JP6307517B2 - 振動測定方法及び干渉計 - Google Patents

振動測定方法及び干渉計 Download PDF

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Publication number
JP6307517B2
JP6307517B2 JP2015546414A JP2015546414A JP6307517B2 JP 6307517 B2 JP6307517 B2 JP 6307517B2 JP 2015546414 A JP2015546414 A JP 2015546414A JP 2015546414 A JP2015546414 A JP 2015546414A JP 6307517 B2 JP6307517 B2 JP 6307517B2
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Japan
Prior art keywords
plane
illumination light
directions
light beams
interferometer
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JP2015546414A
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Japanese (ja)
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JP2016501373A (ja
JP2016501373A5 (enExample
Inventor
エイオルフ ヴィカーゲン、
エイオルフ ヴィカーゲン、
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オプトノール アーエス
オプトノール アーエス
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2015546414A 2012-12-05 2013-12-04 振動測定方法及び干渉計 Active JP6307517B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NO20121458A NO20121458A1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer
NO20121458 2012-12-05
PCT/NO2013/050214 WO2014088424A1 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer

Publications (3)

Publication Number Publication Date
JP2016501373A JP2016501373A (ja) 2016-01-18
JP2016501373A5 JP2016501373A5 (enExample) 2017-01-26
JP6307517B2 true JP6307517B2 (ja) 2018-04-04

Family

ID=50883743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015546414A Active JP6307517B2 (ja) 2012-12-05 2013-12-04 振動測定方法及び干渉計

Country Status (6)

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US (1) US9964432B2 (enExample)
EP (1) EP2929305B1 (enExample)
JP (1) JP6307517B2 (enExample)
CN (1) CN104823029B (enExample)
NO (1) NO20121458A1 (enExample)
WO (1) WO2014088424A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2544727A (en) * 2015-11-16 2017-05-31 Optonor As Optical interferometry
GB2570742B (en) 2018-06-01 2020-10-28 Optonor As Optical-interference analysis
EP3757445A1 (en) 2019-06-24 2020-12-30 Hexagon Ragasco AS System and method for testing composite pressure vessels
NO20200190A1 (en) 2020-02-14 2021-08-16 Optonor As System and method for analysing an object
JPWO2023120170A1 (enExample) * 2021-12-22 2023-06-29

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229832A (en) * 1991-07-08 1993-07-20 Industrial Quality, Inc. Optical ultrasonic material characterization apparatus and method
AU6036599A (en) * 1998-09-09 2000-03-27 Lockheed Martin Idaho Technologies Company Method and apparatus for assessing material properties of sheet-like materials
NO314323B1 (no) 2000-03-24 2003-03-03 Optonor As Framgangsmåte og interferometer for måling av mikroskopisk vibrasjon
JP3955899B2 (ja) * 2002-09-20 2007-08-08 国立大学法人埼玉大学 電子的スペックル干渉法を用いた変形計測方法および装置
US7978341B2 (en) * 2003-12-22 2011-07-12 Bossa Nova Technologies, Llc Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
GB2411001B (en) * 2004-02-10 2007-03-28 Statoil Asa Seismic exploration
GB2416835C (en) * 2004-08-04 2013-11-06 Statoil Asa Method and apparatus for studying surfaces
CN100362316C (zh) * 2006-03-08 2008-01-16 中国船舶重工集团公司第七一一研究所 一种三维电子散斑干涉仪
DE102007023826A1 (de) * 2007-05-21 2008-11-27 Polytec Gmbh Verfahren und Vorrichtung zur berührungslosen Schwingungsmessung
NL1036179A1 (nl) * 2007-11-20 2009-05-25 Asml Netherlands Bv Lithographic apparatus and method.
GB0803701D0 (en) * 2008-02-28 2008-04-09 Statoilhydro Asa Improved interferometric methods and apparatus for seismic exploration

Also Published As

Publication number Publication date
US9964432B2 (en) 2018-05-08
CN104823029B (zh) 2018-09-04
NO334730B1 (no) 2014-05-19
US20150308887A1 (en) 2015-10-29
EP2929305C0 (en) 2024-01-31
JP2016501373A (ja) 2016-01-18
NO20121458A1 (no) 2014-05-19
CN104823029A (zh) 2015-08-05
EP2929305A1 (en) 2015-10-14
EP2929305A4 (en) 2016-07-20
WO2014088424A1 (en) 2014-06-12
EP2929305B1 (en) 2024-01-31

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