JP6297131B2 - ウェハスケールトランスデューサコーティング及び方法 - Google Patents
ウェハスケールトランスデューサコーティング及び方法 Download PDFInfo
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Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Gynecology & Obstetrics (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
Claims (8)
- 複数の小型超音波トランスデューサを製造する方法であって、
複数の小型超音波トランスデューサが形成されたウェハを受け取り、前記小型超音波トランスデューサは各々、
圧電材料を含むトランスデューサメンブレンと、
各々が前記トランスデューサメンブレンに電気的に結合された第1のボンドパッド及び第2のボンドパッドと
を含み、
前記ウェハの前面側から前記複数の小型超音波トランスデューサを覆って保護層を共形に堆積し、
その後、第1のエッチングプロセスを実行して、前記前面側から前記ウェハ内に延在する複数の第1のトレンチを形成し、前記第1のトレンチは、前記保護層を貫いてエッチングされ、前記第1のトレンチは、隣接し合う小型超音波トランスデューサ間に配置され、且つ
第2のエッチングプロセスを実行して、前記第1及び第2のボンドパッドの上に置かれた前記保護層の部分を除去し、それにより前記第1及び第2のボンドパッドを露出させる、
ことを有する方法。 - 前記ウェハの裏面側から複数の第2のトレンチをエッチングし、前記第2のトレンチは各々、前記トランスデューサメンブレンのうちのそれぞれの1つとアライメントされ、
前記第2のトレンチの各々を裏当て材で充填し、且つ
前記裏面側から前記ウェハを薄化する、
ことを更に有する請求項1に記載の方法。 - 前記第2のトレンチを充填することは、前記第2のトレンチをエポキシで充填することを有する、請求項2に記載の方法。
- 前記保護層を共形に堆積することは、前記保護層としてパリレン材料を堆積することを有する、請求項1に記載の方法。
- 前記保護層を共形に堆積することは、化学気相成長プロセスを有する、請求項1に記載の方法。
- 前記第1のエッチングプロセスは、ディープ反応性イオンエッチングプロセスを有する、請求項1に記載の方法。
- 前記保護層を共形に堆積することの前に、前記ウェハの裏面側を覆うこと、を更に有する請求項1に記載の方法。
- 前記圧電材料は、ポリ二フッ化ビニリデン(PVDF)、ポリ(二フッ化ビニリデン−三フッ化エチレン)(P(VDF−TrFE)、又はポリ(二フッ化ビニリデン−四フッ化エチレン)(P(VDF−TFE))を含む、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361781159P | 2013-03-14 | 2013-03-14 | |
US61/781,159 | 2013-03-14 | ||
PCT/US2014/028552 WO2014152987A1 (en) | 2013-03-14 | 2014-03-14 | Wafer-scale transducer coating and method |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016513941A JP2016513941A (ja) | 2016-05-16 |
JP2016513941A5 JP2016513941A5 (ja) | 2017-08-10 |
JP6297131B2 true JP6297131B2 (ja) | 2018-03-20 |
Family
ID=51530489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016502833A Active JP6297131B2 (ja) | 2013-03-14 | 2014-03-14 | ウェハスケールトランスデューサコーティング及び方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10123775B2 (ja) |
EP (1) | EP2973767B1 (ja) |
JP (1) | JP6297131B2 (ja) |
CN (1) | CN105122488B (ja) |
WO (1) | WO2014152987A1 (ja) |
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JP6189033B2 (ja) * | 2012-12-14 | 2017-08-30 | 株式会社日立製作所 | 超音波探触子の製造方法、超音波探触子、及び超音波診断装置 |
JP6569473B2 (ja) * | 2015-10-29 | 2019-09-04 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置 |
JP2017080132A (ja) | 2015-10-29 | 2017-05-18 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置 |
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US11411163B2 (en) * | 2016-12-30 | 2022-08-09 | Intel Corporation | Packaging for ultrasonic transducers |
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JP6922651B2 (ja) | 2017-10-26 | 2021-08-18 | セイコーエプソン株式会社 | 超音波デバイス、及び超音波測定装置 |
CN108652669A (zh) * | 2018-03-14 | 2018-10-16 | 业成科技(成都)有限公司 | 超音波感测器及其运作方法 |
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- 2014-03-14 EP EP14768700.8A patent/EP2973767B1/en active Active
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JP2016513941A (ja) | 2016-05-16 |
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CN105122488B (zh) | 2018-01-26 |
EP2973767B1 (en) | 2017-11-22 |
US10123775B2 (en) | 2018-11-13 |
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US20140276087A1 (en) | 2014-09-18 |
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