NO20121458A1 - Fremgangsmåte for vibrasjonsmåling og interferometer - Google Patents

Fremgangsmåte for vibrasjonsmåling og interferometer Download PDF

Info

Publication number
NO20121458A1
NO20121458A1 NO20121458A NO20121458A NO20121458A1 NO 20121458 A1 NO20121458 A1 NO 20121458A1 NO 20121458 A NO20121458 A NO 20121458A NO 20121458 A NO20121458 A NO 20121458A NO 20121458 A1 NO20121458 A1 NO 20121458A1
Authority
NO
Norway
Prior art keywords
measurements
accordance
illumination
interferometer
plane
Prior art date
Application number
NO20121458A
Other languages
English (en)
Norwegian (no)
Other versions
NO334730B1 (no
Inventor
Eiolf Vikhagen
Original Assignee
Optonor As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optonor As filed Critical Optonor As
Priority to NO20121458A priority Critical patent/NO20121458A1/no
Priority to JP2015546414A priority patent/JP6307517B2/ja
Priority to EP13860879.9A priority patent/EP2929305B1/en
Priority to US14/648,378 priority patent/US9964432B2/en
Priority to PCT/NO2013/050214 priority patent/WO2014088424A1/en
Priority to CN201380063341.7A priority patent/CN104823029B/zh
Publication of NO334730B1 publication Critical patent/NO334730B1/no
Publication of NO20121458A1 publication Critical patent/NO20121458A1/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
NO20121458A 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer NO20121458A1 (no)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NO20121458A NO20121458A1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer
JP2015546414A JP6307517B2 (ja) 2012-12-05 2013-12-04 振動測定方法及び干渉計
EP13860879.9A EP2929305B1 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer
US14/648,378 US9964432B2 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer
PCT/NO2013/050214 WO2014088424A1 (en) 2012-12-05 2013-12-04 Method of vibration measurement and interferometer
CN201380063341.7A CN104823029B (zh) 2012-12-05 2013-12-04 振动测量的方法以及干涉仪

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20121458A NO20121458A1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer

Publications (2)

Publication Number Publication Date
NO334730B1 NO334730B1 (no) 2014-05-19
NO20121458A1 true NO20121458A1 (no) 2014-05-19

Family

ID=50883743

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20121458A NO20121458A1 (no) 2012-12-05 2012-12-05 Fremgangsmåte for vibrasjonsmåling og interferometer

Country Status (6)

Country Link
US (1) US9964432B2 (enExample)
EP (1) EP2929305B1 (enExample)
JP (1) JP6307517B2 (enExample)
CN (1) CN104823029B (enExample)
NO (1) NO20121458A1 (enExample)
WO (1) WO2014088424A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2544727A (en) * 2015-11-16 2017-05-31 Optonor As Optical interferometry
GB2570742B (en) 2018-06-01 2020-10-28 Optonor As Optical-interference analysis
EP3757445A1 (en) 2019-06-24 2020-12-30 Hexagon Ragasco AS System and method for testing composite pressure vessels
NO20200190A1 (en) 2020-02-14 2021-08-16 Optonor As System and method for analysing an object
JPWO2023120170A1 (enExample) * 2021-12-22 2023-06-29

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229832A (en) * 1991-07-08 1993-07-20 Industrial Quality, Inc. Optical ultrasonic material characterization apparatus and method
US20030037616A1 (en) * 2000-03-24 2003-02-27 Eiolf Vikhagen Method for vibration measurement and interferometer

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6036599A (en) * 1998-09-09 2000-03-27 Lockheed Martin Idaho Technologies Company Method and apparatus for assessing material properties of sheet-like materials
JP3955899B2 (ja) * 2002-09-20 2007-08-08 国立大学法人埼玉大学 電子的スペックル干渉法を用いた変形計測方法および装置
US7978341B2 (en) * 2003-12-22 2011-07-12 Bossa Nova Technologies, Llc Multi-channel laser interferometric method and apparatus for detection of ultrasonic motion from a surface
GB2411001B (en) * 2004-02-10 2007-03-28 Statoil Asa Seismic exploration
GB2416835C (en) * 2004-08-04 2013-11-06 Statoil Asa Method and apparatus for studying surfaces
CN100362316C (zh) * 2006-03-08 2008-01-16 中国船舶重工集团公司第七一一研究所 一种三维电子散斑干涉仪
DE102007023826A1 (de) * 2007-05-21 2008-11-27 Polytec Gmbh Verfahren und Vorrichtung zur berührungslosen Schwingungsmessung
NL1036179A1 (nl) * 2007-11-20 2009-05-25 Asml Netherlands Bv Lithographic apparatus and method.
GB0803701D0 (en) * 2008-02-28 2008-04-09 Statoilhydro Asa Improved interferometric methods and apparatus for seismic exploration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229832A (en) * 1991-07-08 1993-07-20 Industrial Quality, Inc. Optical ultrasonic material characterization apparatus and method
US20030037616A1 (en) * 2000-03-24 2003-02-27 Eiolf Vikhagen Method for vibration measurement and interferometer

Also Published As

Publication number Publication date
US9964432B2 (en) 2018-05-08
CN104823029B (zh) 2018-09-04
NO334730B1 (no) 2014-05-19
US20150308887A1 (en) 2015-10-29
EP2929305C0 (en) 2024-01-31
JP2016501373A (ja) 2016-01-18
JP6307517B2 (ja) 2018-04-04
CN104823029A (zh) 2015-08-05
EP2929305A1 (en) 2015-10-14
EP2929305A4 (en) 2016-07-20
WO2014088424A1 (en) 2014-06-12
EP2929305B1 (en) 2024-01-31

Similar Documents

Publication Publication Date Title
TWI671501B (zh) 用於特徵化一樣本之方法及白光干涉測量計、用於處理來自具有一圖案化結構之一樣本之白光干涉測量資料之方法及用於量測具有一圖案化結構之一樣本之白光干涉測量計
JP5241806B2 (ja) 表面輪郭測定のための装置および方法
US9494411B2 (en) Three-dimensional shape measuring device, method for acquiring hologram image, and method for measuring three-dimensional shape
US9568304B2 (en) Image sequence and evaluation method and system for structured illumination microscopy
CN114397092B (zh) 一种测量超表面相位的方法及系统
JP2011154042A (ja) 波面操作および改良３ｄ測定方法および装置
NO20121458A1 (no) Fremgangsmåte for vibrasjonsmåling og interferometer
JP7082137B2 (ja) スペクトル制御干渉法による曲率半径測定
JPH0666537A (ja) システムエラー測定方法及びそれを用いた形状測定装置
WO2018225068A1 (en) Methods and systems of holographic interferometry
JP2007024827A (ja) 位相シフト干渉計
US11892292B2 (en) Methods and systems of holographic interferometry
JP2013096997A (ja) 物体の光干渉測定装置および光干渉測定方法
CN106091974A (zh) 一种物体形变测量仪器、方法和设备
CN217845103U (zh) 可调谐波长干涉三维形貌测量装置
CN107923735A (zh) 用于推导物体表面的形貌的方法和设备
JP2014010019A (ja) 干渉計測装置
JP3327998B2 (ja) 形状測定方法及び装置
NO322717B1 (no) System og fremgangsmate for maling av egenskaper i eller under overflaten til et materiale, samt anvendelse av dette
JP2020153992A (ja) 白色干渉計による形状測定装置
JP2002357407A (ja) 位相シフト干渉縞同時撮像装置における平面形状計測方法
Petry et al. Multi-Wavelengths Michelson Interferometer Based Spatial Phase Shift Shearography with Color Camera
CN120800254A (zh) 一种基于偏振移相的表面形貌测量装置及方法
TW202511698A (zh) 經組態以測量小型結構之干涉儀
JP2006090950A (ja) 被検面傾斜測定装置