JP6301017B2 - ミラー駆動装置およびその製造方法 - Google Patents

ミラー駆動装置およびその製造方法 Download PDF

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Publication number
JP6301017B2
JP6301017B2 JP2017531922A JP2017531922A JP6301017B2 JP 6301017 B2 JP6301017 B2 JP 6301017B2 JP 2017531922 A JP2017531922 A JP 2017531922A JP 2017531922 A JP2017531922 A JP 2017531922A JP 6301017 B2 JP6301017 B2 JP 6301017B2
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Japan
Prior art keywords
beams
pair
reflector
electrode
mirror
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JP2017531922A
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English (en)
Japanese (ja)
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JPWO2017141529A1 (ja
Inventor
恭彦 伊藤
恭彦 伊藤
伸顕 紺野
伸顕 紺野
善明 平田
善明 平田
吉田　幸久
幸久 吉田
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication of JPWO2017141529A1 publication Critical patent/JPWO2017141529A1/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/352—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2017531922A 2016-02-17 2016-12-13 ミラー駆動装置およびその製造方法 Active JP6301017B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016028031 2016-02-17
JP2016028031 2016-02-17
PCT/JP2016/086986 WO2017141529A1 (ja) 2016-02-17 2016-12-13 ミラー駆動装置、ミラー駆動装置の制御方法およびミラー駆動装置の製造方法

Publications (2)

Publication Number Publication Date
JPWO2017141529A1 JPWO2017141529A1 (ja) 2018-02-22
JP6301017B2 true JP6301017B2 (ja) 2018-03-28

Family

ID=59625763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017531922A Active JP6301017B2 (ja) 2016-02-17 2016-12-13 ミラー駆動装置およびその製造方法

Country Status (5)

Country Link
US (1) US10852529B2 (de)
JP (1) JP6301017B2 (de)
CN (1) CN108604008B (de)
DE (1) DE112016006445B4 (de)
WO (1) WO2017141529A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016014001B4 (de) * 2016-11-23 2020-11-12 Blickfeld GmbH MEMS Scanmodul für einen Lichtscanner mit mindestens zwei Stützelementen
DE102017118776B4 (de) * 2017-08-17 2020-11-12 Blickfeld GmbH Scaneinheit mit mindestens zwei Stützelementen und einem freistehenden Umlenkelement und Verfahren zum Scannen von Licht

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01276114A (ja) 1988-04-27 1989-11-06 Murata Mfg Co Ltd 光学素子駆動用アクチュエータ
JPH0294578A (ja) * 1988-09-30 1990-04-05 Toshiba Corp 圧電型回転駆動装置
AU2001280500A1 (en) * 2000-07-10 2002-01-21 Trustees Of Boston University Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same
US6504643B1 (en) * 2000-09-28 2003-01-07 Xerox Corporation Structure for an optical switch on a substrate
US6681063B1 (en) * 2000-11-16 2004-01-20 Computer Optics Inc Low voltage micro-mirror array light beam switch
JP2002318358A (ja) * 2001-02-14 2002-10-31 Victor Co Of Japan Ltd 光偏向器及びその駆動方法
WO2003062899A1 (fr) 2002-01-21 2003-07-31 Matsushita Electric Industrial Co., Ltd. Commutateur optique et son procede de production, dispositif de transmission d'informations faisant appel a ce dernier
JP4461870B2 (ja) * 2004-03-26 2010-05-12 ブラザー工業株式会社 光走査装置およびそれを備えた画像形成装置
US20060133724A1 (en) * 2004-12-20 2006-06-22 National Kaohsiung University Of Applied Sciences Piezoelectric optical micro-switch structure
CN1731236A (zh) * 2005-07-15 2006-02-08 清华大学 片式化的二维压电光反射结构
JP4655977B2 (ja) * 2006-03-22 2011-03-23 ブラザー工業株式会社 光スキャナ、及び、光走査装置、及び、画像表示装置、及び、網膜走査型画像表示装置、及び、光スキャナにおける梁部の形成方法
JP2007274865A (ja) * 2006-03-31 2007-10-18 Casio Comput Co Ltd 圧電アクチュエータ、これを用いた搬送装置及び手ぶれ補正装置
US8061617B2 (en) * 2006-07-28 2011-11-22 Intermec Ip Corp. Enhanced resolution automatic data collection apparatus and method using an afocal optical element
US8411343B2 (en) * 2006-09-27 2013-04-02 National Institute Of Advanced Industrial Science And Technology Optical scanning device
JP5229899B2 (ja) * 2006-09-27 2013-07-03 独立行政法人産業技術総合研究所 光走査装置
US8305669B2 (en) * 2006-10-12 2012-11-06 National Institute Of Advanced Industrial Science And Technology Optical scanning device
JP4873560B2 (ja) * 2007-02-08 2012-02-08 株式会社リコー 光走査装置
JP5493735B2 (ja) 2009-01-30 2014-05-14 株式会社リコー 偏向ミラー、光走査装置、画像形成装置、および画像投影装置
KR101343314B1 (ko) * 2009-02-18 2013-12-18 도꾸리쯔교세이호진 상교기쥬쯔 소고겡뀨죠 광빔 주사장치
JP5728823B2 (ja) * 2009-06-09 2015-06-03 株式会社リコー 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP5509742B2 (ja) * 2009-09-04 2014-06-04 ミツミ電機株式会社 圧電アクチュエータ及びこれを用いた光走査装置
JP4766353B2 (ja) * 2009-09-28 2011-09-07 独立行政法人産業技術総合研究所 光ビーム走査装置
WO2012115264A1 (ja) * 2011-02-25 2012-08-30 日本電気株式会社 光走査装置
JP6024269B2 (ja) * 2011-09-20 2016-11-16 株式会社デンソー 光走査装置
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
JP5397573B1 (ja) * 2012-01-13 2014-01-22 パナソニック株式会社 アクチュエータおよびその駆動方法
DE102013209238B4 (de) * 2013-05-17 2017-10-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Struktur und Verfahren zum Herstellen derselben
JP5916667B2 (ja) 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
WO2016052548A1 (ja) * 2014-09-30 2016-04-07 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
EP3203298B1 (de) * 2014-09-30 2021-07-14 FUJIFILM Corporation Spiegelantriebsvorrichtung und antriebsverfahren dafür

Also Published As

Publication number Publication date
CN108604008B (zh) 2020-11-10
US10852529B2 (en) 2020-12-01
US20200081243A1 (en) 2020-03-12
DE112016006445B4 (de) 2022-09-22
WO2017141529A1 (ja) 2017-08-24
JPWO2017141529A1 (ja) 2018-02-22
CN108604008A (zh) 2018-09-28
DE112016006445T5 (de) 2018-11-29

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