AU2001280500A1 - Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same - Google Patents

Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same

Info

Publication number
AU2001280500A1
AU2001280500A1 AU2001280500A AU8050001A AU2001280500A1 AU 2001280500 A1 AU2001280500 A1 AU 2001280500A1 AU 2001280500 A AU2001280500 A AU 2001280500A AU 8050001 A AU8050001 A AU 8050001A AU 2001280500 A1 AU2001280500 A1 AU 2001280500A1
Authority
AU
Australia
Prior art keywords
microelectromechanical
same
building blocks
constructions made
piezoelectric bimorphs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001280500A
Inventor
Johannes G. Smits
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boston University
Original Assignee
Boston University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/700,633 external-priority patent/US6657764B1/en
Application filed by Boston University filed Critical Boston University
Publication of AU2001280500A1 publication Critical patent/AU2001280500A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
AU2001280500A 2000-07-10 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same Abandoned AU2001280500A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/700,633 US6657764B1 (en) 1999-03-18 2000-03-17 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs
US21719100P 2000-07-10 2000-07-10
US60/217,191 2000-07-10
US09/700,633 2000-11-16
PCT/US2001/021641 WO2002004991A2 (en) 2000-07-10 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same

Publications (1)

Publication Number Publication Date
AU2001280500A1 true AU2001280500A1 (en) 2002-01-21

Family

ID=26911704

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001280500A Abandoned AU2001280500A1 (en) 2000-07-10 2001-07-10 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same

Country Status (2)

Country Link
AU (1) AU2001280500A1 (en)
WO (1) WO2002004991A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5446122B2 (en) * 2008-04-25 2014-03-19 パナソニック株式会社 Meander type vibrator and optical reflection element using the same
JP5598296B2 (en) 2010-12-08 2014-10-01 セイコーエプソン株式会社 Actuator, optical scanner and image forming apparatus
JP5990917B2 (en) * 2012-02-03 2016-09-14 船井電機株式会社 Electronic device having MEMS device and projector function
FR3030474B1 (en) 2014-12-23 2022-01-21 Commissariat Energie Atomique DEVICE FOR TRANSFORMING AN OFF-PLAN MOVEMENT INTO IN-PLAN MOVEMENT AND/OR VICE VERSA
DE112016006445B4 (en) * 2016-02-17 2022-09-22 Mitsubishi Electric Corporation Mirror drive device and method for controlling and manufacturing a mirror drive device
CN111006809B (en) * 2019-12-25 2021-01-15 中国海洋大学 Three-dimensional MEMS ocean turbulence sensor
CN113655612B (en) * 2021-09-03 2023-07-25 上海科技大学 High-stability two-dimensional posture adjusting mechanism

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5209118A (en) * 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
US5099690A (en) * 1989-07-31 1992-03-31 Allied-Signal Inc. Fiber-optic gyroscope accelerometer
JP2831195B2 (en) * 1992-03-25 1998-12-02 富士電機株式会社 Semiconductor acceleration sensor
US5658698A (en) * 1994-01-31 1997-08-19 Canon Kabushiki Kaisha Microstructure, process for manufacturing thereof and devices incorporating the same
JP3339565B2 (en) * 1998-09-29 2002-10-28 株式会社山武 Pressure sensor
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
WO2001077001A2 (en) * 2000-04-11 2001-10-18 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform

Also Published As

Publication number Publication date
WO2002004991A3 (en) 2003-01-16
WO2002004991A2 (en) 2002-01-17

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