JP6316433B2 - マイクロメカニカル超音波トランスデューサおよびディスプレイ - Google Patents
マイクロメカニカル超音波トランスデューサおよびディスプレイ Download PDFInfo
- Publication number
- JP6316433B2 JP6316433B2 JP2016537469A JP2016537469A JP6316433B2 JP 6316433 B2 JP6316433 B2 JP 6316433B2 JP 2016537469 A JP2016537469 A JP 2016537469A JP 2016537469 A JP2016537469 A JP 2016537469A JP 6316433 B2 JP6316433 B2 JP 6316433B2
- Authority
- JP
- Japan
- Prior art keywords
- pmut
- array
- display device
- display
- pmut array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/017—Gesture based interaction, e.g. based on a set of recognized hand gestures
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/033—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
- G06F3/0354—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of 2D relative movements between the device, or an operating part thereof, and a plane or surface, e.g. 2D mice, trackballs, pens or pucks
- G06F3/03547—Touch pads, in which fingers can move on a surface
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/043—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/043—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves
- G06F3/0436—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves in which generating transducers and detecting transducers are attached to a single acoustic waves transmission substrate
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
- G06V40/12—Fingerprints or palmprints
- G06V40/13—Sensors therefor
- G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
- G06V40/20—Movements or behaviour, e.g. gesture recognition
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
- G10K9/125—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Human Computer Interaction (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Psychiatry (AREA)
- Social Psychology (AREA)
- General Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Health & Medical Sciences (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Position Input By Displaying (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- User Interface Of Digital Computer (AREA)
- Image Input (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361915361P | 2013-12-12 | 2013-12-12 | |
| US61/915,361 | 2013-12-12 | ||
| US201462022140P | 2014-07-08 | 2014-07-08 | |
| US62/022,140 | 2014-07-08 | ||
| PCT/US2014/070114 WO2015089453A1 (en) | 2013-12-12 | 2014-12-12 | Micromechanical ultrasonic transducers and display |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017503255A JP2017503255A (ja) | 2017-01-26 |
| JP2017503255A5 JP2017503255A5 (enExample) | 2018-01-18 |
| JP6316433B2 true JP6316433B2 (ja) | 2018-04-25 |
Family
ID=52302355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016537469A Active JP6316433B2 (ja) | 2013-12-12 | 2014-12-12 | マイクロメカニカル超音波トランスデューサおよびディスプレイ |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US10478858B2 (enExample) |
| EP (2) | EP4071589A1 (enExample) |
| JP (1) | JP6316433B2 (enExample) |
| KR (1) | KR101883209B1 (enExample) |
| CN (1) | CN105980968B (enExample) |
| CA (1) | CA2929723C (enExample) |
| WO (1) | WO2015089453A1 (enExample) |
Families Citing this family (269)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10726231B2 (en) | 2012-11-28 | 2020-07-28 | Invensense, Inc. | Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing |
| US9114977B2 (en) | 2012-11-28 | 2015-08-25 | Invensense, Inc. | MEMS device and process for RF and low resistance applications |
| US9511994B2 (en) | 2012-11-28 | 2016-12-06 | Invensense, Inc. | Aluminum nitride (AlN) devices with infrared absorption structural layer |
| US10497747B2 (en) | 2012-11-28 | 2019-12-03 | Invensense, Inc. | Integrated piezoelectric microelectromechanical ultrasound transducer (PMUT) on integrated circuit (IC) for fingerprint sensing |
| US9618405B2 (en) | 2014-08-06 | 2017-04-11 | Invensense, Inc. | Piezoelectric acoustic resonator based sensor |
| EP2973767B1 (en) * | 2013-03-14 | 2017-11-22 | Volcano Corporation | Method of coating wafer-scale transducer |
| US10478858B2 (en) | 2013-12-12 | 2019-11-19 | Qualcomm Incorporated | Piezoelectric ultrasonic transducer and process |
| EP3110628B1 (en) * | 2014-02-28 | 2019-07-03 | The Regents of the University of California | Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut) |
| US9931670B2 (en) * | 2014-05-23 | 2018-04-03 | Konica Minolta Laboratory U.S.A., Inc. | Integrated ultrasound transducer |
| FR3026734B1 (fr) * | 2014-10-02 | 2023-01-06 | Commissariat Energie Atomique | Structure mecanique comprenant un actionneur et des moyens d'amplification mecanique et procede de fabrication |
| KR102199359B1 (ko) * | 2014-10-13 | 2021-01-07 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| US10139479B2 (en) | 2014-10-15 | 2018-11-27 | Qualcomm Incorporated | Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming |
| CN104706334B (zh) * | 2015-03-30 | 2017-08-11 | 京东方科技集团股份有限公司 | 一种具有健康监测功能的显示面板及显示装置 |
| US10387704B2 (en) * | 2015-06-29 | 2019-08-20 | Qualcomm Incorporated | Method and apparatus for enabling the touchscreen display of a mobile device |
| US10955976B2 (en) * | 2015-07-09 | 2021-03-23 | Hewlett-Packard Development Company, L.P. | Flexible display |
| US9928398B2 (en) | 2015-08-17 | 2018-03-27 | Invensense, Inc. | Always-on sensor device for human touch |
| CN105046243B (zh) * | 2015-08-25 | 2019-12-20 | 业成光电(深圳)有限公司 | 显示装置 |
| US10722918B2 (en) | 2015-09-03 | 2020-07-28 | Qualcomm Incorporated | Release hole plus contact via for fine pitch ultrasound transducer integration |
| KR101575086B1 (ko) | 2015-09-08 | 2015-12-07 | 주식회사 알지에스전자 | 초음파를 이용한 터치입력 처리시스템 |
| US10067229B2 (en) * | 2015-09-24 | 2018-09-04 | Qualcomm Incorporated | Receive-side beam forming for an ultrasonic image sensor |
| WO2017058968A1 (en) * | 2015-09-30 | 2017-04-06 | Schlumberger Technology Corporation | Acoustic transducer |
| US10635222B2 (en) * | 2015-10-02 | 2020-04-28 | Samsung Electronics Co., Ltd. | Touch pad and electronic apparatus using the same, and method of producing touch pad |
| KR102476610B1 (ko) | 2015-10-02 | 2022-12-12 | 삼성전자주식회사 | 터치 패드, 이를 이용한 터치 스크린 및 전자 장치, 및 터치 패드의 제조 방법 |
| US10497748B2 (en) * | 2015-10-14 | 2019-12-03 | Qualcomm Incorporated | Integrated piezoelectric micromechanical ultrasonic transducer pixel and array |
| AT518599A3 (de) * | 2015-10-30 | 2018-11-15 | Essential Products Inc | Fingerabdrucksensoren für Mobilgeräte |
| US9710689B2 (en) * | 2015-10-30 | 2017-07-18 | Essential Products, Inc. | Fingerprint sensors for mobile devices |
| KR20170053109A (ko) * | 2015-11-05 | 2017-05-15 | 주식회사 모다이노칩 | 압력 센서 및 이를 구비하는 복합 소자 |
| CN106951817A (zh) * | 2016-01-07 | 2017-07-14 | 上海箩箕技术有限公司 | 光学指纹传感器模组 |
| CN106951816A (zh) | 2016-01-07 | 2017-07-14 | 上海箩箕技术有限公司 | 光学指纹传感器模组 |
| SE539636C2 (en) | 2016-03-14 | 2017-10-24 | Fingerprint Cards Ab | Capacitive fingerprint sensing device and method for capturing a fingerprint using the sensing device |
| JPWO2017168823A1 (ja) * | 2016-03-31 | 2019-02-07 | コニカミノルタ株式会社 | ユーザーインターフェースモジュール及びスマートデバイス |
| US20190036004A1 (en) * | 2016-04-01 | 2019-01-31 | Intel Corporation | Strain sensitive piezoelectric system with optical indicator |
| US9898640B2 (en) * | 2016-05-02 | 2018-02-20 | Fingerprint Cards Ab | Capacitive fingerprint sensing device and method for capturing a fingerprint using the sensing device |
| US11813639B2 (en) * | 2016-05-03 | 2023-11-14 | Vanguard International Semiconductor Singapore Pte. Ltd. | Electrode arrangement for a pMUT and pMUT transducer array |
| US10325915B2 (en) | 2016-05-04 | 2019-06-18 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
| US10315222B2 (en) | 2016-05-04 | 2019-06-11 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
| US10656255B2 (en) | 2016-05-04 | 2020-05-19 | Invensense, Inc. | Piezoelectric micromachined ultrasonic transducer (PMUT) |
| US10670716B2 (en) | 2016-05-04 | 2020-06-02 | Invensense, Inc. | Operating a two-dimensional array of ultrasonic transducers |
| US10445547B2 (en) | 2016-05-04 | 2019-10-15 | Invensense, Inc. | Device mountable packaging of ultrasonic transducers |
| CN105893985B (zh) * | 2016-05-05 | 2018-04-03 | 京东方科技集团股份有限公司 | 显示装置及其制造方法 |
| US10441975B2 (en) | 2016-05-10 | 2019-10-15 | Invensense, Inc. | Supplemental sensor modes and systems for ultrasonic transducers |
| US10539539B2 (en) | 2016-05-10 | 2020-01-21 | Invensense, Inc. | Operation of an ultrasonic sensor |
| US10562070B2 (en) | 2016-05-10 | 2020-02-18 | Invensense, Inc. | Receive operation of an ultrasonic sensor |
| US10706835B2 (en) | 2016-05-10 | 2020-07-07 | Invensense, Inc. | Transmit beamforming of a two-dimensional array of ultrasonic transducers |
| US11673165B2 (en) * | 2016-05-10 | 2023-06-13 | Invensense, Inc. | Ultrasonic transducer operable in a surface acoustic wave (SAW) mode |
| US10452887B2 (en) | 2016-05-10 | 2019-10-22 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
| US10632500B2 (en) | 2016-05-10 | 2020-04-28 | Invensense, Inc. | Ultrasonic transducer with a non-uniform membrane |
| US10600403B2 (en) | 2016-05-10 | 2020-03-24 | Invensense, Inc. | Transmit operation of an ultrasonic sensor |
| US10408797B2 (en) | 2016-05-10 | 2019-09-10 | Invensense, Inc. | Sensing device with a temperature sensor |
| US11119598B2 (en) * | 2016-06-09 | 2021-09-14 | Aito Bv | Piezzoelectric touch device |
| US9735185B1 (en) * | 2016-06-10 | 2017-08-15 | Essential Products, Inc. | Hollowed electronic display |
| EP3472829B1 (en) | 2016-06-17 | 2023-08-16 | InvenSense, Inc. | Piezoelectric micromachined ultrasonic transducers having stress relief features |
| JP6684167B2 (ja) * | 2016-06-27 | 2020-04-22 | 株式会社ジャパンディスプレイ | 表示装置 |
| WO2018004688A1 (en) * | 2016-07-01 | 2018-01-04 | Intel Corporation | Piezoelectric package-integrated acoustic transducer devices |
| CN106250834B (zh) * | 2016-07-25 | 2019-05-10 | 京东方科技集团股份有限公司 | 指纹识别显示面板、其制作方法、其驱动方法及显示装置 |
| CN106446817B (zh) * | 2016-09-18 | 2018-03-20 | 京东方科技集团股份有限公司 | 指纹识别器件、触摸显示面板和指纹识别器件驱动方法 |
| US12263041B2 (en) | 2016-09-29 | 2025-04-01 | Exact Imaging Inc. | Signal processing pathway for an ultrasonic imaging device |
| US10888897B2 (en) | 2016-10-27 | 2021-01-12 | Cts Corporation | Transducer, transducer array, and method of making the same |
| KR101847295B1 (ko) * | 2016-10-31 | 2018-05-28 | 재단법인 다차원 스마트 아이티 융합시스템 연구단 | 초음파 신호의 송수신을 이용하는 사용자 인터페이스 장치 |
| US10405101B2 (en) * | 2016-11-14 | 2019-09-03 | USound GmbH | MEMS loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
| CN108122941A (zh) * | 2016-11-28 | 2018-06-05 | 南昌欧菲生物识别技术有限公司 | 有机发光二极管显示屏指纹识别装置及电子设备 |
| CN106598327B (zh) * | 2016-11-30 | 2019-06-07 | 京东方科技集团股份有限公司 | 触控显示驱动单元电路、驱动方法、电路和显示装置 |
| US11039814B2 (en) * | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| CN106530968B (zh) * | 2016-12-27 | 2019-09-20 | 京东方科技集团股份有限公司 | 显示装置和显示装置的控制方法 |
| CN106711320A (zh) * | 2017-01-09 | 2017-05-24 | 清华大学 | 一种超声波指纹采集器件及其制备方法 |
| CN108363938A (zh) * | 2017-01-25 | 2018-08-03 | 众智光电科技股份有限公司 | 超声波生物识别传感器 |
| KR102753381B1 (ko) * | 2017-02-07 | 2025-01-10 | 삼성전자주식회사 | 초음파 신호를 이용하여 지문 정보를 획득하는 전자 장치 |
| CN116279746A (zh) | 2017-02-27 | 2023-06-23 | 华为技术有限公司 | 车载系统的控制方法和装置 |
| KR102264431B1 (ko) | 2017-03-16 | 2021-06-15 | 삼성전자 주식회사 | 복수의 압전 소자를 구비하는 전자 장치 |
| KR102612647B1 (ko) * | 2017-03-29 | 2023-12-11 | 닛토덴코 가부시키가이샤 | 압전 디바이스 및 압전 디바이스 제조방법 |
| CN108694364B (zh) * | 2017-04-12 | 2021-10-19 | 清华大学 | 一种指纹采集装置及其制备方法 |
| US10846501B2 (en) * | 2017-04-28 | 2020-11-24 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic biometric touch scanner |
| US10489627B2 (en) | 2017-04-28 | 2019-11-26 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic biometric touch scanner |
| US10891461B2 (en) | 2017-05-22 | 2021-01-12 | Invensense, Inc. | Live fingerprint detection utilizing an integrated ultrasound and infrared sensor |
| US10474862B2 (en) | 2017-06-01 | 2019-11-12 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
| CN107220630B (zh) * | 2017-06-07 | 2021-09-03 | 京东方科技集团股份有限公司 | 显示基板及其驱动方法、显示装置 |
| US20180373913A1 (en) * | 2017-06-26 | 2018-12-27 | Qualcomm Incorporated | Ultrasonic fingerprint sensor for under-display applications |
| US10569302B2 (en) * | 2017-06-26 | 2020-02-25 | Qualcomm Incorporated | Biometric sensor with force detection and ultrasonic imaging capability |
| CN107275376B (zh) * | 2017-06-27 | 2019-12-20 | 上海天马微电子有限公司 | 一种显示面板及显示装置 |
| US10643052B2 (en) | 2017-06-28 | 2020-05-05 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
| CN107563273B (zh) * | 2017-07-06 | 2021-07-27 | 业泓科技(成都)有限公司 | 超声波感测模组及其制作方法、电子装置 |
| DE102017116012A1 (de) * | 2017-07-17 | 2019-01-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anzeigevorrichtungen und pixel für eine anzeigevorrichtung |
| CN107368227B (zh) * | 2017-07-18 | 2019-12-06 | 京东方科技集团股份有限公司 | 一种触控显示基板、触控显示装置 |
| CN107451567B (zh) * | 2017-08-03 | 2021-02-26 | 北京小米移动软件有限公司 | 具有指纹识别功能的终端 |
| CN107463900B (zh) * | 2017-08-03 | 2020-11-20 | 北京小米移动软件有限公司 | 具有指纹识别功能的终端 |
| KR102011565B1 (ko) * | 2017-08-04 | 2019-08-16 | 재단법인 다차원 스마트 아이티 융합시스템 연구단 | 비접촉 제스처 인식 시스템 및 그 방법 |
| JP2020530622A (ja) | 2017-08-09 | 2020-10-22 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 対話型生体タッチスキャナ |
| CN109426021B (zh) * | 2017-08-25 | 2021-09-03 | 群创光电股份有限公司 | 显示装置 |
| CN109472182B (zh) * | 2017-09-08 | 2020-09-22 | 茂丞科技(深圳)有限公司 | 晶圆级超声波芯片规模制造及封装方法 |
| JP7172044B2 (ja) | 2017-09-12 | 2022-11-16 | セイコーエプソン株式会社 | 液体吐出ヘッド、液体吐出装置、圧電デバイス、および超音波センサー |
| CN109492489A (zh) * | 2017-09-12 | 2019-03-19 | 南昌欧菲生物识别技术有限公司 | 电子设备 |
| CN109491552A (zh) * | 2017-09-12 | 2019-03-19 | 南昌欧菲生物识别技术有限公司 | 电子设备 |
| KR102395636B1 (ko) | 2017-10-20 | 2022-05-06 | 엘지디스플레이 주식회사 | 압전 패널 스피커 및 이를 포함하는 전자 기기 |
| SE1751354A1 (en) * | 2017-10-31 | 2019-05-01 | Fingerprint Cards Ab | Controllable ultrasonic fingerprint sensing system and method for controlling the system |
| US10997388B2 (en) | 2017-12-01 | 2021-05-04 | Invensense, Inc. | Darkfield contamination detection |
| US10984209B2 (en) | 2017-12-01 | 2021-04-20 | Invensense, Inc. | Darkfield modeling |
| US10936841B2 (en) | 2017-12-01 | 2021-03-02 | Invensense, Inc. | Darkfield tracking |
| EP3412207B1 (de) | 2017-12-12 | 2020-04-01 | Siemens Healthcare GmbH | Mammographie-bildgebung |
| US11100305B2 (en) * | 2017-12-21 | 2021-08-24 | Fingerprint Cards Ab | Display arrangement comprising ultrasonic biometric sensing system and method for manufacturing the display arrangement |
| US11938515B2 (en) * | 2017-12-22 | 2024-03-26 | Invensense, Inc. | Method for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer |
| KR102433315B1 (ko) * | 2017-12-27 | 2022-08-16 | 삼성전자주식회사 | 초음파 트랜스듀서가 임베디드된 유기 발광 다이오드 패널 및 이를 포함하는 표시 장치 |
| US11151355B2 (en) | 2018-01-24 | 2021-10-19 | Invensense, Inc. | Generation of an estimated fingerprint |
| US11509279B2 (en) | 2020-07-18 | 2022-11-22 | Resonant Inc. | Acoustic resonators and filters with reduced temperature coefficient of frequency |
| US12088281B2 (en) | 2021-02-03 | 2024-09-10 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer |
| US11323096B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with periodic etched holes |
| US12040779B2 (en) | 2020-04-20 | 2024-07-16 | Murata Manufacturing Co., Ltd. | Small transversely-excited film bulk acoustic resonators with enhanced Q-factor |
| US11323089B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer |
| US12237826B2 (en) | 2018-06-15 | 2025-02-25 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
| US11323090B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications |
| US11929731B2 (en) | 2018-02-18 | 2024-03-12 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch |
| US11206009B2 (en) | 2019-08-28 | 2021-12-21 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch |
| US10755067B2 (en) | 2018-03-22 | 2020-08-25 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
| JP2021522734A (ja) * | 2018-05-03 | 2021-08-30 | バタフライ ネットワーク,インコーポレイテッド | Cmosセンサ上の超音波トランスデューサ用の圧力ポート |
| KR102637666B1 (ko) * | 2018-05-14 | 2024-02-16 | 엑소 이미징, 인크. | 열압착 본딩, 공융 본딩, 및 솔더 본딩을 사용하는 마이크로머신 pMUT 어레이들 및 전자기기들을 위한 통합 기법들 |
| US10466844B1 (en) | 2018-05-21 | 2019-11-05 | UltraSense Systems, Inc. | Ultrasonic touch and force input detection |
| US20190354238A1 (en) | 2018-05-21 | 2019-11-21 | UltraSense Systems, Inc. | Ultrasonic touch detection and decision |
| US10585534B2 (en) | 2018-05-21 | 2020-03-10 | UltraSense Systems, Inc. | Ultrasonic touch feature extraction |
| US10719175B2 (en) * | 2018-05-21 | 2020-07-21 | UltraSense System, Inc. | Ultrasonic touch sensor and system |
| WO2019226881A1 (en) * | 2018-05-23 | 2019-11-28 | Cornell University | Ultrasonic fourier transform analog computing apparatus, method, and applications |
| US10754385B2 (en) * | 2018-05-28 | 2020-08-25 | Innovasonic, Inc. | Display with acoustic or ultrasonic features |
| US12237827B2 (en) | 2018-06-15 | 2025-02-25 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic filters with multiple piezoelectric plate thicknesses |
| US11323095B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Rotation in XY plane to suppress spurious modes in XBAR devices |
| US12191837B2 (en) | 2018-06-15 | 2025-01-07 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic device |
| US10917072B2 (en) | 2019-06-24 | 2021-02-09 | Resonant Inc. | Split ladder acoustic wave filters |
| US12155371B2 (en) | 2021-03-29 | 2024-11-26 | Murata Manufacturing Co., Ltd. | Layout of xbars with multiple sub-resonators in series |
| US12040781B2 (en) | 2018-06-15 | 2024-07-16 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator package |
| US12081187B2 (en) | 2018-06-15 | 2024-09-03 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator |
| US12191838B2 (en) | 2018-06-15 | 2025-01-07 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic device and method |
| US12119805B2 (en) | 2018-06-15 | 2024-10-15 | Murata Manufacturing Co., Ltd. | Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub |
| US11349452B2 (en) | 2018-06-15 | 2022-05-31 | Resonant Inc. | Transversely-excited film bulk acoustic filters with symmetric layout |
| US11728785B2 (en) | 2018-06-15 | 2023-08-15 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator using pre-formed cavities |
| US11264966B2 (en) | 2018-06-15 | 2022-03-01 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack |
| US12155374B2 (en) | 2021-04-02 | 2024-11-26 | Murata Manufacturing Co., Ltd. | Tiled transversely-excited film bulk acoustic resonator high power filters |
| US12212306B2 (en) | 2018-06-15 | 2025-01-28 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method |
| US12224732B2 (en) | 2018-06-15 | 2025-02-11 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands |
| US10819309B1 (en) | 2019-04-05 | 2020-10-27 | Resonant Inc. | Transversely-excited film bulk acoustic resonator package and method |
| US11329628B2 (en) | 2020-06-17 | 2022-05-10 | Resonant Inc. | Filter using lithium niobate and lithium tantalate transversely-excited film bulk acoustic resonators |
| US11916539B2 (en) | 2020-02-28 | 2024-02-27 | Murata Manufacturing Co., Ltd. | Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators |
| US12463619B2 (en) | 2018-06-15 | 2025-11-04 | Murata Manufacturing Co., Ltd. | Filter device |
| KR102544608B1 (ko) * | 2018-07-04 | 2023-06-19 | 삼성전자주식회사 | 생체 센서를 이용하여 획득된 생체 정보를 포함하는 이미지의 상태에 기반하여, 생체 정보와 관련된 인증을 수행 하는 방법 및 이를 구현한 전자 장치 |
| CN109003950B (zh) * | 2018-08-08 | 2021-05-25 | 苏州晶方半导体科技股份有限公司 | 一种超声波指纹芯片的封装结构以及封装方法 |
| US20200074133A1 (en) * | 2018-09-05 | 2020-03-05 | Zeppelin Corporation | Portable device with fingerprint pattern recognition module |
| KR102631709B1 (ko) * | 2018-09-18 | 2024-01-31 | 삼성전자주식회사 | 생체신호 획득 장치 및 방법과, 생체정보 추정 장치 |
| KR102486154B1 (ko) * | 2018-11-02 | 2023-01-10 | 엘지디스플레이 주식회사 | 초음파 센서, 초음파 센싱 장치 및 디스플레이 장치 |
| US11329098B2 (en) | 2018-11-08 | 2022-05-10 | Vanguard International Semiconductor Singapore Pte. Ltd. | Piezoelectric micromachined ultrasonic transducers and methods for fabricating thereof |
| CN109341843B (zh) * | 2018-11-08 | 2020-03-06 | 吉林大学 | 一种微振动传感器及其制备方法 |
| CN113170013B (zh) * | 2018-11-23 | 2022-09-20 | Lg电子株式会社 | 移动终端 |
| TWI702741B (zh) * | 2018-11-28 | 2020-08-21 | 茂丞科技股份有限公司 | 具懸浮結構的晶圓級超聲波晶片模組及其製造方法 |
| MA54392A (fr) | 2018-12-07 | 2021-10-13 | Octant Inc | Systèmes de criblage d'interactions protéine-protéine |
| TW202034217A (zh) * | 2018-12-07 | 2020-09-16 | 美商蝴蝶網路公司 | 超音波指紋偵測和相關設備及方法 |
| KR102771617B1 (ko) | 2018-12-10 | 2025-02-25 | 삼성전자주식회사 | 전자기기의 지문인식 센서 |
| TWI692888B (zh) * | 2018-12-14 | 2020-05-01 | 茂丞科技股份有限公司 | 晶圓級超聲波晶片組件及其製造方法 |
| US10936843B2 (en) | 2018-12-28 | 2021-03-02 | Invensense, Inc. | Segmented image acquisition |
| CN109492623B (zh) | 2018-12-28 | 2021-03-16 | 武汉华星光电技术有限公司 | 超声波指纹识别模组及显示面板 |
| CN109905833B (zh) * | 2018-12-31 | 2021-04-20 | 瑞声科技(新加坡)有限公司 | Mems麦克风制造方法 |
| CN111405455B (zh) * | 2019-01-02 | 2022-06-07 | 京东方科技集团股份有限公司 | 发声装置及其制作方法以及显示装置 |
| CN109815918B (zh) * | 2019-01-28 | 2021-11-05 | 京东方科技集团股份有限公司 | 指纹识别模组及其制作方法和驱动方法、显示装置 |
| CN109817679B (zh) | 2019-01-31 | 2020-10-16 | 武汉华星光电半导体显示技术有限公司 | Oled显示屏模组 |
| US20200256966A1 (en) * | 2019-02-08 | 2020-08-13 | Bae Systems Information And Electronic Systems Integration Inc. | Thermally conductive and antifouling boot for marine applications |
| KR102548486B1 (ko) * | 2019-02-13 | 2023-06-28 | 삼성전자주식회사 | 디스플레이 및 이를 포함하는 전자 장치 |
| JP7192640B2 (ja) * | 2019-04-23 | 2022-12-20 | 株式会社Soken | 超音波センサ |
| KR102551992B1 (ko) * | 2019-05-02 | 2023-07-06 | 엘지디스플레이 주식회사 | 스캔 구동 회로, 초음파 센서 및 디스플레이 장치 |
| KR102472120B1 (ko) * | 2019-05-03 | 2022-11-28 | 메이 선 테크놀로지 씨오 엘티디 | 의사-압전 d33 진동 장치 및 이를 통합하는 디스플레이 |
| US11545612B2 (en) | 2019-05-03 | 2023-01-03 | May Sun Technology Co., Ltd. | Pseudo-piezoelectric D33 device and electronic device using the same |
| DE112020002385A5 (de) * | 2019-05-15 | 2022-01-20 | Tdk Electronics Ag | Vorrichtung |
| WO2020243928A1 (zh) * | 2019-06-05 | 2020-12-10 | 深圳市汇顶科技股份有限公司 | 光学图像采集单元、光学图像采集系统、显示屏和电子设备 |
| KR102795248B1 (ko) | 2019-06-21 | 2025-04-14 | 삼성디스플레이 주식회사 | 초음파 감지 장치를 포함하는 표시 장치 |
| US11188735B2 (en) | 2019-06-24 | 2021-11-30 | Invensense, Inc. | Fake finger detection using ridge features |
| KR102708845B1 (ko) * | 2019-06-24 | 2024-09-24 | 엘지디스플레이 주식회사 | 센서를 포함하는 표시장치 |
| US11216681B2 (en) | 2019-06-25 | 2022-01-04 | Invensense, Inc. | Fake finger detection based on transient features |
| KR102792090B1 (ko) * | 2019-06-25 | 2025-04-07 | 삼성디스플레이 주식회사 | 초음파 감지 장치와 이를 포함하는 표시 장치 |
| KR102721491B1 (ko) * | 2019-06-25 | 2024-10-24 | 엘지디스플레이 주식회사 | 센서를 포함하는 표시장치 |
| US11216632B2 (en) | 2019-07-17 | 2022-01-04 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
| US11176345B2 (en) | 2019-07-17 | 2021-11-16 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
| CN112279213B (zh) * | 2019-07-22 | 2024-02-13 | 安徽奥飞声学科技有限公司 | 一种mems结构 |
| US11232549B2 (en) | 2019-08-23 | 2022-01-25 | Invensense, Inc. | Adapting a quality threshold for a fingerprint image |
| JP7327006B2 (ja) * | 2019-08-30 | 2023-08-16 | Tdk株式会社 | 振動デバイス |
| US11392789B2 (en) | 2019-10-21 | 2022-07-19 | Invensense, Inc. | Fingerprint authentication using a synthetic enrollment image |
| TWI706561B (zh) | 2019-11-18 | 2020-10-01 | 友達光電股份有限公司 | 顯示裝置及其製造方法 |
| EP3827906B1 (en) * | 2019-11-29 | 2025-09-17 | Imec VZW | A phased array ultrasound device for creating a pressure focus point |
| CN112978671B (zh) | 2019-12-13 | 2024-08-30 | 奥矽半导体技术有限公司 | 力测量和触摸感测集成电路器件 |
| CN112987989B (zh) * | 2019-12-18 | 2022-04-15 | 北部湾大学 | 实验室超声波生物处理的屏显交互方法 |
| US11706987B2 (en) * | 2019-12-20 | 2023-07-18 | Globalfoundries Singapore Pte. Ltd. | Semiconductor device and method of forming a semiconductor device |
| US12022737B2 (en) | 2020-01-30 | 2024-06-25 | UltraSense Systems, Inc. | System including piezoelectric capacitor assembly having force-measuring, touch-sensing, and haptic functionalities |
| US12292351B2 (en) | 2020-01-30 | 2025-05-06 | UltraSense Systems, Inc. | Force-measuring device and related systems |
| TW202131220A (zh) * | 2020-02-10 | 2021-08-16 | 神盾股份有限公司 | 超聲波指紋感測架構 |
| SE2050174A1 (en) * | 2020-02-17 | 2021-08-18 | Fingerprint Cards Ab | Fingerprint sensing module |
| US12255625B2 (en) | 2020-02-28 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Filter using transversely-excited film bulk acoustic resonators with inductively coupled sub-resonators |
| KR20210111935A (ko) | 2020-03-03 | 2021-09-14 | 삼성디스플레이 주식회사 | 표시 장치 |
| IT202000004777A1 (it) | 2020-03-06 | 2021-09-06 | St Microelectronics Srl | Trasduttore ultrasonico microlavorato piezoelettrico |
| CN115551650A (zh) | 2020-03-09 | 2022-12-30 | 应美盛公司 | 具有非均匀厚度的接触层的超声指纹传感器 |
| US11243300B2 (en) | 2020-03-10 | 2022-02-08 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor |
| US11898925B2 (en) | 2020-03-18 | 2024-02-13 | UltraSense Systems, Inc. | System for mapping force transmission from a plurality of force-imparting points to each force-measuring device and related method |
| US12341493B2 (en) | 2020-04-20 | 2025-06-24 | Murata Manufacturing Co., Ltd. | Low loss transversely-excited film bulk acoustic resonators and filters |
| US12278617B2 (en) | 2020-04-20 | 2025-04-15 | Murata Manufacturing Co., Ltd. | High Q solidly-mounted transversely-excited film bulk acoustic resonators |
| US12341490B2 (en) | 2020-04-20 | 2025-06-24 | Murata Manufacturing Co., Ltd. | Low loss transversely-excited film bulk acoustic resonators and filters |
| US11328165B2 (en) | 2020-04-24 | 2022-05-10 | Invensense, Inc. | Pressure-based activation of fingerprint spoof detection |
| US11811391B2 (en) | 2020-05-04 | 2023-11-07 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with etched conductor patterns |
| CN111722750A (zh) * | 2020-05-15 | 2020-09-29 | 浙江工业大学 | 一种新型的触摸屏实现方法 |
| US12284481B2 (en) * | 2020-05-29 | 2025-04-22 | Qualcomm Incorporated | Audio speaker and proximity sensor with piezoelectric polymer technology |
| US11995909B2 (en) | 2020-07-17 | 2024-05-28 | Tdk Corporation | Multipath reflection correction |
| CN112949603A (zh) * | 2020-07-20 | 2021-06-11 | 神盾股份有限公司 | 指纹感测装置 |
| US11264969B1 (en) | 2020-08-06 | 2022-03-01 | Resonant Inc. | Transversely-excited film bulk acoustic resonator comprising small cells |
| US12174295B2 (en) | 2020-08-07 | 2024-12-24 | Tdk Corporation | Acoustic multipath correction |
| US11890643B2 (en) | 2020-08-14 | 2024-02-06 | Vanguard International Semiconductor Corporation | Piezoelectric micromachined ultrasonic transducer and method of fabricating the same |
| US11271539B1 (en) | 2020-08-19 | 2022-03-08 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with tether-supported diaphragm |
| TWI732688B (zh) * | 2020-09-24 | 2021-07-01 | 世界先進積體電路股份有限公司 | 壓電微機械超聲波換能器及其製作方法 |
| US11405017B2 (en) | 2020-10-05 | 2022-08-02 | Resonant Inc. | Acoustic matrix filters and radios using acoustic matrix filters |
| US11658639B2 (en) | 2020-10-05 | 2023-05-23 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator matrix filters with noncontiguous passband |
| US11728784B2 (en) | 2020-10-05 | 2023-08-15 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator matrix filters with split die sub-filters |
| US11476834B2 (en) | 2020-10-05 | 2022-10-18 | Resonant Inc. | Transversely-excited film bulk acoustic resonator matrix filters with switches in parallel with sub-filter shunt capacitors |
| US11929733B2 (en) | 2020-10-05 | 2024-03-12 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator matrix filters with input and output impedances matched to radio frequency front end elements |
| KR102430218B1 (ko) * | 2020-10-20 | 2022-08-11 | 한국전자기술연구원 | AlN(질화알루미늄) 박막 증착 방법 |
| US11719671B2 (en) | 2020-10-26 | 2023-08-08 | UltraSense Systems, Inc. | Methods of distinguishing among touch events |
| US12119806B2 (en) | 2020-10-30 | 2024-10-15 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with spiral interdigitated transducer fingers |
| US11803274B2 (en) | 2020-11-09 | 2023-10-31 | UltraSense Systems, Inc. | Multi-virtual button finger-touch input systems and methods of detecting a finger-touch event at one of a plurality of virtual buttons |
| US12255617B2 (en) | 2020-11-11 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic resonators with low thermal impedance |
| US12431856B2 (en) | 2020-11-12 | 2025-09-30 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with reduced loss in the aperture direction |
| US12255626B2 (en) | 2020-11-13 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Solidly-mounted transversely-excited film bulk acoustic filters with excess piezoelectric material removed |
| US11496113B2 (en) | 2020-11-13 | 2022-11-08 | Resonant Inc. | XBAR devices with excess piezoelectric material removed |
| US11405020B2 (en) | 2020-11-26 | 2022-08-02 | Resonant Inc. | Transversely-excited film bulk acoustic resonators with structures to reduce acoustic energy leakage |
| US11586290B2 (en) | 2020-12-10 | 2023-02-21 | UltraSense Systems, Inc. | User-input systems and methods of delineating a location of a virtual button by haptic feedback and of determining user-input |
| CN112871613A (zh) * | 2020-12-19 | 2021-06-01 | 复旦大学 | 具有支撑柱的压电式微机械超声换能器 |
| US12126318B2 (en) | 2021-01-15 | 2024-10-22 | Murata Manufacturing Co., Ltd. | Filters using decoupled transversely-excited film bulk acoustic resonators |
| US11239816B1 (en) | 2021-01-15 | 2022-02-01 | Resonant Inc. | Decoupled transversely-excited film bulk acoustic resonators |
| US12463615B2 (en) | 2021-01-21 | 2025-11-04 | Murata Manufacturing Co., Ltd | Transversely-excited film bulk acoustic resonators with improved coupling and reduced energy leakage |
| CN114791295B (zh) * | 2021-01-25 | 2025-08-08 | 群创光电股份有限公司 | 电子装置及该电子装置中传感器的制造方法 |
| KR20220129334A (ko) * | 2021-03-16 | 2022-09-23 | 삼성전자주식회사 | 초음파를 이용하여 지문 이미지를 식별하는 전자 장치 및 이의 동작 방법 |
| US11716566B2 (en) * | 2021-03-23 | 2023-08-01 | Qualcomm Incorporated | Segmented transducers for acoustic applications |
| US12289099B2 (en) | 2021-03-24 | 2025-04-29 | Murata Manufacturing Co., Ltd. | Acoustic filters with shared acoustic tracks for series and shunt resonators |
| US12126328B2 (en) | 2021-03-24 | 2024-10-22 | Murata Manufacturing Co., Ltd. | Acoustic filters with shared acoustic tracks |
| US12355426B2 (en) | 2021-03-24 | 2025-07-08 | Murata Manufacturing Co., Ltd. | Acoustic filters with shared acoustic tracks |
| US12348216B2 (en) | 2021-03-24 | 2025-07-01 | Murata Manufacturing Co., Ltd. | Acoustic filters with shared acoustic tracks and cascaded series resonators |
| US12341492B2 (en) | 2021-03-29 | 2025-06-24 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with busbar side edges that form angles with a perimeter of the cavity |
| US12224735B2 (en) | 2021-03-30 | 2025-02-11 | Murata Manufacturing Co., Ltd. | Diplexer using decoupled transversely-excited film bulk acoustic resonators |
| WO2022212569A1 (en) | 2021-03-30 | 2022-10-06 | Resonant Inc. | Filter for 6 ghz wi-fi using transversely-excited film bulk acoustic resonators |
| US12237823B2 (en) | 2021-04-02 | 2025-02-25 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals |
| US12249971B2 (en) | 2021-04-02 | 2025-03-11 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with solidly mounted resonator (SMR) pedestals |
| US12126316B2 (en) | 2021-04-16 | 2024-10-22 | Murata Manufacturing Co., Ltd | Transversely-excited film bulk acoustic resonator |
| US12255633B2 (en) | 2021-04-16 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Filter using transversely-excited film bulk acoustic resonators |
| US12131527B2 (en) | 2021-04-20 | 2024-10-29 | Cornell University | Ultrasonic computation hardware for convolutional neural network computing and other computation applications |
| US12255607B2 (en) | 2021-04-30 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures |
| TWI820590B (zh) * | 2021-04-30 | 2023-11-01 | 日商阿爾卑斯阿爾派股份有限公司 | 鄰近檢測裝置 |
| US12160220B2 (en) | 2021-04-30 | 2024-12-03 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures |
| US12075700B2 (en) | 2021-05-07 | 2024-08-27 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator fabrication using polysilicon pillars |
| US12057823B2 (en) | 2021-05-07 | 2024-08-06 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with concentric interdigitated transducer fingers |
| US12066338B2 (en) | 2021-05-11 | 2024-08-20 | UltraSense Systems, Inc. | Force-measuring device assembly for a portable electronic apparatus, a portable electronic apparatus, and a method of modifying a span of a sense region in a force-measuring device assembly |
| US11681399B2 (en) | 2021-06-30 | 2023-06-20 | UltraSense Systems, Inc. | User-input systems and methods of detecting a user input at a cover member of a user-input system |
| US12170513B2 (en) | 2021-06-30 | 2024-12-17 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with reduced substrate to contact bump thermal resistance |
| US12256642B2 (en) | 2021-07-12 | 2025-03-18 | Robert Bosch Gmbh | Ultrasound transducer with distributed cantilevers |
| US11899143B2 (en) * | 2021-07-12 | 2024-02-13 | Robert Bosch Gmbh | Ultrasound sensor array for parking assist systems |
| US12150384B2 (en) | 2021-07-12 | 2024-11-19 | Robert Bosch Gmbh | Ultrasound transducer with distributed cantilevers |
| US12416807B2 (en) | 2021-08-20 | 2025-09-16 | Tdk Corporation | Retinal projection display system |
| US12260050B2 (en) | 2021-08-25 | 2025-03-25 | Tdk Corporation | Differential receive at an ultrasonic transducer |
| CN113703614B (zh) * | 2021-08-30 | 2024-03-26 | 苏州清听声学科技有限公司 | 一种定向超声触控装置 |
| US12456962B2 (en) | 2021-09-24 | 2025-10-28 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators wafer-level packaging using a dielectric cover |
| US12225387B2 (en) | 2021-09-29 | 2025-02-11 | Murata Manufacturing Co., Ltd. | Communications device with concurrent operation in 5GHZ and 6GHZ U-NII frequency ranges |
| US12451864B2 (en) | 2021-09-29 | 2025-10-21 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with curved shaped ends of fingers or opposing busbars |
| US12407326B2 (en) | 2021-11-04 | 2025-09-02 | Murata Manufacturing Co., Ltd. | Stacked die transversely-excited film bulk acoustic resonator (XBAR) filters |
| US11881171B2 (en) * | 2021-12-09 | 2024-01-23 | Innolux Corporation | Electronic device |
| JP7659667B2 (ja) | 2022-02-09 | 2025-04-09 | 株式会社ジャパンディスプレイ | 検出装置 |
| US11481062B1 (en) | 2022-02-14 | 2022-10-25 | UltraSense Systems, Inc. | Solid-state touch-enabled switch and related method |
| US11775073B1 (en) | 2022-07-21 | 2023-10-03 | UltraSense Systems, Inc. | Integrated virtual button module, integrated virtual button system, and method of determining user input and providing user feedback |
| CN117548318A (zh) * | 2022-08-05 | 2024-02-13 | 天津大学 | 具有支护层的pmut结构及其制造方法 |
| DE102022122821A1 (de) * | 2022-09-08 | 2024-03-14 | Infineon Technologies Ag | Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren |
| WO2025091157A1 (zh) * | 2023-10-30 | 2025-05-08 | 京东方科技集团股份有限公司 | 显示面板及其制作方法、显示装置 |
| CN117619710A (zh) * | 2023-12-18 | 2024-03-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Pmut阵列超声换能器 |
| US12416996B2 (en) * | 2024-01-24 | 2025-09-16 | Qualcomm Incorporated | Devices including one or more high-impedance layers between a display stack and an ultrasonic fingerprint sensor stack |
| CN119626188B (zh) * | 2024-11-15 | 2025-11-28 | 上海船舶电子设备研究所(中国船舶集团有限公司第七二六研究所) | 超多通道pmut阵元二维布阵结构及换能器 |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1043185A (ja) * | 1996-08-08 | 1998-02-17 | Ge Yokogawa Medical Syst Ltd | 超音波イメージング方法及び超音波イメージング装置 |
| US6381197B1 (en) * | 1999-05-11 | 2002-04-30 | Bernard J Savord | Aperture control and apodization in a micro-machined ultrasonic transducer |
| US6953977B2 (en) | 2000-02-08 | 2005-10-11 | Boston Microsystems, Inc. | Micromechanical piezoelectric device |
| CA2406684A1 (en) | 2001-10-05 | 2003-04-05 | Queen's University At Kingston | Ultrasound transducer array |
| JP2004088056A (ja) * | 2002-07-02 | 2004-03-18 | Sumitomo Electric Ind Ltd | 圧電振動子とその実装方法、実装デバイス、それを用いた超音波プローブ、およびそれを用いた3次元超音波診断装置 |
| US6836159B2 (en) * | 2003-03-06 | 2004-12-28 | General Electric Company | Integrated high-voltage switching circuit for ultrasound transducer array |
| EP1629408B1 (en) * | 2003-05-30 | 2015-01-28 | Privaris, Inc. | A system and methods for assignation and use of media content subscription service privileges |
| JP4513596B2 (ja) | 2004-08-25 | 2010-07-28 | 株式会社デンソー | 超音波センサ |
| WO2006042144A2 (en) | 2004-10-07 | 2006-04-20 | Ultra-Scan Corporation | Ultrasonic fingerprint scanning utilizing a plane wave |
| US20060181521A1 (en) | 2005-02-14 | 2006-08-17 | Atrua Technologies, Inc. | Systems for dynamically illuminating touch sensors |
| US7449821B2 (en) | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| US7880565B2 (en) | 2005-08-03 | 2011-02-01 | Kolo Technologies, Inc. | Micro-electro-mechanical transducer having a surface plate |
| KR101337264B1 (ko) | 2006-02-28 | 2013-12-05 | 삼성디스플레이 주식회사 | 터치 패널, 이를 구비한 표시 장치 및 그 제조 방법 |
| US8098915B2 (en) * | 2006-05-25 | 2012-01-17 | Ultra-Scan Corporation | Longitudinal pulse wave array |
| JP2008186843A (ja) * | 2007-01-26 | 2008-08-14 | Olympus Corp | フレキシブル基板の接合構造 |
| EP2017756A1 (de) | 2007-07-20 | 2009-01-21 | BrainLAB AG | Verfahren zur Anzeige und/oder Bearbeitung bzw. Verarbeitung von Bilddaten medizinischen oder medizintechnischen Ursprungs mit Gestenerkennung |
| KR101493840B1 (ko) * | 2008-03-14 | 2015-02-17 | 삼성디스플레이 주식회사 | 액정 표시 장치, 표시 시스템, 및 액정 표시 장치를 이용한물체 형상의 인식 방법 |
| US7856883B2 (en) | 2008-03-24 | 2010-12-28 | Industrial Technology Research Institute | Capacitive ultrasonic sensors and display devices using the same |
| JP2009260723A (ja) | 2008-04-17 | 2009-11-05 | Asahi Kasei Electronics Co Ltd | トランスデューサ |
| WO2009153757A1 (en) | 2008-06-19 | 2009-12-23 | Nxp B.V. | Piezoelectric bimorph switch |
| WO2010006293A2 (en) | 2008-07-10 | 2010-01-14 | Cornell University | Ultrasound wave generating apparatus |
| US7944121B2 (en) | 2008-08-21 | 2011-05-17 | The United States Of America As Represented By The Secretary Of The Army | Negative vertical deflection piezoelectric MEMS actuators and method of fabrication |
| US7876026B2 (en) | 2008-08-21 | 2011-01-25 | The United States Of America As Represented By The Secretary Of The Army | Large force and displacement piezoelectric MEMS lateral actuation |
| WO2010053156A1 (ja) * | 2008-11-10 | 2010-05-14 | 国立大学法人京都大学 | 超音波診断システムおよび超音波診断装置 |
| JP5293557B2 (ja) * | 2008-12-17 | 2013-09-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波トランスデューサーアレイ及び超音波デバイス |
| US8605960B2 (en) * | 2009-03-02 | 2013-12-10 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Fingerprint sensing device |
| JP5177033B2 (ja) * | 2009-03-18 | 2013-04-03 | セイコーエプソン株式会社 | 入力装置、及び電子機器 |
| US8508103B2 (en) * | 2009-03-23 | 2013-08-13 | Sonavation, Inc. | Piezoelectric identification device and applications thereof |
| TWI515664B (zh) * | 2009-03-23 | 2016-01-01 | 索納遜公司 | 用於壓電陶瓷辨識裝置的改良多工器 |
| WO2011022101A2 (en) * | 2009-05-22 | 2011-02-24 | Arizona Board Of Regents, For And On Behalf Of Arizona State University | Flexible antennas and related apparatuses and methods |
| JP2011048696A (ja) * | 2009-08-27 | 2011-03-10 | Kyocera Corp | 入力装置 |
| US9274553B2 (en) * | 2009-10-30 | 2016-03-01 | Synaptics Incorporated | Fingerprint sensor and integratable electronic display |
| CN101712028B (zh) | 2009-11-13 | 2012-02-01 | 中国科学院声学研究所 | 一种薄膜超声换能器及其制备方法 |
| US8593036B2 (en) | 2010-02-26 | 2013-11-26 | Mcb Clean Room Solutions, Llc | High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same |
| US8201739B2 (en) * | 2010-03-08 | 2012-06-19 | Ultra-Scan Corporation | Biometric sensor with delay layer |
| WO2011129326A1 (ja) * | 2010-04-12 | 2011-10-20 | オリンパスメディカルシステムズ株式会社 | 超音波診断装置 |
| US8907929B2 (en) * | 2010-06-29 | 2014-12-09 | Qualcomm Incorporated | Touchless sensing and gesture recognition using continuous wave ultrasound signals |
| US8564314B2 (en) * | 2010-11-02 | 2013-10-22 | Atmel Corporation | Capacitive touch sensor for identifying a fingerprint |
| US8539837B2 (en) * | 2010-12-10 | 2013-09-24 | Palo Alto Research Center Incorporated | Ultrasonic imaging using thin film transistor backplane |
| CN106269451B (zh) | 2011-02-15 | 2020-02-21 | 富士胶卷迪马蒂克斯股份有限公司 | 使用微圆顶阵列的压电式换能器 |
| KR101320138B1 (ko) * | 2011-11-30 | 2013-10-23 | 삼성전기주식회사 | 지문 인식 센서 및 그 제조 방법 |
| MY170979A (en) * | 2012-02-02 | 2019-09-23 | Qualcomm Inc | Ultrasonic touch sensor with a display monitor |
| US8767512B2 (en) * | 2012-05-01 | 2014-07-01 | Fujifilm Dimatix, Inc. | Multi-frequency ultra wide bandwidth transducer |
| US9454954B2 (en) | 2012-05-01 | 2016-09-27 | Fujifilm Dimatix, Inc. | Ultra wide bandwidth transducer with dual electrode |
| US8890853B2 (en) | 2013-01-11 | 2014-11-18 | Sharp Laboratories Of America, Inc. | In-pixel ultrasonic touch sensor for display applications |
| US9323397B2 (en) * | 2013-03-11 | 2016-04-26 | The Regents Of The University Of California | In-air ultrasonic rangefinding and angle estimation |
| WO2015009635A1 (en) | 2013-07-16 | 2015-01-22 | The Regents Of The University Of California | Mut fingerprint id system |
| US10478858B2 (en) | 2013-12-12 | 2019-11-19 | Qualcomm Incorporated | Piezoelectric ultrasonic transducer and process |
| CN106660074B (zh) | 2014-07-08 | 2019-09-24 | 高通股份有限公司 | 压电超声换能器及工艺 |
| CN107120228A (zh) * | 2017-06-06 | 2017-09-01 | 华北电力大学 | 一种带有对称辅助翼的三叉式叶片 |
-
2014
- 2014-12-12 US US14/569,256 patent/US10478858B2/en not_active Expired - Fee Related
- 2014-12-12 CN CN201480066197.7A patent/CN105980968B/zh active Active
- 2014-12-12 US US14/569,280 patent/US9815087B2/en active Active
- 2014-12-12 JP JP2016537469A patent/JP6316433B2/ja active Active
- 2014-12-12 WO PCT/US2014/070114 patent/WO2015089453A1/en not_active Ceased
- 2014-12-12 KR KR1020167018019A patent/KR101883209B1/ko active Active
- 2014-12-12 CA CA2929723A patent/CA2929723C/en active Active
- 2014-12-12 EP EP22161204.7A patent/EP4071589A1/en active Pending
- 2014-12-12 EP EP14825013.7A patent/EP3080686A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP4071589A1 (en) | 2022-10-12 |
| JP2017503255A (ja) | 2017-01-26 |
| KR101883209B1 (ko) | 2018-08-30 |
| US20150169136A1 (en) | 2015-06-18 |
| BR112016013140A2 (pt) | 2017-08-08 |
| CA2929723C (en) | 2020-09-15 |
| KR20160096648A (ko) | 2016-08-16 |
| US20150165479A1 (en) | 2015-06-18 |
| EP3080686A1 (en) | 2016-10-19 |
| WO2015089453A1 (en) | 2015-06-18 |
| CN105980968A (zh) | 2016-09-28 |
| CN105980968B (zh) | 2019-05-07 |
| CA2929723A1 (en) | 2015-06-18 |
| US9815087B2 (en) | 2017-11-14 |
| US10478858B2 (en) | 2019-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6316433B2 (ja) | マイクロメカニカル超音波トランスデューサおよびディスプレイ | |
| EP3990197B1 (en) | Ultrasonic sensor array | |
| US10001552B2 (en) | Three-port piezoelectric ultrasonic transducer | |
| CN108883435B (zh) | 用于超声换能器像素读出的驱动方案 | |
| WO2016061410A1 (en) | Three-port piezoelectric ultrasonic transducer | |
| TW201803299A (zh) | 個人醫療設備干擾抑制 | |
| WO2016053929A1 (en) | Integrated self-capacitive touch display | |
| US11216115B2 (en) | Electronic device and method for controlling touch sensing signals and storage medium | |
| BR112016013140B1 (pt) | Transdutores ultrassônicos micromecânicos e tela |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20171127 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171127 |
|
| A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20180105 |
|
| A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20180214 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180226 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180327 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6316433 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |